See ‘Maximum Cotaninaion Units (Petiles/ 100m) 150 4302 e Opal Microscope Sim un >I im 325 pm 35 a 1SO1117 or Electron Meroscope"* | >4 une). >6 ume) 48 ue) >24 ume) >38 ume) ‘Sie Code x . ° > e ise 000 15 %6 1 3 1 Gass 00 390 152 a 5 1 Ose 9 700 204 oI 0 2 Gass 860 08 20 a Gass Z se azo 8 7 o eee 2.80 76 a Cass 2500 4866 12 26 Gas 25,000 380 we 38 Ose 50,000 193500 a2 105 Gas 100.000 300 Ta 2, Cass 8 200000 ‘77300 2.450 ae Cae ‘00000 156000 ‘4900 ae Cass 10 ‘e000 ‘311000 9.300 1700 Gas 11 7,600,008 B30, i600 S380 Clo 12 3,200,000 1,260,000 222,000 39.200 6760 ‘Darl din taved pon longo dioxin. + parte se based upor projected area eculratet see. Table 3. AS4059 Cleanliness Coding System