Dimensional Metrology - Joao Alves PDF

Dimensional
Metrology
jaalves@inmetro.gov.br
Contents
1 Metre definition
2 Length realization
3 Length dissemination
4 Calibration Lamed
4.1 Length calibration
4.1.1 - Gage-blocks
4.1.2 - Lasers
4.1.3 CMM
4.1.3.1 - CMM calibrating artifacts by comparison
4.1.3.2 - CMM calibrating artifacts by error compensation
4.1.3.3 - CMM calibrating artifacts with a coupled laser as reference
4.1.3.4 - CMM calibrating artifacts with a coupled laser as reference by comparison
4.1.2 Line scales calibration
4.2 Roughness and Form
4.3 Angle measurements
Dimensional Metrology
METER - DEFINITION
1983 New definition >>> Associated to the speed of light

Meter Length of the distance travelled by the light in vacuum in
an interval of time equal to 1/299 799 458 s.
-Reference >> Stabilized Lasers;
-Give to speed of light an exact value c = 299792458 m/s;
-Very delicate realization;
-Values of laser wavelengths determined by BIPM - lasers used
nowadays;
- The definition does not change even if the wavelength change;
METER - DEFINITION
Meter: How is it realized?

Length can be determined from time, or, equivalently, from
frequency measurements.
Theoretically, length can be measured with the same accuracy as
that to determine the second;
Limitations:
-
Optical instruments performance (diffraction);

Index of refraction;
4
METER - DEFINITION
Laser wavelengths recommended by BIPM

514nm - 576nm - 612nm and 633nm
These laser wavelengths permit calibration using beat
frequency with uncertainties better than 10-10
Other laser sources developed in laboratories

Nd:YAG at 532nm
METER - DEFINITION
How is it disseminated?
Length Measurement >>>>
Interferometric methods
The wavelength to be calibrated is compared with the

wavelength of a radiation whose frequency was previously
determined with great accuracy (primary laser)
So, the reference is the wavelength of a stabilized (in frequency
or wavelength) laser radiation (primary laser).
Comparisons realized in an interferometer
6
Length dissemination
LENGTH - DISSEMINATION
Reference
Stabilized Laser
Common Laser
source
8
Laser Calibration
Laser He-Ne (Helium-Neon)
transmiting around 633 nm.
Reference Laser
Clients Laser
Detector fast 1 GHz bandpass frequency and associated

amplifier.
Frequency counter with an
integration time of 10 s
Spectrum Analyzer
Beam splitter and other
optical components
Stabilized in frequency saturated absorption method Uses an internal iodine chamber in

hiperfine transition "i" of the spectrum line 11-5, R(127) of the Iodine molecular isotope 127.
Recommendation 3 (CI-1992) of the CIPM, 81th Meeting, 1992;
LENGTH DISSEMINATION
Interferometer
used to calibrate
small gage
blocks
Plane base
Image obtained in the

interferometer chamber (top)
Gage-block
L=+
10
LENGTH DISSEMINATION
Interferometer
used to calibrate
large gage
blocks
Same methodology as last slide blocks in horizontal

position
11
Calibration - Lamed
12
CALIBRATION IN LAMED
Calibration services - Lamed

a) Length standards
-Gage-blocks (comparative method)
-Rings, and plugs
-Spheres
-Step gages
-Ball bars
-Ball plates and hole plates
- Others
b) Instruments
-Tapes and scales
-Dial gages calibrators
(Small angle generator)
- Electronic displacement transducer
c) Roughness standards
-Roughness standards (periodic and non-periodic)
-Depth set standards
d) Form standards
-Roundness standards
-Depth set standards
e) Angle measurement instruments
-Electronic levels
-Auto-colimators
-Rotary / indexing tables
-Digital angular indicators
f) Angle standards
-Optical polygons
-Angular gage-blocks
-Cylindrical squares
- Plane squares
13
Length Calibration
14
LENGTH CALIBRATION
TRACEABILITY CHAIN
(Length)
BIPM
STABLIZED
LASER
(He-Ne)
CADMIUM 114
CRIPTONIUM 86
INTERFEROMETRIC
LASERS
(He-Ne)
INTERFEROMETERS
DEVICES / SYSTEMS
BLOCKS
0.5 - 100 mm
BLOCKS
100 - 1000 mm
COMPARATOR
CMM
BLOCKS
0.5 - 100 mm
BLOCKS
100 - 1000 mm
MEASUREMENT
MACHINES
- RINGS
- PLUGS
- SPHERES
- STEP GAGES
- BALL BARS
- OTHERS
- SCALES
- DIAL GAGE CALIBRATOR
15
Gage-blocks
16
GAGE-BLOCKS
Calibration of gage-blocks by comparison small blocks
Probing
system
17
GAGE-BLOCKS
Calibration of gage-blocks by comparison large blocks
Probing system
detail
18
Lasers
19
LASERS
Laser source
Sensors pressure, humidity, air and

material temperatures
20
LASERS
He-Ne Laser
Quartz tube
gas (He:Ne-10%)
Coil (high frequence generator)

Laser beam
Plane mirror
Semi-transparent plane mirror
How could we measure with this?

21
LASERS
Michelson Interferometer
When DE1 = DE2, the beams return in

phase and will combine constructively
(bright fringes).
Light source
Lens
E1
D
Beam splitter
Mirrors
E2
22
LASERS
Optics
trihedral prism
(reflector)
f2
f1
f1
f2
Splitter
23
LASERS
Laser measurement system
Eletronic unit
Fringe counter
Prisms (trihedral) 900
Converter
Compensation circuit
Display - digital or
directly at the computer
f2
f1
f2
f1
f 1 f 1
f2
f 1 f 1
Laser head
Beam splitter
movement
24
LASERS
Using the laser
Starting point
Beam splitter
laser
L1
Dead path
L2
Lenght measured
25
LASERS
Aplications
Machine Tool
Z
X
Positioning verification
26
LASERS
Aplications
MMC
Z
X
Y
Optical set
up
Straightness verification
27
LASERS
Aplications
Gage-block
Retro-reflector
Moving table
9,000
Beam splitter
9,00003
28
CMM
29
CMM Classification
Manual
CMM
Automatic
CNC
Joystick
30
Types of CMM
CMM
Moving Bridge
31
CMM
Bridge - Fixed
32
Bridge L shape
CMM
33
CMM
Horizontal arm
34
CMM
Double horizontal arm
35
CMM
Portic
36
CMM
CMM Measurement Instrument

h
d
r,c
r,c
d,p
c
d
r
a
r
k
j
i
37
CMM
CMM Measurement Instrument

Softw
are/H
ardw
are
Env
ir
onm
ent
Operator
u
t
e
S
Results
with
Assem
bl
i ng
Errors
g
Probin
38
CMM
They are in general verified

Tolerances
OK!
39
CMM Verification
CMM
Normally made by users with artifacts;

Standardization (JIS, VDI/VDE, ISO...)
40
CMM Errors - Movement/set up
CMM
Rigid
body
movement
41
CMM Errors
Probing
CMM
42
CMM
Equations referred to kinematic system

E = P + A * X + Ap * Xp
Nominal Values
desviation
xtx + ytx + ztx

P = yty + xty + zty
ztz + xtz + ytz
Positioning
deviation
N.V.
Probing length.
Rotational
deviation
0 ywx xrz zwx + xry + yry

A = 0
0
zwy xrx yrx
0
xrx
0
0
xrz yrz zrz xry + yry + zry
Ap = xrz + yrz + zrz

0
xrx yrx zrx
xry yry zry xrx + yrx + zrx
x
X = y
z
xp
Xp = yp
zp
43
CMM calibrating artifacts

(by comparison)
44
STEP-GAGE CALIBRATION-CMM
CMM Errors
Movement/set up
Zc=Zm
Cinematic
system
Xm
Ym
Yc
Xc
45
X direction set up
Sensors Gageblocks
temperature
Sensors Step gage

temperature
y
46
Measurement uncertainty
47
Y direction set up
y
Gages must be measured
always in the same position
over the machine table
48
Step gage calibration
Step gage must be

measured rigorously at the
same positions previously
occupied by the blocks
x
49

Error compensation
50
ERROR COMPENSATION-CMM
Straightness
Straightness
Systematic
A1
(A1+B1)/2 = 0
Coord. system
changes
A2
B2
(A2+B2)/2 = SD
B1
error
51
Straightness and
parallelism
in cylinders
52
Position of the
spheres in the ballplates
Possible to
compensate all
deviations except
for the positional
ones
A gage is needed!
53
4 positions >> determination of the 21

deviations
Ball or hole plates
Utilizao das
placas
54
Y MMC
Yobj
Dx ( xi, yj) = xtx ( xi ) + ytx ( yi) + ( ywx xrz ( xi )) * yj
25
21
D0
Dy ( x, y ) = yty ( y ) + xty ( x)
Xobj
XMMC
Y MMC
21
Yobj
Y MMC
DY
XMMC
Xobj
1
XMMC
55
Y MMC
DZ
5
Xobj
Y MMC
Yobj
21
D0
25
21
Yobj
XMMC
Y MMC
XMMC
XMMC
56
Y MMC
Yobj
D0
DX
21
25
Y MMC
5
Xobj
21
Yobj
XMMC
Y MMC
XMMC
57
Adding all the equations D0x, DZx, DYx, DXx
D0 x + DZx + DYx + DXx ( xtx i + ( xtx m xtx m 1 ))

=
4
2
Adding all the equations D0y, DZy, DYy, DXy
D0 y + DZy + DYy + DXy ( ytyi + ( yty m yty m 1 ))

=
4
2
xtx, yty - deviations to

be determined
58
Reference gage-blocks
59
Ball
plate- Placa
measurement
Incerteza
de esferas
uncertainty
1,5
1,4
1,3
U( m)
1,2
1,1
1
0,9
0,8
0,7
0,6
0,5
0
50
100
150
200
250
300
350
400
450
500
550
V.N.
60

with a coupled laser
as reference
61
CMM-LASER
CMM LASER SYSTEM
UMM 500 ZEISS

62
CMM-LASER
System to measure lengths

CMM - Laser
Tgag
e
Tair
Ll
Lm
63
CMM-LASER
System model
Movement
Abbe
Tair
Pair
uair
Grad(TM)
Probing
nm
ig
Al
t
en
Corrosion
nm
en
t
Software
%CO2
Laser
Alignment
CMM
TPdr
Gage
Fixation
Ali
g
Strategy
Defects
Dirt
Environment
Material
64
CMM-LASER
Environment conditions short period
12h00min
65
CMM-LASER
Model
Gage lenght
Laser beam
x
Laser display
Y
Difference = probe diameter
Abb principle
Only if in laser direction

66
CMM-LASER
Mathematic Model
l g = ll d
E la E ga E dp E sys
dp
n0
1
lg = l l * *
Ela E ga Edp Esys

n (1 + * (Tg Tr )) (1 + * (Tg Tr ))
67
CMM-LASER
Refraction index of the air

air < vac
vac
air
vac= ar
Refraction index of the air

wavelenght in vacuun;
wavelenght in air;
68
CMM-LASER
Refraction index of the air - Edln :
(s 1) 1+108 (2 + 3T) p
1
10
= p
f 5 + 6 10 +1
1
(1+ 4T)

where :
p
f
T
Air pressure - Pa;

Parcial pressure for moist air - Pa;
Air temperatue - C;
Wave length
Ki are constants
69
CMM-LASER
Dead-path
Beam splitter
Initial point
laser
L1
L1 - Dead path
L2
L2 - Measured lenght
DP = L1* * ( T )
70
CMM-LASER
Cossine error - Laser
L = Laser displacement
M = Table displacement
Retro-reflector plane
L
Laser beam
Table movement axis
M L
2
=
= (1 cos ) =
M
2
71
CMM-LASER
Cossine error - Gage
L
M
M L
2
= (1 cos ) =
=
M
2
= ( M * sin )
72
CMM-LASER
Gage temperature
L20 = Le /(1 + * (Te 20)
= Thermal expansion coefficient;

Le = Lenght at the environment temperature;
L20 = Lenght at 20 0C;
Te = Calibration temperature;
73
CMM-LASER
Validation to calibrate step

gages (gage-blocks)
74
CMM-LASER
Set up - Alignment and fixation of

the gage-block
y
Laser
beam
100m
m
25mm
25m m
Plate for alingnment
Ajusting bolts
Calibration based in KOBA geometry
75
CMM-LASER
Horizontal positioning
25mm
Begining
of the
scale
25mm
Calibration based in KOBA geometry
76
CMM-LASER
Alignment error
z
XZ= Z/25mm
25mm
Block
XY= Y/5mm
ErrorY= Y/5mm
5mm
Table
ErrorZ~ 5m
ErrorDZ ~ 1m
77
CMM-LASER
Gage-block measurement
5mm
Probing error determination
20mm
50mm
100mm
Positioning error determination
200mm
300mm
400mm
78
CMM-LASER
Systematic positioning corrections
0,2
m
79

with a coupled laser
By Comparison
80
CMM-LASER
Rings, plugs and spheres calibration

>Results of calibrated system not used
>Evaluation of the probing errors at each calibration
>Differences between internal and external probing
>Measurements in the centre of the machine table (Range : 200mm)
81
CMM-LASER
The right measurement strategy
Gage-block - Strategy 1
X direction
Ring-gage - Strategy 3
Ring - gage - Strategy 2
Ring-gage - Strategy 4
Strategies 1 and 3 lead to the same results

Umin =0,2 m
82
Line scales calibration
83
SCALES
Gages used as reference to other measurement

systems
84
SCALES
The calibration
Determination of the
distances m1, m2,
m3...
m1
m2
m3
85
SCALES
86
Laser measurement system
Conversor
Prism
SCALES
Plane mirror
LASER
Beam splitter
Scale
Moving table
Prism
87
SCALES
Roughness and Form
88
ROUGHNESS
TRACEABILITY CHAIN
(Roughness)
ROUGHNESS
STANDARDS
PTB
DEPTH SET STANDARDS
RUGOSIMETER
ROUGHNESS
STANDARDS
(NONPERIODIC)
ROUGHNESS
STANDARDS
(PERIODIC)
Depth set standards
89
ROUGHNESS
Parts from mechanical industry
90
ROUGHNESS
Rough surfaces
91
ROUGHNESS
Form, waveness e roughness
92
ROUGHNESS
Total profile, waveness e roughness
93
ROUGHNESS
Rugosimeter
94
ROUGHNESS
Roughness and depth set standards

Depth
Roughness
95
ROUGHNESS
Probing
96
ROUGHNESS
Roughness parameters Ra, Rq

U = 4% (Lamed)
97
ROUGHNESS
Roughness parameters Rz
U = 4% (Lamed)
98
ROUGHNESS
Depth set standard

U= 0,03 m
99
ROUGHNESS
Nom-periodic profile
100
ROUGHNESS
Periodic profile
101
ROUGHNESS
6 grooves depth set standard
102
FORM
TRACEABILITY CHAIN
(Roundness)
PTB
ROUNDNESS
STANDARD
FLICK STANDARD
TALYROND 73 HPR
FLICK
STANDARD
ROUNDNESS
STANDARDS
RINGS AND
PLUGS
103
FORM
Roundness standard
Flick standard
104
FORM
Instrument to form measurement roundness

Talyrond 73
105
FORM
Measuring a flick
Measuring hemi-spherical
106
FORM
Measuring a flick Calibration by comparison
107
FORM
Measuring a cylinder
108
FORM
Graphs from two gages

Lamed standard
Client standard
109
FORM
Angle Measurements
110
Angle
111
Angle
Plane angle units

International Sistem (SI)
Radian: [rad]
Dimensionless unit derived from SI
more used:
Sexagesimal: degree [o] minute [] second []
Trigonometric: [mm/m]
112
Angle
Realization
- Graduated circule
Circular division
- Quocient between two lengths
Sine and tangent
113
Angular standards
Angular standards
Materialized angles Angle generated by Angle generated by
circle division
relation between
lengths
Angle gage-blocks
Optical poligons
Squares
Circular Scales
Indexing tables
Rotary table
Small angle
generator
114
Angular standards
Angle gage-blocks set
Rigid Base
Indexing
table
Block
Levelling
table
180
+
0
Autocolimator
115
Angular standards
Optical poligon
116
Angular standards
Cilindric square
117
Angular instruments
Indexing table
118
Angular instruments
Circular scales
119
Angular instruments
Autocolimator
120
Angular instruments
Autocolimador - Principle
plano focal
objeto
90o
objeto
foco
imagem
imagem
(a)
d=2f
f
(b)
121
Angular instruments
Eletronic laser autocolimator optical scheme

visada da
ocular
(coincidncia
dos retculos)
retculo de
referncia
ocular
retculo
semirefletor
espelho
inclinado
L.E.D
lente de
colimao
detector
infra
vermelho
diodo
infra
vermelho
x
y
display
122
Angular instruments
Electronic Level
Bubble Level
123
Angular measurements
Flatness measurement
124
Angular measurements
Straightness Verification
125
Plane angle realization
Small angle generator
126
Small angle generator
s eg
+
0,0002mm
412,529mm
= 0,1
Measurement range: 0 a 42
U = 0,20
127
Indexing table and optical

poligon calibration system
U = 0,26
autocolimador
polgono ptico
eixo
suporte
do
polgono
unidade
eletrnica
mesa divisora
de referncia
mesa
auxiliar
+2.3
-
seg
+
X Y
128
Polygon and indexing table calibration

Angle representation
B5
A5
A4
A3
B4
1
A2
0
2
A1
B3
B1
B2
1/28
Polygon and indexing table calibration

Multi-step method
Comparison between a polygon and in indexing table
1 Auto-colimator
1 auxiliary table
autocolimador
polgono ptico
mesa de
referncia
mesa
auxiliar
1/28
Muchas gracias!
Thank you!
131

Dimensional Metrology - Joao Alves PDF

Uploaded by

Document Information

Original Description:

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Dimensional Metrology - Joao Alves PDF

Uploaded by

Copyright:

Available Formats

Dimensional

1983 New definition >>> Associated to the speed of light

Meter: How is it realized?

Optical instruments performance (diffraction);

Laser wavelengths recommended by BIPM

Other laser sources developed in laboratories

The wavelength to be calibrated is compared with the

Detector fast 1 GHz bandpass frequency and associated

Stabilized in frequency saturated absorption method Uses an internal iodine chamber in

Image obtained in the

Same methodology as last slide blocks in horizontal

Calibration services - Lamed

Calibration of gage-blocks by comparison small blocks

Calibration of gage-blocks by comparison large blocks

Sensors pressure, humidity, air and

Coil (high frequence generator)

Semi-transparent plane mirror

How could we measure with this?

When DE1 = DE2, the beams return in

Laser measurement system

Prisms (trihedral) 900

Using the laser

Double horizontal arm

CMM Measurement Instrument

CMM Measurement Instrument

They are in general verified

Normally made by users with artifacts;

Equations referred to kinematic system

xtx + ytx + ztx

0 ywx xrz zwx + xry + yry

Ap = xrz + yrz + zrz

CMM calibrating artifacts

Sensors Step gage

Step gage calibration

Step gage must be

CMM calibrating artifacts

4 positions >> determination of the 21

Dx ( xi, yj) = xtx ( xi ) + ytx ( yi) + ( ywx xrz ( xi )) * yj

Adding all the equations D0x, DZx, DYx, DXx

D0 x + DZx + DYx + DXx ( xtx i + ( xtx m xtx m 1 ))

D0 y + DZy + DYy + DXy ( ytyi + ( yty m yty m 1 ))

xtx, yty - deviations to

CMM calibrating artifacts

CMM LASER SYSTEM

UMM 500 ZEISS

System to measure lengths

Environment conditions short period

Only if in laser direction

Ela E ga Edp Esys

Refraction index of the air

Refraction index of the air

Refraction index of the air - Edln :

Air pressure - Pa;

Cossine error - Laser

Cossine error - Gage

L20 = Le /(1 + * (Te 20)

= Thermal expansion coefficient;

Validation to calibrate step

Set up - Alignment and fixation of

Plate for alingnment

Calibration based in KOBA geometry

Calibration based in KOBA geometry