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g Margin,
g ,
Reliabilityy and Scaling
g
CSCE 6730
Advanced VLSI Systems
Instructor: Saraju P. Mohanty, Ph. D.
NOTE: The figures, text etc included in slides are borrowed
from various books,
books websites,
websites authors pages,
pages and other
sources for academic purpose only. The instructor does
not claim anyy originality.
g
y
CSCE 6730: Advanced VLSI Systems
Lecture Outline
Design Margin
Supply
S
l Voltage,
V lt
T
Temperature,
t
P
Process
V i ti
Variation,
etc.
t
Reliability
Electromigration, Self-heating, Hot-carriers, etc.
Scaling
Transistors, Interconnect, etc.
Design Margin
Three different sources of variation:
E
Environmental
i
t l
Supply voltage
Operating
O
ti temperature
t
t
Manufacturing
Process variation
ION decreases
d
with
ith temperature
t
t
IOFF increases with temperature
I ds
increasing
tem perature
V gs
Fast
F t (F)
pM
MOS
TT
FS
SS
slow
Leff: short
Vth: low
tox: thin
SF
nMOS
fast
Corner
Voltage
Temperature
1 98 V
1.98
0 C
T
S
1.8 V
1.62 V
70 C
125 C
NMOS speed
PMOS speed
Voltage
T
Temperature
t
Purpose
NMOS PMOS
VDD
Temperature
Cycle time
Power
Subthrehold
leakage
Pseudo-NMOS
seudo
OS
Reliability
Designing reliable CMOS chips are essential.
Mean Time Between Failure :
MTBF = (#devices * Hrs of Operation) / # Failures
10
Reliability : Electromigration
Electromigration decreases reliability.
Depends on current density.
density
Occurs in wires carrying DC rather than AC, as
in DC the electrons flow in a same direction.
Mean Time to Failure :
MTF exp(Ea/kT) / Jndc
Here Ea is active energy (can be experimentally
Here,
determined) and n is constant (=2).
The electromigration DC current limits vary with
materials, severe for aluminum than copper.
CSCE 6730: Advanced VLSI Systems
11
Reliability
y : Electromigration
g
For electromigration we need a lot of electrons,
and
also
we
need
electron
scattering
scattering.
Electromigration does not typically occur in
semiconductors, but may in some very heavily
doped semiconductor materials.
Electromigration can lead to either open circuit or
short
h t circuit
i it failure.
f il
12
Reliability : Self-heating
Typically bidirectional signal lines RMS (root
mean square) current density is limited by selfself
heating.
Self-heating
S lf h i
may cause temperature-induced
i d
d
electromigration problems in bidirectional signal
lilines.
Self-heating is more prominent for SOI processes
because of poor thermal conductivity of SiO2.
RMS current is calculated as:
Irms = ( I(t)2dt / T)
CSCE 6730: Advanced VLSI Systems
13
14
H
Hot carriers
i
may cause circuit
i i wearout as NMOS
transistors become too slow.
Negative bias temperature instability (NBTI) is an
similar mechanism in PMOS, where holes are
trapped in oxide.
Refer: http://www.semiconfareast.com/hotcarriers.htm
p
CSCE 6730: Advanced VLSI Systems
15
Reliability : Latch-up
NMOS
NMOS and PMOS are formed as needed.
needed
In addition an NPN and an PNP transistor formed
NPN
NPN transistor is formed between n
n-diffusion
diffusion of
NMOS, p-type substrate and n-well.
Substrate and well provide resistance
CSCE 6730: Advanced VLSI Systems
16
Reliability : Latch-up
When parasitic BJT formed by the substrate,
well, and diffusion turn ON, then latch
latch-up
up occurs.
This can lead to a low-resistance path between
supply and ground.
With proper process advances and layout
consideration this can be avoided
Rsub and Rwell need to be minimized (guard rings)
17
Electrostatic discharge
Oxide breakdown
Punchthrough
Time dependent dielectric breakdown (TDDB) of gate
oxide
18
19
Why?
Why more transistors per IC?
Smaller transistors
Larger dice
Why
Wh faster
f t computers?
t ?
Smaller, faster transistors
Better microarchitecture (more IPC)
Fewer gate delays per cycle
20
Scaling : Trend
The only constant in VLSI is constant change
Feature size shrinks by 30% every 2-3
2 3 years
Transistors become cheaper
Transistors
T
i t
become faster
b
f t
Wires do not improve
(and may get worse)
10
Scale factor S
Typically
S 2
Technology nodes
Feature Siz
ze (m)
10
6
3
1.5
1
0.8
0.6
0.35
0.25
0.18
0.13
0 09
0.09
0.1
1965
1970
1975
1980
1985
1990
1995
2000
Year
CSCE 6730: Advanced VLSI Systems
21
2005
Scaling : Assumptions
What changes between technology nodes?
Constant Field Scaling
All dimensions (x, y, z => W, L, tox)
Voltage
V lt
(VDD)
Doping levels
Lateral Scaling
Only gate length L
Often done as a quick gate shrink (S = 1.05)
22
23
Scaling : Observations
Gate capacitance per micron is nearly
independent of process
But ON resistance * micron improves with
process
Gates get faster with scaling (good)
Dynamic power goes down with scaling (good)
Cu
Current
e t de
density
s ty goes up with
t sca
scaling
g (bad)
Velocity saturation makes lateral scaling
unsustainable
24
Scaling : Example
Gate capacitance is typically about 2 fF/m
The FO4 inverter delay in the TT corner for a
process of feature size f (in nm) is about 0.5f ps
Estimate the ON resistance of a unit (4/2 )
transistor.
FO4
O = 5 = 15
5 RC
C
RC = (0.5f) / 15 = (f/30) ps/nm
If W = 2f,
2f R = 8.33
8 33 k
Unit resistance is roughly independent of f
CSCE 6730: Advanced VLSI Systems
25
Wire length
L
Locall / scaled
l d interconnect
i t
t
Global interconnect
Die
Di size
i scaled
l d by
b Dc 1.1
11
26
27
28
Local
L
l wires
i
are getting
tti faster
f t
Not quite tracking transistor improvement
But not a major problem
29
30
Scaling Implications
Improved Performance
Improved Cost
Interconnect Woes
Power Woes
Productivity Challenges
Physical Limits
31
[[Moore03]]
32
But
But
Misleading scale
Global wires
ires
33
Chip size
Scaling of
reachable radius
34
35
Dynamic
Static
[[Moore03]]
36
37
Dynamic power
Subthreshold leakage, tunneling
Short channel effects
Fabrication costs
Electromigration
g
Interconnect delay
38