presentedby

PSaha PSaha
IITKharagpur
11/11/2013 1 PSaha
Rapid prototyping of miniaturized Rapidprototypingofminiaturized
objects j
Microstereolithography isusefulforinstantaneous
microfabrication of3dimensionalobjectsfor microfabrication of3dimensionalobjectsfor
Packagingofsensorsetc.
Mi ldi ( ) Micromolding(asmasterpattern)
Microdevices
Biomedical
Microrobotics
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Implementation p
Pointbypointorlinebylinescanningtechnique
Wh l l i ( i h h h l f i k) Wholelayerinonego(withthehelpofactivemask)
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MiniatureSizeControl
XYPlane :by
tightfocusofthe tightfocusofthe
laser/lightsource
Zdirection :
Controlthe
penetrationdepth
andthereby the
i d h f curingdepthof
eachpolymerised
layer layer
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MiniatureSizeControl
AworkingcurveforcontrollingcuringdepthinSL basedonthephotopolymers
thresholdexposure:

Cd =D
p
ln(E/E
c
),
where
C
d
=thecuringdepth,
E l E=laserpower
E
c
=thresholdpowerforpolymerizationtooccur,
D
p
=thepenetrationdepthofthelaserintothesolution,

D
p
isdefinedviatheBeerLambertlawas:

Dp =1/{2.3(I[I]+UVA[UVA])}
h where
I= molarextinctioncoefficientoftheinitiator,
[I]=initiatorconcentration,
UVA=molarextinctioncoefficientoftheUVabsorber, ,
[UVA]=UVabsorberconcentration.
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Schematic of micro stereo Schematicofmicrostereo
lithographyusingscanninglaser g p y g g
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ACOUSTOOPTICMODULATOR
A AOM i t ti t l h AnAOM isanacoustooptic crystalwhere
thelightpassingthroughthecrystalis
diffractedortransmitteddependingonthe
acousticdrivesignal acousticdrivesignal.
Whenthefixedfrequencydrivesignalis
turnedonthelightisdiffractedandwhen turnedonthelightisdiffractedandwhen
thesignalisoffthelightpassesthroughthe
crystalwithoutdiffraction.
Theamountoflightdiffracteddependson
theamplitudeofthedrivesignal.
Thedrivesignalisgeneratedfromthe
patterntobeexposed.Bycontrollingthe
amplitudeofthedrivesignaltheintensity amplitudeofthedrivesignaltheintensity
oftheexposurebeamiscontrolled.
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A t O ti M d l t AcoustoOpticModulator
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AcoustoOpticDeflector
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Anacoustoopticalscannerdeflectsalightbeambyphase Anacousto opticalscannerdeflectsalightbeambyphase
gratinggeneratedbyanacousticwaveinsideasolidmedium.
Thecompressionandrarefactionsofmediumgeneratedbythe
acousticwaveproduceaperiodicindexvariationandforma p p
phasegrating.
Alaserbeamisdiffractedaccordingtothegratingformula
m. =2dsin
wheremisaninteger, thewavelengthoflaser,anddisthe
gratingspacing.
Ifthewavelength
s
oftheacousticwaveisequaltod,the
d ff d f b
g
s
q
diffractionconditionform=1becomes
sin = /2
s
Foranacousticwavelengthofabout10
3
m,thediffractionorder
ll h d f d
g
istypicallyontheorderof10
3
rad.
Thediffractionangleofthelaserbeamischangedwhen
frequencyoftheacousticwaveissweptfromf
1
tof
2
Acousto OpticalDeflectorisusefulwhen
ScanFieldissmall
HighScanRateandRandomaccessibilityisimportant.
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Micro stereo lithography with Microstereolithographywith
digitalmirrordevice g
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Photographsoftheintegratedmicrostereolithographyprototype
apparatusdevelopedatEPFL,Switzerland pp p
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Features
Objectsmadeofafewhundredtoafewthousandsoflayers
About3to6layersperminute,whichcorrespondstoanaverage
of1.5mmperhour.
Thisdevelopedsystemconsistsofeightelements:
AComputerAidedDesignenvironmentsupportingsolidor
surfacemodelling; g;
Aresinbathwithanintegratedhighresolutiontranslationstage
andcomponentbuiltplatform;
Anultravioletlaserlightsourceoperatingat =351 1nm; Anultravioletlaserlightsourceoperatingat =351.1nm;
Anopticalshutter;
Adiffractiveopticalelementdesignedtoredistributethe
irradianceofthelaserbeamfromaGaussiantoatop hatprofile; irradianceofthelaserbeamfromaGaussiantoatophatprofile;
Apolysilicon thinfilmtwistednematic SVGAresolution(800
multipliedby600)spatiallightmodulator;
Amultielementlithographicreductionlenssystem;anda
comprehensivecontrolsystem.
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Steps p
EachlayerimageofobjectistransferredtotheDigital
MirrorDevice(DMD)andprojectedontotheliquid MirrorDevice(DMD)andprojectedontotheliquid
resin
Resincross linksandsolidifies whereitis Resincrosslinksandsolidifies whereitis
illuminated
Preparationforthenextlayer:z stagedipsintoliquid Preparationforthenextlayer:zstagedipsintoliquid
resintocreatethenext10mlayerontopofthe
alreadysolidifiedobject alreadysolidifiedobject
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Capabilities p
Processtime23hourperobject
M kl Maskless process
Layerbylayerfabricationofmicrostructuresby
j i f li di df D projectionofslicedimages createdfrom3D
computerdesign
S d dSTLfil f i d StandardSTLfileformat required
10mresolution;lateralandvertical
Maximumfieldsize10.24mmx7.68mm
Structuralheight severalmillimeters g
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Di i l Mi i D i (DMD) DigitalMicromirror Device(DMD)
MEMSdevicedevelopedatTexasInstruments,in1987 p
ADMDchiphasonitssurfaceseveralhundred
thousandmicroscopicmirrorsarrangedina
rectangulararraywhichcorrespondtothepixelsinthe g y p p
imagetobedisplayed.
MirrorsareofthinfilmofAluminiumalloyof16
micronacross.
Thenumberofmirrorscorrespondstotheresolutionof
theprojectedimage.800x600,1024x768,1280x720
Themirrorscanbeindividuallyrotated1012,toanonoroffstate.
Thesemirrorscanberepositionedatfrequencyof57kHz toreflectlight Thesemirrorscanberepositionedatfrequencyof5 7kHz toreflectlight
eitherthroughthelensorontoaheatsink (calledalightdump).
Twopairsofelectrodescontrolpositionofmirrorbyelectrostaticattraction. Twopairsofelectrodescontrolpositionofmirrorbyelectrostaticattraction.
Capableofoperationfor100000hourswithoutfailure
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DigitalMicromirror Device(DMD) g ( )
Thedigitalmicromirror
deviceisamicro deviceisamicro
electromechanicalsystems
(MEMS)arrayof
l i i ll aluminiumalloy
micromirrors,
monolithicallyintegrated y g
ontoandcontrolledbyan
underlyingsiliconCMOS
staticrandomaccess
Cross-section of a DMDdevice
staticrandomaccess
memory(SRAM)array
Cross section of a DMD device
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CreationofshadesbyDMD y
Therapidrepositioningof
themirrors(essentially themirrors(essentially
switchingbetween'on'
and'off')allowstheDMD
tovarytheintensityofthe
lightbeingreflectedout
throughthelens creating throughthelens,creating
shadesofgreyinaddition
towhite(mirrorin'on'
Top down view of landed mirrors
(
position)andblack
(mirrorin'off'position).
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Performance comparison with Performancecomparisonwith
conventionalstereolithography g p y
Testcomponentmade p
withaconventional
stereolithography
machine
Testcomponentmade
withsmallspot
technologybyProform
Testcomponentmadeof
gy y
AG
p
microstereolithography
Degreeofaccuracy
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Degreeofaccuracy
Applications pp
Scale model of a small car, made
of 673 layers of 5 micron each
Three interwoven springs
having smooth surfaces
Part of a hearing aid Double-end connector fluidic
pipes for cell-bilogy applications
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