LIST OF FIGURE

Fig.
No

Figure name

1.1

Components of MEMS

Page
no
2

2.1

Projected MEMS market share in 2006

2.4

Lab on a Pill

2.5

MEMS Endoscopy

2.6

MEMS driven scalpels

2.8

Micro/Nano Robots in medical field

3.2

MEMS Robot

10

CONTENT

Sr.
No.

Title

Page No.

Acknowledgement
Abstract
Contents
List of figures
List of tables
1
1.1
1.2
1.3

Introduction
What is MEMS
Components of MEMS
Benefits of MEMS in medical applications

1
2
3

2.1
2.2
2.4
2.5
2.6
2.7
2.8
2.9

Theroy
Classification of biological MEMS devices
Projected MEMS market share in 2006
MEMS Sensors
MEMS redefines endoscopy with Lab on a Pill
MEMS and endoscopy
Micro-surgical tools
Survey of MEMS Devices
Micro Robots in medical field

4
4
5
6
6
7
7
8

Results
Challenges for MEMS medical sensors
Removal of the diseased area

10
12

Advantages

11

Applications

Conclusion

12
13

References

14

3
3.1
3.2

2.2.1
2.2.2
2.3.1

LIST OF TABLE

Table No

Table Name

Page No

2.1

Projected MEMS market share in 2006

5.1

Applications

12

Abstract
MEMS have been identified as one of the most promising technologies for the 21st Century
and have the potential to revolutionize both industrial and consumer products by combining
silicon

based

microelectronics

with

micromachining

technology.

Applications

of

microelectromechanical systems (MEMS) and microfabrication have spread to different

fields of engineering and science in recent years. Perhaps the most exciting development in
the application of MEMS technology has occurred in the biological and biomedical areas. In
addition to keynfluidic components, such as microvalves, pumps, and all kinds of novel
sensors that can be used for biological and biomedical analysis and measurements, many
other types of so-called micro total analysis systems (TAS) have been developed the
development of bio-MEMS devices and systems involves a truly interdisciplinary integration

of basic sciences, medical sciences,and engineering. This is the primary reason bio-MEMS is
still in the earliest stages of development in comparison with electrical and mechanical
sensing devices and systems.
Keywords: MEMS, MEMS Sensors, Micro-surgical tools, Endoscopy, Micro Robot