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훆죝웷훆퓬힢틢쫂쿮
훆죝웷훆퓬힢틢쫂쿮
(,211505)
Zr-3,R60702
:
ZirconiumIV-B 300
1850 ZrO300
6.5g/cm 3 ZrH
0.180.002
0.55ASME
40
1
GB150.4-20116.5.1
AB
862
1
590
590 E=/
ZrN550
a. b.
1
- 44 -
E12.5/10+21mm
1
R607022000mm
=12.5mmL=2000mm
B60mm H6mm
GB150.4-20116.5.2 2
*3D :PgN
a. b.
2 B
2
350mm 2.1
3
B
- 45 -
350
2%-4%HF30%-
40%HNO350-601 1.5
2
3
a. a.
1. 2. 3. 1.Ar 2. 3.
4.Ar 5. 6. 4. 5.
NB/ 80%
T47011-20106.3.5.5
6-3 - 200mm20+3
3(4)
99.999%
-50
18mm
20L/min 4
18L/min
NB/T47011-20106.3.2.3
80%- 5
5
- 46 -
2.2
1845
5 6
a b c
6 a.100x b.100x c.100x
23
(L/min)
12 4 3 20 180-210 ~14 ~4 20 24 20
2.3
NB/T47011-20106.6.4 -
200
- 47 -
(L/min)
mm (A) (V) mm/s
Ar+40%He
Ar99.99%
3.3
3.4
3.5
3 [1]NB/T47011-2010.
3.1
[2]..
[3]..
3.2
[4]..
99.999%
- 48 -