Amostra C1A

2
Y[m]

0 1 2 3
X[m]
RMS= 2.00 nm (3x3um)

Amostra A2A
3

2
Y[m]

0 1 2 3
X[m]
RMS= 5.1 nm (3x3 m)

Amostra B1
 3

2
Y[m]

0 1 2 3
X[m]