Chng 4.

CC PHNG PHP O LNG DI BNG LASER

4.1 o chnh xc di bng giao thoa k laser.
4.1.1 Hiu ng giao thoa.
Hin tng giao thoa xy ra khi hai sng nh sng n sc v kt hp gp
nhau ti mt im, hay ni mt cch khc hai sng nh sng phi pht t hai
ngun sng ging ht nhau, thng ngi ta s dng hai sng c tch t cng
mt ngun pht sng.
4.1.1.1 S giao thoa ca hai sng kt hp
minh ho cho hin tng giao thoa ca nh sng, ta xt trng hp giao
thoa ca hai sng cu nh hnh 4.1.
Gi s ta c hai ngun sng n sc kt hp s1 v s2, ti mt im M trong
mi trng truyn sng nhn c ng thi hai dao ng t s1 v s2.
Theo nguyn l chng cht, dao ng tng hp ti M l tng vc t hai dao
ng thnh phn t ti . d kho st, ta gi thit rng hai sng c cng
mt bin khi dt ti im M . Tc l
t d
s1 = acos [ 2( - 1 ) + 1 ]
T
t d2
s2 = a cos [ 2 ( ) + 2 ]
T
trong d1 v d2 l qung ng truyn sng t s1 v s2 ti M, T l chu k
sng, l bc sng, 1 v 2 l pha ban u ca hai sng. Gi s hai dao ng
cng phng, do ln ca dao ng tng hp tm c theo php cng i
s:
d d1 t d d
s=s1 +s2 = 2acos( 2 + 1 2 )cos 2 2 1 1 2
2 T 2 2
Dao ng tng hp c cng chu k nh hai dao ng thnh phn v c bin

d 2 d 1 1 2
A=2acos( )
2
v do cng sng ti im M l
d 2 d 1 1 2
I = A2 =2a2+2a2cos 2
2
d 2 d 1 1 2
Lng 2 chnh l hiu pha ca hai sng khi gp nhau ti
2
M .V (1 - 2 ) / 2 = const , nn s phn b di ph thuc vo hiu ng i
d2-d1.

1
 Hnh 4.1 S giao thoa ca cc sng ph hp v nh vn giao thoa

Do tho mn iu kin d2 - d1 = const nn qu tch ca nhng im l cc

mt Hypecboloit trn xoay nhn ng s1s2 lm trc v nhn cc im s1 , s2
lm cc tiu im, hnh 4.1.
+ di t cc i bng 4a 2 khi hai sng ng pha, tc l d2 - d1= m vi
m l s nguyn hay hiu quang l l mt s nguyn ln bc sng.
+ di t cc tiu v bng khng khi hiu quang l l mt s l ln bc
sng.
Hin tng khi tng hp hai sng c cng tn s v c hiu pha ban u
khng i, cho nhng min sng lun c cng cc i xen k vi nhng
min sng lun c cng cc ti, c gi l giao thoa nh sng.
Nh th, v thc cht giao thoa ca sng l s phn b li nng lng dao
ng trong khng gian, tn ti nhng im lun dao ng vi bin cc i
xen k vi nhng im lun dao ng vi bin cc tiu .
Mun s phn b l n nh trong khong thi gian quan st c,
th hiu pha ca chng phi khng i t nht trong khong thi gian . Hai
sng cng tn s v c hiu pha khng i gi l hai sng kt hp v sng kt
hp l i kin cn c giao thoa.
4.1.1.2 S giao thoa ca hai sng trong trng hp tng qut
y ta xt s chng cht hai sng trong iu kin tng qut. Trc ht xem
rng hai sng s1 , s2 c phng bt k, khi vic tng hp dao ng thc hin
bng php cng vc t
S = S1 + S2
Cng ca sng
I = S2 =(S1+S2)2 = S12+S22 + 2S2S2
Ly trung bnh theo thi gian quan st, ta c
(S2) = (S12) + (S22) + 2S1S2
Khi S1 v S2 l sng phng n sc th (S2)=a 2/2 nn

2
 1 2 1 2 1 2
a = a1 + a2 +2(S1S2)
2 2 2
S hng 2(S1S2)gi l s hng giao thoa, v nu n bng khng th
a2=a12 +a22
Cng ca dao ng tng hp l tng n gin ca cng gy ra bi
hai dao ng thnh phn v khng c giao thoa.
Vy iu kin th nht c giao thoa l: phng dao ng ca hai sng
khng vung gc vi nhau. Trng hp hai sng ng phong, ch l trng
hp ring c giao thoa. Tuy nhin, khi gc (S1, S2) 0 v 900, ta c th
phn tch mi vc t thnh cc thnh phn song song vi nhau tng i mt.
By gi ta xem rng hai sng n sc dao ng cng phng y c tn s
khc nhau
S1 = a1cos(1t-1 ) vi 1 = k1d1-01
S2 = a2cos(2t-2 ) vi 2 = k2d2-02
trong k1 = 2/1v k2 = 2/2 l s sng ng vi cc tn s 1 , 2. Khi

1 t'
(S1S2) =(s1s2) = s1 s2 dt
t' 0
t' t'
a1 a 2
{ cos[(2 1)t (2 1)dt + cos[(2 1)t (2 1)dt }
2 t ' 0
=
0

quan st c nh giao thoa th thi gian quan st t phi ln so vi

chu k dao ng vy ch c tch phn th nht c th khc khng vi iu kin :
- hiu 1-2 nh
- 02-01 =const
1
Khi 1 = 2 th (s1s2) = a1a2cos(2-1)
2
Vy iu kin th hai quan st c vn giao thoa (tc l h vn n nh
trong sut thi gian quan st ) l hai sng phi c tn s khc nhau khng
nhiu v c hiu pha ban u khng i. iu c ngha l phi c s cng cc
sng kt hp.
Khi hai sng bin phc U1(r) v U2(r) chng cht ln nhau, kt qu l mt
sng n sc c cng tn s v c bin phc
U(r) = U1(r) + U2(r)
V I1 = U1 2 v I2 = U 2 2 , cng sng tng l
I= U 2
= U1 U 2 2 = U1 2
+ U 2 2 + U1*U2 + U1U2*
v U1 = I1 exp (i1) v U2 = I 2 exp (i2)
Biu thc cng ca sng tng hp khi giao thoa gia hai sng kt hp c
bin khc nhau l

3
 I = I1+I2 +2 I1 I 2 cos(2-1)
Trong trng hp tng qut ny
Imax = I1+I2 +2 I1 I 2
Imin = I1+I2 -2 I1 I 2
I max I min 2 I1 I 2
i lng = = c gi l su hay tng phn ca
I max I min I1 I 2
nh giao thoa.
4.1.1.3 S hnh thnh vn giao thoa ng nghing
Ta t trc mt ngun sng rng mt bn phng song song A, c b dy e
hnh 4.2.

R F
S S R1
R
R1 O
I K I K
e
J J1
R2 R3

Hnh 4.2 S hnh thnh vn ng nghing

Tia sng S n mt bn cho ta mt tia phn x IR v tia khc x IJ, tia khc
x IJ ti mt th hai ca bn li cho tia phn x JK v tia khc x JR 2. Tia JR2
l ra khi bn theo phng song song vi tia ti SI, cn tia JK tr li ti mt th
nht cho tia phn x KJ1 v tia khc x KR1. Cc tia l ra sau mt th hai ca
bn c cng chnh lch nhau nhiu nn ta khng xt.
Gi gc ti v gc khc x ca tia sng i vi bn mt l i v r, n l chit
sut ca bn, bn c t trong khng kh vi chit sut n 1. Khi hiu
quang trnh ca cp tia IR v KR1 bng

= 2 n e cos r +
2
Do bn mt song song vi nhau, e khng i , hiu quang trnh ch ph thuc
gc khc x r, tc gc ti i, m khng ph thuc vo im ti ca tia sng trn
mt bn. V vy vn ca bn mt song song c gi l vn ng nghing v
c th quan st c vi ngun sng rng.
V vn giao thoa nh x v cc, nn quan st h vn ta phi dng mt
thu knh hi t O vung gc vi cc tia phn x. Khi vn giao thoa ca cc
tia nys hi t ti tiu im ca thu knh.

4
 4.1.1.4 nh giao thoa ca vn ng dy
Gi s ta c bn mt mng chit sut n, b dy thay i, ti im kho st hai
mt to vi nhau mt gc nh chng vi pht, hnh 4.3.

e1 e2

h
Hnh 4.3 Dng vn giao thoa hnh nm

Gi l gc nm, e l dy ca nm ti im cch mp nm mt khong x

v n l chit sut nm. V gc nh nn
e=x.
Nhng im c cng dy u trn cng mt ng thng song song vi
mp nm, nn vn giao thoa l nhng ng thng song song vi mp nm.
Trong trng hp di sng vung gc r = 0 , hai vn ti lin tip ng vi hai b
dy e1 v e2 :
2ne1 = m v 2ne2 = ( m+ 1 )

v do cch nhau mt khong h = x1 - x2 =
2n
Vn giao thoa cch u nhau nh trng hp cc vn khng nh x. Ti mp
nm e = 0 ta c mt vn ti.
Gi s khong cch hai vn l h=0,2 mm th
632,8.10 6
= = 55
2nl 2.1.0,2
Ta thy rng khong cch gia cc vn khng ph thuc vo chiu dy nm
m ch ph thuc vo gc nm. Nh vy, bng vic m s vn dch chuyn ta
c th xc nh c khong dch chuyn ca gng.
Trong trng hp ngun sng chiu thng gc v gc rt nh, s giao thoa
xy ra ngay khi tia phn x t b mt th nht v tia phn x t b mt th hai
gp nhau trn b mt gng th nht.
4.1.2 Phng php o d di bng giao thoa k laser.
Nu ngun sng laser c gc m rt nh th c th coi b mt sng ca
chm tia l phng. S giao thoa trong trng hp ny l s giao thoa ca hai
sng phng. nh giao thoa nhn c trn mt phng nh M c cng sng I
u nhau trn ton b nh giao thoa v ph thuc vo hiu pha , vo cng
sng I1, I2 ca ca hai chm tia chun St v chm tia o S khi giao thoa.

5
 I=I1+I2+ 2 I 1 I 2 cos
2
Trong = (L-Lt).

- l bc sng nh sng laser.
- L v Lt l qung ng i ca hai chm tia o v chm tia chun t im
chia chm K n mt phng nh M sau khi phn x li t gng G v Gt.
2
t 0 = ( L Lt ). , cho gng ng dch chuyn mt khong x th

qung ng i ca gng ng l L + 2x v ta c:

Gt
St
CT
Ngun Laser S K
S
G
S't,S'
x
M

Hnh 4.4 S nguyn l o di bng giao thoa k laser

2
= [( L + 2x) -Lt ] . = 4nx / + 0

Trong n l chit sut ca mi trng lan truyn chm tia laser, trong
khng kh n1.
Ta c: I = I1+I2+ 2 I 1 I 2 cos(4nx / +0 )
Kt qu ca php bin i trn cho thy:
- Chu k bin thin ca cng sng trn mn thu nh M tng ng vi
dch chuyn ca gng ng x = /2n. Ni mt cch khc khi coi n =1, bt u
quan st nh giao thoa thi im sng nht th khi gng ng dch chuyn
qung dng bng mt s l ln na bc sng nh sng laser ta s thy mn M
l ti nht, khi gng ng dch chuyn qung ng bng mt s chn ln na
bc sng ta s thy mn M l sng nht.
- Khi dch chuyn x ca gng ng theo mt chiu th c th xc nh c
qung ng x ng vi di cn o, bng cch m s ln thay i trng thi
sng ti trn mn M. Chi tit hn, nu c th phn bit c k mc sng ti
gia vn sng v vn ti th cn c th xc nh c cc lng dch chuyn x
nh n /2kn. chnh l c s ca php nng cao phn gii ca php o
ln k ln.

6
 Khi t ti mt phng nh M mt cm bin quang in t m s vn sng
hoc vn ti, nu s vn m c l N th qung ng m gng ng G
dch chuyn l
X = N. /2kn
- Quan st trng thi sng ti trn mn M khng cho bit dch chuyn x theo
hng no v ta nhn c kt qu dch chuyn cc vn sng - ti nh nhau khi
dch chuyn x l theo hng xa ra hay gn vo tm chia chm tia. Kh khn ny
s c gii quyt khi s dng s giao thoa k nh hnh 4.5.
pht hin chiu bin i ca dch chuyn x, cn phi xoay gng ng
nghing mt gc nh s nguyn l trn hnh 4.5. Khi nh giao thoa c
dng l nh ca cc vn giao thoa ng dy gm cc vch thng l vn sng
v ti xen k nhau, song song vi trc nghing ca gng. Khong cch gia
cc vn cng tn c gi l bc vn H.
H /2n

Gt
St
CT
Ngun Laser S
S
G
S't,S'
x
M

Hnh 4.5 S nguyn l giao thoa k khi nghing gng

Khi cho gng ng G dch chuyn mt khong x = /2n , cc vn cng tn

s dch chuyn v tr i mt lng bng mt bc vn H. Chiu dch chuyn ca
cc vn ny l:
+ Khi gng ng G chy xa so vi gng tnh, tc l khong cch x tng
ln th cc vn s dch chuyn theo hng v pha nh nm.
+ Khi gng ng G chy li gn gng tnh Gt, cc vn s dch chuyn ri
xa nh nm.
Khi dng hai cm bin quang in Cb1 v Cb2 t cch nhau mt phn t
bc vn H trn mt phng hng nh giao thoa, ta s nhn c hai tn hiu sin
tnh lch pha nhau 900 nh trn hnh 4.6 (a), (b). Du lch pha ny tu theo
hng dch chuyn ca G v vi mt b m chu k tn hiu sin nhy pha ta c
th xc nh c qung ng v hng dch chuyn ca gng ng.

7
 S nguyn l giao thoa k o chiu di dng gng tnh nghing c cu
to n gin, phn gii cao. Tuy nhin n c nhc im l ch s dng c
mt phn nng lng ca nh giao thoa chuyn i sang dng tn hiu in v
nhy cm nhiu i vi rung ng ca gng ng trong qu trnh dch chuyn.
S nguyn l ny s dng thch hp nht trong cc php o cn chnh xc
cao cc phng th nghim v o lng chun.

Gt Cb1
I
G
Cb2 x

H a) Dch chuyn thun

I
I Cb1 Cb2
x
Cb1 Cb2
b) Dch chuyn nghch

Hnh 4.6 Dng vn khi nghing gng v tn hiu thu cm bin

Tn hiu thu trn cm bin CB1 v CB2 l:

CB1 = Acos [ ( 4 / ).x ]
CB1 = Acos [ ( 4x / )( x/4) ]
Du /4 ph thuc vo chiu dch chuyn gng trong qu trnh o. Dng
cc mch in xc nh pha hai tn hiu CB1 v CB2 ta s xc nh c chiu
dch chuyn.
4.1.3 Cc s bin th ca giao thoa k laser o di c kh.
Vi mc ch lm gim nh hng ca cc nguyn nhn gy nn sai s cho
giao thoa k laser o di lm vic n nh, chnh xc cng nh nng cao
phn gii khi o, ngi ta nghin cu v s dng trong o lng c kh mt
s s bin th t nguyn l c bn nu trn.
4.1.3.1 S giao thoa k vi gng phn x gc 3 mt .
Khi u o dch chuyn trong qu trnh o, cc sai lch trong ng dn ng
s gy nn s dao ng ca gng ng. Nu gng ng l gng phn x
phng, th chm tia phn x s b dao ng theo. V tr ca nh giao thoa trn
mt phng nh M s dao ng vi bin t l vi gc nghing ca php tuyn
mt gng vi tia ti v vi ln ca chiu di tia phn x. gim nh
hng ca cc rung ng ny trong s hnh 4.7, hai gng phn x phng

8
Gt v G c thay bng gng gc 3 mt, n m bo cho tia phn x lun
song song vi tia ti cho d u o mang gng ng b rung ng. S ny
cn trnh c s phn x ngc ca chm tia phn x n ngun pht laser v
cho php thu c phn ln nng lng ca chm sng laser trn nh giao thoa,
to iu kin thun li cho vic x l tn hiu o.

Gt

St CT
S
Ngun Laser
S
G
S't,S' x

Hnh 4.7 S giao thoa k dng gng phn x gc

Nhc im ca s ny l do dng gng gc nn khng th to nh giao

thoa kiu nm quang hc, v vy s khng xc nh c chiu dch chuyn u
o. S ny ch dng o cc kch thc di bin thin mt chiu.
4.1.3.2 S giao thoa k vi nh sng laser phn cc.
xc nh c chiu dch chuyn ca gng ng G khi dng gng
phn x gc, s giao thoa k trn hnh 4.8, s dng nh sng laser phn cc.

Cb2

Cb1 Gt
S't,S' G
CP2
St S
NgunLaser S
x
/4 CP1

Hnh 4.8 S giao thoa k dng nh sng laser phn cc dng 1

9
 Ngun sng laser pht ra chm tia S c phn cc thng, sau khi i qua tm
/4 s chuyn thnh chm tia phn cc trn. Ti lng knh chia tia dng phn
cc, chm tia S c tch thnh chm tia o S v chm tia chun St c phn
cc thng vung gc vi nhau. Chm tia o c phn x 3 ln gng gc,
cn tia chun th phn x 2 ln tm phn chm, v vy phn cc ca chng l
ngc nhau, khi kt hp chng ta c nh sng phn cc thng c hng tu
thuc vo pha tng i gia hai chm tia khi giao thoa vi nhau. Khi mt
phng phn cc ca chm tng s quay tu thuc vo v tr ca gng. Ta bit
rng khi gng o G dch i /2 th mt phng phn cc quay 1800, mt phng
phn cc tng s quay 450 nn cng sng thu trn cm bin s bin i i
mt chu k. Hng quay ca mt phng phn cc tng tu thuc vo hng
dch chuyn ca gng gc, v vy trn hai cm bin quang in ta s thu c
hai tn hiu c pha lch nhau 900 tng ng vi chiu chuyn ng ca gng
o G.
Mt dng s giao thoa k vi nh sng laser phn cc khc c trnh by
trn hnh 4.9. Trong s ny s dng tm V tr pha /4 to nn s lch pha
900 gia chm tia o S v chm tia chun St.

Gt

Cb1
St
CP G
S

Ngun Laser
S V
x
/4
Cb2

Hnh 4.9 S giao thoa k dng nh sng laser phn cc dng 2

Cc giao thoa k s dng nh sng laser phn cc cn c u im l: nh c

tnh phn cc nn khi chia chm tia dng bin hoc phn x t cc gng c
th s dng cc tm chia chm v gng phn x phn cc. iu cho php

10
vic chia chm tia laser t c t l chia cng sng gia hai tia chm u
hn v t c h s phn x cao hn. Nh vy m tng phn ca nh giao
thoa cao hn.
S giao thoa k dng nh sng laser phn cc c cu to v iu chnh
phc tp song gim c rt nhiu nh hng ca rung ng ca gng ng
trong qu trnh o. iu lm gim nh cc yu cu v chnh xc cao ca
ng dn hng u o cng nh vic ng chnh trc quang ca h giao thoa
k, v vy s nguyn l ny thch hp cho iu kin o phn xng sn
xut.
4.1.3.3 S giao thoa k c quang l chm tia o tng gp i.
Trong cc s trn chu k ca tn hiu o tng ng vi dch chuyn gng
ng x = /2. tng nhy, ngi ta cho chm tia o G i qua mt hnh
trnh kp nh hnh 4.10. Trong s ny tia o sau khi phn x t gng gc,
li c quay ngc li mt ln na vi quang l nhnh o ging ht nh
trong ln u.
Do qung ng nh sng tng ln 4 ln trong nhnh o, nn chu k tn hiu
trn b thu tng ng vi di dch chuyn ca gng ng l /4, v vy
phn gii c s c tng ln gp i.
Gt

St
S G
Laser S
S x
St
M

Hnh 4.10 S giao thoa c phn gii c s c tng gp i.

Do nhy quang hc tng ln i hi chnh xc v s ng chnh cc chi
tit quang c cao hn, ng thi cng nhy cm vi rung ng nhiu hn. S
nguyn l ny ch thch hp cho vic o lng phng th nghim.
4.1.3.4 S giao thoa k laser o theo hiu ng p-l.
Vic m chnh xc s vn giao thoa theo ln ca cng sng ca vn
chu nhiu nh hng ca cc yu t lm bin ng cng sng trong qu
trnh dch chuyn gng ng theo u o. Phng php o theo hiu ng p-
l s gim nh hng ca s bin ng cng sng trn nh giao thoa.
Hiu ng p-l xy ra khi gng G dch chuyn vi tc V trong qu
trnh u o dch chuyn thc hin php o nh hnh 4.11. Do mt phng

11
hng nh giao thoa ng yn, trn b thu bng cm bin quang in nhn c
sng nh sng phn x li t gng ng b dch pha theo tc v chiu dch
chuyn ca gng. S dch chuyn ny gy nn s bin i tn s dao ng
sng nh sng ca chm tia o S theo hiu ng ple.

Gt

St CT
S f
Ngun Laser
S
G
S't,S' V
f& ff
M
Hnh 4.11 S giao thoa k laser o theo tn s.

Khi , s giao thoa ca hai chm tia S v St l s giao thoa ca hai sng c
tn s xp x nhau. Kt qu ca s giao thoa ny l bin sng nh sng giao
thoa trn mt phng M b iu bin phch. Cng nh sng giao thoa thu trn
cm bin quang in bin i theo chu k phch ca hiu hai tn s .
Khi gng ng dch chuyn theo u o, nu xt trong khong thi gian t,
gng G chuyn ng u vi vn tc V, khi n i qua qung ng /2n
trong thi gian T= / 2nV. chnh l chu k bin i ca dao ng sng nh
sng. Hay ni cch khc tn s nh sng b bin i mt lng l:
1 2 nV
f = = f
T c
y f l tn s sng nh sng ca laser v c l vn tc nh sng.
Thay f = c / ta c
2nV
f =

Vn tc dch chuyn ca gng ng G l
V=f /2n
Trn mt phng M, cng sng thu c bi cm bin quang in

12
 I = I1+ I2 +2(I1I2)1/2 cos (2f.t)
Cng sng giao thoa bin thin theo tn s dch chuyn p-l vi bin
thay i t l vi cn bc hai ca tch hai cng sng I 1 , I2 v bin i
theo qui lut sin tnh theo thi gian vi tn s 2f.
Khi xc nh c lng bin i tn s f trong khong thi gian t ta xc
nh c qung ng dch chuyn ca gng trong thi gian :
x = V.t = f.t / 2n
Phng php o dch chuyn thng bng giao thoa k laser theo phng php
o tn s l phng php o theo gi tr trung bnh ca vn tc dch chuyn
gng ng G. Khi tc ca gng ng dch chuyn khng u trn qung
ng o x, cn phi thc hin cch o vi phn l chia nh x thnh cc di vi
phn xi c tc dch chuyn Vi vi thi gian .ti. Khi , di cn o c
tnh l:
x = fi .ti/ 2n
phn gii ph thuc vo phn gii ca php o tn s .f v thi gian t.
chnh xc khi o ph thuc vo chnh xc ca php o tn s fi v o
thi gian chuyn ng.ti ca u o.
Do lng bin i tn s f t l vi tc dch chuyn ca gng, khi gng
ng yn khng chuyn ng th thnh phn ny khng tn ti nn phng php
o ny l phng php o ng. Vi tn s dch chuyn p-l khong 100
MHz cho php o dch chuyn n tc ti 30 m/s, c th p ng c hu
nh nhng i hi v o lng dch chuyn thng trong cng nghip c kh.
Trong hiu ng p-l, du ca lng bin i tn s f tu thuc vo chiu
dch chuyn ca gng ng G. Lng bin i tn s f c du dng khi
gong c hng chuyn ng sao cho hiu quang l hai tia St v S gim v c
du m khi ngc li. Tuy nhin s bin i ca cng sng I trong biu thc
khng ph thuc vo du ca thnh phn f. V vy s nguyn l ny khng
xc nh c hng bin i ca kch thc o.
c im c bn ca phng php ny l n t c chnh xc cao nh
kh nng o chnh xc tn s dch chuyn ple , khong thi gian dch chuyn
v s n nh cao ca tn s laser. khng n nh ca cng tn hiu giao
thoa thu nhn do s bin ng ca cng sut ngun pht laser khng nh hng
n kt qu o do dao ng bin in p ca tn hiu thu nhn khng nh
hng n gi tr ca tn s. y l mt u im c bit ca phng php o
theo tn s khi s dng n trong iu kin c nhiu rung ng nh phn
xng sn xut.
4.1.4 Phng php o d di bng giao thoa k laser vi ngun laser hai
tn s.

13
 xc nh hng dch chuyn ca gng ng trong phng php o theo
tn s, trn s hnh 4.12 s dng ngun pht laser c hai tn s f1 v f2 .
Hai tn s ny khc nhau khong t vi n vi chc MHz v c s phn cc
vung gc nhau. Tm chia chm phn cc s tch hai tia c tn s khc nhau
thnh tia o c tn s f1 v tia chun c tn s f2 do s khc nhau v hng
phn cc ca chng. Chm c tn s f2 truyn theo hng gng c nh lm
chm tia chun, cn chm tia vi tn s f 1 truyn n gng o. Nu cho hai
chm tia ny giao thoa nhau ta nhn trn cm bin quang in Cb 2 cng
sng l
I = I1+ I2 +2(I1I2) 1/2 cos( 2 f.t ) vi f = f2 - f1

Gt
V
f2 CP f1f1
f1&f2
cp
Ngun Laser
f1
G

f2- f1 f2- f1f1

Cb1 Cb2

Hnh 4.12 S giao thoa k o bng laser hai tn s.

Khi gng ng G dch chuyn th tn s ca tia phn x f1 thay i mt

lng f1, cn tn s phch giao thoa nhn c l f2-(f1 f1). Khi cng
sng trn cm bin Cb2 s bin i l:
I = I1+ I2 +2(I1I2) 1/2 cos [2( f f1)t ]
Ngoi ra, mt tn hiu chun c ly t tm chia chm cp t ngay sau
ngun laser bng cm bin Cb1 vi tn s phch f . Tn hiu o f f1 v tn
hiu chun f c a vo b x l m tn s ly ra gi tr ca f1 .
Vn tc dch chuyn gng ng G
V = 1 f1 /2n
ln ca di o
x = V.t = 1 f1.t / 2n
Khi o theo vi phn qung ng dch chuyn th
x = 1f1i.ti / 2n

14
 Du ca thnh phn f1 cho bit chiu bin i kch thc o:
- Du cng tng ng vi chiu dch chuyn ca gng ng li gn tm
phn chm CP lm gim hiu quang l gia hai chm tia giao thoa.
- Du tr tng ng vi chiu dch chuyn ca gng ng i xa tm phn
chm CP lm tng hiu quang l gia hai chm tia giao thoa.
Vic xc nh du dch chuyn ny thc hin thng qua s bin i ca gi tr
tuyt i ca s bin thin tn s f f1.
S giao thoa k o theo nguyn l dng ngun laser hai tn s c nhy
thp hn khi dng ngun laser mt tn s song n cho php nng cao tc dch
chuyn ca u o, gim nh hng ca rung ng v s bin ng ca cng
sng ca nh giao thoa. S nguyn l ny hin ang c s dng nhiu
trong cc my o dng trong cng nghip.
Trong thc t, my o dch chuyn di bng giao thoa k hai tn s ca hng
Hewlett-Parkard c phm vi o n 80m vi phn gii n 0,16m hoc n
0,01m vi ni suy in t, chnh xc t n 0,05m tc o n
0,3m/s. Vi vic s dng thm gng gc kp v tm chia chm tia, vi thit b
ny cn c th dng o cc gc v phng ca cc b mt
4.1.5 nh hng ca mi trng o n chnh xc ca giao thoa k
laser .
V nguyn l chuyn i o lng ca giao thoa k cho thy hnh nh giao
thoa s l duy nht nu bc sng ca nh sng laser lun lun n nh. Nu
trong qu trnh lm vic m bc sng bin thin th hnh nh vn giao thoa
cng s tri theo. Mt trong cc nguyn nhn lm bin ng l s bin ng
ca chit sut mi trng khng kh m giao thoa k lm vic.
Ta bit rng di bc sng nh sng ph thuc vo tnh cht ca mi
trng m n lan truyn, m qu trnh o thng l trong mi trng khng kh.
Khi di bc sng laser trong khng kh l
= 0 /n
y 0 l bc sng ca bc x laser trong chn khng v n l chit sut
khng kh.
Gi tr c o bi giao thoa k laser l chiu di qung ng quang hc m
n bng tch gia chiu di hnh hc vi chit sut mi trng. m bo
chnh xc o cao, cn phi hiu chnh gi tr chit sut khng kh. S thay i
chit sut khng kh l yu t chnh lm hn ch chnh xc ca php o chiu
di. Chit sut ca khng kh ph thuc nhiu vo cc thng s ca nhit , p
sut, m v thnh phn ho hc ca n. Khi thc hin php o, chit sut ny
cn ph thuc vo s n nh trng thi ca khng kh.

15
 Gi tr o c biu din l bi ca bc sng nh sng, m bc sng nh
sng ny cn phi c o tng ng vi cc iu kin mi trng o. V vy,
bc sng laser cn phi c hiu chnh theo s sai lch ca iu kin o thc
so vi cc iu kin tiu chun khi xc nh bc sng ca ngun laser.
Gi tr chit sut ca khng kh kh c 0,03% CO2 150 C v p sut 760 mm
Hg ng vi chiu di sng laser HeNe =0,63299138m trong chn khng l:
nkh=1,0002765 .
Hiu chnh s thay i m, nhit , p sut c xc nh theo cng thc
sau:
(n-1)=(nkh-1).P/720,775[1+P(0,817-0,0133T).10-6/(1+0,003662T)]-5,6079.10-8f
y: f l p lc ring phn ca hi nc nhit T0C v p sut ton phn
kh quyn P(mm Hg)
Theo biu thc trn:
-Khi p sut tng 1mm Hg, chit sut tng 0,36.10-6 gi tr chun.
-Khi tng nhit ln 10C lm gim chit sut i 0,96.10-6 gi tr chun.
-Khi tng p sut ring phn hi nc 1mm Hg s lm gim chit sut
0,06.10-6 gi tr chun.
tnh ton trc tip s thay i bc sng nh sng ca laser trong khng
kh c thnh phn khng i, c th dng cng thc ca Edle. Trong khng kh
thng, v d trong khng kh vi thnh phn CO2 xc nh nhit 200C,
P=1013kPa, m tng i H= 50%, bc sng =0.63282m. Nu iu kin
mi trng sai khc t vi cc gi tr ny, th c th tnh s thay i ca bc
sng vi chnh xc tng i vi cng thc:
/= 10-6(0,9.t 0,3P +0,01H)
( t: 0K ; P: hPa; H: %)
Vi nhit t sai lch n 100C v m f =30 50%.
Vi chnh xc dng trong thc t, chit sut khng kh i vi laser
HeNe c n nh trong khong Lemba c th tnh theo cng thc
n-1 = (78,64P /T -12f/T).10-6
Sai s o ny sinh khi sai lch p sut, nhit , m khmg kh vi gi tr
chun l P=760 mmHg, T=200C, f=1mm Hg, c th xc nh theo cng thc
( L/L) =(-0,93T+0,36P-0,06f).10-6
Trong :
L l sai s tuyt i o
L l gi tr dch chuyn do
T l sai lch nhit i vi nhit chun
P l sai lch p sut i vi p sut chun

16
 f l sai lch m i vi chun
Gi tr bc sng ch ca laser HeNe i vi gi tr chun ca nhit , p
sut v m khi hiu chnh theo tn s trung tm ca mi trng laser l ch =
0,63281976 m.
Cc gi tr hiu chnh c th dng hiu chnh c lp tng thng s hoc hiu
chnh ng thi thng qua b phn tnh ton tnh bc sng tng ng khi
thc hin php o. Trong trng hp ny sai s o c xc nh bng sai s o
cc thng s mi trng m khng phi sai lch ca chng vi gi tr danh
ngha. Khi s dng giao thoa k laser o kch thc chiu di ca chi tit, cn
m bo s ph hp kt qu o thc hin trong cc iu kin nhit o khc
nhau. Khi trong kt qu o cn phi a vo hiu chnh LT, lin quan n
s thay i kch thc ca chi tit o khi nhit thay i.
LT/L = - t
y l h s dn n thng do nhit ca vt liu chi tit o.
L l kch thc chi tit o cn xc nh.
t l s thay sai lch nhit ca vt cn o i vi iu kin tiu chun.

Mt

St
Ngun S S
Laser CT M
x *
Cm bin quang in

Cm bin cc thng s Cm bin nhit

mi trng khng kh CPU vt o

Kt qu o

Hnh 4.13 S o c hiu chnh sai s t ng.

Khi thc hin php o, sai s o kch thc do nhit c xc nh bng

sai s o gi tr nhit v gi tr h s dn n thng do nhit . Trong nhiu
trng hp n vt qu ng k sai s o do nh hng ca mi trng xung
quanh n di bc sng laser.

17
 Tt c cc hiu chnh k trn cn phi tnh n khi tnh chiu di hnh
hc t qung ng quang hc o c. Trong cc h o t ng vic iu
chnh ny c thc hin mt cch t ng bng phn mm, nh trong hnh
4.13. Nhit vt o cng c xc nh chuyn kt qu o v nhit
chun.
4.1.6 nh hng ca rung ng mi trng n giao thoa k laser.
Trong mi trng xung quanh ta lun xut hin cc rung ng do mi vt
lun chuyn ng v tc ng tng h ln nhau. Cc rung ng ny lan truyn
trn mt t, trn nn nh ca cc xng sn xut v cc phng th nghim. Cc
thit b o lng v cng ngh lp t trn nn cc nh xng v phng th
nghim s chu s tc ng ca cc rung ng ny. Cc rung ng ny gy nh
hng nghim trng n chnh xc ca cc php o v cc nguyn cng
cng ngh chnh xc. Khi xy ra cc cng hng cc b ti cc b phn ca
dng c o, gy nn cc bin dng v dch chuyn v tr ln ca cc b phn, chi
tit thit b.
c bit l khi o cc kch thc di cn t chnh xc n c
micromet v nh hn, cc rung ng ca mi trung gy nn nhng sai s rt
ln.
Trong thit b o chiu di bng giao thoa k, chnh xc ca php o tu
thuc vo n nh v tr tng quan gia cc phn t ca h quang. Cc rung
ng trong mi trng xung quanh c th lm thay i v tr tng quan gia
cc chi tit quang. To nn cc sai lch nh: khng thng hng, s thay i
khong cch tng i gia cc chi tit quang lm gim s r nt hoc sai lch
cc nh quang m cc sai lch ny thay i theo s bin ng ca rung ng. Do
nhy ca hiu ng giao thoa n mt phn mi bc sng th nhng rung
ng trc tip rt nh n mt vi phn mi ca micromet cng lm cho h
giao thoa khng n nh, v tr vn giao thoa thay i, gy nn sai s o. V vy,
vic gim nh hng ca rung ng mi trng i vi my o giao thoa l ht
sc cn thit, c bit l trong qu trnh nghin cu vic o di bng giao
thoa laser.
4.1.6.1 c im ca rung ng mi trng.
Cc ngun rung ng ca mi trng xut hin do nhiu nguyn nhn. T s
rung ng do cc thit b hot ng, cc va chm ca cc vt, cc hot ng
ca cc phng tin giao thng v ca con ngi.. V vy, sn nn ca cc
phng th nghim v cc phn xng chu cc rung ng c di tn s rng t
cc ngun khng th trnh khi nh hnh 4.14:

18
 Hnh 4.14 Cc ngun rung ng trong phng o lng

+ Sn nh mang cc dao ng thng ng trong di t 10 n 30Hz t ngi,

xe c, cc hot ng a chn, cc cng trng xy dng.
+ Cc to nh cao tng dao ng n hng mt trong gi thi vi tn s t 1
n 10Hz.
+My, thit b hot ng to nn cc dao ng n 200Hz.
Cc rung ng lan truyn trn nn nh cc phng th nghim v nh xng l
cc sng c hc ngang v dc:
+ Khi nn phng nm trn mt t v nn nh cng th thnh phn sng
dc lan truyn theo b mt nn nh l ch yu.
+ Khi nn phng nm cc tng cao ca nh v nn phng khng cng th
thnh phn dao ng ngang thng l ch yu. Ngoi ra cn c s lc ngang do
dao ng ca nh.
Tnh cht ca cc rung ng l ngu nhin v bin v tn s. Tn s khng
n nht m thng l di rng tu thuc vo cc iu kin c th ca nguyn
nhn gy rung ng v kt cu ca nh, xng. Ph tn s t 0 n hng chc
kHz vi cc c tnh bin - tn s l thng c bin ln tn s nh v
gim i khi tn s tng ln. Theo ti liu ca hng Mellgriot, mt ph cng
sut ca cc rung ng mi trng ti cc im l rt khc nhau tu theo mi
trng, v d:
- Trong cng nghip nng: <10-7 g2/Hz.
- Trong cng nghip nh: <10-8 g2/Hz.
- Gn ng giao thng: <10-9 g2/Hz.

19
 - Bc chn ngi bc nh: <10-2 g2/Hz.
4.1.6.2 Cc bin php gim rung ng v h thng gim chn.
gim nh hng ca rung ng mi trng n cc thit b, thng s
dng cc bin php:
+S dng thit b gim chn trong mi lin kt gia nn nh v thn mynh
m cao su, m kh... Thit b ny s trit gim nng lng ca rung ng
truyn n my.
+ Thit k my v b my c kh nng chu nh hng t nht ca rung ng
nh: tng khi lng b my hoc thn my tng lc qun tnh chng li rung
ng tn s cao. Tng cng ca thn my gim bin dng v nh hng
ca rung ng tn s thp.
+ S dng cc cht hp th nng lng rung ng bng ma st ni nh cht
do lng nht, du c nht cao, cc vt liu ht ri nh ct.
Tu theo mc rung ng, v yu cu v gim chn m s dng mt hoc
cc bin php trn kt hp vi nhau. Thng thng, ngi ta s dng kt hp
ng thi mt s bin php gim chn to nn mt h thng gim chn nhm
cch ly c hiu qu nht thit b cn c gim chn khi cc rung ng ca
mi trng. H thng gim chn ny mc ln l mt to nh hoc mt cn
phng, mc thng thng l mt bn cch ly hoc cc m gim chn.
Trong lnh vc cc nghin cu v quang hc, thun tin cho s dng, ngi
ta ch to mt s h gim chn thng gi l bn quang hc (Optical table).
4.1.6.2. Cc h gim chn quang hc ca hng Mellesgriot.
Hng MellesGriot ch to cc h gim chn dng cho cc nghin cu v
quang hc cn c gi l bn quang hc. Cc bn gim chn ny c cc kch
c v kh nng gim chn khc nhau tu thuc vo cc mc ch s dng v
mc rung ng ca mi trng. Hng MellesGriot chia cc loi bn gim
chn quang hc thnh 3 cp :
-Cp 1- Bn Hon thin (Perfomance): dng trong cc lnh vc quang hc
thng thng nh laser xung, quang si a mt, cc nh v v tr cn n
chnh xc c micromet... trong mi trng yn tnh hoc t rung (c mt ph
cng sut nhiu nh hn 10-10g2Hz). Thn bn c dy 210 mm hoc 310
mm, vi phng t n 0,10 mm / 1m2, h s bin dng ng hc nh hn
1,3 x 10-3 mm/N. dch chuyn tng i ca thn bn nh hn 0,27 nm.
Bin dng thn bn khi t ti trng113 Kg nh hn 1,65m. Chn bn khng
dng cc phn t gim chn.
-Cp 2- Bn Hon thin hn (Perfomanceplus): s dng vi quang si n
mt, cc ph k, tc k quang... mi trng mt ph cng sut nhiu n
10-8 n 10-9g2Hz. phng thn bn t n 0,05 mm/m2. H s bin dng
ng hc nh hn 0,9 x 10-3 mm/N. dch chuyn thn bn tng i nh

20
hn 0,18 nm. bin dng thn bn khi chu ti 113 kg t gia thn bn 1,5
m. Cc phn t gim chn 4 chn bn cho php chu ti t 275 n 1100 kg
i vi bn tiu chun v t 550 n 2200kg i vi bn chu ti nng. p sut
khng kh ca cc m kh n 550kPa. Tn s cng hng theo phng thng
ng nh hn 5,5Hz v theo phng nm ngang nh hn 4,5Hz. H s khuych
i theo phng thng ng nh hn 6 vng cng hng v nh hn 0,25
tn s 10Hz, cn theo phng nm ngang l nh hn 9,2 vng cng hng v
nh hn 0,13 tn s 10Hz.
-Cp 3- Bn siu hon thin (UtraPerfomance): vi cc giao thoa k,
hologram, cc nh v v tr nh hn micromet hoc c nanomet.. v mi trng
c rung ng nhiu ti hn 10-7g2Hz. phng thn bn t 0,05 mm/1m2.
H s bin dng ng hc nh hn 0,5 x 10-3 mm/N. dch chuyn thn bn
tng i nh hn 0,10 nm. bin dng thn bn khi chu ti 113kg t gia
thn bn 1,5m. Cc phn t gim chn 4 chn bn cho php chu ti n
2500kg. p sut khng kh ca cc m kh n 690kPa.
C kh nng iu chnh cao 13mm v t ng n nh cao t
0,25mm Tn s cng hng theo phng thng ng nh hn 1,35Hz v theo
phng nm ngang nh hn 1,0Hz.
H s khuych i theo phng thng ng nh hn 4 vng cng hng v
nh hn 0,02 tn s 10Hz, 0,1 5Hz, cn theo phng nm ngang l nh hn
4 vng cng hng v nh hn 0,03 tn s 10Hz, 0,06 5Hz.

Hnh 4.15 Kt cu chn bn (a), mt bn(b) v phn t gim chn kh

21