KHO ST C TRNG V KH NNG NG DNG CA CM BIN GIA TC MEMS

1. Mc ch
Kho st cm bin gia tc ch to theo cng ngh MEMS, trn c s thc hin mt bi ton s dng cm bin gia tc: Bi ton o gc nghing v rung.

2. L thuyt
2.1 Tng quan v MEMS

Vo th k XX, cc thit b in t c tch hp vi s lng ngy cng ln, kch thc ngy cng nh v chc nng ngy cng c nng cao. iu ny mang li s bin i su sc c v mt cng ngh ln x hi. Vo cui nhng nm 50 ca th k XX, mt cuc cch mng ho v cng ngh micro din ra v ha hn mt tng lai cho tt c cc ngnh cng nghip. H thng vi c in t (Micro ElectroMechanical Systems) vit tt l MEMS cng c ra i v pht trin trong giai on ny. Cng ngh vi c v ang tin xa hn nhiu so vi ngun gc ca n l cng nghip bn dn. MEMS bao gm nhng cu trc vi c, vi sensor, vi chp hnh v vi in t cng c tch hp trn cng mt chip (on chip). Cc linh kin MEMS thng c cu to t silic. Mt thit b MEMS thng thng l mt h thng vi c tch hp trn mt chip m c th kt hp nhng phn c chuyn ng vi nhng yu t sinh hc, ho hc, quang hoc in. Kt qu l cc linh kin MEMS c th p ng vi nhiu loi li vo: ho, nh sng, p sut, rung ng vn tc v gia tc...Vi u th c th to ra nhng cu trc c hc nh b tinh t v nhy cm c th, cng ngh vi c hin nay cho php to ra nhng b cm bin (sensor), nhng b chp hnh (actuator) c ng dng rng ri trong cuc sng. Cc b cm bin siu nh v rt tin ch ny thay th cho cc thit b o c k, cng knh trc y. Song cng ngh MEMS mi ang giai on u ca n v cn rt nhiu nhng nghin cu c bn hn, su hn.

2.2

Cng ngh ch to cc sn phm MEMS

Cc sn phm MEMS l s tch hp vi mch in t vi cc linh kin, cc chi tit vi c. Mch vi in t c ch to trn phin silic do xu hng chung l li dng ti a vt liu silic ch to cc linh kin vi c theo nhng k thut tng t vi k thut lm mch vi in t, in hnh l k thut khc hnh. Tuy nhin cc linh kin ca mch vi in t u nm trn mt phng (cng ngh planar ngha l phng) cn nhiu linh kin vi c phi thc hin nhng thao tc nh dch chuyn, rung, quay, y ko, bm v.v Do chng khng ch nm trn mt mt phng m c mt phn, c khi hon ton tch ra khi mt phng. Mt khc cc chi tit vi c phi lm bng vt liu c tnh cht thch hp th d c chi tit cn n hi nh l xo, c chi tit cn rt cng, c chi tit cn mm do, c ch cn phn x tt nh sng, c ch cn dn in. May mn l trn c s silic c th lm ra mt s vt liu p ng c nhu cu ni trn, th d oxyt silic (SiO2) cch in, silic a tinh th (poly - Si) dn in c, nitrit silic (Si3N4) va cng va n hi. Cng c th dng cc phng php bc bay, phn x to nhng lp cht c bit nh lp kim loi phn x, lp p in, lp hp kim n hi v.vln b mt silic ri khc hnh ch ny c mt phn x tt dng lm gng, ch kia c l kim loi n hi dng lm l so v.v C th k n mt s phng php v gia cng cc chi tit c tiu biu cng ngh MEMS nh sau: Gia cng vi c khi Gia cng vi c khi l ly i mt phn th tch trong phin vt liu hnh thnh chi tit vi c. Gi l gia cng nhng thc ra l dng cc phng php ho, l n mn (tm thc) to ra trn phin cc l su, cc rnh, cc ch lm v.v...nh c minh ho trn hnh 1.2.

Hnh 1.2. Minh ho cm bin p sut vi c khi

hnh thnh cc chi tit c phn cn li c hai cch ph bin: n mn t: thng dng i vi cc phin vt liu l silic, thch anh. y l qu trnh dng dung dch ho cht n mn theo nhng din tch nh sn nh cc mt n (mask). Cc dung dch ho cht thng dng i vi silic l cc dung dch axit hoc hn hp cc axit nh HF, HNO3, CH3COOH, hoc KOH. Vic n mn c th l ng hng (n mn u nhau theo mi hng) hoc d hng (c hng tinh th n mn nhanh, c hng chm). n mn kh: n mn kh bng cch cho kh hoc hi ho cht tc dng thng l nhit cao. Hnh dng, din tch h n mn c xc nh theo mt n (mask) t ln b mt phin vt liu. tng cng tc n mn c th dng sng in t (RF) kch thch phn ng hoc dng in th tng tc ion tc l tng tc cc vin n bn ph. Gia cng vi c b mt Th d trn phin silic cn to ra mt dm a tinh th silic mt u c nh, mt u t do c th lm theo cc giai on sau: - To ra lp oxyt silic trn phin silic. - Dng mt n 1 khot (theo cch khc hnh) din tch sau ny gn vo y u c nh ca dm. - Ph ln ton b mt lp a tinh th silic ri dng mt n 2 khc hnh khot i lp silic a tinh th, ch cha li mt dm. - Nhng ton b vo mt loi axit ho tan ht SiO2 (nhng khng ho tan silic) ta c c dm a tinh th mt u bm vo phin silic, mt u t do.

Hnh 1.3. M t dm cng hng gia cng vi c b mt

Trong th d trn c nhng lp ch to ra nh lp SiO2 ch c vai tr trong mt giai on gia cng, sau li ho tan loi b. Ngi ta gi l lp hi sinh. Hn to ra cc chi tit vi c phc tp, su, kn nh ng dn, b ngm... c th thc hin vic gia cng hai phin ri hn p hai mt gia cng li vi nhau. To mt ci h trn b mt mt phin bng cch n mn thng thng ri hn ln trn phin mt phin khc y h li. Gi l hn nhng thc ra l p nhit trc tip hai phin li hoc dng thm mt lp lt tng cng s kt dnh. Gia cng bng tia laze C th dng tia laze to ra nhng chi tit vi c theo kiu khot ln lt, iu khin trc tip. Tuy nhin cch gia cng ny rt chm, khng gia cng ng lot c. V vy cng ngh MEMS cch gia cng bng laze thng ch dng lm khun. Laze dng l laze exim mi mnh v vt liu gia cng thng l cht do, polymer. Liga LIGA l t ghp cc ch u ca Lithgraphie Galvanofruning und Abformung, ting c ngha l khc hnh, m in v lm khun. y l k thut to ra cc h vi c ba chiu ch khng phi l hai chiu nh cc cch khc hnh bnh thng.

 LIGA ngi ta dng chm tia X cc mnh nn c th i su vo cht cm n hng milimet. Cht cm thng dng thuc loi acrylic vit tt l PMMA. Thng qua nhng ch b khot thng trn khun, tia X chiu vo lp cm theo nhng din tch nht nh, lm bin cht cht cm c tia X chiu n s b ho tan. V trong k thut LIGA ngi ta thng dng lp cht cm dy, v tia X mnh nn tia X c th i su vo lp cht cm n hng trm, thm ch hng nghn micromet nh sau khi nhng vo dung dch, nhng ch cht cm b ho tan i c th rt su, hnh khc thc s l ba chiu ch khng phi l hai chiu nh quang khc thng thng.
2.3 ng dng ca cc cm bin MEMS

Tuy rng MEMS mi ra i cha lu nhng c rt nhiu ng dng gp phn khng nh vo s pht trin i sng x hi.
Cc ng dng ph cp:

Cc ng dng ph cp nht hin nay ca cng ngh MEMS trong cc ngnh cng nghip c th tm tt nh sau: Sensor p sut: Kim tra t l nhin liu v cc chc nng o c khc khc trong t, thit b o huyt p v cc ng dng dn dng khc. Sensor gia tc v gyroscope: Ti kh trong t, thit b nh hng cho tn la v cc phng tin vn ti. Hin th: Cc mn hnh phn gii cao dng cc vi gng cho cc thit b in t . u phun mc: Hng trm triu chip phun mc mt nm cho cc my in laser en trng v mu. Cc sensor ho hc: Cho cc mc ch y t v y sinh hc. Chuyn mch cho thng tin quang si: Internet, truyn hnh v thng tin gii rng dng cp quang. Vi van: Cc h sc k kh cc nh s dng cc dy vi van. Chuyn mch in c: Cc vi rle trong cc ng dng mt chiu, xoay chiu v v tuyn.

2.4

Vi cm bin gia tc

Cm bin gia tc l mt thit b dng o gia tc. Cm bin vi c l mt loi cm bin c ch to theo cng ngh vi c. N chnh l mt trong nhng sn phm phong ph v a dng nht ca cng ngh MEMS.

Hnh 2.1. S mt h o gia tc

Cm bin vi c ngy cng nhanh hn, nhy hn, nh hn, r hn v c tin cy cao cha tng c so vi cc cm bin ch to theo cng ngh in t trc y. Trong ti ny chng ta c bit quan tm n kh nng ng dng ca cm bin gia tc vi c in t. Cm bin gia tc ch to theo cng ngh vi c in t c hai loi l cm bin kiu t v cm bin kiu p tr. Trong nhiu ng dng vic la chn cm bin kiu t hay kiu p tr l rt quan trng. Cm bin kiu p tr c u im l cng ngh cu to rt n gin. Tuy nhin nhc im ca n l hot ng ph thuc nhiu vo s thay i nhit v c nhy km hn cm bin kiu t. Cc cm bin kiu t c nhy cao hn, t b ph thuc vo nhit , t b nhiu v mt mt nng lng. Tuy nhin chng c nhc im l mch in t phc tp hn. Hin nay cm bin gia tc kiu t c ng dng rng ri hn.

. ng dng ca cm bin gia tc Cm bin gia tc vi c nhanh chng thay th cc loi cm bin gia tc thng thng trc y trong nhiu ng dng. Mt vi nhng ng dng in hnhca cm bin gia tc vi c. Cm bin gc Roll Pitch nh hng 3D trong khng gian Pht hin va chm : nhng thng tin v gia tc, vn tc v dch chuyn gip phn bit s va chm v vic khng xy ra va chm o v iu khin mc rung

iu khin v d on kh nng lm vic ca my mc, thit b o mt s thng s sinh hc trong c th con ngi

2.4.1
T in phng

Nguyn tc hot ng

Hnh 2.3. T in phng 1 E = CV 2 2 C= k= F x F= E 1 C 2 V = x 2 x Q V

A g

FM =

C x C

C=

Trong :

g l khong cch gia hai bn t in l dch chuyn ca hai bn t C l in dung ca t in E l nng lng hay in trng gia hai bn t k l hng s n hi FM l h s phm cht
Gia tc Gia tc k Vct gia tc

Trc cm bin X Ax = A cos( ) l gc lch theo trc x

Gia tc l s thay i ca vn tc theo thi gian. Vn tc n lt n li o s thay i ca dch chuyn theo thi gian. Lc trng trng l nguyn nhn gy ra gia tc ri t do v gia tc ny bng 9.81 m s 2 (1g). Gia tc thng c tnh thng qua lc gy ra gia tc v lc lin h vi gia tc theo cng thc F = ma. F l lc gy ra gia tc, m l khi lng, a l gia tc. Lc c n v l N, m c n v l gam (g), a c n v l . m s 2 Cc thit b dng o gia tc phi xc nh c gi tr ca lc tc dng ln mt khi vt th bit trc. Mt cch tip cn khc tnh ton gia tc l : Gia tc l o hm ca vn tc theo thi gian. Vn tc li l o hm ca dch chuyn theo thi gian. Gia tc

Vn tc

 dch chuyn

Gia tc cng c th c xc nh mt cch d dng nh mt dng c n gin nh sau

Theo nh lut II Newton F = ma Tcos - mg = 0 T = mg/cos Tsin = ma Ta c a = g tg

2.4.2

Nguyn tc hot ng ca vi cm bin gia tc kiu t

Vic o gia tc thng qua cm bin gia tc MEMS [1] c th c m t nh mt s trn hnh v 4 nh mt h gm mt khi lng m v mt l xo.

Hnh 4. H khi lng l xo c s dng o gia tc

Khi h quy chiu c gia tc, gia tc ny c truyn cho khi m thng qua l xo. L xo gin ra v dch chuyn ny c xc nh bi mt cm bin dch chuyn. Theo nh lut Hooke, lc ko khi lng m t l vi bin dng ca l xo F = kx, vi k l h s t l hay cng ca l xo, x l khong dch chuyn so vi v tr cn bng. Theo nh lut II Newton, trong h quy chiu qun tnh ng yn, lc F ny cung cp cho khi lng m c mt gia tc a theo cng thc F = ma. Ti v tr cn bng ta c F = ma = kx. H thng c th c m t bi phng trnh vi phn sau:
m d 2x dx + D + Kx = Fext = m * a 2 dt dt

vi D l h s ma st. Do , chng ta thu c a =

kx trong h quy chiu qun tnh ng yn.. m

Nh vy, o gia tc ta ch cn o khong dch chuyn x. o khong dch chuyn ny, ngi ta c th s dng thuc tnh in ca t in c hai bn cc song song khong cch gia hai bn t c th thay i c (hnh 6)

Hnh 5 M hnh mt t in n (bn tri) v hai t ni tip nhau (bn phi).

in dung ca t in n l C=

k , vi k l hng s ph thuc vo thuc x0

tnh ca mi trng nm gia hai bn t. Nu bit k, in dung ca t in C ta c th tnh c x0. Cng trong hnh 3, nu bn t nm gia CA v CB dch chuyn mt khong l x th
CA = k k , CB = x + x0 x x0

(1)

hay c th vit li l:

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CA = C

x0 x0 , CB = C x0 + x x0 x

(2)

do
1 1 C = C A C B = Cx0 (3) x0 + x x0 x

Vi khong x dch chuyn nh, phng trnh trn c th rt gn thnh:

C C 2x x0 (4)

Nh vy, nu gn khi lng m ca cm bin vo bn t nm gia h hai t in ni tip th c th xc nh c dch chuyn ca n di tc dng ca lc F, tc l xc nh c gia tc thng qua vic xc nh gi tr C.

3. Dng c v thit b thc nghim

3.1. M t cm bin 3.1.1 Gii thiu chung Hai loi cm bin gia tc c s dng ph bin trong cc ng dng hin nay l cm bin kiu t v kiu p tr.

Hnh 3.1. Cm bin gia tc ADXL202

Cm bin gia tc c s dng trong ti ny l mt cm bin gia tc hai chiu kiu t cho php xc nh mt cch c lp cc gia tc theo cc phng trc to X v Y.

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Cm bin ny c hai loi li ra l li ra s ( rng xung li ra t l vi gia tc) v li ra tng t (mc in p tng t li ra t l vi gia tc). Cm bin c th c s dng o c gia tc tnh( v d nh gia tc trng trng) ng dng lm sensor o nghing v gia tc ng (v d nh rung) ng dng lm sensor o rung. Di o l trong khong 2g vi g l gia tc trng trng.

3.1.2. S chn

Chn 1 2 3 4 5 6 7 8 9 10 11 12

Tn NC
VTP

M t chc nng No connect Test point Self Test Common Ni vi Rset t T2 No connect Common No connect Li ra s knh Y Li ra s knh X Li ra tng t knh Y Li ra tng t knh X

ST COM T2 NC COM NC Yout Xout Yfilt Xfilt

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13 14

V DD V DD

+3V n +5.25V +3V n +5.25V

Hnh 3.2 S chn ca ADXL202

3.1.3. Nguyn l hot ng ca ADXL202

Nguyn l hot ng ca ADXL 202 c ch ra nh hnh 3.3. ADXL202 l h thng o gia tc hai knh c tch hp hon ton trn mt chip (on-chip). ADXL 202 c ch to theo nguyn tc vi c b mt v theo nguyn tc o gia tc c vng phn hi (open-loop). Trn mi knh, tn hiu li ra c chuyn i t tng t thnh tn hiu s qua mt b DCM (duty cycle modulated).

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Hnh 6. S nguyn l ca ADXL202

Tn hiu tng t X filt v Y filt c a qua hai t lc C x v C y . Gi tr ca hai t ny thng c chn bng nhau v trong khong 0.47F. Gi tr ca t in quyt nh di tn m tn hiu tng t li ra hot ng. Tn hiu ra s l X out v Yout (c rng xung t l vi gia tc li vo).

Di tn 10Hz 50Hz

Gi tr t 0.47F 0.1F Tn hiu tng t c cho qua mt mch lc RC (mch lc thng di) c tc dng nng cao phn gii v gip chng nhiu chng ph.

1 R set .C
filt

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100Hz 200Hz 500Hz 5kHz

0.05F 0.27F 0.01F 0.001F

ADXL 202 c 14 chn li ra. in tr Rset t rng xung li ra PWM (T2).

T2 R2

1ms 2ms 5ms 10ms

125K 250K 625K 1.25M

Tn hiu s li ra c m bi b m ca vi iu khin

3.1.4. Kho st tn hiu li vo theo tn hiu s li ra o s ph thuc gia s xung thu c t b m vo gc nghing ca cm bin so vi phng trng trng, ta thu c mt dng tn hiu iu ho hnh sin nh minh ho trong hnh 3.

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Hnh 8 th biu din s ph thuc rng xung vo gc nghing Vic m thi gian ko di xung t li ra s ca cm bin gia tc MEMS c thc hin bi vi iu khin Basic Stamp[2]. Bng thc nghim s dng mt thit b chun gc v phn mm nhng vit trn chp hin th s xung ta thc hin kho st trong di o t 1 n 360 (xem ph lc 1), ta thu c phng trnh nh trn. Pt = A.Sin( t + ) + Offset (*) Trong :
Pt l s xung ti thi im t

t l gc nghing tng ng vi xung Pt

A= Pmax Pmin vi Pmax v Pmin l s xung cc i v cc tiu o c 2 Pmax Pmin Pmax + Pmin = l lch ban u ca hnh sin so vi 2 2

gc nghing ban u(trn th hnh 6 gc nghing ban u =0)

Offset = Pmin +

gc 0. Phng trnh trn l c s cho vic tnh ton gc nghing da trn li ra s ca cm bin gia tc.

Thnh phn chnh ca bi th nghim gm

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1 My rung 1 b g sensor c chia 2 Cm bin gia tc ADXL202 Board mch: iu khin my rung, nhn cc tn hiu t cm bin gia tc, x l ri truyn v PC theo lnh nhn c t PC.

S khi ca h o nh sau:

Bn quay

Sensor1

Xout Yout Vi iu khin ATMEGA 8535

My rung
Xfil

Sensor2

RS232
ADC1 ADC2

Yfil

Lc thng cao

Ampli

Lc thng cao

Ampli

M t hot ng: Sensor1 g trn a quay, gc nghing ca sensor 1 so vi phng gia tc trng trng g (phng thng ng) c chnh bi kim xoay. Cc li ra rng xung Xout v Yout a vo vi iu khin o rng xung ca mi knh.

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Sensor2 gn trn my rung (l mt loa trm cng sut va), khi loa rung s tc ng gia tc ln 2 truc X v Y ca sensor2. Cc li ra in p ca sensor c lc thng cao ri qua b khuych i v dch mc mt chiu trc khi a vo ADC1 v ADC2 ca vi iu khin ATMEGA8535. Vi iu khin ATMEGA8535 kt ni RS232 vi PC, tc bound 57600. Dng PC gi cc lnh o v VK thc hin 2 php o:

Byte 0x01

Hng PC-> MP

ngha Yu cu gi gi tr rng xung ca Xout v Yout v.

0x02

PC->MP

Yu gi gi tr ADC1 v ADC2 v.

Cc gi tr Xout, Yout, ADC1, ADC2 vi iu khin gi v PC u l 2 byte Byte thp trc, byte cao sau. Do gi tr PC nhn c l: Byte thp + 256*byte cao

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4. Phn Thc hnh

4.1 Kho st cm bin p gia tc

Cp ngun cho mch: Ni cc cht +5V, -5V, GND t board POWER SUPPLY vo board x l ATMEGA8535 t sensor1 gia tc ln g chia t kim ch 0 Dng dao ng k quan st xung li ra trn cc cht Xout1 v Yout1, rng xung ca mi knh tng ng vi gia tc trng trng tc dng vo sensor theo trc X v Y. Yu cu: Thay i gc nghing ca sensor bng cch quay kim ch, dng dao ng k quan st v o rng xung tng ng ca mi li ra Xout v Yout ri ghi vo bng di y: 10 Gc nghing () DX(%) DY(%) Tn s (Hz)
T bng trn rt ra nhn xt: Ti cc gi tr gc c bit: 0, 45 v 90 Nhn xt g v gia tc trng trng g vi cc gi tr ax v ay

4.1.1 Dng dao ng k kho st li ra rng xung ca ADXL202

20

30

40

45

50

60

70

80

90

4.1.2 o gc nghing chnh xc dng my tnh

Vn cp ngun cho board mch nh phn 4.1.1 t sensor1 gia tc ln g chia Ni cc cht Yout1 vi Yin, Xout1 vi Xin Chy Tubor C trn PC M file DOGOC.cpp c sn trong th mc BIN Chy th chng trnh Sinh vin c hiu chng trnh ri x l kt qu nhn c. Thay i gc nghing ca kim ch ri ghi vo bng di y: 10 Gc nghing () DX(%) 20 30 40 45 50 60 70 80 90

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DY(%) Tn s (Hz) Ch rng cng thc l thuyt nh sn xut sensor a ra: A(g) = ( D 0.5 )/12.5% (g) D: rng xung Khng hon ton ng. thu c kt qu chnh xc phi c php cn chun. C th nh sau: Cn chun cho knh X: Chnh kim ch 90 Ax = 1 (g), thu c D1 Chnh kim ch 270 Ax = -1 (g), thu c D2 Gi s hm Ax ph thuc tuyn tnh theo D: Ax = a*D + b T D1 v D2 tnh ra ngay c cc h s a v b. Cn chun cho knh Y: Tng t knh X, sinh vin t suy ngh. Yu cu: Sinh vin tm cc gi tr ax, bx, ay, by cn chun cho cc knh X v Y. T xc nh gc nghing ca sensor theo cng thc: tan() = Ay/Ax Ax v Ay l cc gia tc theo trc X v Y Vn cp ngun cho board mch nh phn 4.1.1 t sensor1 gia tc ln g chia t kim ch 0 Dng vn k mt chiu o in p li ra trn cc cht Xfil1 v Yfil1, in p trn mi knh tng ng vi gia tc trng trng tc dng vo sensor theo trc X v Y. Yu cu: Thay i gc nghing ca sensor bng cch quay kim ch, dng vn k o in p tng ng ca mi li ra Xout1 v Yout1 ri ghi vo bng di y: 10 Gc nghing () VX(V) VY(V)
T bng trn rt ra nhn xt: Ti cc gi tr gc c bit: 0, 45 v 90 Hnh nh in p mi knh t l tuyn tnh vi sin hoc cos ??

4.1.3 Dng vn k kho st li ra in p ca cm bin:

20

30

40

45

50

60

70

80

90

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 Vn cp ngun cho board mch nh phn 4.1.1 Gn sensor 2 ln my rung a tn hiu t signal generator vo Power Amplifier Ni cc cht Yfil2 vi Yf in, Xfil2 vi Xf in Vn bin tr v v tr 5 Hz Chy Tubor C trn PC M file DORUNG.cpp c sn trong th mc BIN Chy th chng trnh Chnh tn hiu l sng sine 50Hz, dng dao ng k t bin khong 100mV. Sinh vin c hiu chng trnh ri x l kt qu nhn c. Yu cu V ra dng sng trn mn hnh ca 2 knh X v Y. Tnh tn s ca tn hiu thu c. Thay i tn s, bin , dng sng ca tn hiu vo. Hy quan st cc kt qu thu c, rt ra cc nhn xt.

4.1.4 o tn s rung :

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Ph lc
Giao tip gia my tnh v vi iu khin c thc hin bng phng thc truyn thng ni tip theo chun RS 232. L thuyt v truyn thng ni tip c trnh by rt k trong cc gio trnh v cu trc my tnh, sinh vin c th tham kho. Trong ti liu ny ch nhc li mt s kin thc gip sinh vin c th thc hin giao tip c vi vi iu khin qua cng COM. Cc chn ca cng ni tip: DB25 DB9 Vit tt Chn s Chn s Pin 2 Pin 3 Pin 4 Pin 5 Pin 6 Pin 7 Pin 8 Pin 20 Pin 22 Pin 3 Pin 2 Pin 7 Pin 8 Pin 6 Pin 5 Pin 1 Pin 4 Pin 9 TD RD RTS CTS DSR SG CD DTR RI

Tn y

Transmit Data Receive Data Request To Send Clear To Send Data Set Ready Signal Ground Carrier Detect Data Terminal Ready Ring Indicator

Table 1 : D Type 9 Pin and D Type 25 Pin Connectors

S kt ni gia hai thit b u cui

a ch cng ni tip Trong my tnh c khng phi ch mt cng ni tip. Ty tng phn cng ca my tnh m cng COM c a ch xc nh. Thng thng ta s dng 2 cng COM1 v COM2. a ch ca mt s COM khc cho di y.
Tn a ch c s IRQ

COM 1 COM 2 COM 3

3F8 2F8 3E8

4 3 4

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COM 4

2E8

Table 3 : Standard Port Addresses

Chng trnh vit bng ngn ng C di y cho ta a ch c s ca cc cng com mong mun.
#include <stdio.h> #include <dos.h> CONST Max = 10; void main(void) { unsigned int far *ptraddr; /* Pointer to location of Port Addresses */ unsigned int address; /* Address of Port */ int a; ptraddr=(unsigned int far *)0x00000400; for (a = 0; a < Max; a++) { address = *ptraddr; if (address == 0) printf("No port found for COM%d \n",a+1); else printf("Address assigned to %Xh\n",a+1,address); *ptraddr++; } }

COM%d

is

Cc thanh ghi s dng v a ch ca chng c a ra bng sau

a ch c s DLAB Read/Write Vit tt Tn gi

=0 +0 =0 =1 +1 +2 +3 +4 +5 +6 +7 =0 =1 -

Write Read

Transmitter Holding Buffer Receiver Buffer Divisor Latch Low Byte Interrupt Enable Register Divisor Latch High Byte Interrupt Identification Register FIFO Control Register Line Control Register Modem Control Register Line Status Register Modem Status Register Scratch Register

Read/Write Read/Write IER Read/Write Read Write IIR FCR

Read/Write LCR Read/Write MCR Read Read LSR MSR

Read/Write -

DLAB

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Bit DLAB l bt th 7 trong thanh ghi iu khin ng truyn. Khi bt ny c t bng 1 th 2 thanh ghi: thanh ghi c a ch bng a ch c s v thanh ghi c a ch bng a ch c s +1 s lu tr gi tr s chia xc nh tc truyn thng (tc baud) ca cng ni tip (thanh ghi c a ch l a ch c s lu byte thp, thanh ghi c a ch = a ch c s +1 lu byte cao). Bng cch thit lp gi tr cho 2 thanh ghi ny, ta c th c tc truyn mong mun. Bng di y l mt s gi tr thng dng.
Tc Baud (BPS) s chia (Dec) Byte cao s chia Byte thp s chia

50 300 600 2400 4800 9600 19200 38400 57600 115200

2304 384 192 48 24 12 6 3 2 1

09h 01h 00h 00h 00h 00h 00h 00h 00h 00h

00h 80h C0h 30h 18h 0Ch 06h 03h 02h 01h

Trong bi thc tp ny, tc truyn thng c s dng l 9600.

Thanh ghi iu khin ng truyn: Line Control Register (LCR)

ngha cc bt trong thanh ghi c cho bng di y. 1 Divisor Latch Access Bit Bit 7 0 Bit 6 Cho php cc thanh ghi b m nhn, truyn v cho php ngt

Set Break Enable

Bits 3, 4 Bit 5 Bit 4 Bit 3 Parity Select And 5 X X 0 No Parity 0 0 1 1 Bit 2 0 1 0 1 0 1 1 1 1 1 Odd Parity Even Parity High Parity (Sticky) Low Parity (Sticky)

S bt STOP 1 bt Stop 2 bt STOP khi di d liu l 6,7 or 8 bt hoc 1.5 bt STOP khi chiu di d liu l 5 bit.

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Bits 0 Bit 1 Bit 0 Xc nh chiu di d liu And 1 0 0 5 Bt 0 1 1 1 0 1 6 Bt 7 Bt 8 Bt

Trong bi thc tp ny, khung truyn c dng: 8 bt d liu, bt Stop, khng c bt chn l.

Thanh ghi trng thi ng truyn: Line Status Register (LSR)

ngha cc bt: Bit Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Notes

C li b m nhn B m nhn rng B m truyn rng Break Interrupt Li khung truyn Li chn l Overrun Error D liu sn sng trong b m nhn

Thanh ghi trng thi modem: Modem Status Register (MSR)

Bit Notes

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

Carrier Detect Ring Indicator Data Set Ready Clear To Send Delta Data Carrier Detect Trailing Edge Ring Indicator Delta Data Set Ready Delta Clear to Send

Th tc khi to cng truyn thng ni tip trn my tnh: 1. Xc nh tc baud

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2. nh dng khung truyn

outportb(PORT1 + 3 , 0x80);/* SET DLAB ON */ outportb(PORT1 + 0 , 0x03);/* Set Baud rate - Divisor Latch Low Byte */ /* Default 0x03 = 38,400 BPS */ /* 0x01 = 115,200 BPS */ /* 0x02 = 57,600 BPS */ /* 0x06 = 19,200 BPS */ /* 0x0C = 9,600 BPS */ /* 0x18 = 4,800 BPS */ /* 0x30 = 2,400 BPS */ outportb(PORT1 + 1 , 0x00);/* Set Baud rate - Divisor Latch High Byte*/ outportb(PORT1 + 3 , 0x03); /* 8 Bits, No Parity, 1 Stop Bit */

Th tc xut mt byte ra cng ni tip: 1. Kim tra b m truyn 2. Nu b m truyn rng: vit byte cn xut vo thanh ghi m truyn
outportb(PORTAddr, ch);} /* Send Char to Serial Port */

Th tc c mt byte t cng ni tip: 1. kim tra c d liu sn sng trong b m nhn khng 2. Nu sn sng, c gi tr thanh ghi b m nhn.
c = inportb(PORTAddr + 5); /* Check to see if char has been*/ /* received. */ if (c & 1) {ch = inportb(PORTAddr); /* If so, then get Char */ printf("%c",ch);} /* Print Char to Screen */

Nhim v ca sinh vin: Vit chng trnh thc hin: 1. Hin th p sut trong bung p sut ti thi im hin ti 2. Cho ngng cnh bo l 400mmHg v ngng nguy him l 450 mmHg. Vit chng trnh cnh bo khi p sut vt qu ngng cnh bo v m van an ton khi p sut vt qu ngng nguy him. Ti liu tham kho 1. Ng Din Tp, Vi iu khin AVR, NXB KHKT 2003 2. Mohamed Gad-el-Hak, The MEMS handbook, CPR Press, New York, 2002 3. http://www.analog.com/en/prod/0,2877,ADXL202,00.html

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