Detector Quang Hoc Bang Ban Dan

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NGUYN CH THNH - tct quang hc bn dn Lp hc chuyn Sn Thng 11 nm 2004

223

Institut d Alembert

tct Quang hc bng Bn dn

NGUYN Ch Thnh

Phng Th nghim Phtnic Lng t v Phn t
Trng i Hc S Phm Cachan
n v Nghin cu Hn hp s 8537,
Trung Tm Quc gia Nghin cu Khoa Hc Php

61 avenue du Prsident Wilson
94235 Cachan cedex
Php

ctnguyen@lpqm.ens-cachan.fr

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224

NGUYN Ch Thnh sinh nm 1956 ti Vit Nam. Hon thnh lun n Tin s Vt l Trng
i Hc Paris 11 nm 1993 trong lnh vc Quang hc v Phtnic. Sau thi gian lm nghin cu
sau tin s ti trng Ecole Normale Suprieure de Cachan (ENSC), ni ng tip tc nghin cu
cc ti trong lnh vc Quang ph v ng dng, ng thi vi vic ging dy vt l, ng vo
lm vic ti Trung tm Quc gia Nghin cu Khoa Hc Php (CNRS) nm 1996 vi t cch l K
s Nghin Cu. Thi gian t 1996 n 2002, ng lm nghin cu Phng th nghim Vt l
Laser, thuc Vin Galile, ti Trng i hc Paris 13, trong lnh vc Vt l Laser, Quang Ph
laser, o lng tn s v ng dng. T nm 2002, ng v lm nghin cu ti Phng th nghim
Phtnic Lng t v Phn t (Laboratoire de Photonique Quantique et Molculaire) thuc
trng ENSC trong lnh vc microphtnic v ng dng. ng l trng nhm nghin cu
"Microphtnic v linh kin phtnic lm bng polymer cho truyn thng quang hc" ca Phng
th nghim LPQM. Ti y ng tham gia cc ti nghin cu trong cc lnh vc Microlaser,
Quang hc phi tuyn, Microphtnic phn t, Quang hc tch phn v linh kin phtnic lm
bng polymer.
T nm 1993, song song vi hot ng nghin cu khoa hc, ng ging dy ti trng ENSC
vi t cch l cn b thnh ging trong lnh vc Quang in t hc, Quang hc, Vt l Laser v
linh kin phtnic t trnh C nhn Vt l v Vt l ng dng, o to ti nng Vt l, o
to Gio s Thc s ngnh Vt l v Vt l ng dng n Master Vt l v Vt l ng dng.

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225
MC LC

I. DN NHP
I.1. Nhc li cc im chnh trong tng tc phtn-bn dn
I.1.1 Chuyn dch in t trong cht bn dn
I.1.2 Phn x v hp th phtn
I.2. tct quang hc bn dn
I.2.1. Nguyn l vn hnh c bn
I.2.2 Cc c trng chung
a) Hiu sut lng t.
b) p ng c trng theo ph.
c) nhy.
d) p ng thi gian.
II. CC B TIP GIP BN DN
II.1 B tip gip p-n
a) B tip gip p-n trng thi cn bng nhit ng.
b) B tip gip p-n c phn cc.
c) in dung chuyn tip v in dung khuch tn.
II.2. Tip xc kim loi-bn dn
II.2.1. B tip gip Schottky
a) B tip gip Schottky trng thi cn bng nhit ng.
b) B tip gip Schottky c phn cc.
II.2.2. Tip xc thun tr
III. TCT QUANG HC LNG T
III.1 TCT QUANG DN IN
III.1.1 Vn hnh ca mt tct quang dn in
III.1.2 khuch i ca quang dn in
III.1.3 p ng thi gian
III.3 TCT QUANG HC DNG B TIP GIP
III.3.1 it quang p-n
a) Vn hnh ca it quang p-n.
b) p ng thi gian.
III.3.2 it quang p-i-n
III.3.3 it quang dng hiu ng nhn in
a) Vn hnh ca it quang dng hiu ng nhn in.
b) p ng thi gian.
III.3.4 it quang Schottky
III.3.5 it quang MSM (Mtal-Semiconducteur-Mtal)
III.3.6 it quang dng cu trc dn sng
IV. TING N TRONG CC TCT QUANG HC BN DN
IV.1 Gii thiu tng quan
IV.2 Cc ngun ting n
IV.2.1 Ting n phtn
IV.2.2 Ting n do s to cp v ti hp
IV.2.3 Ting n do nhn in
IV.2.4 Ting n nhit
IV.2.5 Ting n 1/f
IV.3 nhy c trng
IV.3.1 nhy c trng ca tct quang hc
IV.3.2 nhy c trng ca tct quang dn in
IV.3.3 nhy c trng ca it quang p-i-n
IV.3.4 nhy c trng ca it quang dng hiu ng nhn in
IV.3.5 o tn hiu quang hc bng php o trc tip vi cc it quang
a) o tn hiu quang bng php o trc tip vi it quang p-i-n
b) o tn hiu quang bng php o trc tip vi it quang dng hiu ng nhn in
V. O TN HIU QUANG HC BNG PHP O KT HP

TI LIU THAM KHO TM TT

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226
I. DN NHP
Trong mt h truyn thng quang hc (chng hn nh truyn tn hiu bng si quang, vn hnh ca cc linh
kin chc nng trong quang hc tch hp), tct quang hc l linh kin c chc nng chuyn i tn hiu quang
thnh tn hiu in chng c th c x l bng cc linh kin in t. Cc tct quang hc dng trong truyn
thng quang hc l nhng tct lng t lm bng bn dn. Trong ti liu ny, chng ti trnh by hai phn ch
yu: phn u trnh by cc tct quang hc bng bn dn di cch nhn ca vt l cc linh kin bn dn v
phn sau trnh by hiu nng ca cc linh kin ny trong vic o cc tn hiu quang.
Trong phn u, trc ht chng ti nhc li cc im chnh ca tng tc phtn vi cht bn dn trong c ch
o sng quang v cc b tip gip bn dn-bn dn v bn dn-kim loi. K n, chng ti trnh by vt l cc
tct quang hc bn dn trn c s ca c ch quang dn in trong mt cht bn dn (tct quang dn in),
trong cc b tip gip bn dn (it quang p-n, it quang p-i-n, it quang dng hiu ng nhn in) v trong cc
b chuiyn tip kim loi-bn dn (it quang dng hiu ng Schottky, it quang kim loi-bn dn-kim loi).
Trong phn sau, chng ti s trnh by, di quan im vt l cc linh kin, cc dng ting n (ting Php: bruit/
ting Anh: noise) khc nhau trong qu trnh o cc tn hiu quang bng php o trc tip cng nh cc tham s c
trng cho hiu nng ca cc tct lng t. Chng ti trnh by sau php o kt hp (dtection cohrente/
coherent detection) cc tn hiu quang, php o c s dng nhiu trong cc h truyn thng quang hc nhm ci
thin hiu nng ca qu trnh o tn hiu quang.
I.1. Nhc li cc im chnh trong tng tc phtn-bn dn
I.1.1 Chuyn dch in t trong cht bn dn
Cc chuyn dch quang hc gia cc trng thi in t trong mt cht bn dn gm: hp th, bc x t
pht v bc x cng bc. Qu trnh hp th mt phtn trong cht bn dn l kt qu ca vic chuyn dch mt
in t trong vng ho tr sang vng dn ca cht bn dn. Qu trnh ny tng ng vi vi vic to ra mt cp ht
mang in t do in t-l trng xy ra ngay sau tng tc gia mt phtn vi cht bn dn. C ch ny c s
dng trong phng php o thng lng phtn bng cht bn dn. Ch c nhng phtn m nng lng ln
hn rng ca vng cm mi c cht bn dn hp th : h E
g
.
Tng tc phtn-in t (hay phtn-l trng) ny phi tun theo cc nh lut bo ton, nh lut phn b
thng k lng t ca cc ht mang in c kh nng tng tc vi cc phtn. Cc chuyn dch quang hc trong
bn dn tun theo cc nh lut bo ton sau y:
(i) Bo ton nng lng :
E
i
l nng lng ban u (trc tng tc) v E
f
l nng lng sau cng (sau tng tc) ca in t v E
p
l
nng lng ca phtn ; theo nh lut bo ton nng lng, ta c: E
f
- E
i
= E
p
(I.1)
Du+ tng ng vi trng hp hp th mt phtn v du tng ng vi trng hp bc x mt phtn.
(ii) Bo ton ng lng ( k p
r
h
r
= ):

f
k
r
v
i
k
r
l cc vect sng trc v sau tng tc ca in t,
p
k
r
l vect sng ca phtn ; theo nh lut
bo ton ng lng, ta c :
p i f
k k k
r r r
= (I.2)
Vi cp ht tng tc ny, trong phm vi cc cht bn dn thng dng v cc phtn trong di ph hng ngoi,
ngi ta chng minh rng : k
lectron
>> k
photon
. iu ny dn n kt qu l: k
f
k
i
(I.3)
absorption
(a)
(b)
(c)
mission
transitions
non-radiatives
absorption thermalisation

Hnh I.1 : Cc chuyn dch gia cc vng trong cht bn dn: (a) chuyn dch trc tip; (b,c) chuyn dch gin tip
Ngha l vect sng in t c bo ton trong tng tc vi phtn. Ngi ta biu din s bo ton vect sng
in t bng mt vect sng c v tr thng ng trong khng gian k. Nh vy, v l do bo ton vect sng in t
trong tng tc vi phtn, ch c nhng chuyn dch in t c v tr thng ng trong khng gian k mi c xem
l chuyn dch quang hc. iu kin ny ch c th thc hin c trong cc cht bn dn c vng cm trc tip
(tc l nh ca vng ho tr ngay hng thng ng vi y ca vng dn) (hnh I.1.a). Thc vy, trong mt cht
bn dn c vng cm trc tip, cc chuyn dch quang hc theo v tr thng ng tun theo ng cc nh lut bo
ton nng lng (E
C
- E
V
= h) v ng lng (k
f
= k
i
). Hin tng bc x v hp th d c thc hin trong cc
cht bn dn kiu ny.
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227
Trong cc cht bn dn c vng cm gin tip (tc l nh ca vng ho tr khng xp hng thng ng vi y
ca vng dn), chuyn dch quang hc ch c th thc hin c vi iu kin c thm mt c ch chuyn dch ph
thch hp. Trong c ch ny, s ng gp ca mt ht tng tc th ba (nh phnn quang hc chng hn) l cn
thit tun th cc nh lut bo ton. Trong trng hp ny, cc chuyn dch in t gia y ca vng dn v
nh ca vng ho tr (hnh I.1.b) khng cn v tr thng ng trong khng gian k ; chng khng cn l chuyn dch
quang hc na. Trong loi vt liu ny, chuyn dch quang hc kh c kh nng thc hin c, l do l v cc nh
lut bo ton khng cn c tn trng.
Ngc li, trong loi vt liu c vng cm gin tip, hp th mt phtn l iu c th thc hin c, nh vo
mt c ch trung gian nh c trnh by trn hnh I.1.c. Trong trng hp ny, mt phtn c nng lng ln hn
rng ca vng cm (h > E
C
- E
V
) c th c hp th bng mt chuyn dch quang hc c v tr thng ng gia
nh ca vng ho tr v y th hai ca vng dn (vect sng k c bo ton), nng lng tha trong qu trnh
hp th ny s c tiu tn di dng nhit trong vt liu.
Ch c nhng ht ti in m nng lng, ng lng v mt trng thi tha mn cc iu kin bo ton mi
c kh nng tham gia vo cc tng tc vi phtn. Cc ht ti in ny c gi tn l cc ht ti in quang hc
(gi tt l ht quang ti in).
I.1.2 Phn x v hp th phtn

Hnh I.2
Gi
0
(E) l thng lng phtn ti vi nng lng E = h. Thng lng ny c o bng s phtn c nng
lng E p ln mt n v b mt ca cht bn dn trong mt n v thi gian. R(E) l h s phn x ca cht bn
dn i vi bc x c nng lng E (phn ln cc cht bn dn c h s phn x l R 30%).
t
(E) l thng lng
truyn qua, ngha l thng lng cc phtn xm nhp vo bn trong th tch ca cht bn dn v
r
(E) l thng
lng ca cc phtn nng lng E phn x trn b mt ca cht bn dn (hnh I.2):
t
(E) = [1-R(E)]
0
(E).

Hnh I.3 : Gin phn b thng lng phtn trong bn dn
c trng ca s hp th cc phtn trong qu trnh truyn bn trong cht bn dn l h s hp th (E,x),
c nh ngha nh sau :
) x E, (
) x E, ( d
dx
1
x) (E,
= (I.4)
Nh vy ta c: (E,x) =
0
(E)[1-R(E)] exp[-(E)x] (I.5)
H s phn x R(E) ph thuc vo bn cht ca cht bn dn, nhng ni chung gi tr ca n t thay i theo
nng lng phtn khi m nng lng ny rt gn vi nng lng vng cm ca cht bn dn ; nh vy chng ta c
th vit: R(E) = R. Tri li, gi tr ca h s ny thay i rt nhiu theo gc chiu ca chm tia ti. Gi tr ny t
cc tiu khi chm tia ti thng gc vi b mt bn dn v khi h s phn x bng :
2
S
S
1 n
1 n
R
|
|
.
|
\
|
+
= (I.6)
trong n
S
l chit sut ca mi trng bn dn. Nu chm tia ti gm cc phtn n sc, h s quang hc to
cp in t-l trng s bng ng t sut bin mt ca cc phtn :
G(E,x) =
dx
) x E, ( d
= (1-R)
0
(E)(E) exp[-(E)x]
Nu chm tia kch thch l a sc th h s quang hc to cp l : G(E,x) =
E
x)dE' , G(E' (I.7)
i vi mt cht bn dn, nu h s hp th (E) = 0 i vi tt c phtn m nng lng E < E
g
(vt liu trong
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228
sut i vi cc phtn ny) v (E) hng s i vi tt c cc phtn m nng lng E > E
g
, chng ta c th
vit : G(E,x) = (1-R) exp(-x)
' )dE (E'
0
Eg

(I.8)
Nu
0
l thng lng ca tt c cc phtn m nng lng E > E
g
th ta c:
G(E,x) =
0
(1-R) exp(-x) (I.9)

Hnh I.4 : Bin i ca h s hp th v b dy hp th theo di sng ca 4 cht bn dn (theo[11])
H s hp th ca vt liu bn dn thay i theo bc sng (hay theo nng lng phtn) ca bc x kch thch.
Hnh I.4 biu din ng cong h s hp th theo bc sng ca bc x kch thch ca 4 loi vt liu bn dn
thng dng trong cng ngh ch to cc tct quang hc.
Cc phtn c hp th to sinh cc cp in t-l trng (l cc ht quang ti in) thng d trong vt liu bn
dn. C hai loi qu trnh xy ra ngay sau khi to cp i vi cc ht quang ti in: hoc l chng t ti hp trong
qu trnh khuch tn bn trong bn dn vi thi gian sng (thi gian sng
n
ca in t v thi gian sng
p
ca
l trng), hoc l chng b in trng qut ngay v cc tip im thun tr (ohmique - ohmic) vi mch ngoi. Cc
phng trnh m t cc c ch ny c suy ra t cc phng trnh tin ho sau y:

x
J
e
1

n
t) (x, G
t
n
n
n
optique
(I.10)

x
J
e
1

p
t) (x, G
t
p p
p
optique
(I.11)
trong mt dng in t J
n
v mt dng l trng J
p
c xc nh bng cc phng trnh:
E n
x
n
D
e
J
n n
n
+
= (I.12)
E p
x
p
D
e
J
p p
p
+
= (I.13)

e l in tch ca in t ; n, D
n
,
n
v p, D
p
,
p
ln lt l mt , h s khuch tn v linh ng ca in t v
ca l trng trong bn dn.
I.2. tct quang hc bn dn
I.2.1. Nguyn l vn hnh c bn

Hnh I.5 : Ba c ch ca o lng t sng quang hc: (a) php o tng ng vi chuyn dch quang hc gia hai vng km vi
vi to cp in t-l trng ; (b) vi c ch vt ro th bng hin tng quang pht x bn trong vt liu ; (c) dch chuyn
quang hc t mt mc lin kt n mt mc t do (theo [1])
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229
Nguyn l vn hnh c bn ca cc tct quang hc bn dn l : trong trng thi khng c kch thch quang
hc, cc ht ti in trong cc vt liu bn dn khng c kh nng to ra trng thi dn in ; bi v, hoc l chng
c ng trong mt vng khng c kh nng tham gia dn in (chng hn trong vng ho tr b lp kn, nh tct
quang hc bn dn ni bm) ; hoc l chng b chn bi mt ro th nng (chng hn nh ro th Schottky), hoc
l chng tn ti trn mt mc lng t lin kt (nh l tct quang hc bn dn ngoi lai, tct quang hc
dng ging lng t). Nh vy chnh dch chuyn quang hc gia hai tp hp cc mc nng lng lng t (tp hp
ny ng gp vo trng thi dn in, tp hp kia ng gp vo trng thi khng dn in) l ngun gc ca c ch
o sng quang hc (hay o thng lng phtn). Nguyn l gii thch v sao ngi ta dng tn gi chng loi
chung cho cc tct quang hc bn dn l tct lng t.
I.2.2 Cc c trng chung
Cc c trng ca mt tct quang hc l:
a) Hiu sut lng t.
Hiu sut lng t trong :
i
= (Thng lng cc ht quang ti in)/(Thng lng cc phtn ti) = 1- exp(-
d)

(voir figure I.4).
Hiu sut quang hc :
optique
= 1 R
Hiu sut ton b (hiu sut lng t) : =
i
.
optique
= (1-R)[ 1- exp(-d)] (I.14)
(n v m
-1
) l h s hp th ca vt liu v d (n v m) l di (hay su) ca vng hp th trong tct.
Hiu sut lng t l mt hm s ca bc sng v h s hp th v h s phn x thay i theo bc sng.
b) p ng c trng theo ph.

Hnh I.6 : Biu din ng p ng c trng theo ph ca cc tct bn dn
p ng c trng ca mt tct c nh ngha bng t s sau :

i
= (Cng dng quang in)/(Cng sut chiu sng ca sng quang ti)

1,24
(m) g
h
ge
h
ge
P
I

inc
ph
i

=
= = (A/W) (I.15)
vi : hiu sut lng t; g : h s khuch i ca tct ; e : in tch c bn ; v : tn s v bc sng ca
sng quang ti. p ng c trng ca mt tct lng t ph thuc vo bc sng ti. Cc ng biu din p
ng c trng ca tct lng t c mt gii hn trn theo bc sng (bc sng ngng) tng ng vi
rng ca vng cm ca cht bn dn (hnh I.6). Hnh I.7 biu din cc ng p ng c trng tiu biu ca vi
tct quang hc bn dn.

Hnh I.7 : p ng c trng theo ph ca vi tct quang hc bn dn [theo [6])
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230
p ng ca mt tct c th b xung cp tu theo iu kin chiu sng trn n. Mt p ng ng phi l
p ng ph thuc tuyn tnh vo cng sut chiu sng ca sng ti. Th nhng, p ng ca mt tct tr nn
bo ho khi m n c chiu sng qu mc. Do , cn thit phi bit di ng tuyn tnh (dynamique linaire/
linear dynamic range) p ng ca mt tct quang hc s dng ng thit b ny.
c) nhy.
i lng biu din kh nng o cng sut chiu sng ti thiu ca sng quang ti m vn khng b ln vi ting
n ca tt c gi l nhy ca tct. Tham s biu din nhy ny l nhy c trng (dtectivit /
detectivity) ca tct. Chng ta s tho lun v nhy c trng ca tct trong chng III
*
.
d) p ng thi gian.
Cc hng s thi gian ng gp vo vic gii hn p ng thi gian (di y gi tt l p thi) ca tct
quang hc l:
Thi gian cc ht quang ti in vt qua vng hot tnh ca bn dn (vi s hin din ca in trng);
Thi gian sng ca cc ht quang ti in trong vng khuch tn;
Hng s thi gian RC, l p thi ca mch in hp thnh t in dung v in tr ca tct vi mch c tn
hiu in.
Hng s thi gian thit lp h s khuch i trong cc tct quang hc dng hiu ng nhn in.
Di truyn qua ca cc tct lng t rt rng (di truyn qua ca cc tct quang hc cc nhanh c th
t n hng trm GHz).
II. CC B TIP GIP BN DN
Cc tct quang hc bn dn c thc hin ch yu trn c s cc b tip gip (jonctions junctions): hoc
l mt b tip gip cu to t hai loi bn dn khc nhau (loi n v loi p), c hai c ch to t mt vt liu bn
dn duy nht (b tip gip ng th), hoc l mt b tip gip cu to t hai loi bn dn khc nhau c ch to
t hai vt liu bn dn khc nhau (b tip gip d th), hoc l mt b tip gip kim loi-bn dn (tip gip Schottky)
hoc l mt b tip gip kim loi-in mi-bn dn (cu trc MIS). Trong tp bi ging ny chng ti trnh by hai
loi tip gip dng trong vic ch to cc tct quang hc: tip gip bn dn-bn dn v tip gip kim loi-bn
dn.
II.1 B tip gip p-n
B tip gip p-n c cu to t mt vt liu bn dn c pha tp loi p mt bn v pha tp loi n bn cn
li (hnh II.1.a). ng c trng I(V) ca dng in chy qua b tip ni p-n biu th hiu ng chnh lu.
a) B tip gip p-n trng thi cn bng nhit ng
kho st cc b tip ni p-n, chng ti dng m hnh n gin ca b tip ni gin on (jonction
abrupte/ abrupt junction) mt chiu: vi phn gi tr x > 0, cht bn dn c pha tp loi n vi mt khng i
N
D
cc nguyn t cho (donneurs/ donors); vi phn gi tr x < 0, cht bn dn c pha tp loi p vi mt khng
i N
A
cc nguyn t nhn (accepteurs/ acceptors). ngay st lp tip gip (xung quanh v tr x = 0 ): p(x) < p
p
=
N
A
v n(x) < n
n
= N
D
. Vng in tch khng gian (ZCE) c trng bng in tch c nh eN
A
bn pha p v in tch
c nh eN
D
bn pha n (hnh II.1.a et c). S phn b in tch lng cc ny to nn mt in trng v do mt
hiu th V
d
(hiu th khuch tn). Hiu th ny, trong trng thi cn bng cho php xp ngang hng cc mc nng
lng Fermi; vi k
B
l hng s Boltzmann, ta c:
|
|
.
|
\
|
=
2
i
A D B
d
n
N N
ln
e
T k
V (II.1)
T phng trnh Poisson, ta c th suy ra hm s hiu th :

p
2
p
S
A
n
2
n
S
D
V ) d - (x
2
eN
V ) d - (x
2
eN
- V(x) + = + = (II.2)
trong biu thc ny
S
l hng s in mi ca cht bn dn. in trng hng theo trc x v c biu din
bng: ) d - (x
eN
- E(x)
p
S
A
= cho trng hp d
p
<x<0 v ) d - x (
eN
E(x)
n
S
D
= cho trng hp 0<x<d
n
(II.3)
Trong hai vng trung ho (khng c in tch khng gian c nh), ta c : E = 0. T suy ra rng ca vng
in tch khng gian ZCE : W = d
n
+ d
p
=
1/2
2
i
A D
D
A
Dp
1/2
2
i
A D
A
D
Dn
n
N N
ln
N
N
1
1
2L
n
N N
ln
N
N
1
1
2L
|
|
|
|
.
|
\
|
|
|
.
|
\
|
+
+
|
|
|
|
.
|
\
|
|
|
.
|
\
|
+
(II.4)

*
V nhy ca tct cn c mt tham s khc, thng c s dng trong h truyn thng quang hc, biu din kh nng
thu tn hiu thng tin ca h thng. l nhy ca my thu (sensibilit du rcepteur receiver sensivity). i lng ny c
nh ngha nh l kh nng o mt cng sut quang hc ngng, n nh bi h thng, m khng b ln vi ting n ca my thu.
Vn ny s c trnh by trong bi ging v h thng truyn thng quang hc.
________________________________________________________________________________
231
vi
2 / 1
D
2
B S
Dn
N 2e
T k
L
|
|
.
|
\
|
= v
2 / 1
A
2
B S
Dp
N 2e
T k
L
|
|
.
|
\
|
= ln lt l di Debye trong vng n v trong vng p. di Debye
l i lng o chiu su xm nhp ca cc ht in t do trong vng ZCE.
Nu b tip gip c cu to theo cch khng i xng, vng ZCE s trin khai ch yu trong vng t pha tp.
Chng hn trong b tip gip p
+
n : N
A
>> N
D
, ta c : W
2 / 1
2
i
A D
Dn n
n
N N
ln 2L d
|
|
.
|
\
|
|
|
.
|
\
|
(II.5)

Hnh II.1. B tip gip gin on p-n trng thi cn bng nhit ng

b) B tip gip p-n c phn cc
Khi b tip gip p-n c p in th, ro th nng ca n b bin i v kt qu l cc ht ti in t do s
khuch tn t vng c mt cao sang vng c mt thp. Nu hiu th phn cc V
app
> 0, ta c trng thi phn
cc thng (polarisation en direct/ forward bias) (hnh II.2) v nu V
app
< 0, ta c phn cc ngc (polarisation en
inverse/ reverse bias) (hnh II.3).
(i) Phn cc thng.
Khi ta p mt hiu th V
app
thp phn cc thng b tip gip, hiu th ny l tch xa hai mc nng lng
Fermi nm hai bn ca vng ZCE : E
Fp
= E
Fn
- eV
app
. Trong hai vng trung ho in th vn khng i, ni duy nht
trong b tip gip m in th c th gim l vng in tch khng gian ZCE. rng ca vng ZCE do gim
thiu.
________________________________________________________________________________
232

Hnh II.2. B tip gip p-n c phn cc thng
Phng trnh truyn ti in t c vit :
n
p
n
n - n(x)
-
x
n
D
x
-
t
n
(II.8)
Trong D
n
l h s khuch tn v
n
l thi gian sng ca in t trong vng p. Nu gi
n n n
D L = l di
khuch tn ca in t trong vng p th li gii ca phng trnh (II.8) c vit l:

|
|
|
|
|
.
|
\
|
|
|
.
|
\
|
|
|
.
|
\
|
=
n
p p
n
p
T eVapp/k
p p
L
W d
sinh
L
W x
sinh
1) (e n n - n(x)
B
(II.9)
trong W
p
l chiu rng ca vng p. Dng in ton phn to bi vic phun in t vo vng p cng l dng in
khuch tn im x = -d
p
(quy c chiu dng l chiu ca dng in chy t vng p sang vng n):

(
(
|
|
.
|
\
|
=
|
|
.
|
\
|
= 1 -
T k
eV
exp j 1) (e
L
W d
coth
L
n eD
j
B
app
ns
T eVapp/k
n
p p
n
p n
n
B
(II.10)
Trong biu thc ny j
ns
l dng in khuch tn gii hn ca in t:
|
|
.
|
\
|
=
n
p p
n
p n
ns
L
W d
coth
L
n eD
j (II.11)
p dng cng lp lun nh trn, ta c dng in to bi vic phun l trng trong vng n, vi
p p p
D L = l
di khuch tn ca l trng trong vng ny:

(
(
|
|
.
|
\
|
=
|
|
.
|
\
|

= 1 -
T k
eV
exp j 1) (e
L
d W
coth
L
p eD
j
B
app
ps
T eVapp/k
p
n n
p
n p
p
B
(II.12)
Trong j
ps
l dng in khuch tn gii hn ca l trng:
|
|
.
|
\
|

=
p
n n
p
n p
ps
L
d W
coth
L
p eD
j (II.13)
________________________________________________________________________________
233
Dng in ton phn chy qua b tip gip di phn cc thng l tng s ca hai dng dn to bi cc ht ti
in thiu s c phun vo hai pha ca vng in tch khng gian ZCE :

(
(
|
|
.
|
\
|
= + = 1
T k
eV
exp j j j ) (V j
B
app
sat p n app
(II.14)
Trong j
sat
l dng in bo ho ca b tip gip p-n v c vit:
|
|
.
|
\
|

+
|
|
.
|
\
|

= + =
p
n n
p
n p
n
p p
n
p n
ps ns sat
L
d W
coth
L
p eD

L
W d
coth
L
n eD
j j j (II.15)

Hnh II.3. (a,b) B tip gip p-n c phn cc ngc v (c) ng c trng I(V) ca b tip gip p-n
(ii) Phn cc ngc.
H thc (II.14) c thit lp trong trng hp phn cc thng vi hiu th V
app
> 0. Trong trng hp
phn cc ngc (vi hiu th V
app
< 0) cc phng trnh thit lp trn vn gi nguyn dng nhng trong trng
hp ny ro th nng c nng cao (hnh II.3.a,b). Trong iu kin , hai vng trung ho ca b tip gip s b
thiu ht cc ht ti in thiu s. Ngay khi gi tr ca hiu th phn cc|-V
app
|>> (k
B
T/e), ta c : j(-V
app
) - j
sat
.
ng c trng I(V) ca mt it tip gip p-n c biu din trn hnh II.3.c.
c) in dung tip gip v in dung khuch tn
Khi phn cc ngc, vi phn b in tch trong vng ZCE, b tip gip p-n to nn in dung vi phn:

W
S
dV
dQ
C
S
t
= = (II.16)
Trong dQ l in tch to ra trong vng ZCE khi hiu th phn cc bin i mt lng dV. W l rng ca vng
ZCE v c xc nh bng h thc (II.4), S l tit din thng ca b tip gip. C
t
c gi l in dung tip gip
(capacit de transition) ca b tip gip p-n. Nu b tip gip rt t i xng, chng hn trong b tip gip p
+
n : N
A

>> N
D
, ta c : W d
n
. Nh vy:
app d
1/2
D S
n
S
t
V V
1
2
eN
S
d
S
dV
dQ
C
+
|
.
|
\
|
= = = (II.17)
________________________________________________________________________________
234
Khi b tip gip c p mt hiu th xoay chiu: V
app
(t) = V
0
+v.exp(jt), vi v << V
0
; tnh ton [2] cho thy rng
b tip gip c mt dn np (admittance) bng tng s mt in dn (conductance) v mt in dung khuch tn
(capacit de diffusion). in dung ny bng: ( )
|
|
.
|
\
|
+ =
T k
eV
exp L n L p
T 2k
e
C
B
0
n p p n
B
2
d
(II.18)
II.2. Tip xc kim loi bn dn

Hnh II.4. Cu trc kim loi chn khng bn dn trng thi cn bng nhit ng
Trong vt liu kim loi khng c vng cm, tt c cc mc nng lng ca in t t do u nm di mc
nng lng Fermi E
Fm
. lm thot mt in t t do t b mt ca kim loi t trong chn khng, cn tit phi
cung cp mt nng lng e
m
. Nng lng ny c gi l cng thot ca kim loi v c gi tr bng hiu s gia
mc nng lng chn khng NV v mc nng lng Fermi E
Fm
. Mc nng lng quy chiu NV biu th th nng ca
mt in t t do trong chn khng v ngay st b mt cc vt liu t trong chn khng. i vi vt liu bn
dn, c th hon ton thot khi cht bn dn vo trong chn khng, mt in t t do c tr st b mt ca
kim loi v c nng lng y ca vng dn phi vt qua mt ro th nng c cao bng e
S
.
S
c gi l
i lc in t (affinit lectronique/ electron affinity) ca cht bn dn. e
S
biu th nng lng cn thit gi cc
in t t do bn trong cht bn dn. Ngi ta cng nh ngha cng thot e
S
trong cht bn dn l i lng m
gi tr bng hiu s nng lng gia mc nng lng Fermi E
FS
v mc nng lng chn khng NV.
C hai loi tip xc kim loibn dn:
Tip gip Schottky l tip xc kim loi-bn dn thc hin hiu ng chnh lu.
Tip xc thun tr hay tip xc mic (contact ohmique/ ohmic contact) l tip xc kim loi-bn dn m c
trng I(V) tun theo nh lut Ohm.
II.2.1. B tip gip Schottky
a) Tip gip Schottky trong trng thi cn bng nhit ng
Trong trng hp trnh by trn hnh II.4, ta c :
S
<
m
. Khi hai vt liu c ni li vi nhau, cc in t
t do trong vng dn ca vt liu bn dn chy sang vt liu kim loi. H thng ny s tr nn n nh trong mt
trng thi cn bng. Trng thi ny c xc nh bng s xp thng hng cc mc nng lng Fermi trong hai vt
liu. Trong cht bn dn (trng hp ny l loi n) mt vng thiu ht ht ti in t do (zone de depltion/
depletion zone) c thit lp, cc ion cho
+
D
N khng cn c trung ho in bng cc in t t do na, dn n
s xut hin trong vng ny cc in tch dng c nh. Khi trong kim loi xut hin s tch t in t mt
tip gip ca hai mi trng. V khong cch gia vng dn ca cht bn dn v mc nng lng Fermi biu din
mt dn s in t trong vng dn, nn gn mt tip gip hai mi trng, khong cch ny ln hn so vi
cng khong cch vng trung ho ca cht bn dn. V rng mc nng lng Fermi c v tr nm ngang, cho nn
kt qu l cc vng trong vt liu bn dn s b un cong v phi trn. Nhc li rng vt liu kim loi l mt b cha
in t t do khng l vi mt t 10
22
n 10
23
cm
-3
, trong khi mt cc ion cho
+
D
N trong cht bn dn ch t
10
17
n 10
18
cm
-3
. Vng in tch khng gian (tc l vng thiu ht cc ht ti in t do) nh vy s ko di v
pha cht bn dn. Trong trng thi cn bng nhit ng, mt tip gip hai mi trng ca b tip gip, c tn ti
mt ro th nng bng:
B
=
m
-
S
.
B
c gi l ro th nng Schottky. S phn b ca mt in tch
trong b tip gip c biu din trn hnh II.5.a : (x) = eN
D
(0< x < L) et (x) = 0 (x > L).
T phng trnh Poisson:
S
D
2
2
eN
-
dx
V(x) d
= , ta c th suy ra phn b ca in trng :
- E(x) = L) - (x
eN
-
S
D
(II.19)
________________________________________________________________________________
235
V phn b ca in th (hnh I.2.5.b) :
|
|
.
|
\
|
= Lx -
2
x
eN
- V(x)
2
S
D
(II.20)

Hnh II.5. B tip gip Schottky trng thi cn bng nhit ng

Hiu th khuch tn, i lng xc nh chiu cao ca ro th nng trong cht bn dn c vit:

( )
2
S
D S m
d
L
2
eN
0) V(x - L) V(x
e
- e
V = = = = = (II.21)
T suy ra b rng ca vng in tch khng gian ZCE trng thi cn bng:

1/2
S m
D
S
1/2
D
d S
) (
eN
2
eN
V 2
L
|
|
.
|
\
|
=
|
|
.
|
\
|
= (II.22)
b) B tip gip Schottky c phn cc
(i) c trng in th - dng in.
Kho st trng hp b tip gip c p mt in th dng tnh theo chiu t kim koi sang bn dn (V
m

V
S
> 0) (hnh II.6.b). Vng dn ca bn dn trong trng hp ny c nng cao mt mc bng eV
app
v cong
ca n gim bt. Kt qu l ro th t bn dn kim loi b gim chiu cao trong khi chiu cao ro th t kim loi
bn dn vn khng i. Trng hp ny khin cc in t t do trong bn dn khuch tn sang kim loi v to
thnh dng in khuch tn chy t kim loi sang bn dn. B tip gip nh vy c phn cc thng. Dng in
hp bi cc ht ti in thiu s (trong trng hp ny l cc l trng) l khng ng k, do dng in chy
trong b tip gip ch yu l dng cc ht ti in a s.
mt tip gip hai mi trng ca b tip gip c tn ti ng thi mt dng in to bi pht x nhit in t
(mission thermolectronique/ thermoelectronic emission). Ngun gc vt l ca ca dng in ny l hin tng
pht x nhit in t ; l cc nhit in t c ng nng vt qua ro th b mt ca mt vt liu. Dng
in ny nh th c ng gp bi pht x nhit in t ca cc ht ti in t do theo hai chiu : t kim loi
________________________________________________________________________________
236
sang bn dn v ngc li t bn dn sang kim loi. Phn ng gp ca mi pha (kim loi bn dn hay bn dn
kim loi) ph thuc vo chiu cao ca mi ro th. Cn trong vng in tch khng gian ZCE ca cht bn dn,
dng in di chuyn tun theo cc quy lut ca hin tng khuch tn v c hin din ca graien mt cc ht ti
in v quy lut ca in trng hin din trong vng ny. Dng cc ht ti in a s l dng in duy nht tn
ti, do dng in ny phi c bo ton ; nh vy ta c th tnh ton dng in ny trong vng ZCE hay l
mt tip gip hai mi trung.

Hnh II.6. B tip gip Schottky c phn cc
) Dng nhit in t: Gi thit rng tt c cc nguyn t cho v nguyn t nhn trong cht bn dn u
b ion ho, dng nhit in t trng thi cn bng nhit ng c vit nh sau:
j
msc
= j
scm
=
|
|
.
|
\
|
|
|
.
|
\
|
=
|
|
.
|
\
|
T k
eV
- exp
m 2
T k
eN
T k
eV
- exp
N
N
T A
B
d
1/2
C
B
D
B
d
C
D 2 *
(II.23)
trong A* l hng s hiu dng Richardson nh ngha bng:
3
2
B
*
*
h
k m e 4
A

= ; m* l khi lng hiu dng ca
in t; k
B
l hng s Boltzmann v h l hng s Planck.
Khi b tip gip c phn cc thng (V
m
V
S
> 0) : chiu cao ca ro th kim loi bn dn khng i : dng
nhit in t j
msc
c gi nh c. Ro th bn dn kim loi, ngc li tr thnh e(V
d
V
app
), chiu cao ro th
nh vy b h thp. Dng nhit in t ton phn c vit thnh:
j
e
= j
scm
- j
msc
=
(
(
|
|
.
|
\
|
|
|
.
|
\
|
|
|
.
|
\
|
T k
eV
- exp -
T k
) V - e(V
- exp
m 2
T k
eN
B
d
B
app d
2 / 1
C
B
D
(II.24)
Nh vy:
|
|
|
.
|
\
|
= 1 e j j
T k
eV
se e
B
app
(II.25)
________________________________________________________________________________
237
vi j
se
l dng nhit in t bo ho:
T k
eV
-
1/2
C
B
D se
B
d
e
m 2
T k
eN j
|
|
.
|
\
|
= (II.26)
) Dng in khuch tn: Dng in ny l kt qu ca s khuch tn cc in t t do trong vng ZCE ca
cht bn dn. Tnh ton [2] cho thy dng in khuch tn c th c vit di dng :

|
|
|
.
|
\
|
= 1 e j j
T k
eV
sd d
B
app
(II.27)
vi j
sd
l dng in khuch tn bo ho: ( )
T k
eV
-
1/2
app d
1/2
S
D
n D sd
B
d
e V V
2eN
eN j
|
|
.
|
\
|
= (II.28)
) T hp t hai dng in: Cc biu thc thu c t hai cch tnh ton (dng nhit in t v dng khuch
tn in t) l rt gn nhau v chng cng thay i theo quy lut (e
eVapp/k
B
T
-1), l hm s ca in p V
app
, vy th ta
c th vit:
|
|
|
.
|
\
|
= 1 - e j j
T k
eV
sat
B
app
(II.29)
Trong dng in bo ho thay i vi quy lut hm m theo nhit v theo hiu s cng thot ca kim loi
v ca bn dn: j
sat
exp(- eV
d
/k
B
T). c trng I(V) ca b tip gip c trnh by trn hnh II.6.d. Bi v dng
in c bo ton, hai biu thc tm c ca hai loi dng in phi ng nht. Ta c th xem nh hai loi dng
in ny c mc ni tip v dng in chy qua b tip gip b chi phi bi mi vng m n chy qua (ngha l
trong vng ZCE dng in ny l dng khuch tn, trong khi mt tip gip hai mi trng dng in ny l dng
nhit in).
(ii) in dung vi phn.
Nu b tip gip c phn cc di hiu th V
app
m theo chiu thng (V
m
-V
S
> 0), chiu cao ro th tr thnh
e(V
d
-V
app
) v rng ca vng in tch khng gian ZCE c vit :
1/2
app d
D
S
app
) V - (V
eN
2
) L(V
|
|
.
|
\
|
= . Cng nh trong
trng hp ca b tip gip p-n, mt thay i vi phn dV
app
s ko theo mt thay i b rng L(V
app
) ca vng ZCE
v kt qu l mt in tch vi phn dQ c pht trin trong vng ny. Nh vy cu trc b tip gip Schottky c
mt in dung vi phn. in tch khng gian c vit: Q
S
= - Q
m
= eN
D
L = [2
S
eN
D
(V
d
-V
app
)]
1/2
. in dung vi phn
ca b tip gip: ( )
L
V - V
2
eN
dV
dQ
) C(V
S 1/2
app d
1/2
D S
app
= |
.
|
\
|
= = (II.30)
I.2.2.2. Tip xc thun tr
Tip xc thun tr (contact ohmique/ ohmic contact) l tip ni cn thit c th ni mch ngoi vi vng
hot ng ca mt linh kin bn dn. Tip xc thun tr c nh ngha nh l tip xc kim loi-bn dn c in
tr tip xc rt nh so vi in tr ca khi bn dn hay in tr ni tip ca cc linh kin bn dn. Nu b tip gip
Schottky c c trng bng hiu ng chnh lu th ngc li, tip xc thun tr c c trng I(V) tuyn tnh theo
nh lut Ohm, theo c hai chiu phn cc. in tr ca tip xc thun tr phi c gi tr thp nht c th thc hin
c, ngha l s gim hiu th trn tip xc thun tr phi nh hn rt nhiu so vi s gim hiu th bn trong
khi bn dn.
Nu nh i vi bc huyn tip Schottky dng bn dn loi n, iu kin cn thit l :
m
>
SC(n)
, th iu kin
cn thit cho tip xc thun tr cng loi, ngc li, phi l :
m
<
SC(n)
.
iu kin cn thit i vi tip xc kim loi v bn dn loi p cng tng t nh trn : i vi b tip gip
Schottky ta c:
m
<
SC(p)
; trong khi i vi tip xc thun tr th:
m
>
SC(p)
.

III. TCT QUANG HC LNG T
III.1 TCT QUANG DN IN
III.1.1 Vn hnh ca mt tct quang dn in
Kho st mt linh kin quang dn in c dng hnh hc nh trnh by trn hnh II.1. Khi khng c chiu
sng, in dn (conductivit/ conductivity) ca linh kin biu din theo mt cc ht ti in t do (n
0
v p
0
) v
linh ng ca chng (
n
et
p
) l:
0
= n
0
n
e + p
0
p
e (III.1)
Khi linh kin c chiu sng, gi n v p l mt in t v mt l trng do kch thch quang hc to
nn, in dn ca linh kin, trong trng hp ny, tr thnh: =
0
+ ; vi l bin thin ca in dn khi
linh kin c chi sng v c nh ngha bng: = e(
n
n +
p
p). V rng n v p l mt cc ht ti in
sinh ra do s to cp bng hp th cc phtn, cho nn s quang in t ng bng s quang l trng : n = p.
Do ta c th vit: = e
n
n(1+
p
/
n
)

________________________________________________________________________________
238

Hnh III.1 : S vn hnh ca mt linh kin quang dn in
Hai in cc (l tip xc thun tr) c dng p mt in trng E song song vi b mt ca linh kin v
thu thp cc ht quang ti in. Gi thit rng di khuch tn ca cc ht quang ti in l ln ( chng
khng b ti hp trc khi n c in cc), th mt cc ht ti in thng d sinh ra do chiu sng c th biu
th bng : n =
wld
0

(III.2)
Trong l hiu sut lng t ton phn;
0
l thng lng phtn ti v l thi gian sng ca cc ht quang
ti in.
Bin thin tng i ca in dn biu din theo thng lng ca tn hiu quang ti (
0
) l :
wld
) e(

d
0
p n
+
= (III.3)
Khi linh kin quang dn in c dng trong mt mch in, i lng thng dng biu din l in tr
ca linh kin ; in tr ca tct quang dn in l : R
d
= l/(wd). Vy th bin thin in tr ca tct quang
dn in theo thng lng ca tn hiu quang ti c biu din bng:

d
R
wd
d
l
dR
d
2
d
= = =
wld
) e(
R
0
p n
d

+
(III.4)

Hnh III.2 : S d mch in dng phn cc tct quang dn in
Tn hiu quang hc c biu din bng cng sut ca sng quang ti (o bng Watt) vi gi thit rng sng
quang ti l n sc :
hc
P
0
0
= (Watt). c th o tn hiu in ca tct, ta c th phn cc tct theo s
mch in trnh by trn hnh III.2. Hiu th o c trn in tr R
L
ca ph ti l :
L d
L 0
R R
R V
V
+
= . Bin thin ca
hiu th do bin thin in tr ca tct quang dn in (hay ni cch khc tn hiu in biu th theo tn hiu
quang ti) c vit :
0
p n
2
d L
d L 0
2
d L
d L 0
P
wld hc
) ( e
) R (R
R R V
) R (R
dR R V
- dV
+
+
=
+
= (III.5)
p ng c trng theo hiu th ca tct nh vy l :
V
() =
d A hc
) (
) R (R
R ieR

P
dV
d
p n
d L
d L
0

+
+
= (III.6)
Trong A
d
= wl l din tch b mt ca tct ; i l cng dng in chy qua linh kin.
Ta cng c th biu din p ng c trng ca tct theo dng in :
i
() =
d hcA
) ( e
) R (R
iR
P
dV
R
1
P
di
d
p n
d L
d
0 L 0

+
+
= = (III.7)
T biu thc ny ta thy, tng gi tr p ng ca tct cn phi lm tng hiu sut lng t, thi gian sng
ca cc ht quang ti in, linh ng ca cc ht ti in ny v dng in phn cc trong linh kin (bng cch
tng hiu th phn cc).

________________________________________________________________________________
239
II.1.2 khuch i ca quang dn in
Ta c th vit p ng c trng theo dng in ca mt tct quang dn in di dng :

i
() = G
hc
e
(III.8)
Trong G =
d A
) (
i
d
p n
+
. Cte = g. Cte ; vi Cte =
( )
L d
d
R R
R
+
. H s g c gi l khuch i ca quang dn
in. lm n gin biu thc, chng ta kho st trng hp mt cht bn dn ngoi lai (ch c mt loi ht ti
in t do). Trong trng hp ny, ta thay i lng (
n
+
p
) bng : g =
wld
i

=
2
l

wd
l
i

=
2
d
l

iR

=
l l
V
d

=
l
E
; trong V
d
l hiu th gia hai in cc ; E l in trng gia hai in cc. Th nhng
E
l
=
t

biu din thi gian di chuyn ca cc ht ti in gia hai in cc (di tc dng ca in trng). Nh vy
khuch i ca quang dn in c biu th bng t s gia thi gian sng v thi gain di chuyn gia hai in cc
ca cc ht quang ti in: g =
t
(III.9)
II.1.3 p ng thi gian
Kho st trng hp mt linh kin quang dn in ngoi lai loi p. Phng trnh tin ho ca mt cc ht
quang ti in chiu theo phng kch thch quang hc (phng x trong hnh III.1) c vit:
t
p
=
x) (t, G
optique
p
p

x
J
e
1 p
; trong t sut to cp quang hc trong cht bn dn l .G

optique
(t) ; p l mt
cc ht quang ti in thng d v
p
l thi gian sng ca cc ht quang ti in. Gi thit rng c chiu sng
ln vt liu l ng nht, bng cch tnh tch phn phng trnh ny theo b dy ca linh kin quang dn in (t x
= 0 n x = d), ta c :
dt
p d
= (t) G
optique
-
p
p

Ch rng dng quang in lu thng theo phng thng gc (phng y trong hnh v) vi phng kch thch
quang hc (phng x), do : 0
x
J
p
=
.
Nu cng sut chiu sng l hng s ta c th vit : G
optique
(t) = G
0
; V nu chiu sng bt u thi im t =
0 vi: p(0) = 0, th p ng thi gian ca linh kin c vit : p(t) =
p
G
0
(1-e
- t/p
).
Nu cng sut chiu sng thay i theo thi gian theo quy lut hnh sin th ta c : G
optique
(t) = G
0
sint, vi p(0)
= 0, p ng thi gian ca tct trong trng hp ny l: p(t) =
p
G
0
(1-e
- t/p
)sin(t+). Bin p ng thi
gian trong ch n nh biu din theo tn s c vit: p() =
2
p
2
p 0
1
G
+

(III.10)
Nh vy tct quang dn in phn ng nh mt b lc ly h tn (filtre passe-bas low-pass filter) c tn s ct
(frquence de coupure cut-off frequency) l : f
c
=
p
2
1

(III.11)

Hnh III.3 : ng p ng tn s ca mt tct quang dn in tng ng vi hai thi gian sng khc nhau (theo [1])
Khi tng gi tr thi gian sng ca cc ht quang ti in, ta lm tng di thng v cng ng thi lm gim
khuch i g ca tct. iu phn nh c trng ca mt tct quang dn in : tch s khuch i di
thng l mt hng s (hnh III.3).
________________________________________________________________________________
240
III.3 TCT QUANG HC DNG B TIP GIP
Mt trong nhng kh khn ca vic s dng tct quang dn in l tr khng ca n thp. khng phi l
trng hp ca it quang hc. tct quang hc dng b tip gip (dtecteur photovoltaque/ photovoltaic
detector) s dng c trng chnh lu ca mt it p-n hoc mt it Schottky c c mt tr khng cao v
tch cp in t-l trng, sinh ra trong qu trnh tng tc vi phtn. Nh vy, chnh in trng bn trong it
gi vai tr lm lu thng dng in.
III.3.1 it quang dng tip gip p-n
it quang c cu to t mt b tip gip p-n (tip gip ng th hay tip gip d th) vn hnh di ch
phn cc ngc hoc khng phn cc.
a) Vn hnh ca it quang p-n

Hnh III.4 : Nguyn l vn hnh ca mt it quang : (a) gin cc vng nng lng, (b) cu to ca b tip
gip p-n v hp th cc phtn, (c) ng biu din s to cp quang hc (d) cu hnh tiu biu ca mt it
quang.
Khi it c chiu sng, cc phtn ti c hp th trong ba min khc nhau ca it quang (hnh
III.4.b) : cc phtn c nng lng cao (tng ng vi bc sng ngn) c hp th trong vng p+, cc phtn
c nng lng thp hn (tng ng vi bc sng di hn) c th xm nhp n vng in tch khng gian (ZCE)
v n vng khuch tn ca it. S to cp in t-l trng bng kch thch quang hc trong cc vng ny ng
gp vo vic to thnh dng quang in trong it quang. Cc cp in t-l trng sinh ra bng kch thch quang
hc trong vng ZEC lp tc b qut ngay bi in trng rt mnh trong vng ny v pha cc vng p+ v n. Cc ht
quang ti in ny ng gp vo vic to thnh dng quang in sinh ra do to cp quang hc J
G
(sau y gi tt l
dng quang in to cp) chy qua it quang. Cc cp in t-l trng sinh ra bng kch thch quang hc trong cc
________________________________________________________________________________
241
vng trung ho (vng p+ v vng n) t khuch tn v mt s ht s b ti hp trong vng ny. i vi mt s cc
ht khc, c th khuch tn n bin gii ca vng ZCE, chng lin b qut ngay bi in trng ca vng ZCE. Cc
ht quang ti in khuch tn ny ng gp vo vic to thnh dng quang in khuch tn J
ndiff
v J
pdiff
. Dng
quang in ton phn J
ph
l hp thnh ca hai loi dng quang in k trn, c tnh ton ti cng mt im trong
linh kin, chng hn ti im W, ta c: W) (x J W) (x J W) (x J J
pdiff G ndiff ph
= + = + = =
(i) Dng quang in to cp:
Phng trnh tin ho ca cc ht quang ti in c vit:
x
J
e
1 n
(x) G
t
n
Gn
n
optique
, vi h sut to
cp quang hc c xc nh bi (I.9):
x -
0 optique
R)e - (1 (x) G

= . Di ch thng trc, phng trnh ny tr
thnh:
x
0
Gn
R)e - (1
dx
dJ
e
1

= ; n = 0 bi v tt c cc ht ti in trong vng ZCE b qut ngay bi in trng
trong vng ny. Dng in J
Gn
s thu c bng cch ly tch phn phng trnh sau cng t x = 0 n x = W (b
rng ca vng ZCE), vi lu l J
Gn
(0) = 0. Kt qu l : J
Gn
(W) = J
G
= ) e R)(1 - (1 e
W
0

(III.12)
chnh l dng in t chy qua bin gii gia vng ZCE v vng trung ho (vi gi tr x > W).
(ii) Dng quang in khuch tn:
V rng tt c cc ht ti in sinh ra trong vng ZCE lp tc b qut ngay bi in trng, cho nn ta c:
0) (x J W) (x J
pdiff pdiff
= = = v 0) (x J W) (x J
ndiff ndiff
= = = . Mt dng quang in khuch tn J
pdiff
hp thnh bi
cc quang l trng khuch tn trong vng n ( ngoi vng ZCE) s c xc nh t li gii ca phng trnh tin
ho sau:
x -
0
2
2
p
p
R)e (1 p
dx
d
D
p

=
. T :
x
2
p
W
0 p x/L
x/Lp
e
) L ( 1
R)e - (1
Be Ae p(x)
p

+ + = , vi L
p

=
p p
D l di khuch tn ca l trng ; D
p
l h s khuch tn ca l trng.
Gi thit rng kch thc ca linh kin bn dn l ln c th xem rng kch thc ca vng khuch tn
, t c th p dng iu kin bin v cc vo li gii tng qut ca phng trnh v suy ra l : B = 0. Hn
na, ti im x = W ta c p(W) = 0, bi v tt c cc l trng n c vng bin gii ny lin b qut ngay bi
in trng. T ta suy ra : ] e [e
) L ( 1
R)e - (1
p(x)
W)/Lp (x W) (x
2
p
W
0 p

= . Mt dng quang in khuch

tn ti im x = W c vit l:
W x
p pdiff
dx
p d
eD J
=
|
.
|
\
|
=
Th th, ta c :
W
0
p
p
pdiff
R)e - (1
L 1
L
e J

+
= (III.13)
S phn b cc quang in t trong vng trung ho p
+
c cng dng vi s phn b cc quang l trng trong
vng n. Tuy nhin, trong thc t, b dy ca vng tuyn u ny rt nh so vi 1/ cho rt nhiu phtn c th
xm nhp n vng ZCE, t c th to ra ti a cc ht quang ti in trong vng ny. Mt quang in t
trong vng ny do rt thp. Hn na, ta ch c th xem nh khng ng k mt in t trong vng trung ho
p
+
, v rng ta c :
2
i
n np =
+
, vi p
+
>> n. S ng gp vo dng quang in khuch tn trong trng hp ny, nh
vy, ch yu l do ng gp ca quang l trng trong vng trung ho n : J
diff
= J
pdiff
.
Dng quang in ton phn do c vit : J
ph
= J
G
+ J
diff
= )
L 1
e
R)(1 - (1 e
p
W
0
+

(III.14)
Dng quang in J
ph
cung cp bi it quang nh vy t l vi thng lng cc phtn ti
0
. tct quang
hc do c p ng tuyn tnh. Mt khc, tng nhy ca dng quang in ny, biu thc ca J
ph
ch ra rng
cn phi tng gi tr ca h s hp th (tc l tng hiu sut lng t) v b rng W ca vng in tch khng
gian ZCE v di khuch tn L
p
. Dng quang in ny hp vi dng in trong ti (courant d'obscurit/ dark
current) J
obs
" to thnh dng in ton phn u ra ca it quang : J = J
obsc
+ J
ph
.
(iii) Dng in trong ti:
Trn hnh III.5 trnh by 4 dng in (J
gn
, J
ndiff
, J
gp
, J
pdiff
) cu thnh dng in trong ti ca it quang. Khi it
quang khng c chiu sng, dng in chy qua b tip gip l tng s ca 4 dng in khc nhau ny : J
obsc
=
J
ndiff
+J
pdiff
J
gn
-J
gp
; trong J
gn
l dng in to cp (sinh ra do chuyn ng nhit) ca in t ; J
ndiff
l dng in
khuch tn ca in t ; J
gp
l dng in to cp (sinh ra do chuyn ng nhit) ca l trng v J
pdiff
l dng in
khuch tn ca l trng.

________________________________________________________________________________
242

Hnh III.5 : Phn b ca dng in trong ti
Dng in to cp in t J
gn
v dng in to cp l trng J
gp
sinh ra t chuyn ng nhit ca cc ht cu
thnh vt liu bn dn trong vng ZCE. Cc ht ti in ny b qut ngay bi in trng E trong vng in tch
khng gian ny. Cc dng in ny khng ph thuc vo hiu th phn cc V
app
; chng tn ti mi gi tr V
app
.
Dng in khuch tn in t J
ndiff
cu to t cc in t t do trong vng trung ho n v khuch tn v pha vng
ZCE. Chiu ca dng in ny ngc vi chiu ca dng in to cp in t J
gn
. Dng in khuch tn l trng J
pdiff

cu to t cc l trng t do trong vng trung ho p v khuch tn v phi vng ZCE. Chiu ca dng in ny cng
ngc vi chiu ca dng in to cp l trng J
gp
. S ht ti din t do ng gp vo hai dng in khuch tn ny
ph thuc vo chiu cao ro th nng ca b tip gip p-n. Th m chiu cao ca ro th nng ny li t l thun
vi hiu th phn cc V
app
. Cho nn cc dng in khuch tn ny ph thuc vo hiu th phn cc ca it quang.
-10 -9 -8 -7 -6 -5 -4 -3 -2 -1 0 1 2 3 4
-0,004
-0,003
-0,002
-0,001
0,000
0,001
0,002
0,003
0,004
0,005
0,006
I
ph
I
obsc
C
O
U
R
A
N
T

(
m
A
)
Tension de polarisation (V)
Courant d'obscurit
Photocourant

Hnh III.6 : c trng I(V) ca mt it quang
T tnh ton trnh by trong mc II.1.b ca chng II ta c dng in trong ti ton phn c biu din bng
biu thc (II.14), ngha l : 1) (e J J
T /k eV
sat obsc
B app
= (III.15)
Nh vy, dng in ton phn u ra ca it quang, khi n c chiu sng vi thng lng quang hc
0
, c
vit l: J = J
obsc
+ J
ph
= )
L 1
e
R)(1 - (1 e 1) (e J
p
W
0
T /k eV
sat
B app
+

(III.16)
Hnh III.6 trnh by cc c trng I(V) ca dng in trong ti v dng quang in ca it quang.

________________________________________________________________________________
243

Hnh III.7 : Hai cch vn hnh ca mt it quang : (a) o bng dng quang in v (b) o bng hiu th quang in
Khi s dng mt it quang o tn hiu quang hc, ta c th p dng hai cch o khc nhau: o bng dng
quang in (hnh III.7.a) v o bng hiu th quang in (hnh III.7.b).
Trong s o bng dng quang in, it quang c ni vi mt mch in c tr khng rt nh (R
L
) v
dng quang in o c, c xc nh bng biu thc (III.16) trn. Ta cng c th o hiu th V hai u ca
in tr ph ti R
L
.
Trong s o bng hiu th quang in, it quang c ni vi mt mch in c tr khng rt ln (I = 0).
Trong trng hp ny, phng trnh ca dng quang in trnh by trn cho thy c xut hin mt hiu th V
ph

hai cc ca it quang : linh kin nh vy vn hnh theo cch to ra hiu th quang in. Biu thc ca hiu th
quang in V
ph
c vit l:
|
|
.
|
\
|
|
|
.
|
\
|
+
=
|
|
.
|
\
|
+ =

p
W
sat
0 B
sat
ph
B
ph
L 1
e
1
J
R) - (1 e
1 ln
e
T k

J
J
1 ln
e
T k
V (III.17)
Chng ta thy rng, trong cch o ny, it quang khng cung cp mt p ng tuyn tnh theo thng lng
phtn ti
0
.
p ng c trng theo ph ca mt it quang c th c vit di dng (nh trong trng hp ca tct
quang dn in): () =
/e h
1
=
1,24
(m)
(III.18)
vi hiu sut lng t ton phn xc nh bi ht thc :
|
|
.
|
\
|
+
=

p
W
L 1
e
1 R) (1 (III.19)
T biu thc ca p ng c trng theo ph ny ta thy khng c h s khuch i trong p ng ca mt
it quang ( so snh vi p ng ca mt tct quang dn in c h s khuch i g, ta c th xem nh h
s khguch i ca it quang l 1).
b) p ng thi gian ca it quang.

Hnh III.8 : Mch in tng ng ca mt it quang vn hnh theo cch o dng quang in
p ng thi gian ca mt it quang c xc nh t li gii cc phng trnh ng lc hc (I.10) v
(I.11). Cc phng trnh ny m t s phn b theo thi gian cc ht quang ti in trong cc vng c tng tc vi
phtn, vi mt dng in in t J
n
v mt dng in l trng J
p
c xc nh bng (I.12) v (I.13). Vic
tnh ton thu c li gii cc phng trnh ny kh nhiu kh, trong khi ta c th d on c nhng kt qu
vt l chnh yu ca cc li gii . Do vy, y chng ta, thay v i tm li gii t m hnh ton hc ca p ng
thi gian, i tm gii thch vt l ca hin tng ny. Chng ta quan tm n cc hng s thi gian ng gp vo
vic to nn p ng thi gian ca mt it quang. C ba hng s thi gian v mi hng s tng ng vi mt hiu
ng vt l khc nhau.
Hng s thi gian tng ng vi dng in khuch tn (t
d
). Hng s ny chnh l thi gian sng ca cc ht
quang ti in (vy th t
d
= ). Gi tr ca hng s ny thay i t 10
-4
s trong Si n 10
-8
s trong GaAs, ngha l
tng ng vi cc di truyn qua (bande passante passband) c rng t 10 KHz n 100 MHz. Di truyn qua
vi rng ny khng p ng c vi yu cu o cc tn hiu quang thay i vi tc nhanh.
Hng s thi gian mch RC (t
RC
). Vng in tch khng gian ZCE ca it quang to ra mt in dung chuyn
tip C
d
ca tct, xc nh bi h thc (II.23) [xem mc II.1.c]. Khi dng it quang o cc tn hiu bin i
nhanh, in dung ny hp vi in tr ca tct (R
p
) v in tr ph ti (R
L
) (nh c m t trong mch in
tng ng trnh by trn hnh III.8) mt mch in m tn s ct l :
d
c
RC 2
1
f
= (III.20)
________________________________________________________________________________
244
Trong R l in tr tng ng ca hai in tr mc song song R
p
v R
L
.
Th d : i vi mt it quang c tit din ca vng ZCE l: A = 1 mm
2
, c pha tp vi mt 10
15
cm
-3
v c p vi
hiu th VD V = 10V ; ta c b rng ca vng ZCE l: W = 3,6 m v in dung chuyn tip l 30pF. Ni vi mt in tr ph
ti c gi tr 50, it quang ny c tn s ct bng: 1/2RC = 110 MHz.
Hng s thi gian tng ng vi di chuyn ca cc ht ti in trong vng in tch khng gian ZCE (t
t
). Hng
s thi gian ny c c trng bng: t
t
=
app
V
w
; trong w l b rng ca vng ZCE, l linh ng ca cc

ht quang ti in v V
app
l hiu th phn cc. Hng s ny c gi tr nh nht trong ba hng s lin h n p
thi ca linh kin. Thc vy, b rng vng in tch khng gian ZCE tri di khong 1 m khi it quang c p
mt in th phn cc chng V
app
=1V, ngha l mt in trng trung bnh bng 10
4
V/cm. Ngay i vi mt vt liu
bn dn m cc ht ti din c linh ng thp, chng hn = 100 cm
2
/V/s (gi tr ny tng ng vi vn tc di
chuyn chng 10
6
cm/s), ngha l tng ng vi mt thi gian di chuyn ca ht ti in trong vng ZCE bng 100
ps, hay mt tn s ct chng 10 GHz.
p ng thi gian ca linh kin l t hp ca ba hng s thi gian m biu thc gn ng c th vit l [10]:
( )
2 / 1
2
t
2
RC
2
d
t t t t + + (III.21)
Hai hng s thi gian u tin to ra cc gii hn khng chp nhn c vi vic o cc tn hiu quang bin iu
nhanh, nh trong trrng hp ca truyn thng quang hc tc cao m di truyn qua cn thit phi ln hn GHz.
i vi cc loi ng dng ny ta cn phi dng it quang p-i-n.
III.3.2 it quang p-i-n

Hnh III.9 : S ca mt it quang p-i-n : (a) cu trc ca it quang p-i-n ; (b) gin vng nng lng ;
(c) ng biu din s to cp bng kch thch quang hc v (d) cu hnh tiu biu ca mt it quang p-i-n

________________________________________________________________________________
245
Chng ta thy rng trong mt it quang dng b tip gip p-n, s gii hn b rng ca vng in tch khng
gian ZCE l mt yu t ng gp vo hn ch ca dng quang in v ca di truyn qua ca linh kin. lm tng
b rng ca vng ZCE, trong cu trc ca mt it quang p-i-n, ngi ta chen vo gia hai vng pha tp p v n ca
b tip gip mt cht bn dn ni bm (ch i trong t p-i-n l vit tt ca ch intrinsque/ ni bm) rt t pha tp.
B rng ca vng ZCE, di ch phn cc ngc, tri rng trn sut vng i, v s to cp bng kch thch
quang hc xy ra ch yu trong (hnh III.9.a v b). Cu trc ny c nhng u im sau:
- N c mt in dung chuyn tip C
t
= A/W thp v do to nn mt tn s ct kh cao.
- V rng vng in tch khng gian ZCE rt rng, tri di n kh su trong vng trung ho n (W >> 1, vng
khuch tn ht ti in c gim thiu rt nhiu), do s ng gp ca dng in khuch tn J
diff
cng nh thi
gian sng ca cc ht quang ti in l khng ng k (thi gian sng ny lin quan n s ti hp cc ht ti
in trong cc vng khuch tn). Nh vy ta c th b qua s ng gp ca hng s thi gian tng ng vi dng
in khuch tn vo p ng thi gian ca tct. Phn ng nng ng ca linh kin do ch yu c quyt
nh bi dng in to cp J
G
.
Nguyn l vn hnh ca it quang p-i-n tng t vi nguyn l vn hnh ca it quang dng b tip gip p-n ;
iu khc bit l rng ca di truyn trong it quang p-i-n rt ln.
Th d : Trong mt it quang p-i-n c tit din tip gip A = 0,01 mm
2
, c b rng vng ZCE (l vng i) W=10 m s cho mt
in dung chuyn tip l Cd = 0,1 pF. Ni linh kin vi mt in tr ph ti R = 50 , it quang ny s c mt tn s ct fc =
1/2RCd bng 30 GHz. in th phn cc c ln chng (VD Vapp) = 100 V , in th ny to ra trong vng ZCE mt in
trng E = 10
2
V/ 10m = 10
5
V/cm. in trng ny y cc ht ti in c linh ng chng = 100 cm
2
/V/s chuyn
ng vi vn tc 10
7
cms
-1
. Vn tc ny tng ng vi thi gian chuyn ng trong vng ZCE l t = 100 ps, ngha l it
quang c mt tn s ct chng 10 GHz.
Chng ta thy rng trong th d ny thi gian chuyn ng ca cc ht quang ti in trong vng in tch khng
gian l yu t hn ch ca di truyn qua. Nh vy, ta khng th tng b rng W ca vng ZCE m khng lm hn
ch rng di truyn qua ca tct. Th th cn phi chn mt gii php tha hip tt gia in dung chuyn
tip C
d
v thi gian chuyn ng ca cc ht quang ti in
t
trong vng in tch khng gian c th tng
rng di truyn qua ca tct.
III.3.3 it quang dng hiu ng nhn in (photodiode avalanche/ avalanche photodiode)
Trong mt it quang dng hiu ng nhn in (sau y gi tt l it quang nhn in) ngi ta s dng
hin tng nhn in i vi cc cp in t-l trng khuch i s ht quang ti in c to ra v do
khuch i p ng ca tct quang hc.
a) Vn hnh ca it quang nhn in

Hnh III.10 : C ch nhn in trong b tip gip p-n (theo [5])

S c ch ca hiu ng nhn in trong mt it quang p-i-n c trnh by trn hnh III.10. B tip gip p-n
(hay p-i-n) ca it quang c phn cc ngc vi mt hiu th cao (nhng thp hn hiu th nh thng
tension de claquage/ breakdown voltage - ca b tip gip). Hiu th cao ny to ra mt b rng kh ln ca vng
ZCE v ng thi cng to ra mt in trng rt mnh trong vng ny. Mt photon hp th im A to ra mt
cp in t-l trng bng chuyn dch in t A B (in t B trong vng dn v l trng A trong vng ho
tr). Hai ht quang ti in ny c t trong in trng rt mnh v do chng lp tc c gia tc. Vi s gia
tc ny, in t B thu c mt ng nng quan trng trong l trnh ca n, v nh vy nng lng ton phn ca
in t ny ln hn nng lng y ca vng dn. Th nhng, l trnh ca ht in t b gin on do va chm
ngu nhin vi mng tinh th, chng hn im C. im ny, in t chia bt mt phn nng lng ca n cho
mng tinh th. Nng lng chuyn giao ny ln hn rng ca vng cm v sc ion ho nguyn t, to nn
chuyn dch in t F E. Mt cp in t-l trng th cp nh vy c sinh ra, v n lt chng c gia tc
bi in trng, ng thi vi in t s cp. in t s cp ny, sau khi chuyn giao bt nng lng im C,
ri xung im D v tip tc c gia tc trn mt l trnh mi. L trng sinh ra im F c gia tc theo chiu
ngc li v bng va chm vi mng tinh th im G, to nn chuyn dch in t H I, dn n kt qu l ln
ny mt cp in t-l trng mi khc c sinh ra. Ln na, cp ht ti in ny li c gia tc di in trng
v tham gia vo qu trnh ion ho cc nguyn t bng va chm. Nh vy, mt hiu ng dy chuyn to cp in t-
________________________________________________________________________________
246
l trng xy ra trong vng nhn in ca linh kin. Kt qu l dng quang in s cp c nhn ln bng hiu ng
nhn in ny v to thnh u ra ca linh kin mt dng quang in c khuch i.
Dng quang in chy qua it quang nhn in (c tit din tip gip A) nh vy bt ngun t ba dng in:
Dng in to cp s cp sinh ra do hp th mt phtn hoc do chuyn ng nhit. Trong mt lp c b dy
dx ca vng nhn in, dng in to cp bng : AeGdx ; trong G l h s to cp ton phn (to cp quang hc
v to cp nhit hc).
Dng in to cp th cp do va chm ca in t vi mng tinh th, dng in in t th cp c vit :
n
I
n
dx, trong
n
l h s nhn in ca in t v c nh ngha bng s
n
dx cc cp in t-l trng th cp
sinh ra bi chuyn ng ca mt in t xuyn qua mt khong cch dx trong vt liu di mt in trng mnh.
Dng in to cp th cp do va chm ca l vi mng tinh th, dng in l trng th cp c vit :
p
I
p
dx,
trong
p
l h s nhn in ca l trng v c nh ngha bng s
p
dx cc cp in t-l trng th cp sinh ra
bi chuyn ng ca mt l trng xuyn qua mt khong cch dx trong vt liu di mt in trng mnh.
Ch rng cc h s nhn in ca in t v ca l trng (
n
v
p
) ph thuc rt mnh vo in trng v gi
tr ca chng khng ng k di in trng yu.
Trong ch tnh (ngha l G l hng s), ta c : AeG I I
dx
dI
-
p p n n
n
+ + = ;
v AeG I I
dx
dI
p p n n
p
+ + = .
Tnh lin tc ca dng in ton phn i hi phi c : I = I
n
+ I
p
. Bng cch thay th I
n
trong phng trnh th hai
t h thc ny, ta c : AeG I )I (
dx
dI
n p n p
p
+ + =
Phng trnh vi phn ny c li gii tng qut :
p n
n
)x
n p
(
p
AeG I
Ce (x) I

+
+ =

. Hng s tch phn C c xc
nh t cc iu kin bin tip xc ca vng n ti x = 0 v tip xc ca vng p ti x = L. Gi thit rng (trong
trng hp l tng) tip xc p khng th phun c mt in t no vo vng nhn in (do : I
n
(L) = 0), v
tip xc n khng th phun c mt l trng no vo vng nhn in (do : I
p
(0) = 0). S bo ton dng in
ton phn i hi : I = I
p
(L) = I
n
(0). T suy ra :
)L
p n
(
p n
)L
p n
(
e
1 e
AeG I

= (III.22)
T s gia dng quang in s cp v dng in sau cng u ra, sau khi chy qua vng nhn in c di
L, c vit l :
|
|
|
|
.
|
\
|

= =

)L
p n
(
p n
)L
p n
(
primaire
e
1 e
L
1
AeGL
I
I
I
(III.23)
Biu thc (III.23) cho thy rng thng lng ca dng in chy qua vng nhn in c khuch i so vi
thng lng ca dng in s cp bi mt h s nhn in M xc nh bng:
M =
|
|
|
.
|
\
|

)L (
p n
)L (
p n
p n
e
1 e
L
1
(III.24)

Hnh III.11 : ng biu din h s nhn in M theo i lng
n
L vi cc gi tr khc nhau ca tham s k = p/n (theo [1])
________________________________________________________________________________
247
Trng hp c bit khi m
n
=
p
= , h s nhn in tr thnh : M =
L 1
1

.
T phng trnh ca h s nhn in M ta thy, vi mt gi tr nht nh ca in trng, phi c mt gii hn
bt buc cho di L ca vng nhn in. Thc vy, nu di L tng n mt gi tr lm cho mu s ca phng
trnh trn tr thnh khng, th h s nhn in s tin ti v cc, v trong trng hp , mi to sinh v cng nh
ca dng in s cp cng c th dn n s to thnh dng in lm on mch (court-circuit/ short-circuit) it
quang hc. Dng in ny c th to nn s nh thng lm ph hu tct quang hc nu dng din khng
c hn ch bng cch khc.
p ng ca it quang dng hiu ng nhn in c mt h s khuch i M tng t nh trong trng hp
ca tct quang dn in (vi h s khuch i g), nhng vi mt bn cht vt l c bn hon ton khc.
b) p ng thi gian
Tng t nh trong trng hp ca it quang p-n hay p-i-n cp trn, thi gian p ng ca mt it
quang nhn in ph thuc vo cc hng s thi gian tng ng vi thi gian chuyn ng ca cc ht quang ti
din trong vng hot tnh, vi thi gian sng ca chng trong vng khuch tn v vi hng s thi gian ca mch RC
ca linh kin. S khuch i bn trong cc it quang nhn in, da trn c ch ion ho cc nguyn t bng va
chm ca cc ht ti in vi mng tinh th, cung cp thm mt gii hn khc cho p ng thi gian ca linh kin,
bi l s thit lp h s khuch i ca it khng th xy ra tc thi. i vi cc linh kin m s ion ho ch lin
quan n mt loi ht ti in, th thi gian thit lp h s khuch i bng thi gian di chuyn cu ht ti xuyn
qua vng nhn in. Nhng i vi cc linh kin m trong c hai loi ht ti in cng tham gia vo c ch ion
ho cc nguyn t, th vic thc hin nhiu "l trnh kh hi" l cn thit c th thu c mt h s khuch i
nht nh v s "l trnh kh hi" cn thit ny cng nhiu khi gi tr cc h s
n
v
p
cng gn nhau. Thi gian
thit lp h s khuch i nh vy tng ln. Hng s thi gian ny ng gp vo vic gii hn rng di truyn
qua ca it quang nhn in. Tng t nh trong trng hp ca tct quang dn in, ngi ta thy rng,
trong mt s iu kin vn hnh, tch s (h s khuch i rng di truyn qua) ca it quang nhn in l
hng s ; iu c ngha l ngi ta khng th lm tng h s khuch i m khng lm suy gim di truyn qua
ca linh kin.
III.3.4 it quang Schottky

Hnh III.12 : S vn hnh ca mt it quang Schottky : (a) Vn hnh bng c ch pht x bn trong vt liu ca mt quang
in t khi hp th mt phtn c nng llng h > (m-SC) (ro th Schottky) ; (b) To cp in t-l trng bng kch thch
quang hc trong cht bn dn vi phtn c nng lng h > Eg ; (c) Vi hiu th phn cc ngc ln, it quang Schottky c th
vn hnh nh mt it quang nhn in (theo [4]).
________________________________________________________________________________
248
it quang dng ro th Schottky c cu to t mt b tip gip d th kim loi-bn dn. B tip gip ny lm
xut hin mt phn cch ca hai vt liu mt ro th nng e
ms
bng khong cch gia mc nng lng Fermi
ca kim loi v y vng dn ca cht bn dn: e
ms
= e
s
- e
SC
; e
s
l cng thot ca kim loi v e
SC
l nng
lng cn thit gi in t bn trong cht bn dn. Nguyn l vn hnh ca mt it quang Schottky da trn c
ch pht x bn trong vt liu (mission interne/ internal emission) ca mt quang in t t kim loi sang vng dn
ca cht bn dn khi c kch thch quang hc. Qu trnh ny c trnh by bng s trn hnh III.12.a.
it quang Schottky c cu to t mt mng mng kim loi (hoc mt mng mng hp kim kim loi-bn dn
c tnh cht vt l nh mt kim loi)) c ph trn mt bn dn. Mt chm tia sng ti gm cc phtn c
nng lng h >
ms
c hp th trong mng mng kim loi ; chm tia ny chuyn giao nng lng ca cc
phtn cho cc in t m nng lng di mc Fermi ca kim loi. Cc quang in t do c pht x vo
bn trong vt liu bn dn bng cch vt qua ro th nng e
ms
= e
s
- e
SC
. Cc quang in t ny xm nhp
vo vng dn ca cht bn dn v ng gp vo vic to thnh dng quang in chy qua it quang. Loi pht x
bn trong vt liu ny i hi mt bc sng ct (longueur d'onde de coupure/ cut-off wavelength) bt buc, xc
nh bng:
(eV)
1,24
(m)
ms
c
= .
S hp th cc phtn trong mng mng kim loi l rt thp, bi v trong kim loi cc quang in t b mt
nng lng trn mt on ng di chuyn rt ngn do b va chm: qung ng t do trung bnh L
B
ca cc quang
in t ch t 50 n 100 trong phn ln cc kim loi. H s hp th ca cc kim loi c o bng t l nghch
ca b su hiu ng da (mt vt liu kim loi c in tr sut 10.cm s c mt b dy hiu ng da trong vng
hng ngoi chng 200 v mt h s hp th = 1/ = 5.10
5
cm
-1
). Nh vy, ngi ta s c mt h s chuyn i
phtn thnh quang in t trong kim loi c ln bng [1- exp(-L
B
)]. Ngoi ra, khng phi tt c cc quang in
t c kch thch nng lng vt ro th nng s hon ton xm nhp c vo trong cht bn dn, bi v
phng chuyn ng ca cc quang in t ny khng nht thit l phong xm nhp vo bn trong bn dn. Cc
tnh ton [1] cho thy rng hiu sut lng t ca loi tct quang hc ny l rt thp v c th c vit di
dng sau y: ( )
(
(

2
ms
m F
L
h
h 8E
1
) e (1
B
(III.25)
Trong E
Fm
l mc nng lng Fermi ca kim loi.

Hnh III.13 : (a) Cu trc ca mt it quang Schottky ; (b) ng biu din truyn sut ca mng mng kim loi ( y l
mng mng bng vng) theo dy trong trng hp khng c v c lp chng phn x nhm ci thin truyn sut (theo
[10]).
Mc d c hiu sut lng t rt km, it quang Schottky vn c s dng v nhiu l do:
Trong cng ngh bn dn, ngi ta khng th to ra c vi tt c cc vt liu bn dn hai loi pha tp kiu p
v kiu n. B tip gip Schottky c bit c li trong trng hp ny. Trong c ch vn hnh ca it quang
Schottky, bc sng ct ca tt khng b p t bi rng vng cm ca cht bn dn nhng bi chiu cao
ca ro th nng do tip xc kim loi-bn dn to ra. Nh vy, ngi ta c th s dng mt vt liu bn dn d ch
to lm (substrat) cho linh kin (chng hn nh silicium) v chn la mt kim loi thch hp to ra bc
sng ct mong mun (th d nh cp vt liu bn dn Si loi p v kim loi PtSi cho mt bc sng ct bng 5,6 m).
Trong mt b tip gip Schottky, ngi ta cng c th thc hin c c ch to cp cc ht quang ti in
nh trong trng hp ca it quang dng b tip gip p-n (hnh III.12.b) hay nh trong trng hp ca it quang
nhn in (hnh III.12.c) o cc sng quang ti m bc sng c th xuyn qua c mng mng kim loi
xm nhp vo trong cht bn dn.
p ng thi gian ca cc it quang p-n v p-i-n mt mt b gii hn bi thi gian sng ca cc ht ti in
trong cc vng khuch tn nm bn cnh vng ZCE v mt khc bi hng s thi gian RC do in dung v in tr
ca tct p t. gim thiu hng s thi gian u tin, ngi ta lm gim b rng ca vng khuch tn trn
mt phn ca b tip gip. Nhng vic gim bt b rng ca vng khuch tn ny khng th trnh c vic ko
theo s tng in tr ni tip ca tct, m iu li ko theo vic tng hng s thi gian RC. it quang
Schottky, ngc li, cho php thc hin vic gim thiu ny, v l in tr ca kim loi l rt thp. Hn na, c ch
quang dn in trong it quang Schottky ch lin quan n mt loi ht ti in a s duy nht (l in t) m
linh ng thng kh ln ; do loi tct quang hc ny v bn cht c p thi nhanh hn cc linh kin dng
________________________________________________________________________________
249
ng thi hai loi ht ti in (nh it quang p-n hay p-i-n). Ngi ta thc hin c cc it quang Schottky
m di truyn qua c th t n 100 GHz [1].
III.3.5 it quang MSM (Kim loi-Bn dn-Kim loi)

Hnh III.14 : (a) Cu trc it quang MSM ; (b) Cu hnh cc in cc.
Nhm ci thin hn na di truyn qua ca it quang v to thun li cho vic thc hin tch hp tct
quang hc vo mch tch hp (in t v quang hc), ngi ta xut mt cu hnh khc ca it quang: it
quang MSM. it quang hc ny cng cu to trn c s ca tip gip Schottky ; nhng cu trc ca n l cu trc
phng (planaire/ planar): cc in cc ca it quang MSM c thc hin trn cng mt mt phng (mt phng
ca linh kin nh c trnh by trn hnh III.14.a) trong khi hai in cc ca it quang Schottky bnh thng c
t trn hai mt phng song song khc nhau ( "nh" v "y" ca linh kin nh c trnh by trn hnh
II.13.a). it quang MSM c cu to t mt lp mng cht bn dn, thc hin bng phng php epitaxi
(pitaxie/ epitaxy) trn mt lm bng vt liu bn in mi (semi-isolant/ semi-insulant). Cc in cc kim loi
ca it c sp xp theo hnh cc ngn tay an nhau v c du thay i lun phin (hnh II.14.b). Cc ht quang
ti in c to ra do hp th cc phtn ti trong lp bn dn nm gia cc tip xc kim loi-bn dn ni tip
(vng cm quang/photosensible trn hnh II.14.b) b qut ngay bi in trng kh mnh gia cc in cc v c
tp kt bi cc in cc ny. Linh kin c phn cc sao cho lp bn dn tr thnh hon ton thiu ht in tch t
do nhm tng cng ti a s hp th bn trong cht bn dn v ng thi gim ti thiu p thi ca it quang.
Khong cch gia cc in cc phi nh hn di khuch tn ca cc ht quang ti in to nn hiu sut ln
trong vic tp kt cc ht quang ti in. Nhng nu cc in cc chim nhiu din tch ca linh kin, iu ny c
nguy c lm gim kh mnh nhy ca it quang MSM. Nh vy, kch thc, khong cch v s lng cc in
cc c ti u ho c th thc hin uc cc hiu nng nh mong mun nu trn.

Hnh III.15 : Mt it quang MSM dng cu trc dn sng [10].
it quang MSM c nhiu u im so vi diode quang Schottky. Trc nht, cc it quang MSM do c din tch
in cc v khong cch gia cc in cc rt thp (khong t 1 n vi m), thi gian di chuyn ca cc quang
in t l kh ngn v in dung ca cc it ny l kh thp ; iu dn n vic tng rng di truyn qua
ca linh kin (ngi ta thc hin c cc it quang MSM bng Si c di truyn qua rng n 110 GHz
). Mt
u im khc ca linh kin ny l cu trc phng ca n, c bit thun li cho vic ph kim loi to thnh in
cc. V mt cng ngh ch to, vic ny kh d lm v thun tin cho vic tch hp it quang vi cc linh kin in
t tch phn khc nhm thc hin my thu tn hiu quang dng mch quang in t tch hp (Optoelectronic
Integrated Circuit - OEIC); bi v cng ngh ny l hon ton ging vi cng ngh dng ch to cc transistor
dng hiu ng trng (FET). Hn th na, cu trc MSM cng ng thi to thun li cho vic tch hp linh kin ny
vo cc mch quang hc tch phn (optique intgre/ integrated optic) nhm thc hin cc it quang dng cu trc
dn sng (xem mc III.3.6 sau y). Trn hnh III.15 biu din s mt it quang MSM dng cu trc dn
sng. Nhc im ca it quang MSM l p ng ni ti ca n thp. L do l thu nhp cc phtn trn b mt
cm quang ca linh kin kh thp do din tch cc in cc lm gim thiu b mt cm quang. Ngi ta c th ci

T. Hsiang et al., SPIE Proc. 2022, 6, 1993.

________________________________________________________________________________
250
thin nhc im ny bng cc s dng cc in cc trong sut (it quang MSM bng InGaAs dng cc in cc
bng Cadmium Tin Oxide-CTO hay bng Indium Tin Oxide-ITO).
III.3.6 it quang dng cu trc dn sng
Trong cu trc ca mt it quang thng thng, thu c hiu sut lng t ton phn ti u (xc nh
bng h thc III.19), cn thit phi c W >> 1 v L
p
>> 1, ngha l phi tng b rng ca vng in tch khng
gian v di khuch tn ca cc ht quang ti in. Th nhng, khi lm tng gi tr hai tham s ny, ta khng
trnh khi lm suy gim rng ca di truyn qua do vic tng thi gian chuyn ng trong vng in tch khng
gian v tng thi gian khuch tn ca cc ht quang ti in. Nhng nu by gi ta ghp linh kin ny vo trong
mt cu trc dn sng quang tch hp, ta c th ng thi ci thin c hiu nng ca hiu sut lng t v
rng di truyn qua ca n.

Hnh III.17 : S d ca mt it quang dng cu trc dn sng.
Thc vy, mt it quang c ghp vo mt b dn sng, m cu trc c trnh by trn hnh III.17, cho thy
c nhiu u im. Trc ht, v rng vng hot tnh ca tct c chiu sng theo phng song song ch
khng phi theo phng thng gc vi tit din ca b tip gip, dng quang in u ra ca tct c vit l:
) e 1 ( e J
L -
0 ph

= (III.26)
Trong L l chiu di ca vng hot tnh o theo phng truyn ca sng quang. Trong cu hnh ny, v rng b
rng W ca vng in tch khng gian ZCE v chiu di L ca vng hot tnh l c lp vi nhau, cho nn ngi ta
c th chn la mt cc ht ti in ca vng hot tnh v hiu th phn cc V
app
sao cho b rng W ca vng
in tch khng gian bng vi b dy ca b dn sng ; trong khi , chiu di L c th c thc hin vi mt
di thch hp tho mn iu kin L >> 1. Do m hiu sut lng t c th t gi tr bng 1 vi bt k gi tr
no ca h s hp th , bng cch iu chnh di L, vi iu kin l mt mt do khuch tn v do hp th
ca cc ht ti in l khng ng k.

Hnh III.18 : S d mt it quang dng cu trc dn sng lm bng InGaAs c ghp vo b dn sng lm bng InP [12].
u im th hai ca loi tct ny l rng ca di truyn qua. Thc vy,v rng tct quang hc c
to nn trong mt knh dn sng rt nh, cho d c chiu di L tng i ln, linh kin ny vn c in dung ca
b tip gip rt b ; iu dn n gi tr rt b ca hng s thi gian RC, m hng s ny li l gii hn ch yu
ca di truyn qua. Bi v tt c cc phtn n u c hp th trc tip trong vng in tch khng gian, khng
nhng hiu sut lng t c tng ln m thi gian khuch tn cc ht ti in cng c trit tiu. Kt qu l
rng ca di truyn qua s khng b gii hn bi hng s thi gain khuch tn na. Cc tnh ton [12] cho thy rng
mt it quang dng cu trc dn sng lm bng AlGaInAs-GaInAs, vn hnh bc sng 1,55 m, c th t n
hiu sut lng t bng 0,94 v di truyn qua bng 100 GHz. it quang dng cu trc dn sng cn c mt u
im khc: l kh nng c tch hp trong mt linh kin quang hc tch phn dng thc hin vic o tn hiu
quang, mt chc nng khng th thiu c trong cc linh kin chc nng quang hc. Hnh III.19 trnh by s d
mt it quang dng cu trc dn sng lm bng InGaAs c ghp vi mt b dn sng lm bng InP.

________________________________________________________________________________
251

IV. TING N TRONG CC TCT QUANG HC BN DN
IV.1 Gii thiu tng quan
Kh nng o mt tn hiu quang hc rt yu lun b gii hn bi s hin din ca ting n trong qu trnh
o. Ngi ta nh ngha y thut ng ting n (bruit/ noise) dng ch cc thng ging ngu nhin trong tn
hiu in do tct quang hc cung cp. Ting n ny lun c thm vo tn hiu phi o v do trong mt qu
trnh o, chng ta khng th loi b hon ton ting n, nn mc ch ca ta l tm cch ti a ho t s tn hiu so
vi ting n. Chng ta nhc li y vi khi nim thng k ca ting n trong cc tct quang hc:
Cng sut ca ting n c biu din bng phng sai
2
cc thng ging ca i lng o c (dng quang
in hay quang hiu th), chng hn dng in u ra ca tct quang hc :
| | | | dt i i(t)
T
1
i i(t) i i
2
T
0
2
2 2
B
2
i

= = = = (IV.1)
Trong i l dng in trung bnh v T l thi gian tch phn ca qu trnh o (temps d'intgration/ integration
time) hay l hng s thi gian ca tn hiu in cung cp bi tct.
Cn s bc hai ca phng sai hay cn c gi l lch chun (cart-type/ standard deviation) (hay gi tr
hiu dng- valeur efficace/ root mean square trong trng hp ca mt tn hiu quy tm hay tn hiu m gi tr
trung bnh bng khng) c trng cho ting n ca i lng o :
| | | | dt i i(t)
T
1
i i(t) i
2
T
0
2
B i

= = = (IV.2)
Trng hp c nhiu ngun ting n tn ti cng lc trong qu trnh o tn hiu quang, ting n ton phn
trong qu trnh o c biu th bi

1/2
n
1 j
j
2
B
1/2
n
1 j
j
2
Btotal
1/2
n
1 j
2
j total
i i i
(
(
=
(
(
|
.
|
\
|
= =
(
(
=

= = =
(IV.3)
Vic o ting n trong cc tct quang hc thng c gn lin vi di truyn qua i vi tn hiu in
trong h thng o tn hiu quang hc, khi m thng lng cc phtn ti c bin iu theo thi gian. Trng hp
n gin nht l trng hp m h thng o p ng mt cch ng u vi mi tn s bin iu c gi tr gia f
1

v f
2
; v ngoi khong tn s ny khng c p ng ca h thng (hay p ng bng khng) : di rng truyn qua
nh vy bng f = f
2
f
1
. Trong thc t, p ng c trng ca mt tct quang hc thng ph thuc vo tn
s bin iu. Nu nh p ng ca h thng o tn hiu quang hc thay i mt cch lin tc theo tn s bin iu,
ta c th khi qut ho khi nim di truyn qua di vi tn hiu in theo nh ngha sau y:

=

0
2
max
df
(f)
f (IV.4)
Trong (f) = TF[R(t)] l p ng tn s ca h thng o v R(t) l p ng thi gian ca cng h o, TF l bin
i Fourier.
max
l gi tr cc i ca (f).
Trong mt h thng o m ngi ta tch phn tn hiu in trong mt khong thi gian tch phn T, vi mt
xung vo thi im t = -T/2, p ng thi gian ca h thng c dng nh sau :
(t) =
(
=
< < =
2
T
,
2
T
- t 0,
2
T
t
2
T
,
0

Th p ng tn s ca mt h nh vy c vit :
fT
fT sin
dt e
T
(f)
0
ft j2
T/2
T/2 -
0
(IV.5)
Di truyn qua i vi tn hiu in do bng :
2T
1
df
0 fT
fT sin
df
0
(f)
f
2

2

max

= |
.
|
\
|
=

(IV.6)
H thc ny thit lp quan h gia thi gian tch phn ca tn hiu quang hc v di truyn qua i vi tn hiu
in ca mt h thng o tn hiu quang.
Ngi ta cng c th biu din ting n trong khng gian tn s. Nu qu trnh ngu nhin l qu trnh cgc
(ergodique/ ergodic) v dng (stationnaire/ stationary), k thut bin i Fourrier l thch hp phn tch ting n.
Ngi ta nh ngha ph ca cng sut ting nhay l mt ph ca cng sut ting n (densit spectrale de
puissance du bruit/ spectral density of noise) i lng S
B
(f) : S
B
(f) =

d )e ( C
f j2 -
-
ii
(IV.7)
Trong C
ii
() l hm t tng quan (autocorrlation/ autocorrelation) ca dng in ngu nhin i(t) nh ngha
bng : C
ii
() =

+
T/2
T/2 T
)dt i(t)i(t
T
1
lim (IV.8)
________________________________________________________________________________
252
Ngi ta c th chng minh rng (xem chng hn trong [9]) : =
2
B
(f)df
f
0
S

B
(IV.9)
Trong f l di truyn qua ca qu trnh o tn hiu quang. Biu thc ny thit lp mi quan h gia mt ph
ca cng sut v phng sai ca ting n.
Trong mt qu trnh o tn hiu quang, c tn ti nhiu ngun ting n khc nhau :
Ting n phtn : l ngun c bn nht ca cc ting n t thn (bruits inhrents/ inherent noise) trong
mt qu trnh o tn hiu quang. Ting n ny c xem l c bn v n khng xut x t cc sai hng hay
thiu st ca tct quang hc. Ngun gc ca loi ting n ny l trong cc thng ging ngu nhin ca
thi gian ti (date doccurrence) ca cc phtn trong vng hot tnh ca tct. Ting n ny c cng
thm vo tn hiu quang hc cn o (hnh IV.1.a et b). Ting n phtn nh vy n t hai ngun :
- Ting n do thng ging ca cc phtn trong tn hiu quang ti.
- Ting n do thng ging ca cc phtn trong bc x phng (rayonnement de fond/ background
radiation), l bc x c thm vo tn hiu quang ti.
Ting n ca cc ht quang in t : Ngun gc ca loi ting n ny l trong cc thng ging ngu nhin
ca dng in to cp bn trong cht bn dn, trong qu trnh o tn hiu quang. Thc th, vic to cp in
t l trng (bng kch thch quang hay nhit) khng th to ra c mt dng in hon ton khng i bi
v bn cht cc ht ti in l gin on v bi v thi im m chng c sinh ra l ngu nhin. Cc thng
ging trong dng in bt ngun t thng ging ca mt cc ht ti in trong cht bn dn. Ting n
ny c gi l ting n do s to cp v ti hp.
Ting n ca khuch i hay ting n do nhn in : Loi ting n ny tn ti trong tct quang hc c
qu trnh to ra khuch i ni ti, nh trong it quang dng hiu ng nhn in. Qu trnh khuch i
dng quang in do hiu ng ion ho bng va chm cc nguyn t l mt qu trnh ngu nhin. Qu trnh
ny lm cng thm kh nhiu ting n cho dng quang in thu c.
Ting n ca mch in: chnh l ting n nhit hay ting n Johnson (hay cn gi l ting n Nyquist) c
ngun gc t chuyn ng nhit ca cc ht ti in trong mt in tr. Ting n ny lin quan n cc
thng ging ngu nhin ca dng in do chuyn ng nhit trong tct.
Ting n 1/f : C ch vn hnh ca loi ting n ny khng c hiu bit r, d vy ting n ny tn ti
trong mi qu trnh o tn hiu quang. N c gi l ting n 1/f bi v cng sut ca ting n ny gim
nhanh theo tn s f, tn s m tn hiu c o.

Hnh IV.1 : Nhiu ngun ting n khc nhau ca qu trnh o tn hiu quang: (a) trong mt it quang (khng c khuch i) v
(b) trong mt tct quang hc c khuch i (tct quang dn in hay tct quang nhn in) (theo [9])

Hnh IV.1.a biu din trng hp ca mt tct quang hc khng c khuch i (it quang). Tn hiu quang
hc u vo c ting n t thn : ting n phtn. Hiu ng phtnc ca tct lm chuyn i cc phtn ti
thnh cc ht quang ti in. Trong qu trnh ny, tn hiu quang trung bnh b gim theo h s nhn (hiu sut
lng t), ting n, v phn mnh cng b gim nhng t hn tn hiu ti. Tn hiu c o, ngoi ting n ca cc
ht quang ti in, cn b cng thm ting n ca mch in (bao gm ting n nhit v ting n 1/f). Nu trong
qu trnh o c tn ti mt khuch i (h s khuch i g trong tct quang dn in hay h s nhn in M
trong it quang nhn in), c tn hiu quang ti ln ting n u c khuch i nh trnh by trn hnh IV.1.b.
Hn th na, khuch i cn cng thm vo tn hiu quang ting n ring ca n : l ting n do khuch i
hay ting n do nhn in. Ting n ca mch in c a vo im thu hoch ca dng in ra.
Cn lu rng mch in t t sau tct quang hc (b tch phn, b bin i dng in-hiu th) cn lm
cng thm ting n ring ca mch in t ny vo tn hiu cui cng. l ting n nhit, ting n do s to cp
v ti hp (c ngun gc chuyn ng nhit hay in), ting n 1/f. Hiu nng ca mt qu trnh o tn hiu quang
________________________________________________________________________________
253
c c trng bng t s tn hiu trn ting n (S/B rapport signal bruit/ signal to noise ratio) c nh ngha
bng t s:
B B
v
v
i
i
B
S
= = (IV.10)
Ch rng cn c mt cch biu din khc t s tn hiu trn ting n: t s tn hiu trn ting n theo cng
sut c nh nga bng t s gia tn hiu o bng cng sut v cng sut ca ting n, ngha l :

2
B
2
2
B
2
2
2
P
v
v
i
i

i

B
S
= =
= |
.
|
\
|
(IV.11)
Ngi ta cng biu din t s tn hiu trn ting n bng dcibel (dB) :

P
B
S
10log )
B
S
20log( (dB)
Bruit
Signal
|
.
|
\
|
= = (IV.12)
IV.2 Cc ngun ting n
IV.2.1 Ting n phtn
Ting n phtn l do cc thng ging ngu nhin t thn ca cc phtn cha trong thng lng ti. Gi
P
inc
l cng sut trung bnh ca tn hiu quang ti, th thng lng trung bnh cc phtn c vit l = P
inc
/(h)
(photons/s). S n phtn ti trong qung thi gian tch phn T b thng ging theo mt quy lut xc sut v quy lut
ny ph thuc vo bn cht vt l ca ngun bc x. S phtn ti trung bnh bng : T n = . i vi cc bc x
pht ra t mt ngun laser hay mt ngun bc x nhit m rng ca vch ph bc x l rt ln so vi 1/T, s
phn b xc sut ca s phtn ti tun theo nh lut Poisson :
0,1,2,... n ,
n!
) n exp( n
p(n)
n
=
= (IV.13)
p(n) l xc sut o c n phtn. Trong qu trnh ny, gia cc phtn ti khng c tn ti mt tng quan thi
gian no. Chng ta lu rng nh lut phn b xc sut ny khng phi l nh lut phn b duy nht ca thng
lng phtn ti. Phng sai ca phn b ny l : n
2
n
= (IV.14)
t suy ra lch chun hay l ting n phtn :
n
= n (IV.15)
Nh vy t s tn hiu trn ting n ca thng lng phtn ti l : n
B
S
= (IV.16)
Trong qu trnh o tn hiu quang, cc phtn ti c chuyn i thnh cc ht quang ti in bng hiu ng
phtnic vi hiu sut lng t . Thng lng trung bnh cc phton ti (photons/s) do to ra thng lung
trung bnh cc ht quang ti din bng (photolectrons/s). S m cc ht quang ti in o c trong qung
thi gian tch phn T l mt s ngu nhin m gi tr trung bnh ca n bng : n m = .
Nh vy cc thng ging ngu nhin trong thng lng phtn ti c chuyn i thnh cc thng ging ngu
nhin ca cc ht quang ti in bng c ch o tn hiu quang ca tct quang hc. Nu s phn b xc sut
cc phtn ti tun theo nh lut Poisson, th s phn b xc sut ca cc ht quang ti in cng tun theo nh
lut ny.
Do vy m phng sai ca phn b xc sut cc ht quang ti in c vit : n m
2
m
= =
V ting n cc ht quang ti in l : n
m
= (IV.17)

Hnh IV.2 : Dng quang in, do mt tct quang hc cung cp, c hnh thnh bi s chng cht cc xung in m mi xung
tng ng vi mt phtn ti c o. trn s ny, mi xung c trnh by bng mt dng hm m, nhng trong thc t,
xung in c th c dng bt k (daprs [9]).

Mi ht quang ti in to ra trong mch ngoi mt xung in c rng v mt in tch q = e ; in tch ny
chnh bng din tch o c di ng biu din ca xung in (hnh IV.2). Nh vy mt thng lng phtn ti
to ra mt thng lng cc xung in mch ngoi. V tng hp cc xung in ny hnh thnh dng in tc thi
mch ngoi. Trong trng hp m phn b xc sut cc phtn ti tun theo nh lut Poisson th ting n ca dng
________________________________________________________________________________
254
quang in ny c gi l ting n Schottky (cn gi l ting n "lo xo" - bruit de grenaille / shot noise )
, v
cng thc tnh ton loi ting n ny c Schottky ngh ln u tin (xem ch thch cui trang bn cnh).
Dng quang in trung bnh trong trng hp ny c vit :
T
e m
i = . Dng quang in tc thi l :
T
me
i = .
Phng sai ca dng quang in do l: ( ) ( )
2
m
2
2
2
2
2
2
2
2
B
2
B

T
e
m - m
T
e
T
e m
-
T
me
i - i i = =
|
|
.
|
\
|
= = = .
Th m chng ta c : m
2
m
= . Nh vy
: f i 2e
T
i e
T
m e
i
2
2
2
B
= = = (IV.18)
Ting n Schottky ca dng quang in c xc nh bi : f i 2e i
B
= (IV.19)
IV.2.2 Ting n do s to cp v ti hp
Ting n do to cp v ti hp c ngun gc trong s thng ging ngu nhin ca hin tng to cp in
t-l trng (bng kch thch quang hc hay do chuyn ng nhit) v hin tng ti hp, ngha l trong s thng
ging ca mt cc ht ti in t do trong cht bn dn. cho s thng ging mt ht ti in ny c th
to ra s thng ging ca dng quang in, vn tc trung bnh ca cc ht ti in t do cn phi khc khng. Nh
vy, ting n do to cp v ti hp ch tn ti khi m dng in trung bnh trong cht bn dn khc khng. iu ny
i hi phi c hin din ca mt in trng trong cht bn dn (tct quang dn in, it quang di phn
cc ngc).
Cc tnh ton ca loi ting n ny [1] ch ra rng nu thi gian sng trung bnh ca cc ht quang ti in
l , h s khuch i ca tct quang hc l g (nh h s khuch i nh ngha trong trng hp quang dn
in g =
t
; l thi gian sng ca cc ht quang ti inv

t
l thi gian di chuyn cc ht quang ti in trong
in trng), th cng sut ting n do to cp v ti hp c biu th bi : f i 2eg
2
2
2
B
= (IV.20)
Nh vy ting n do to cp v ti hp l : f i 2eg i
2
2
B
= (IV.21)
IV.2.3 Ting n do nhn in

Hnh IV.3 : H s nhn in trong qu trnh nhn in do hiu ng ion ho bi va chm cng l mt i lng ngu
nhin. S thng ging ngu nhin ny l ngun gc ca ting n do hiu ng nhn in (theo [9])
Trong cc it quang bn dn dng hiu ng nhn in, dng in to cp c khuch i bi hiu ng ion
ho cc nguyn t bng va chm. Dng in ny cng to ra ting n v hiu ng khuch i trong it quang lm
nhn ln ting n ny. Th nhng qu trnh nhn in bng c ch ion ho bi va chm cc nguyn t, bn thn n
cng l mt qu trnh ngu nhin (hnh IV.3) v qu trnh ny lm cng thm rt nhiu ting n cho dng quang

Nhc li rng ting n phtn khng nht thit ng nht vi ting n Schottky (ca dng quang in trong trng hp trn), bi
v s phn b xc sut ca thng lng phtn ti khng nht thit ch tun theo nh lut Poisson (trong nhng trng hp khc,
s phn b ny c th tun theo nh lut Bose-Einstein, hay ngay c mt nh lut phn b kt hp gia nh lut Poisson v nh
lut Gauss). Hn na, ting n Schottky khng phi l thuc tnh c quyn ca cc ht quang ti in, ting n ny cng tn ti
i vi c ch bc x nhit cc in t khi m s phn b cc in t nng ny tun theo nh lut Poisson.
Cng thc ny c ngh ln u tin bi Schottky [W. Schottky, Ann. Phys. (Leipzig) 57, 541, 1918
________________________________________________________________________________
255
in cung cp bi it quang nhn in. Tnh ton ca loi ting n ny [1] cho thy rng cng sut ting n do
nhn in c vit: f
M
LM) LM)(1 (1
M i 2e i
p n 2
B
+ +
= (IV.22)
Trong M l h s thc in t hay h s nhn in, L l di ca vng nhn in,
n
l h s nhn in ca
in t v
p
l h s nhn in ca l trng. Ta c th vit : f MF(M) i 2e i
2
B
= (IV.23)
vi
M
LM) LM)(1 (1
F(M)
p n
+ +
= (IV.24)
i lng F(M) c gi l h s ting n do nhn in biu din ting n cng thm do hiu ng nhn in.
Ting n do hiu ng nhn in do bng: f MF(M) i 2e f
M
LM) LM)(1 (1
M i 2e i
p n
B
=
+ +
= (IV.25)
Nh vy, ting n do nhn in c hp thnh t ting n do to cp 2e i f c khuch i bi h s nhn
in M (h s ny gi vai tr nh h s khuch i g trong trng hp quang dn in) v bi h s ting n do
nhn in F(M).
IV.2.4 Ting n nhit
Ting n nhit hay ting n Johnson
(hay cn gi l ting n Nyquist

**
) l do thng ging ngu nhin trong
chuyn ng nhit ca c ht ti in trong cc in tr ca mch in nhit T. Chuyn ng nhit ca cc ht
ti in to ra mt dng in ngu nhin trong vt liu, ngay c trong trng hp khng c in trng ngoi. Nh
vy, dng in chuyn ng nhit trong mt in tr R l mt dng din ngu nhin m gi tr trung bnh bng
khng : 0 i(t) = . Phng sai ca dng in
2 2 2
B
i ) i (i = = tng theo nhit T. Ta c th tnh ting n nhit to
ra bi mt in tr R nhit T, bng cch tnh mt ph ca cng sut ting n nhit S
B
(f).
Cng sut in tiu th bi mt dng in i(t) chy qua in tr R l : (f)Rdf
f
0
S R R i
B
2
B
2

= = . Nh vy, s
hng S
B
(f) R biu din mt ph ca cng sut in tiu th (trn mt n v tn s - Hz) bi dng in ngu
nhin ca ting n chy qua in tr R. Ta c th xem rng cng sut in tiu th bi ting n nhit bng vi cng
sut bc x mt chiu ca mt vt en (corps noir/ black-body) trong trng thi cn bng nhit nhit T. Cho d
s phn b ca vn tc chuyn ng nhit cc ht ti in trong in tr R l ngu nhin v ng hng, ch c cc
chuyn ng theo phng ca dng in trong mch mi ng gp vo ting n nhit. V l do m ta c th xem
bc x ca vt en l bc x mt chiu. Tnh ton thng k cho bc x mt chiu ca vt en [10] cho bit mt
ph cng sut (trn mt n v tn s) ca bc x l:
1 T) exp(hf/k
hf
4
df
dP
B

= ; trong h l hng s Planck v k
B
l
hng s Boltzmann.
Nh vy ta c : S
B
(f) =
1 T) exp(hf/k
hf
R
4
B

(IV.26)
Phng sai ca ting n nhit bng : (f)df
f
0
S
B
2
B

=
Trong vng ph m tn s f << k
B
T/h ( l vng ph tn s m tt c cc tct quang hc vn hnh, v l ta c
k
B
T/h = 6,25 THz nhit thng), ta c: exp(hf/k
B
T) 1 + hf/k
B
T, iu ny dn n S
B
(f)
R
T 4k
B
.
T ta suy ra :
R
f T 4k
i
B 2
B
2
B

= = (IV.27)
Nh vy ting n nhit trong in tr R bng vi :
R
f T 4k
i
B
B

= (IV.28)
IV.2.5 Ting n 1/f
C tn ti mt ngun ting n m c ch khng c hiu bit r. Ting n ny c c trng bng s
gim bin ca phng sai theo mt quy lut gn ng 1/f, vi f l tn s ting n c o. V l do m
loi ting n ny c gi tn l ting n 1/f. Biu thc thc nghim ca phng sai ting n ny c vit :

=
f
f Bi
i
DC 2
B
(IV.29)
Trong B mt hng s ph thuc vo loi tct quang hc c s dng ; i
DC
l dng in mt chiu chy qua
tct quang hc (ngha l dng in c bin iu (dng in AC) khng ng gp vo ting n 1/f) ; : c gi
tr tiu biu l 2, nhng gi tr o c thay i trong qung 1,5 - 4 ; : gi tr tiu biu l 1, nhng gi tr o c
thay i trong qung 0,8 1,5.

Hin tng ny c tm thy bng thc nghim ln u tin bi Johnson [J.B. Johnson, Phys. Rev., 32, 110, 1928]
**
Tnh ton l thuyt ca ting n ny c cng b ln u tin bi Nyquist [H. Nyquist, Phys. Rev., 32, 110, 1928]
________________________________________________________________________________
256
Bi v thnh phn c bin iu ca dng quang in khng ng gp vo loi ting n 1/f, ta c th loi b
ting n ny trong qu trnh o bng cch lm bin iu tn hiu quang ti v lc b thnh phn khng i (hay
dng in mt chiu), chng hn bng php d ng b (dtection synchrone/ lock-in amplification). Nh vy ting
n 1/f c vit l :
=
f
f Bi
i
DC
B
(IV.30)

Hnh IV.4 : ng biu din ph ca cng sut ting n trong tct quang hc bn dn.

Ph ca cng sut ting n trong tct quang hc bn dn (ting n do to cp v ti hp, ting n nhit v
ting n 1/f) c biu din trn hnh IV.4. Trong ng biu din ph ny ta thy rng ting n do to cp v ti
hp cng nh ting n nhit l cc ting n trng (bruits blancs/ white noises).
IV.3 nhy c trng
Mi tct quang hc u to ra ting n v ting n ny cng thm vo tn hiu cn o. Do vy, mc ch ca
chng ta khng phi l ch i tm ring tn hiu (dng quang in i
S
chng hn) m l tch tn hiu cn o ra khi
ting n (dng in ting n i
B
chng hn). o mt tn hiu, nh vy, l tm cch thu c mt t s tn hiu trn
ting n
i B
S
i
i
i
B
S
= = ln nht c th thu c.
IV.3.1 nhy c trng ca tct quang hc
Trong mt qu trnh o tn hiu quang ni chung, mt tn hiu i
S
(o bng A) l tch s ca p ng (o
bng A/W) vi cng sut ca tn hiu quang P
inc
(o bng W, P
inc
= h) : i
S
= P
inc
= h. T s tn hiu trn
ting n c vit l :
B
inc
i
P
B
S
= (IV.31)
Cng sut ti thiu o c ca tn hiu quang ti (puissance incidente minimale dtectable) l cng sut to ra
t s tn hiu trn ting n bng 1. chnh l cng sut tng ng ca ting n hay NEP (vit tt ca ch Noise
Equivalent Power) c xc nh bi : NEP =
B
i
(IV.32)
Vi cc tct quang hc bn dn, dng in ting n i
B
c vit di dng: f KeAJ i
d B
= (IV.33)
Trong K l mt hng s (K = 2 trong trng hp cc tct quang hc dng b tip gip v K = 4 trong trng
hp tct quang dn in vi h s khuch i g). A l din tch ca tct v J
d
l mt dng in trung bnh
chy qua tct. f l di truyn qua ca tct.
Nh vy ta c : NEP =
f KeAJ
d
(IV.34)
Biu thc (IV.34) cho thy rng hiu nng ca tct quang hc biu th bng i lng NEP ph thuc vo di
truyn qua cng nh din tch b mt cm quang ca tct. Chng ta khng th so snh cc loi tct quang
hc c di truyn qua v din tch b mt cm quang khc nhau. Do , ngi ta nh ngha mt i lng mi,
phn nh tnh t thn ca tct, v khng ph thuc vo di truyn qua cng nh din tch b mt cm quang
ca linh kin. i lng ny cho php so snh cc tct quang hc ch to bng cc cng ngh khc nhau. Ngi
ta nh ngha nhy c trng D* l i lng sau y :
D* =
NEP
f A
(mesure en cm.Hz
1/2
.W
-1
) (IV.35)
Hay l : D* = |
.
|
\
|
=
B
S
P
f A
KeJ inc
d
(IV.36)
Lu rng nhy c trng D* l mt hm s ca bc sng : D* =D*(), bi v p ng ph ca tct
quang hc l mt hm s ca bc sng (= ()).

________________________________________________________________________________
257
IV.3.2 nhy c trng ca dtct quang dn in
Cng sut ting n ton phn do tct to ra l tng s ca cc cng sut ting n khc nhau:

2
1/f
2
GR
2
R
2
B
i i i i + + = (IV.37)
Trong i
R
biu th ting n nhit ; i
GR
biu th ting n do to cp v ti hp ; i
1/f
l ting n 1/f.
- Ting n nhit : Nu R
d
l in tr, T
d
l nhit v f l di truyn qua ca tct quang hc, ting n nhit
c vit :
d
B 2
R
R
f T 4k
i

= . Nu tct quang dn in c phn cc theo s mch in trnh by trn hnh
III.2, vi in tr ph ti R
L
nhit T
L
; Ting n nhit tng cng ca h thng s l :

|
|
.
|
\
|
+ =
L
L
d
d
B
2
total R
R
T
R
T
f 4k i (IV.38)
- Ting n do to cp v ti hp : Vi tct quang dn in, ngi ta tnh c [1] rng ting n ny bng:
=
2
GR
i 4eg i f ; trong i l dng in trung bnh chy qua tct bao gm dng quang in i
ph
v dng in
trong ti i
O
. Ta c :
+
=
h
) P ge(P
i
F S
ph
; trong P
S
l cng sut quang ca tn hiu ti v P
F
l cng sut quang ca
bc x phng. V :
d
d
O
R
V
i = ; trong V
d
l hiu th phn cc v R
d
l in tr ca tct quang dn in trong
ti. Nh vy, ting n do to cp v ti hp c vit l:
d
d F S
2 2
2
GR
R
f 4egV
h
f ) P (P e g 4
i +
+
= (IV.39)
- Ting n 1/f : Ting n ny ch lin h n dng in khng i v n s bin mt tn s cao:
f
f Bi
i
2
DC 2
1/f
= ;
trong B l mt hng s t l ; i
DC
l thnh phn khng i ca dng in chy qua tct quang dn in, f l
tn s bin iu ca thng lng quang ti. Ting n 1/f khng phi l gii hn c bn ca tct quang hc.
Trong qu trnh o tn hiu quang, ta lun c th loi b loi ting n ny, chng hn bng ccch dng php d
ng b (dtection synchrone/ lock-in amplification).
- Ting n ton phn ca tct quang dn in c vit l :

f
f Bi
R
f 4egV
h
f ) P (P e g 4
R
f T 4k
i
2
DC
d
d F S
2 2
d
B 2
B
+ +
+
+
= (IV.40)
Nu ting n 1/f l khng ng k, th ta c: f
h
) P (P e g 4
gV
e
T k
R
4e
i
F S
2 2
d
B
d
2
B
(
(
+
+ |
.
|
\
|
+ =

Hnh IV.6 : nhy c trng D* ca vi tct quang dn in ; trn mi ng biu din D*() c ghi nhit
vn hnh ca tct, nhy c trng c o nhit ny (theo [6]).

________________________________________________________________________________
258
Ngay khi m hiu th phn cc ln hn gi tr k
B
T/e (khong 26 mV nhit thng), ta c th vit :
f
h
) P (P e g 4
R
4egV
i
F S
2 2
d
d 2
B
(
(
+
+
Nh vy ting n trong tct quang dn in l : f i eg 2 f
h
) P (P e g
R
egV
2 i
F S
2 2
d
d
B
=
(
(
+
+ = (IV.41)
T s tn hiu trn ting n c vit l:
f i 2h
eg P

f i eg 2
h
egP

f i eg 2
P
B
S
S
S
S
= (IV.42)
Nh vy, cng sut tng ng ca ting n l : NEP =
f i eg 2

Ta suy ra nhy c trng ca tctt quang dn in : D*() =
J 2h
eg

egJ 2
NEP
f A
(IV.43)
Trong J l dng in trung bnh chy gia hai in cc chia cho din tch cm quang A ca tct quang dn
in hay ni cch khc l mt dng in trung bnh chy gia hai in cc chun ho trn din tch cm quang A
ca tct quang dn in (nhc li l phng ca dng in i thng gc vi phng truyn ca thng lng
phtn ti trong mt dtct quang dn in).
IV.3.3 nhy c trng ca it quang p-i-n
Cng sut ting n ton phn do tct to ra c vit :
2
1/f
2
G
2
R
2
B
i i i i + + = ; trong i
R
l ting n nhit ; i
G
l
ting n do to cp v khng c ti hp ; i
1/f
l ting n 1/f.
- Ting n nhit v ting n 1/f c cng biu thc nh trong trng hp tct quang dn in trn.
- Ting n do to cp m khng c ti hp tng ng vi trng hp ca it quang p-i-n c vit [1] l : = i
2
G

2e i f ; trong i l dng in trung bnh chy qua it quang, f l di truyn qua ca tct. Dng in trung
bnh bao gm dng quang in v dng in trong ti. Ch rng s ng gp vo ting n ca dng in trong ti
l hon ton c lp vi dng gp ca dng quang in.
- V phn ng gp vo ting n do to cp ca dng in trong ti, ta c s ng gp tng cng ca 4 dng in
to thnh dng in trong ti ca it quang. Mi dng in ny gp thm phn ting n ca n vo ting n ca
dng in trong ti. Do , ta c : f ) i i i 2e(i i
pdiff gp ndiff gn
2
Gobsc
+ + + = ; trong i
gn
v i
ndiff
ln lt l dng in to
cp v dng in khuch tn ca in t ; i
gp
v i
pdiff
ln lt l dng in to cp v dng in khuch tn ca l
trng. Dng biu thc xc nh dng in bo ho i
sat
ca it quang (xem mc III.3.1, tnh ton dng in trong
ti), ta thu c : f 1) (e 2ei i
T /k eV
sat
2
Gobsc
B app
+ = (IV.44)
Trong V
app
l hiu th phn cc ca it quang. Mt dng in bo ho c xc nh bi (II.15). V phn
ng gp ca dng quang in vo ting n c vit : f
h
P P
2
2e f
h
eP
2e i
F S inc 2
Gph
|
.
|
\
|
+
= |
.
|
\
|
= ; trong l hiu
sut lng t ca tct quang hc, P
S
l cng sut quang ca tn hiu ti, P
F
l cng sut quang ca bc x
phng. Ting n tng cng do to cp c vit l :
f
h
) P e(P
1) (e i 2e i i i
F S
T /k eV
sat
2
Gph
2
Gobsc
2
G
B app
+
+ + = + = (IV.45)
Kt qu ny cho thy rng ting n do to cp s c gim nu ta phn cc ngc it quang vi hiu th cao,
v rng phn ng gp ca dng in trong ti s b hn ch bi s tng cao ro th nng ca b tip gip. Tuy
nhin, trong thc t, s ci thin ny kh c kh nng c thc hin, bi v trong cc it quang c s dng, khi
tng hiu th phn cc ngc s lm xut hin ting n ph khc. Loi ting n ny c gi nh l ting n 1/f
to ra bi dng in r trong it quang. Nh vy, ting n ton phn trong it quang l :

2
1
2
DC F S
T /k eV
sat
B
B
f
f Bi
f
h
) P e(P
1) (e i 2e
R
f T 4k
i
B app
|
|
.
|
\
|
+
(
+
+ + +
= (IV.46)
T s tn hiu trn ting n c vit :

2
1
2
DC F S
T /k eV
sat
B
S
f
f Bi
f
h
) P e(P
1) (e i 2e
R
f T 4k
h
eP

B
S
B app
|
|
.
|
\
|
+
(
+
+ + +
= (IV.47)
________________________________________________________________________________
259
Nu ting n 1/f l khng ng k, th t s tn hiu trn ting n tr thnh:

2
1
F S
T /k eV
sat
B
S
f
h
) P e(P
1) (e i 2e
R
f T 4k
h
eP
B
S
B app
|
|
.
|
\
|
+
+ + +
= (IV.48)
Cng sut tng ng ca ting n (NEP) c biu din di dng :
NEP =
+
+ + +
f
h
) P e(P
1) (e i 2e
R
f T 4k
F S
T /k eV
sat
B B app

T ta suy ra nhy c trng ca it quang:
D*() =

hc
) P (P e
1) (e i 2e
R
T 4k
h
A e
F S
T /k eV
sat
B B app
(
+
+ + +
(IV.49)
Trong A l din tch b mt cm quang ca tct.

Hnh IV.7 : nhy c trng D* ca vi tct quang hc dng b tip gip;
nhit vn hnh ca tct c ghi cnh bn ng biu din (d'aprs [6])
Nu ting n nhit l khng ng k so vi ting n to cp, ta c :
D*() =
|
.
|
\
| +
+ +
hc
) E E ( e
1) (e J 2 h
e
F S
T /k eV
sat
B app

Trong
A
P
E
S
S
= et
A
P
E
F
S
= ln lt l ri quang hc trn b mt cm quang ca tct (gi thit rng
phng chiu sng l thng gc vi b mt ca tct) ca tn hiu quang ti v ca bc x phng.

Nu ta vit biu thc ca J
sat
vo biu thc ca D*, ta c :
D*() =
|
.
|
\
| +
+ +
hc
) E (E
1) (e Ke 2 h
F S
T /k eV
T /k
g
E
B app
B
(IV.50)
________________________________________________________________________________
260
Trong
D
V C
p
p
N
N N
D
K = . Khi hiu th phn cc bng khng (V
app
= 0), ta c :
D*() =
|
.
|
\
| +
+
hc
) E (E
2Ke 2 h
F S
T /k
g
E
B
(IV.51)
Biu thc ny cho thy rng nhy c trng ca it quang bin i nghch vi hm m ca (-E
g
/k
B
T), iu
cho thy li ch ca vic vn hnh it quang nhit thp.
IV.3.4 nhy c trng ca it quang dng hiu ng nhn in
Trong it quang dng hiu ng nhn in, ta c ng gp ca tt c cc loi ting n nh trong trng hp
it quang p-i-n ; nhng y ting n do to cp phi c thay bng biu thc (IV.25):
f F M ) i i 2e( f MF i 2e i
2
obs ph
2
G
+ = =
Nh vy ta c: f F M
h
) P e(P
1) (e i 2e f F M ) i i 2e( i
2 F S
T /k eV
sat
2
obs ph
2
G
B app
+
+ + = + = .
Ting n ton phn trong trng hp ny c vit :

2
1
2
DC 2 F S
T /k eV
sat
B
B
f
f Bi
f F M
h
) P e(P
1) (e i 2e
R
f T 4k
i
B app
|
|
.
|
\
|
+
(
+
+ + +
= (IV.52)
V t s tn hiu trn ting n l:

2
1
2
DC 2 F S
T /k eV
sat
B
S
f
f Bi
f F M
h
) P e(P
1) (e i 2e
R
f T 4k
h
M eP

B
S
B app
|
|
.
|
\
|
+
(
+
+ + +
= (IV.53)
Nu ting n 1/f l khng ng k, t s tn hiu trn ting n tr thnh :

2
1
2 F S
T /k eV
sat
B
S
f F M
h
) P e(P
1) (e i 2e
R
f T 4k
h
M eP

B
S
B app
|
|
.
|
\
|
+
+ + +
= (IV.54)

Hnh IV.4 : Bin i ca t s tn hiu trn ting n (S/B) theo thng lng phtn ti ca it
quang v it quang nhn in c din tch cm quang 1mm
2
v di truyn qua 50Hz (theo [1])

Hnh IV.4 biu din bin i ca t s tn hiu trn ting n ca mt it quang v ca mt it quang nhn in
c cng din tch cm quang v cng di truyn qua. Ta nhn thy rng, trong iu kin chiu sng yu ( < 10
12

photons/cm
2
), it quang nhn in cho mt t s tn hiu trn ting n tt hn it quang, trong khi vi iu
kin chiu sng ln hn gi tr thng lng ny, ting n do nhn in trong it quang nhn in tr thnh quan
trng, lm cho t s tn hiu trn ting n ca it quang nhn in km hn t s ca it quang.
Cng sut tng ng ca ting n (NEP), do , c vit:
________________________________________________________________________________
261
NEP = f F M
h
) P e(P
1) (e i 2e
R
f T 4k
Me
h
2 F S
T /k eV
sat
B B app
+
+ + +
.
T ta suy ra nhy c trng ca it quang nhn in:
D*() =
F M
hc
) P (P e
1) (e i 2e
R
T 4k
h
A eM
2 F S
T /k eV
sat
B B app
(
+
+ + +
(IV.54)
Trong A l din tch b mt cm quang ca tct. Nu ting n nhit l rt nh so vi ting n to cp, ta c :
D*() =
F
hc
) E (E e
1) (e J 2e h
e
F
hc
) P (P e
1) (e i 2e h
A e
F S
T /k eV
sat
F S
T /k eV
sat
B app B app
(
+
+ +
=
(
+
+ +
(IV.55)

IV.3.5 o tn hiu quang hc bng php o trc tip vi cc it quang
Trong cc chng trnh by trn y chng ta cp n qu trnh o tn hiu quang bng cc tct
quang hc m tn hiu in u ra (dng quang in hay quang hiu th), trong trng hp khng b bo ho
chiu sng, t l tuyn tnh vi cng sut quang (hay cng sng) ca tn hiu quang ti. Php o tn hiu
quang ny c gi l php o trc tip. Thng thng, trong mt mch in dng cho my thu tn hiu quang hc,
ngi ta dng mt mch in t ph thm khuch i tn hiu in cung cp bi tct quang hc. Mch in
t khuch i tn hiu ny cng thm vo tn hiu cn o ting n ring ca mch. Nhm c trng cho hiu ng
ting n thm vo ca mch in t khuch i biu din theo cng sut ting n, ngi ta nh ngha h s ting
n ca mch in F
B
nh sau :
F
B
= (Cng sut ting n u ra ca mch in)/(Cng sut ting n u vo ca mch H s khuch i
theo cng sut) (IV.55)
Xt chng hn trng hp ca ting n nhit. Nu h s khuch i theo cng sut ca mch khuch i l G
amp
,
mt ting n nhit c cng sut u vo l
R
f T 4k
i
B 2
B

= , vi trng hp mt mch khuch i l tng khng
ting n, s cho u ra mt cng sut ting n bng:
R
f TG 4k
i
amp B 2
BGi

= . Th nhng trong thc t, mch khuch
i thm mt h s ting n ca mch in F
B
vo ting n chung ; cng sut ting n thc s u ra s l :
R
f F TG 4k
i
B amp B 2
BG

= .
a) o tn hiu quang bng php o trc tip vi it quang p-i-n:
T s tn hiu trn ting n trong php o trc tip vi it quang p-i-n c xc nh bng h thc (IV.47). Khi
m ting n nhit v dng in trong ti l khng ng k so vi ting n Schottky v khi bc x phng l khng
ng k, ta c t s tn hiu trn ting n t mc gii hn ca ting n Schottky bng:

f h
P
2
1
f 4h
P
B
S
S S

= (IV.56)
Khi khng th b qua ting n 1/f, loi b loi ting n ny, ngi ta thng s dng php d ng b
(dtection synchrone/ lock-in amplification), bng cch bin iu bin ca tn hiu quang ti. Cng sut quang
ca tn hiu trong trng hp ny c vit : P = P
0
(1+ msin
m
t) ; trong m l tham s bin iu bin . Dng
quang in u ra ca it quang c vit: t) msin (1 i i(t)
m S
+ = vi phn bin i theo thi gian ca dng
quang in l t msin i
m S
. T s tn hiu trn ting n theo cng sut bng :

( )
( ) f
h
) P e(P
1) (e i 2eR T 4k h 2
m eP R
B
S
F S
T /k eV
sat B
2
2
S
P B app
|
|
.
|
\
|
(
+
+ + +
= |
.
|
\
|

Hay l :
2
1
F S
T /k eV
sat
B
S
f
h
) P e(P
1) (e i 2e
R
f T 4k
2 h
m eP
B
S
B app
|
|
.
|
\
|
+
+ + +
=
Th d: Trong mt knh truyn thng quang hc, ngi ta s dng mt it quang bng InGaAs m hiu sut lng t l
0,64. Bc sng s dng l 1,55 m. Din tch cm quang ca tct l 100 m
2
. Cng sut quang ca b ngun l 10 mW.
Tn hao trn truyn tn hiu gia ngun v my thu c c tnh bng 30 dB. Di truyn qua ca h thng l 100 MHz.
Dng in trong ti ca it quang l 5 nA. Gi thit rng b khuch i in t c h s ting n ca mch bng 6 dB. in
tr ph ti bng 50. Ting n 1/f v bc x phng di sng s dng l khng ng k.

Ta th c tnh cc loi ting n v t s tn hiu trn ting n trong php o ny. Ta c:
- Cng sut quang nhn c trn b mt it quang : P
0
= 10
-3
.(10 mW) = 10 W (v rng tn hao ng
truyn l 30 dB).
________________________________________________________________________________
262
- p ng ca it quang l: A/W 0,8
10 . 3 . 10 . 626 , 6
10 . 55 , 1 . 0 0,64.1,6.1
hc
e
8 34
6 -19
= =

=

.
- Dng quang in tng ng vi tn hiu quang: =
0 S
P i = (10 W). (0,8 A/W) = 8 A. So snh vi dng in
trong ti (5 nA), ta c :
obs S
i i >> .
- Cng sut ca tn hiu quang: P
S
= (P
0
)
2
= (0.8.10.10
-6
)
2
= 6,4.10
-11
W = 64 pW.
- Cng sut ting n do to cp (l ting n Schottky trong trng hp ca it quang p-i-n):
( ) f i i 2e
obs S
+ = 2.1,6.10
-19
(8.10
-6
+5.10
-9
).100.10
6
= 2,6.10
-16
W = 0,26 fW.
- Cng sut ting n nhit: 4kT
B
f/R = [4.(1,38.10
-23
).300.10
8
]/50 = 3,3.10
-14
W = 33 fW. Trong trng hp
ny ting n nhit l ch o (ting n nhit ln gp 127 ln ting n Schottky).
- Cng sut hiu dng ca ting n nhit c tnh n ting n ca mch in khuch i ca h thng:
3,3.10
-14
.10
0,6
= 13,14.10
-14
W = 131,4 fW.
- Nh vy, t s tn hiu trn ting n theo cng sut l : dB 26,9 487
13,14.10
6,4.10
B
S
14 -
-11
P
= = |
.
|
\
|

b) o tn hiu quang bng php o trc tip vi it quang dng hiu ng nhn in :
T s tn hiu trn ting n trong php o trc tip vi it quang dng hiu ng nhn in c xc nh bng
h thc (IV.53) v (IV.54) khi ting n 1/f l khng ng k. Khi m ting n nhit v dng in trong ti l khng
ng k so vi ting n Schottky v khi bc x phng l khng ng k, ta c t s tn hiu trn ting n t mc
gii hn ca ting n Schottky bng:
f F h
P
2
1
f F 4h
P
B
S
S S

= (IV.57)
So snh biu thc (IV.57) vi (IV.56), ta thy rng t s tn hiu trn ting n t mc gii hn ting n Schottky
ca it quang dng hiu ng nhn in l thp hn t s ca it quang p-i-n ; iu ny l do h s ting n nhn
in trong it quang nhn in to nn.
Khi ta lm bin iu bin ca tn hiu quang ti vi ch s bin iu m, t s tn hiu trn ting n ca tct tr
thnh:
2
1
2 F S
T /k eV
sat
B
S
f F M
h
) P e(P
1) (e i 2e
R
f T 4k
2 h
Mm eP

B
S
B app
|
|
.
|
\
|
+
+ + +
= .
Th d: Cng th d nh trn nhng by gi it quang p-i-n c thay bng it quang dng hiu ng nhn in m h s
ting n do nhn in l F = 10 v h s nhn in l M =100.
- p ng ca tct quang hc l : A/W 80
10 . 3 . 10 . 626 , 6
100 . 10 . 55 , 1 . 0 0,64.1,6.1
hc
M e
8 34
6 -19
= =

=

- Dng quang in tng ng vi tn hiu quang, cung cp bi it l: =
0 S
P i = (10 W). (80 A/W) = 0,8 mA.
- Cng sut ca tn hiu quang : P
S
= (P
0
)
2
= (80.10.10
-6
)
2
= 6,4.10
-7
W = 0,64 W.
- Cng sut ting n Schottky: ( ) f F M i i 2e
2
obs S
+ = 2.1,6.10
-19
(8.10
-6
+5.10
-9
).(100)
2
.10.100.10
6
= 2,56.10-11 W
= 25,6 pW. Ta thy rng trong trng hp ca it quang nhn in, ting n Schottky l ch o (ting n
Schottky ln gp 776 ln ting n nhit).
- Cng sut hiu dng ca ting n nhit c tnh n h s ting n mch in l: 3,3.10
-14
.10
0,6
= 13,14.10
-14

W = 131,4 fW.
- Nh vy t s tn hiu trn ting n theo cng sut ca it quang nhn in l:
dB 44 24872
) 13,14.10 (2,56.10
6,4.10
B
S
14 - 11 -
-7
P
=
+
= |
.
|
\
|
.
Ta thy rng trong trng hp ny, it quang dng hiu ng nhn in cung cp mt t s tn hiu trn ting
n ln hn nhiu so vi trng hp dng it quang p-i-n.
V. O TN HIU QUANG HC BNG PHP O KT HP
Trong chng trc, chng ta thy rng trong qu trnh o tn hiu bng php o trc tip, t s tn hiu
trn ting n b hn ch, c bit bi ting n nhit v ting n do mch khuch i in t t sau tct quang
hc. Ngay c trong trng hp khng c cc ting n ny, qu trnh o tn hiu quang cng s b gii hn bi ting
n Schottky ca cc ht quang ti in. Trong s o tn hiu dng php o trc tip ny, him khi t n gii
hn ca ting n lng t to bi ting n Schottky. Tuy nhin, ta c th tin gn n gii hn ting n lng t
ny bng cch dng php o kt hp (dtection cohrente/ coherent detection).
Ngoi ra, trong php o trc tip, tct quang hc ch c th pht hin thng lng phtn p ln b mt
cm quang ca tct m thi ; ngha l tct quang hc ch c th o c cng sng, hay ni cch khc
mt i lng t l vi bnh phng ca trng quang hc. Php o trc tip ny khng cho php o c tn s ln
pha ca tn hiu quang ti. Hn na, tct quang hc khng th o cng (hay bnh phng ca trng quang
hc) tc thi ; m ch c th o gi tr trung bnh theo thi gian ca cng sng trong qung thi gian tch phn,
c xc nh bi di truyn qua ca tct. Ch rng thi gian tch phn ny l rt ln so vi chu k dao ng
________________________________________________________________________________
263
ca sng quang. Nu p ng ca tct quang hc l , vi mt sng quang ti phng v n sc, c dng : E(t)
= E
0
cos(t+), p ln din tch A b mt cm quang ca tct, th dng quang in u ra ca tct ny
c vit l: | |
2
0
2
E
Z 2
A
) t ( E
Z
A
i(t)

=
= (V.1)
Trong
r 0
r 0
Z

= l tr khng quang hc ca mi trng ;
0
,
r
ln lt l t thm ca chn khng v t
thm tng i ca mi trng ;
0
,
r
ln lt l hng s in mi ca chn khng v hng s in mi tng i
ca mi trng.
Php o kt hp, ngc li, cho php thu c cc thng tin v tn s v pha ca sng quang ti. Trong s
ca php o kt hp, tct quang hc c chiu sng ng thi bi sng quang ca tn hiu cn o v mt
chm tia quang hc th hai, n t mt ngun sng khc, gi l dao ng t cc b (oscillateur local/ local
oscillator) ; dao ng t ny c kt hp pha (cohrence de phase/ phase coherence) vi tn hiu quang ti. Dao
ng t cc b phi c kt hp pha trong mt khong thi gian di c th nhn c thng tin cn chuyn t
tn hiu ti. Trong mt h thng truyn thng quang hc truyn cc tn hiu s, thi gian ca kt hp pha ti thiu
cn thit phi c l c rng xung thng tin cn o. c cht lng kt hp pha ny, dao ng t cc b
phi l mt ngun sng kt hp. Thng thng ngi ta dng cc laser c n nh tn s lm dao ng t cc
b. S tiu biu ca php o kt hp c trnh by trn hnh V.1. Hnh V.1.a trnh by s b o dng mt
tm tch chm tia sng (lame sparatrice/ beam splitter) nhm thc hin vic chng cht hai chm tia ti: tn hiu
cn o v dao ng t cc b. Hnh V.1.b trnh by mt b o khc c th thc hin c. Trong b o ny ngi ta
dng mt m ghp quang hc c hng (coupleur directionnel/ directional coupler), chng hn b ghp 2X1 dng
si quang hc. B o ny thng c s dng trong h thng truyn thng dng si quang hc. S ca php
o ny cn phi c thc hin vi s cn trng. Dao ng t cc b v sng quang ca tn hiu ti khng nhng
phi c kt hp pha, m chng cn phi c cng mt sng v cng phng phn cc trn ton b din tch cm
quang ca tct quang hc. Mi s lch ng chnh (dsalignement/ misalignement) theo gc hay theo chiu
ngang u ko theo cht lng rt xu ca php o.

Hnh V.1 : Hai s thc hin php o kt hp
Xt trng hp l tng ca hai sng ti phng v n sc, c cng mt sng v c cng phng phn cc
thng trn ton b b mt cm quang A ca tct quang hc. Sng quang ca tn hiu cn o c biu din
bng:
( )
1 S 1 S
t cos E (t) E + = (V.2)
Sng quang ti t dao ng t cc b l: ( )
2 L 2 L
t cos E (t) E + = (V.3)
S chng cht ca hai sng ti ny trn b mt ca tct c vit :
( ) ( )
2 L 2 1 S 1 L S
t cos E t cos E (t) E (t) E + + + = + .
Ta c dng quang in cung cp bi tct quang hc, suy ra t h thc (V.1) :
| |
2
L S
) t ( E ) t ( E
Z
A
i(t) +
= (V.4)
Do ta c: | |
2
2 L 1 S 2 1 2 L
2 2
2 1 S
2 2
1
) t cos( ) t cos( E 2E ) t ( cos E ) t ( cos E
Z
A
i(t) + + + + + +
=

| | | |
+ + + + +
+ + + + + +
=
2 1 L S 2 1 2 1 L S 2 1
2 L
2
2
2
2
1 S
2
1
2
1
t ) ( cos E E t ) ( cos E E
) t ( 2 cos
2
E
2
E
) t ( 2 cos
2
E
2
E
Z
A
i(t)
________________________________________________________________________________
264
tct quang hc khng th p ng c trc cc dao ng c tn s rt ln (tc l cc tn s
S
,
L
,
S
+
L
) v gi thit rng gi tr ca hiu tn s (
S
-
L
) l nh hn b rng di truyn qua ca tct. Trong iu kin
ny, chng ta thu c dng quang in di dng:
| |
+ + +
=
2 1 L S 2 1
2
2
2
1
t ) ( cos E E
2
E
2
E
Z
A
i(t) (V.5)
Biu thc (V.5) cho thy dng quang in bao gm hai phn : phn u, gm hai s hng u tin, l khng i v
phn sau thay i theo thi gian ; phn sau ny biu din tn hiu dao ng mt tn s gi l tn s trung gian,
bng hiu s ca hai tn s:
I
=
S
-
L
(V.6)
Nh vy ta c: ( )
(
(
+ + +
=
2 1 I 2 1
2
2
2
1
t cos E E
2
E
2
E
Z
A
i(t) (V.7)
Hai s hng u ca biu thc (V.7) biu din php o c lp ca tct quang hc i vi tn hiu quang v
tn hiu ca dao dng t cc b; hai s hng ny hp thnh thnh phn khng i ca dng quang in. S hng
th ba, ngc li, biu din s to ra tn s trung gian (hay l s to ra hiu tn s ca hai sng ti) bi tct
quang hc. Vic to hiu tn s l mt s vn hnh phi tuyn tnh (opration non-linaire/ nonlinear operation) ca
tct, bi v p ng tuyn tnh ca tct quang hc khng cho php thc hin vic to ra tn s (gnration
de frquence/ frequency generation). Vic to ra tn s quang hc ny c gi l trn sng quang hc (mlange
optique/ optical frequency mixing). V nh vy, tct quang hc gi vai tr ca b trn sng quang hc
(mlangeur optique/ optical frequency mixer). Qu trnh ny tng t vi phng php o htrin (htrodyne/
heterodyne) trong lnh vc tn s rai (radiofrquence/ radiofrequency), v l do , php o ny cn c gi l
phng php o htrin quang hc (dtection htrodyne optique/ optical heterodyne detection). Khi m
S

L

php o c gi l htrin v khi
S
=
L
php o c gi l hmin (homodyne). Biu thc (V.5) cng cho
thy rng, khi m ta bit chnh xc tn s
L
v pha
2
ca dao ng t cc b, ta c th suy ra tn s
S
v pha
1

ca tn hiu quang ti. Php o kt hp, nh vy, cho php o tn s v pha ca tn hiu quang ti. Hnh V.2 hai
dng quang in u ra ca tct quang hc, tng ng vi php o htrin v php o hmin p dng
cho mt tn hiu quang c bin iu bin . Dng quang in trung bnh ca tn hiu quang ti l
Z 2
AE
i
2
1
S

= v
dng quang in trung bnh ca dao ng t cc b l
Z 2
AE
i
2
2
S

= .

Hnh V.2 : Dng quang in trong php o htrin v php o hmin vi mt tn hiu quang ti c bin iu bin
Trong s thng dng ca php o kt hp, ngi ta trn mt tn hiu quang ti cn o c cng yu vi
mt tn hiu quang c cng rt mnh ca dao ng t cc b, ngha l trng quang hc ca tn hiu dao ng
t cc b l rt ln so vi trng quang hc ca tn hiu cn o: E
2
>>E
1
. Thng tin cn thu c mang bi thnh
phn thay i theo thi gian ca dng quang in, do ta c dng quang in hiu dng ca tn hiu l:
| |
2 1 L S
2 1
S
t ) ( cos
Z
E AE
(t) i +
= (V.8)
Biu thc (V.8) cho thy ch li ca php o kt hp i vi mt tn hiu c trng quang hc E
1
thp. Thc
vy, khi m tn hiu yu ny c trn vi tn hiu c trng quang hc E
2
kh mnh ca dao ng t cc b, bin
dng quang in to ra bi tn hiu quang yu c nhn vi bin ca trng quang mnh. H s khuch i
t thn v khng c ting n ny ca php o kt hp, do , cho php khuch i mt cch hiu qu tn hiu ra xa
khi mc ting n ca mch in.
________________________________________________________________________________
265
By gi chng ta tnh t s tn hiu trn ting n ca s phng php o ny. Xt trng hp b o kt hp
dng it quang p-i-n. Cng sut ting n nhit (i
BT
) ca it quang l:
R
f T 4k
i
B 2
BT

= ; trong R l in tr ca
mch in v f l di thng ca tct quang hc, c gi thit l lun lun ln hn tn s trong gian
I
xc
nh bi (V.6).
Cng sut ting n Schottky c vit: f i
2
E
2
E
Z
A
2e i
obs
2
2
2
1 2
BG

(
(
+
|
|
.
|
\
|
+
= ; trong
obs
i l dng in trong ti trung
bnh.
Cng sut ca tn hiu quang thu c t biu thc (V.8):
( )
2
2
2 1 2
S
Z 2
E AE
) t ( i

= .
Nh vy, t s tn hiu trn ting n theo cng sut ca php o kt hp c vit l:

( )

f
R
T 4k
i
2
E
2
E
Z
A
2e
Z 2
E AE

i i
) t ( i
B
S
B
obs
2
2
2
1
2
2
2 1
2
BG
2
BT
2
S
PC
+
(
(
+
|
|
.
|
\
|
+
=
+
= |
.
|
\
|
(V.9)
V rng trng quang hc ca dao ng t cc b l kh mnh (E
2
>>E
1
), ting n Schottky trong php o s l
ch o, do ta c th b qua s ng gp ca ting n nhit v dng in trong ti. Trong iu kin ny, t s
tn hiu trn ting n (V.9) tr thnh:
f 2eZ
AE

B
S
2
1
PC

|
.
|
\
|
(V.10)
Nh vy, c th thc hin c qu trnh o tn hiu quang t n mc gii hn ting n Schottky bng php
o kt hp. Cn nhn mnh rng php o kt hp khng b nh hng bi ting n ca bc x phng, v rng dao
ng t cc b khng trn ting n ny trong qu trnh o. Php o kt hp l mt trong nhng phng php rt
him cho php t n gii hn ting n phtn trong cc qu trnh o tn hiu quang trong vng ph hng ngoi,
ni m ting n ca bc x phng l kh quan trng.
Nhc li rng cng sut trung bnh ca tn hiu quang c biu din bng:
2Z
AE
P
2
1
S
= v p ng ca tct
quang hc l :
=
h
e
, biu thc (V.10) c th c vit l :
f h
P

B
S
S
PC

= |
.
|
\
|
(V.11)
T s tn hiu trn ting n t mc gii hn ting n Schottky, biu din theo gi tr ca dng quang in v
gi tr ca dng in ting n, nh vy, c vit nh sau:
f h
P
B
S
S
C

= |
.
|
\
|
(V.12)
So snh biu thc ny vi biu thc (IV.56) ca php o trc tip dng quang it p-i-n, ta thy rng t s tn
hiu trn ting n t mc gii hn ting n Schottky ca php o kt hp l hai ln ln hn (hay ln hn 3 dB) t
s ca php o trc tip. Hiu nng ny cho thy mt u im khc ca php o kt hp.
Php o kt hp cn c dng trong vic hn ch dn rng ca xung quang hc c truyn trong si
quang hc, bng cc b hiu chnh pha (galiseur de phase/ phase equalizer) in t. S dn rng xung truyn ny
l do s tr pha ca cc sng thnh phn khc nhau, bi s khc bit vn tc nhm trong khi truyn. V rng php
o kt hp cho php o c pha ca tn hiu quang, s tr pha n c th c hiu chnh bng cc b lc in t.

TI LIU THAM KHO TM TT

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________________________________________________________________________________
266
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Detector Quang Hoc Bang Ban Dan

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Detector Quang Hoc Bang Ban Dan

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________________________________________________________________________________

NGUYN CH THNH - tct quang hc bn dn Lp hc chuyn Sn Thng 11 nm 2004

; trong t sut to cp quang hc trong cht bn dn l .G

= . Mt dng quang in khuch

; trong w l b rng ca vng ZCE, l linh ng ca cc

T. Hsiang et al., SPIE Proc. 2022, 6, 1993.

; l thi gian sng ca cc ht quang ti inv

(hay cn gi l ting n Nyquist

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