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31-05-2012-.j
12:54 :51 ~

STAND
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2.4mm '
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DATE
TIME

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2-

STAND
PROF ILE
F IL TER
EVA-L
N
\.c
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TILT-COMP,

J IS2001 ,w
Rv
GAUSS
2.4mm\
~
3 .....
O.Bmm
2.5J.lm

M-SPEED
RANGE

0.25mm/s
AUTO
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PRE/POST
ON
DRIVE
STAND
R-PR6F-tI:::EEVA-L
2.4mm
\.c
0,BmmX3

M-SPEED
RANGE

Ra
10, 16J.lm
Rz
54,34J.lm
Rq
12,53J.lm
Rt
69. 32J.lm
RP
27, 30J.lm
Rv
27, 03J.lm
RSm ( ZP/Zv, 10%)

Ra
B.65J.lm
Rz
40,85J.lm
Rq
10,77 J.lm
Rt
51, 68J.lm
RP
16.11J.lm
Rv
24,74J.lm
RSm ( ZP/Zv, 10%)

Rsk
Rku
R.6.q

Rsk
Rku
R.6.q

-0.13
2.44
0.44

EVA-L
2.4mm
\.c=0,8mmX3
X500

0.25mm/s
AUTO
ESC
ON
PRE/POST
STAND
DRIVE
R-PROFILE
EVA-L
2.4mm
\.c
0,BmmX3

344J.lm

Hor.

20.0J.lm/cm
200.0J.lm/cm

2.4mm

X500

x50
Ver.

-0.56
2.77
0.40

R-PROFILE
EVA-L
\.c=O, BmmX3
x50
Ver,
Hor.

~
'0,

ALL~_

PARAMETER
RPc, RSm, RPPi
SmE Iement
ZP/Zv
C.LEVEL
10%

506J.lm

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31-05-2012
~
12:14:22

PARAMETER
\)
RPc, RSm, RPPi
SmElement
ZP/Zv
C,LEVEL
10%

C'L

.J

20.0J.lm/cm
200.0J.lm/cm