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  • Due To 14th of November

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    KASIM
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    HMW

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    Due to 14th of November

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    HMW

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
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    8 views1 page

    Due To 14th of November

    Uploaded by

    KASIM
    HMW

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    HMWdueto14thofNovember

    3
    1)Calculatethevolumetricconcentrationofatoms(atoms/cm )
    andspecificmass(density)ofsinglecrystalsilicongiventhe
    latticeconstantofsilicon(5.43).

    2)Whatisthescalinglawforthemomentofinertiaofaflexural
    beam?WhatistheimplicationforMEMSsensors?Whatisthe
    implicationforMEMSactuators?

    3)Whattypicallyhappenswhenyouturnoffavacuumpump
    anddonotopenanyvalves?BesuretoexplainWHYit
    happens?
    4)Pleasecalculatetheoxidethicknessonntype(111)Sistarted
    withnoinitialoxidebyusingappropriategraphsinthebook.
    Time
    0hr
    1hr
    1hr
    1hr

    Temperatur
    e
    Room
    Temp.
    9000C
    10000C
    10000C

    Type

    Overall
    Thickness
    0nm

    Wet
    Dry
    Wet

    ?
    ?
    ?

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