HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Microactuators
Introduction to Micro System Technology
Lecture 6

Quan Zhou

Outline
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Definitions
Performance measures
Basic actuator technologies
piezoelectric
electrostatic
shape memory alloys
electromagnetic
EMFi
MSM
other actuators

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 Microactuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Actuator
A device that transforms energy into controllable motion
Performs useful work on the environment in response to a control signal

Definition by the lecture text book

microactuator is a device of a few micrometers to few centimeters in size
having a functional principle applicable in the microworld.

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Performance Measures
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Linearity Scaling
Accuracy Power efficiency
Precision Drift
Resolution Threshold
Repeatability Step response
Sensitivity
Speed
Hysteresis
Span

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 Linearity

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Linearity
Refers to the linearity of the output as a
function of its input
Maximum difference between a
reference linear line and the actuator
output
Expressed as a percent of full-scale
output
Reference line: best-fit line or line based
on terminal points
Repeatability
Deviation of output over cycles of
operation
Maximum different between the output
5

2
value at the same input value
1 R = max(Yi(X) - Yk(X))
laser

-1

-2

-3

-4
-6 -4 -2 0 2 4 6
Control V
Table of Contents, Slide 5 HELSINKI UNIVERSITY OF TECHNOLOGY
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Precision, Accuracy, Resolution

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Precision
how exactly and reproducibly a
desired actuation is executed
Precision Accuracy
the difference between actual
motion and target motion.
a(%) = (Ya - Yt) / Yt
FSO(%) = (Ya - Yt) / YFSO
| FSO| <= |a|
FSO = Full Scale Output
Resolution
smallest increment in input that
results in detectable actuation
Smallest Inducible Output
smallest step that can be detected

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Control Engineering Laboratory
 Span, Sensitivity, Speed, Drift

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Span
full-scale operating range of the actuator output

Sensitivity
the ratio of the actuator output Y to an incremental change in its input X
S = Y X
is a function of temperature, etc, usually not linear

Speed
the speed at which the actuator output can be changed v = dY dt

Drift
change in actuator output with time, temperature, etc

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Hysteresis, Threshold, Backlash, Noise

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Hysteresis
the difference in the actuator output
Y when Y is reached from two
opposite directions
Threshold
starting from zero input, the
smallest initial increment in the
input that results in detectable
actuator output (a in figure)
Backlash
Lost motion after reversing
direction (b).
Noise
fluctuations in the output with zero
input

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 Hysteresis and drift

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

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Load-Bearing Capability and Stiffness

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Load changes the behavior of the actuator

force - displacement curve gives the static behavior
10

8
Load line
Force (N)

Actuator F-X
2

0 1 2 3 4
Displacement (um)
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 Step Response

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

The actuator output does not change abruptly in response to a step input
transient behavior

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Scaling
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Scaling
to evaluate how different actuation methods scale, a scalability measure
has been introduced
Sc = ( d / dV )

is power efficiency and V is volume

power efficiency: Pout / Pin

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 Mini and micro actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

The selection of the most suitable actuation principle depends on

many factors, such as
required forces
amount of motion needed
accuracy
size requirements
speed
...
No ideal motion principle

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Classification
of Actuators
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Classification based on the

type of input energy
electrical
fluidic
thermal
chemical
optical
acoustic

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 Actuation Types

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

This lecture Not covered

Piezoelectric actuators Optical actuators
Shape Memory alloy Chemical actuators
Electrostatic actuators Acoustic actuators
Electromagnetic actuators
EMFi
MSM
other actuators

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Linear Motion Miniature Actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

few linear actuators that have small size, high resolution and long
total displacement at the same time
small size long total displacement
commercial products compete with precision or resolution
Most commercial applications today are based on electromagnetic or
piezoelectric principles
Research mostly prefers micro- and nano actuators

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 Piezoelectric effect

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Some crystals develop an electrical charge when exposed to mechanical stress

Conversely, the application of an electric field to a piezoelectric crystal leads to a
physical deformation

Piezoelectric buzzers
Piezo elements by PI in alarm devices

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Piezoelectric effect ...

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

First discovered by Curie brothers in 1880

First applications with natural single crystals in
1920s
e.g. quartz
In the 1950s piezoelectric ceramics
(e.g. lead zirconate titanate, PZT)
Piezoelectric polymers (e.g. PVDF)

Piezoelectric ceramics must undergo a

polarizing process for the piezoelectric
phenomenon to occur
Crystal structure must be asymmetric

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 Piezoelectric elementary cells

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

PbZrO3-PbTiO3

PZT

Above Curie temperature Below Curie temperature

Ti/Zr ion has six

equivalent
positions in
potential energy

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Piezoelectric ceramics...
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

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 Piezoelectric ceramics

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

As macroscopic point of view, molecular dipoles align within small areas forming
large dipole moments
The domains are randomly oriented and therefore the net external electric dipole is
zero
If material is subjected to large electric field, the domain dipoles within a gain align
in the direction closest to the field (poling)

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Piezoelectricity models (micro)

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Direct effect
Sk is strain (relative displacement) tensor
S k = s ikETk + d ik Ei dik is a matrix of piezoelectric constants, m/V
Inverse effect Ei is the electric field vector, V/m
sE is the elastic compliance matrix when
Di = d ik Tk + ikT Ei
subjected to a constant electric field, m2/N
Ti is stress (force/unit area) tensor, N/m2
i = 1,2,3 indices of components of Di is electric displacement vector, C/m2
polarization ik is the permittivity measured at constant
k = 16 of mechanical stress and stress, As/Vm
strain

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 Piezoelectricity models...

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

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Piezoelectricity models (macro)

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

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 Preloaded piezoelectric actuator model

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

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Temperature dependency of the piezo effect

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

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 Piezoelectric actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

An electric field acting on a piezoelectric ceramic leads to a physical

deformation of the ceramic
PZT ceramic is widely used
High-voltage (1000 V) and low-voltage piezo actuators (100 - 200 V)
Designs:
stacks
tubes,
bimorphs
hybrid
rotational motors
stepping motors

Physik Instrumente

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Piezo ceramic properties

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

General properties
Fast (kHz)
High force (MPa)
High resolution (subnanometer)
Good efficiency
power losses nearly zero at static
case
Small strain (~0.1-0.2 %)
High voltage (60-1000 V)
Large hysteresis (15-30%)
Drift

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 Piezoelectric Stack Actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Ceramic and metallic plates stacked

one after another to increase the
maximum displacement
Many products commercially
available
Advantages:
good resolution
high speed
high output force
low power consumption
Disadvantages:
small total strain
hysteresis
drift

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Examples of Piezo Stacks

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Piezo systems Inc

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 Piezoelectric Bimorph Actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Bending actuator (bimorph) Cantilever design

Two piezo layers with opposite
polarization connected together
Resembles bimetal structure
While one piezo layer expands,
the other contracts, the net
motion is greater than the
actual strain of the material
Good displacement S-beam design
Weaker force, slower than e.g.
stack
Benders can also have one
piezo layer, where the piezo
layer attached to a metal is
bending the structure

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Example of Piezo benders

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

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 Piezo tube actuator

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Operate on the transversal piezo

effect.
Can operate in all three axis
Small displacement
Relative small force

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Example of tube actuator

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

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 Magnification of displacement
of piezo actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Lever systems
lever arms of dissimilar lengths
Hydraulic systems
piston and bore assemblies
Composite systems
combine several basic designs
Ultrasonic motors
Stepper systems
several small steps

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Piezoelectric motors
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Small periodical movements summarize to a greater motion

Both rotational and linear motors
Vibration-based motors (Ultrasonic and sonic)
standing wave
traveling wave
Inchworm motors
Inertia based motors
Properties
The hysteresis and drift become insignificant
High resolution
Large travel / motion range
Gearless, simple mechanical structure
Friction based, therefore load affects step length and this leads to
inaccuracy in open loop systems

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 Ultrasonic motors

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Work in the ultrasonic range (40 - 45 kHz) i.e. above 20 kHz and are
therefore inaudible to the human ear
developed in 1980s in Japan
Standing wave ultrasonic motors
Standing wave produces also lateral motion vector through extensions on
the surface

Ultrasonic motor by University of Missouri-Rolla

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Ultrasonic motors
Traveling wave ultrasonic motors
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Traveling wave of the flexural vibration

is produced by applying high frequency
voltage signals with a phase difference
of 90 degrees to a piezoelectric
element.
An oval-shaped trajectory opposite to
the traveling direction of the wave is
drawn at the point that is in contact with
the moving body (rotor)
Utilized in camera auto focus, e.g. by
Canon

Ultrasonic motor by Canon

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 Piezoelectric linear motors

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Piezoelectric linear steppers

Physik Instrumente Nanomotion

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Inchworm stepping motors

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Movement along a rod by three

piezoelements
Unlimited movement
Good resolution
Internal encoders
Maximum speed 2 mm / s
Drawback: expensive

Inchworm by
Burleigh

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 Other piezoelectric steppers

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Stick & slip actuators by EPFL A piezo stepper by Klocke

Nanotechnik
utilizes a piezo tube for fine
positioning and a shock wave
produced by the same piezo
for coarse movements

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Piezoelectric steppers...
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Impact drive actuators

Developed by Higuchi
Utilizes static friction and impulsive
force caused by the rapid
displacement of an actuator.
When the actuator makes rapid
extension or contraction, a strong
inertial force is generated and the
main body is moved against static
friction.
When the actuator makes slow
retraction, the inertial force could
be smaller than static friction so
that the main body keeps the
position

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 Piezoelectric resonance structures

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

A piezoelectric layer is used to excite

a beam, diaphragm or a micro bridge
Applications
gyroscopes
microbalances
Micropumps
AFM

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Control of piezoelectric actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Voltage control
Feed forward
Feed back
Charge control
Feed forward
Feed back

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 Applications of piezo actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Micro/nano robotics
Motion actuation
Gripper
etc
Vibration control
HUT

Newport MIT
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Control Engineering Laboratory

Applications of piezo actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Consumer electronics
Camera
Inkjet print head
Buzzers/speakers
Fluidics
Active valve
Micropump
Droplet dispensers

Microdrop

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 Shape Memory Alloy

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Shape Memory Alloys (SMAs) are metallic materials that have an

ability to remember their original shapes
Discovered in 1930s by a Swedish physicist Arne lander
Widely used Nickel-titanium (NiTi) alloys were found in the beginning
of 1960s in U.S. Naval Ordnance Laboratory

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Shape memory alloys

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Shape memory effect: the alloy tends

to return to its original shape
Shape is defined, stored into the
memory of the material during a
tempering process
Nickel Titanium is a widely used alloy
Large strain (5 %) compared with
piezoelectric
Disadvantage: slow speed of
response
Because of heating and cooling: the
smaller the size the faster it is

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 SMA Working Principle

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Reversible, thermic-mechanical transformation of the atomic

structure of the metal at certain temperatures
Austenite form = high temperature form
Alloy above transformation temperature
Alloy returns to a desired shape (after deformation at martensite form) and
generates force/stress and a displacement
Martensite form = low temperature form
Alloy below transformation temperature
Remains in austenite form position if there is no external stress
Alloy can be deformed with an external stress

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SMA Working Principle

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Austenite
Stress

M artensite

Strain

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 SMA Working Principle

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Heating of SMA by electric current fed

through the element
Cooling with ambient material (air,
water, etc.), also additional cooling
possible
AMT Maximum deformation 8%, usually
approx. 4%
Several alloys with different
properties
Ni-Ti alloy most common
Also Au, Cd, Cu alloys
Alloy composition affects
transformation temperatures,
AMT hysteresis, maximum force, etc.

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Products
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Wires, springs, tubes and bars of

SMA available is several sizes and
alloy compositions
Also complete actuators available for
some applications

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 Properties of SMAs

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Ni-Ti alloy has largest hysteresis

Transformation temperature can
be changed by altering the
amounts of different metals
Working stress:
40130MPa;
40130N/mm2
Superelasticity

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Properties of SMA Actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Advantages
High force/weight and force/volume ratios
Large deformation
Heating by current fed through the alloy => simple
Cooling by ambient material => simple
Raw material inexpensive
Disadvantages
One wayoperation => bias force required
Heating/cooling cycles reduce band-width
Amount of cycles reduces maximal deformation
(>100 000 cycles => maximal deformation 4%)
Cycling changes the properties of the alloy (hysteresis, temperatures)
Hysteresis (1030C), nonlinearity

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 Control of SMA

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Displacement control
Hysteresis, nonlinearity
No direct relationship between current/resistance/temperature/force and
deformation
On/Off control
Constant heating to maintain austenite phase
No heating at all to return to martensite form (with bias force)
Feedback control
Displacement measurement needed if accurate or fast changes required

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Application of SMA
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Medical SEM of deflectable NiTi

microscissors. The
Microsurgical instruments, stents entire scissors structure
is made of a thin NiTi

Aerospace wire. (University of

Karlsruhe)

Connectors, lock rings

Automotive
Ni-Ti thermostat
Industrial
Valves, pipe connectors
Consumer
Eyeglass frames
Safety
Fire safety valves
A NiTi spring in coffeepots marketed by
Carioca in Japan is trained to open a valve
and release hot water at the proper
temperature to brew a perfect pot of coffee.

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 Electrostatic actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

The attractive force between two

conductive plates with unlike charges
(Coulombic force)
2
U
FN = 2 A
1

d
Most electrostatic actuators are still at
research level and in micro size
Advantages
Scaling-down is beneficial
Easy to miniaturize
Disadvantages
A dust particle and surface defects
can cause a breakdown due to a
small air gap
High voltages

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Electrostatic actuators, linear motion

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Structures for linear motion

Plate and membrane structures
Comb structures (normal force)

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 Electrostatic actuators, rotational

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Structures
Comb structures (tangential force)
Wobble motor
Torque has been small
Lifetime has been short due to
friction
Electrostatic motor
by LAAS, France

Wobble motor:
Rotor that is located inside a stator forms the axis
of the motor
- electric field moves the rotor inside the stator
- friction rotates rotor

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Rotational Microactuators
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Micromotors
Electromagnetic mini and
micromotors
Elecrostatic motors
Piezoelectric motors

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 Electromagnetic Mini Motors

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Principle utilised frequently in the

macro world
Commercial miniaturised motors
reduces in dimensions, for example
3 mm, L 10 mm
Miniaturized solutions often
brushless DC motors
Torque still question mark

C.I. Kasei

Smoovy

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Electromagnetic Mini Motors, Linear

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Motion is transferred to linear by

combinations of screws and nuts, ball
bearings or roller screws
Linear stepper motor: through a
threaded nut and leadscrew

Smoovy

Linear stepper
by HSI

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 Electromagnetic Micro Motors

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Problems
difficult to miniaturize (not
compatible with IC production
technologies)
complex
scaling not advantageous
inefficient
Benefits
high power output can be achieved
insensitive to gap contamination
drives need only low voltages
reliable

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Linear stepper motors

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Linear stepper motors operate in a

straight line on a fixed base

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 Voice coil actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Based on the Lorentz force

Use permanent magnets
Nanometer resolutions are possible
Drawbacks
can generate heat
Applications
positioners in computer disk drive
heads and in mirror systems
Micropositioning (with compliant
mechanics)

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Control Engineering Laboratory

EMFi film structure

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

A VTT invention
The ElectroMechanical Film is a
thin,biaxially oriented polypropylene
film that can be used as an electret
inner layer polypropylene (PP)
surface layers conductive
total thickness 3070 m
elastic due to the voids capturing
air in the film

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Control Engineering Laboratory
 EMFi working principle

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

A simplified single air-

gap model

Table of Contents, Slide 67 HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

EMFi advantages
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

low costs
low volume, approximately 50 m thickness
inexpensive materials, polypropylene and aluminum
high sensitivity
light weight
low volume
air gaps
easy to cut
flexible, covers round and concave surfaces

Table of Contents, Slide 68 HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory
 Applications of EMFi

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Noise reduction
Keyboard

Microphone
EMFi floor

Table of Contents, Slide 69 HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Magnetic Shape Memory (MSM) Effect

MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

A form of the material stored into the

memory
Material is deformed using magnetic field
Product of a Finnish company Adaptamat,
Properties
Strain several %s (up to 10 %)
Displacements in milliseconds
Large output forces (hundreds of
N/mm2)
Drift, hysteresis
MSM consists of internal areas, twin
variants, which have different magnetic
and crystallographic orientations
Applying the magnetic field H to the single
variant material causes the other twin
variant to appear and grow

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Control Engineering Laboratory
 Electrostrictive actuators

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Deformation of the material in an

electric field
Crystal stack design & polymers
Electrostrictive crystals are not poled
The strain is in the same order as
piezoelectric
Provide better characteristics of creep
compared to piezos
Drawback: strain sensitivity to
temperature
Show higher capacitance
Commercial actuators exist

Table of Contents, Slide 71 HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory

Magnetostrictive actuators
MICRO AND NANO SYSTEMS RESEARCH GROUP
MICRO AND NANO SYSTEMS RESEARCH GROUP

Magnetostrictive effect
ferromagnetic crystal changes its
shape when subjected to a
magnetic field
Terfenol-D has been the most widely
used
Typically a magnetostrictive rod
placed inside a coil
Large output forces and quick
dynamic responses
Etrema
Disadvantage
small displacements
Applications
Active noise & vibration control

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Control Engineering Laboratory
 Other actuators and phenomenon

MICRO AND NANO SYSTEMS RESEARCH GROUP

MICRO AND NANO SYSTEMS RESEARCH GROUP

Hydraulic actuators
Large in size and high output forces
Can have zero friction and nearly backlash free power transmission
Piston, rod systems, metallic bellows and rubber components
Electrorheological fluid :
The form of it changes when it is placed in an electric field
Consist of micro-sized particles suspended in a dielectric liquid
Simple structure - only fluid and electrodes are needed
Drawbacks: weakness as solids and chemical instability
Magnetorheological fluids:
The flow rate is controlled by the strength of a magnetic field otherwise similar to
electrorheological fluid

Table of Contents, Slide 73 HELSINKI UNIVERSITY OF TECHNOLOGY

Control Engineering Laboratory