Risk Assessment Report

P&S Co., Ltd.

Manufacturer ULVAC. Inc.

(LC50)

SiH4
0.96% 4hr Rat 1H :
H: H2
0.75% 4hr Rat 0.2% 4hr Rat
NH3
1H : , ,

1R : ,
R :
H :
,
NF3
0.67% Rat
1R : , ,
R : ,
N2O
0.025% Rat
()
TEOS 1H : , ,
,

TRF Ver: PRAS-160225

Product name Multi-chamber type TEOS CVD System

LEL

HEL ()

Rev. 1

TWA

STEL

IDLH

, ,

1.3

1.37 100

5ppm

O
O

4
15

76
28

500~571
651

25ppm

35ppm -

, ,
, ,

0.07
0.59

A4

10ppm

2.5

A4
-

1.3

23

50ppm
10ppm

,
,
, ,

1.53

7.2

, , ,

(
)

Chemical Delivery System Process chamber Gas box

TEOS LGD Scope
TEOS . .

Copyright () , , .
PRAS-1
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

Risk Assessment Report

P&S Co., Ltd.

Mode

Risk Analysis /
No
A P S O Key event

1-1 O O O - , Gas box
Gas Leak Valve, fitting
Gas
, SiH4
H

NH3

1-2 O O O - ,

Gas box
SiH4
H2
NH3

1-3 O O O - Gas box

SiH4
H2

Gas Leak,

Gas Leak,

TRF Ver: PRAS-160225

Safety Measures /

Gas box , Valve, fitting
Gas box
Gas box

Gas box

gas
MFC

Gas box ,
Gas box ,
Gas
(PLr=b )
, ,
1 Alarm , Gas box
Gas box ,
,

,
,
, .

Gas box

,
2 2

Gas box

,
Gas box

gas box ,


gas box
.
Gas box

Gas box ,
Gas , 2 2

(
. ,

S P Key measure

Gas box

2 3

MG PG
4
4

A
A

4
2

Copyright () , , .
PRAS-2
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

No

Mode

A P S O

1-4 O O O O

Risk Assessment Report

TRF Ver: PRAS-160225

Risk Analysis /
Safety Measures /
Key event

S P Key measure

NH3
),
Gas box
,
,

,
(CR ,
.
SUS
Gas box , gas box
)

() .
,
PLr=d ,

,
, ,
PLr=b , 2 2
,
,
,
Gas box
, ,

1 Alarm ,
, .
Damper Gas box Damper Lock-out
, Tag ( )

TG test
. Tracer Gas Test

Chamber Scrubber
Scrubber Scrubber
Duct

SiH4

Gate valve
3 1
Gas box

gas
,
,

MG PG
N
4

A
N

4
A

4
2
3
4
4
2
3
4

A
A
A
A
N
A
A
N
N

Copyright () , , .
PRAS-3
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

Risk Assessment Report

P&S Co., Ltd.

Mode

Risk Analysis /
No
A P S O Key event

S P
1-5 - - - O SiH4
Filter Filter Hand valve ~ Filter
H2


NH
3

NF3
2 3

N2O
TEOS
1-6

1-7

- - - O

SiH4
H2
NH3
NF3
N2O
TEOS
N2
Ar

SiH4
H2
NH3
NF3
N2O
TEOS
1-8 O O - - SiH4
H2
NH3
NF3
N2O

Hand
valve
CGS

Pressure
gauge

TRF Ver: PRAS-160225

Safety Measures /
MG PG
Key measure

Filter purge filter , ,

, N2 Purge , VCR
4 A
VCR titting
fitting test probe
Hand valve 2 VCR fitting

3 N

Hand Valve
Hand valve Hand valve / , CGS
Hand valve , CGS

gas
Hand valve /
, , ,
,


Hand valve 1
Hand valve / CGS LOTO
4 2


CGS N2 purge
.
.
N2, Ar
T-branch + Hand valve + quick coupling

N2 CDA Purge .
Hand valve LOTO ,

Gas
C
Gas
Gas

- ( )
3 2
-

- C
Pressure
SiH4, H2, NH3, NF3, N2O, TEOS
Transducer
Ar, N2
,
2 2
, gas
,
.

A
N

SiH4, H2, NH3, NF3, N2O Ar, N2

gas 2 Pressure
Switch Pressure Transducer ,
4
.
. (PL=b)

Copyright () , , .
PRAS-4
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

Risk Assessment Report

TRF Ver: PRAS-160225

Mode

Risk Analysis /
Safety Measures /
No
A P S O Key event

S P Key measure

1-9 O O O - Back
Valve interlock SiH4, H2, NH3, NF3, N2O Gas
Gas
pressure , Gas valve back pressure

, Gas . (PL=b)
, valve ,
SiH4, H2, NH3, NF3, N2O N2 Ar
, Gas Over 2 2
N2, Ar Check valve
pressure Back

pressure

1-10 O O O O Solenoid Air operated valve
manifold Solenoid valve manifold gas ,
gas valve valve
Solenoid valve
Solenoid valve SiH4, H2 O2 line , solenoid valve
packing

2

2 2
fault
gas
gas SiH4, H2, NH3, NF3, N2O solenoid valve

Solenoid N2, Ar, He gas solenoid valve

valve

1-11 O O O O TEOS TEOS
TEOS Gas ,
TEOS TEOS Gas box

Viton
Stainless , Gasket Stainless
2 1
Metal sealing TEOS

1-12 O O - - TEOS TEOS TEOS gas NH3
TEOS NH3
NH3 NH3
.
2 2

MG PG
4

A
N

N
N

Copyright () , , .
PRAS-5
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

Process Chamber (Gas box )

Risk Assessment Report

TRF Ver: PRAS-160225

On-line mode :
Off-line mode :
Manual mode :
PM mode : .
LID ,
Gate valve N2 purge Maintenance Door 75sec
N2
Mode

Risk Analysis /
Safety Measures /
MG PG
A P S O Key event

S P Key measure

2-1 - O - O N2 PM
Gate valve
PM Anneal chamber Load-lock chamber
A
close
Gas leak Anneal chamber Load-lock
door valve (PL=b)
4
Timing leak
TM
chamber N2
PM Gate valve , Air purge
A
Load-lock
N2
(Timing Leak) (PL=c)

,
Main air LOTO PM air operated valve
Anneal

CDA Main Normal Close Solenoid valve

3 A

, CDA
No

Air valve
4 1 Solenoid valve PM gas
3
power off
(Timing leak )
N2 LOTO
air Hand valve lock-out
. , Lock-latch type 3
, Lock-out .
O2


1
( 19.5% , 21%
)

A
A

Copyright () , , .
PRAS-6
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

No

Mode

A P S O

2-2

- O O -

2-3

- O O -

2-4

- O - O

Risk Assessment Report

Risk Analysis /
Key event

TRF Ver: PRAS-160225

Safety Measures /
MG PG

S P Key measure

O2
1

RF
PM chamber PM RF
RF PM
Controller
4
RF RF 2 2 RF interlock
(PL=d )

RF
RF RF Generator
RF RF Generator RF
4
Controller

RF
RF RF Generator RF
,
guard 3

, RF
RF ,
3

, RF . (PL=c)
Timing leak
SiH4
Gas PM
PM ,
Air purge
Purge
H2
Process chamber
N2 purge TM
4
N2
purge
NH3

air purge (Timing Leak) ,
N2O
.
Air OFF
NF3
PM , main air
Air air
operated valve CDA Main Normal
3
4 4
Close Solenoid valve ,
CDA gas Air valve

VCR test hole Gas , ,
Regulator 2 1 VCR
Fitting Test hole , 0 4
. (TWA
)

Copyright () , , .
PRAS-7
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

Risk Assessment Report

P&S Co., Ltd.

No

Mode

A P S O

2-5

- O - O N2

Risk Analysis /
Key event

Gas leak

PM
Process chamber N2

TRF Ver: PRAS-160225

Safety Measures /
MG PG
S P Key measure

VCR SOP


Gas , , Regulator
2
2 VCR Fitting Test hole
, 0
. (TWA )
Timing Leak PM , TM
Normal Open air purge (Timing Leak) Timing Leak
4 2
4 A
valve Normal OPEN type
Timing Leak valve Normal Close

Copyright () , , .
PRAS-8
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

Annealing Chamber

Risk Assessment Report

TRF Ver: PRAS-160225

Mode

Risk Analysis /
Safety Measures /
A P S O Key event

S P Key measure

3-1 - O - O He, N2
Timing
Leak
PM
PM , TM
Normal Open air purge (Timing Leak) Timing Leak
Gas leak annealing chamber He, N2
4 2

valve Normal OPEN type
Timing Leak valve Normal Close

3-2 - O - O Anneal
Heater
Heater
Annealing chamber 60
1 3
chamber

.
3-3 - O - O Anneal
Heater
Heater
Heater
1 3
chamber

. (PL=b)
3-4 O O O - Anneal
Heater
Heater
Heater
Heater
chamber

, .

1 3
.

.
3-5 O O O - Anneal
SCR SCR
SCR
SCR , Heater
1 3
chamber

3-6 O O O - Anneal


chamber
1 3

. ,
.
3-7 - - - O Anneal
,
Main 1 ,
chamber

.
1 3

No

MG PG
4

Copyright () , , .
PRAS-9
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

Risk Assessment Report

P&S Co., Ltd.

TM Chamber

TRF Ver: PRAS-160225

TM LID open Robot Teaching

Teaching
Mode

A P S O
4-1 O O O - , TM
, chamber

All

chamber

No

4-2

- O - O TM
chamber
N2 line

Risk Analysis /
Key event
S P

PM
PM
chamber Process chamber
gas Gate valve ,
Gate valve
Gate valve .

3 2

TM

PM, Anneal chamber, LL chamber

Gate valve
pump 2
Gas
.

Safety Measures /
Key measure

Gate valve TM Gate

. ,
PM ,

Purge, Air Leak . ,

Gate valve Air Leak
Air Leak PM
main air Air
air operated valve CDA Main
Normal Close Solenoid valve ,
CDA gas
Air valve
PM
Solenoid
valve
PM
TM gas
power off
chamber , PV07
(Timing leak )
N2
Main air LOTO PM air operated valve
MFC01 , N2
.
CDA Main Normal Close Solenoid valve
Gate valve
, CDA
N2, He, Ar air
Air valve
4 3
operated valve MFC
O2
N2


.
( 19.5% , 21%
)
O2

MG PG
4
4
4
4
3
3
3

1
1

Copyright () , , .
PRAS-10
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

Risk Assessment Report

Mode

Risk Analysis /
No
A P S O Key event

S P Key measure
4-3 - O - - TM
TM Teaching

2 4

4-4 - O - - TM
Main

GOT ,
key switch

4-5

- O O - TM

TRF Ver: PRAS-160225

Safety Measures /
MG PG

Teaching mode LID ,
Gate valve . 3

, Key switch
, Teaching
. Mode change key
Key
2 4

PM
,
.
Teaching

/ LID , Teaching

LID , MC

(PL=d, Stop category 0)

Teaching
(100mm/sec )

2 ( )



2 3

Hold-to-run

(Hold-to-run)

4
4
4
4
4
4

4
, Main GOT
STO Function STO Function
, ,
, .(PL=d)
SLS Function 4
, SLS Function ,
Encoder ,
(PL=d) .

Copyright () , , .
PRAS-11
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

No

4-6

Mode

A P S O

Risk Assessment Report

Mode

Risk Analysis /
A P S O Key event
S P Key measure

5-1 O O O O

2 4

5-2 O O O O

2 4

5-3 O O O -
Air
Solenoid valve



2 3
No

TRF Ver: PRAS-160225

Safety Measures /
MG PG

S P Key measure

S-mark
, S-mark KCs
KCs Mark
( 3
)
- O - - Crane
Crane
, Crane , Crane



4 3
, 4

( )

Risk Analysis /
Key event

Safety Measures /

ISO 14122 series ,
, ,

MG PG
4
4

Guard
4

Solenoid valve

Solenoid valve 3
air Solenoid valve close

Copyright () , , .
PRAS-12
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=

P&S Co., Ltd.

How to see Risk Assessment Report

Risk Assessment Report

TRF Ver: PRAS-160225

4 . .
3 1 , .

2 1 . . .
P
Possibility

PE
Protection
Effect

PG
Progress

1 . .

4 . Human error .
3 . 2 .
2 . 3

1 . 2 (, , ,
N ,

4 . . .

3 . , .

2 . . , Human Error, .

1 . . , Human Error, .
A Applied.

N Not applied. .

Copyright () , , .
PRAS-13
Mode : A=AUTO , P=, S= , O= S(Severity): 4= , , 3=1 & , 2=1 , 1=
P(Possibility): 4= , 3=2 , 2=3 , 1= 2 ,
MG (Mandatory Grade, ) : 4=, 3= , 2= , 1=
PG(Progress) : A=. N=