a CH RD tH Tat Measurement xture. The content of questions regarding the Thank you for reading the Introduction to Surface Roughness Measurem related to our pr that this introd your KEYENCE INDEXaCe eit T-1 l What is Surface Roughness? Ityou look at machined parts, you wll notice that ther surtaces embody a complex shape made of a series of peaks and troughs of varying heights, depths, and spacing, Surtace roughness is defined as the shorter requency of real surtaces relative to the trough. A product's exterior cover, a vehicle's dashboard, a machined panel-~thediflerences in appearance, speciticlly whether something is shiny and smooth or rough and mate, are due to the itlrence in surace roughness. Surface roughness not only atfets the object's appearance, but it also produces texture or tactile ditferences ‘Appearance and texture can influence a products added value suchas class and customer saistcton Ita part makes contact with something, ts surface roughness affects the amount of wear o the ably to forma seal the partis to be painted, the roughness also affects the thickness ofthe paint thas therefore been required in recent years fo quant the asperity ofa surface 1-2 | ISO 25178 Surface Texture 180 25178 Surface Texture i a collection of international standards relating tothe analysis of surface roughness. While JIS B 0571-1 and ISO 13565-1 (Surtace Texture: Profile Method) are based on analysis using the stylus method, ISO 25178 ‘Surface Texture standards support two evaluation methods: contac type (stylus method) and non-contact type (optical probe). ‘The dual-method approach resolves existing problems in the profile method: variations in measurement results depending on the ‘measurement site and variations due tothe scanning direction,Pe eM Cem OT TTT) 2-1 | Surface Roughness Terminology This section explains the terms used in ISO 25178 Surtace Texture Real surface Fal surface indicates the surface from measurement data in the XY plane direction. Generally, the haight data isthe subject of processing Primary surtat Primary curtace isthe surface obtained after S-itering the real surface, Surface filter Surface iter is afitration operator appliad toa surface. sitter S-ter is after eliminating the emallest ecalo elements trom the surface (low-pass titer). Ths fit is equivalent to tho Ccuaftvaluo As in JIS B 0601-200". In tho case of contact-ype surface roughness measurement, noise do to edges is removed, Liter Liters a fiter eliminating the largest scale elements from the surface (high-pass fite). This filers used to remove Lndulations and other lateral components from the surface, and thus allows for the extraction of ony the roughnoss ‘components. L-filer is equivalent fo the cutoff value Ac in JIS B 0633-2001 F-operator F-operater remaves form from the primary surtace. This ite is equivalent to tk correction, suppressing the nominal surface texture characterization. ‘S-F surface Surface fiers a surface obtained after applying an F-operator tothe primary surface. SL surface SL ourface is a surface obtained alter applying an Liter to the SF surlaca Scale-limited surtace Scalediited surface means either the S-F surface or the SL surface Its the equivalent ofthe roughness profile or waviness profile in the profile method, Reference surface Flerence surface is the base forthe scalo-limited surtace and topresents the plane at the mean height ofthe evaluation area as par the 180 25178 Surlace Texture function Evaluation area Evaluation area isthe portion ofthe scale limited surface that is subject to evaluation Definition area Definition area isthe prtion of the evaluation area that is used for parameter definition, Height The height represents the distance between the reference surface and each point on the scale-imited surface. A point lower than the reference plane has # negative value. ‘Auto-correlation function ‘Auto-corrolation function is used to evaluate the periodicity of surface roughness in the direction of the plano ‘Angular spectrum (graph) ‘The angular spectrum indicates a graph for determining the direction ofthe lay (or surface pattern; hairne, in the case of ‘metal comprising a surface.2-2 | Process of Evaluation ‘The parameters used in |SO 25178 Surface Texture are calculated ftom the following procedure Obtain the primary surface by surface fitering (using S-fiter) the real surface. According to the evaluation result, perform further surface filtering (using F-operator and L-flter) to obtain the scale-limited surface. Obtain the reference surface for the scale-limited surface and calculate the parameters. 2-8 | Filtering The standards for fering are sill under review by the Intemational Organization for Standardization (ISO), This section innraduces the fering methods being evaluated by ISO for the Sfiter and the Liter Gaussian filter ‘The Gaussian fit is one kind of smoothing fiter that supprasses noise using the Gaussian function. Gaussian filters that ‘are specified in JIS B 0832:2001 (ISO 115621996) and ISO 16610-21:2011 are appliad to areal surface roughness measurements, Spline filter The spline fier is one kind of iter used to obtain @ smooth profile by interpolating the sections between effective adjacent points using the spline function. Spline filters that are specified in ISO/TS 16010-22:2000 are applied to areal surface roughness measuremenis,2-4 | S-filter and L-filter settings Cutoff wavelength for S-filter ‘A value equal to or more than 3 times the measurement resolution for the XY plane (horizontal plane) is used, Ifthe set value isnot suficiently effective, increase the set value unti the scale-Imited surface noise is removed. Ifa diferent kind of tering was applied beforehand, this may not be used, Cutott wavelength for Lefilter The cutoff wavelength for Lflter is dificult to uniformly specify based on lens magnification or stylus tip diameter; thereiote, itmust be adjusted with reference fo the real surface, Set a value 9 times the X¥-directiona length ofthe profile that you want io remove as waviness. Potie + Horzertal dance ‘Secton | 4678 ym O80 In the example above, the cutct valve is 0.1 mm 0.004". 14.878 x 5 = 73.39 = 0.1 mm 0.004"2-5 | 180 25178 Surface Texture Parameters Explained ‘The parameters used in ISO 25178 Surface Texture are calculated based on the following concept Reference surtace ‘Obtain the reference surface (mean plane) for the measurement area (vertical M piel, horizontal N pixel) spectied on the height screen and calculate the doviation of height distrioution when the height ofthe reerence surface is 0 1 180 25178 Surface Texture Parameters Parameters are grouped into six categories in ISO 25178 Surface Texture 1. Height parameters, 2. Spatial parameters 3, Hybrid parameters 4. Functional parameters ©. Functional volume parameters 0. Feature parameters The following evaluation parameters are defined forthe categories. category Parameter Deseraten 84 | Pestmoan que hot sk | Stawness Se) Kanes Heit parameters sp | Masimum peskrsioht sv | Maximum itheght se | Masinumbogtt sa | Artmstical mean ight sat | Adocerstatan nat Spat paraneters sx | Toxxe aspect ao sd | Teese docion da | Poot mean save aracont Hybrid parameters sor | Developed racial ars rato un, metaaye aeons manclrmus prunes SO 2517622012 (Sale ane sane,‘sie)_— | Ave mata eo Ssmo(m) | vars areal ati ato 8 | Coreroughness depth Spl Regus paki Suk | Recuoes val dont anchor sou | Peskin sera nae aeons pak ee sora | aleve partion (pecertage of fe measurement ate that corres he ape valley structures aseciate with Sik) vq__| Spe fines ogresson perermed txough the vay gion ‘Seq Spoof aise rgrssion primed rough the plteau region ‘Sq lative seal materia atthe pata val ntraacon| Sip | Peak arama height ww | Dae veidvolume we | Corevoid volume Functional volune paranetor np | Peak mats vlume me | Cave mata ume Spd Densty of poaks See | Athi mean peak curate ‘sto | Ton port hight ot sursco Sp | Five point peok hich ean praetor: Ss | Five point pit depen ‘Seae) | Clend dale area ‘Shate) | Clos il area Sec) | Closed dale woe sme) ose hvokneEB Height parameters ‘The height paramoters below are developed analogously from ISO 4287 and JIS BOGO1 and focus on the height (displacement) ofthe evaluation area. caegery Parameter | Dotergten Newoe “This paramatrcoresponds the standard dition Sq |Fectmean square height} of stance fom the mean pane Is equvalent othe ‘andar deviation of nights cq__| Tis parameter represents the syrmety of height se Seco sdstbusion we ku “This parameter represerts the kurtosis of rexght siertzon Heortperameers “Thi parameter rprorers tha maxmum value ct high S| Meximum peck NOGH | im tne mean plane of the surface, “Tie th absolut mmm vais ot ost om ne $+ | Minuten | TEST aeit me “This parametrrprocerts the distance betwen the = Momum Pst | rghest point and tho lowes point onto sufaca, ‘This the aritete moan of the absolute valve of tho Se |Atirsteat mean Pe) sgt ram tre mean plane of the surface ‘Supplomontary Notos Root mean square height (Sa) This parameter represents the root mean square value of ordinate values within the definition area. Itis ‘equivalent tothe standard deviation of heights Ssk values represent the degree of bias of the roughness shape (asperity) ZSS,Z x y)axdy] PEE Ssk = 5h Ssk0 Ssk<0- Height distribution is skewed above the mean plane. Ssk=0 Height distribution (peaks and pits) is symmetrical around the mean plane. Ssk>0 Height distribution is skewed below the mean planeKurtosis (Sku) Sku value is a measure of the sharpness of the roughness profile sku SS. y)exdy] Sku<3 Sku=3 Sku>3 SkU<3 ++ ~~ Height distribution is skewed above the mean plane. Sku=3 Height distribution is normal distribution. (Sharp portions and indented portions co-exist.) Sku>3 Height distribution is spiked Maximum peak height (Si This is the height of the highest peak within the defined area. Sp = mgx z(x,y) Maximum pit height (Sv) This ie the absolute value of the height of the largast pit within the defined area Sv = | min z(x,y) | Maxi ht (Sz) This parameter is defined as the sum of the largest peak height value and the largest pit depth value within the defined area. Sz= Sp +Sv Arithmot This parameter is the mean of the absolute value of the height of points within the defined area al mean height Sa =f, |Z(cy) | dxdySpatial parameters Spatial parameters are parameters that focus on the ditection of the plane (wavelength direction). category Parameter | Descrgten Notes This parameter represents te hrzortal distance inthe sat | fum.conaaten gin | drecionn which he auto coreion function decay the vale) (2 by default te tase Ths paranatar is messire unter ofthe eres ‘texte. The value is ebtaned by diving the hozontal ‘stance inthe docten which tho au coetion ‘Spatial paranotore se | Texureaspectrato | furcten decays tothe value] (02by dota ho tastost (cauivalot io Sab by te horzcrtal tance inthe recon fhe slowest docay of ao-corelaion uncon to he voll Ths value he angle wih which the angub pct sis Texto drecton | 1APSIS) the ages It renreserts tho lay ofthe surace "Ta as dein Ges meacerans pranSOS ISD PA? A ace as aR) ‘Auto-correlation function used for the calculation of Sail and Sir have the characteristic of allowing you to identity surface features. Auto-cortelation function can also evaluate the periodicity of each surtace direction, ‘The enter of the image is the highest point (ACF = 1), ‘and the ACF dacaye as the amount of shift away from the center increases. ACF falls rapidly to zore along ‘direction where the short wavelength component is dominant, and falls slowly when shifing along a direction where along wavelength component is dominant ‘Te gue Sows woven deur, te Therefore, the decay is slower along the direction of lay (on an anisotropic surface, while the decay is rapid along eget rg pre pn oe the ditection perpendicular tothe lay. ‘a conseaes ae me carer eet neu dows: Dalai epusd 10The angular spectrum graphs used for the calculation of Std can be displayed. Angular spectrum graphs allow you to identify the lay (haitline) direction Angular spectrum ‘re anor onan on ts anise acd me ana son og yin te mage the sare fe are ek eh Puke change cern we rst ca. Hybrid parameters Hybrid parametars are paramaters that focus an both the height ditaetion and the direction of the plane (wavelength direction). cotegeny Parameter | Oesesgten Footmean square | This parameter iscakuatsd as arootmean square ch saint | amnesiac cmscnece aoe || fe pears woenos fo sorn oe sa | Doderics| cre tate eran teste ab cerparea te plana dfn area "G Functional parameters Functional parameters are caleulated using the areal matorial ratio (bearing area) curve. Thay aro utilized to ‘evaluate the behavior of a surface that comes into strong machanical contact. ‘Areal material ratio The areal material ratio, Smr(e), isthe percentage of the cross-sectional area of the surface at a height [e] relative tothe evaluation cross-sectional area. ‘Areal material ratio curve ‘The areal material ratio curve expresses the heights at Which the aroal matoral ratio ie 0% to 100%. Equivalent line Ss ser ouitesccuene “Sn Core surtace Core surface is obiained by removing the predominant peaks and valley (portions not included in the range Cot heights at an equivalent lino areal material ratio (0 0% to 100%¢) from the definition area of the scale- Vro | limited surface. ‘The poaks with a height above the core surface aro called reducod poaks and the vallys bolow the core Ce sma 8% surface are called reduced valleys, 2catagory aramatee | Dasergten owes Tis pavaatar i caloated as difronce ofhaghts st real malarial rato voles OX and 100% onthe 8 | Cororoughnoss don | cquvalent i spociicaly, tis alo obtanod by subiracing the minima eight rom he maximum eight he ora suc, This pavaretorroprosents the mean Height of peaks above the core surface Sek | Reduced peak height This pavaretar represents the moan dept of valoys suk | Racveedvatey pin | [NE Daramoter repress oak ato parton Functional paramere (percentage of aserit ssmt__| tat compress ho poak Smucuzes associat) Smetana? rprceentho parcertag asta at ‘wth pe the rersacionf core sulace manera hacht and ara ‘ley matralparin”|matenalraticuva, ands poeertage osstae atthe (Geroontage he | ersecton of core surface minimum height and areal Passurerent ares | ale ati cave, roepoctehy, Sm2 | natcomprses ne deoper valey structures associa wit SA) ‘ow | Paskenrane magne | THe banat isthe difeerc ofheighis athe arcl rari rato values pr and a. B: Functional volume parameters concem volumes that are calculated using the areal material ratio curve, They are uilized to evaluate the behavior of a surface that comes into stiong mechanical contact, Inverse areal material ratio ‘Sme{p) the inverse areal material ratio, isthe height (c] that gives the areal material rato p%, Void volume Wp), the void volume, isthe volume of space per unit area that is calculated based on the areal material ratio curve of areal material ratio p% to 100% Material volume \in(p), the material volume isthe volume of material portion per unit area that is calculated based on the ‘areal material ratio curve of aroal material ratio 0% to p%. categeny Parameter | Dotergten Newoe Ths paraetarroprosens the void volume of dae athe ‘eal malta ato 0%, Ths pararetarroproseris to difererce belvon ha w Dale vid veh We ‘core woid volume | void volume at aral matoal aio ps ard he vid Functional vlan elu a ral ater ato a, Parartors rratnalvouma | THSPSaTeo oprosents ho volume of mati taal vine | Penk rtaalvoume | zane Ths pararetorrepeseris the dflererce betwen he vvne | Cor matrialvolune | mate vu al ral mater ato qs and he mater votre at rel materi ratio pe 13G Feature parameters Feature parameters are calulated from results of paak and vallay regions, respectively, segmented from the scale-limited surface. Point on the surface that is higher than all other points within the neighborhood of that point Hu Rogion around a peak such that all maximal upward paths ond at the peak Course tine Curve separating adjacent hills Pit Point on the surface that is lower than all other points within the neighborhood of that point Dale Region around a pit such that all maximal downward paths end at the pit, Aldge line Curve separating adjacent dalos Saddle point Point at which the ridge lines and course lines cross Local peak height Height difference betwaen the peak and its neatast saddle point connected by a ridge line Local pit neignt Height difference betwaen the pit and its nearest saddle point connacted by a course line “4‘Segmentation ‘¢ Watershed algorithm ‘The watershed algoritym is employed to pation regions, which aro used in the calculation of feature parameter. \Water is poured into the surtace landscape and it rune along the surface shape and reaches the pit. Upon ‘continuing to pour water, the water surfaces of water filing different pts make contact with each other. The set of these contact points isthe ridge line that partitions the dala region. The same approach ean be applied tothe hil region by vatically inverting the process © Wot pruning Peaks and pits merely need tobe higher ar lower that other points in their respective neighborhoods. For this reason, a curlace with fine asporty can have a vast numiber ef peaks and pits. Applying the watershed algorithm to such surfaces can result in meticulous segmentation into minute peak and valley regions. In order to suppress this over segmentation, the Wolf pruning method is used to remove regions below a certain hheightidepth threshold. ‘The threshald is provided as a porcentage of the maximum height (Sz) of the surface. Tho default value is S%. 6 6 696 oo Vo bay b — a 06 ‘nopptscaeinmesautearagt ‘ak mgan cen sg mas oe (ermanrg 90 Closed area_ Open area ‘A region that isin contact with the ‘boundary ofthe definition area atthe ‘matetial height cis called an “open area," while a region thats nat ie called a "closed area.” Height cis. > <<< Disadvantages >> © Cloar wave prate © Stylus weer © Copatle otlong distance © Measuring pressure can cause scratches on the sample surface measurement © Inabitty to measure viscous samples (© Measurement limited by radius of stylus ip © Measurement tekes ime © Difficulties in posttoning and identticaton of sub moasuring points (© Requires sample cutting and processing for tracing by the detector Contactiype surface roughness testers provide reliable measurement, because they directly touch the sample, However, direct contact also causes disadvantages as outlined above. [More detailed explanations for Some of these points are presented on the following pages. 6Stylus wear The stylus must be polished, because it will wear down ‘overtime. The made of wear vatioa, making the stylus Hat cr rounded depending on the matorial and chape of tho ‘measurement target object. Different stylus shapes will naturally generate diferent wave profiles (One method for determining stylus wear is to use a commercially available wear inepection test pioce, Wear is determined by comparing the data profile (groove width) of tho test piece bofore and after the woar ofthe stylus ‘Markings on the sample from measuring pressure ‘As explained before, styles are made of sapphire or lamond-such hard materials can seraich the surface of the test object. Espacially whan repeating parallel adjustments, it is easy forthe stylus to soratch the sample during rapid feed. Grooves narrower than the radius of the stylus tip. cannot be measured The tip ofthe stylus is sphetical. The stylus tip cannot trace the shape propery if the width of the groove (scratch, ete) is rarrowor than the radius ofthe stylus tp. Diterence in measurement este due 10 wear of sus Radius fats tip and groove witht cample Atomic force microscope (AFM) The atomic force microscope measures the asperity of a sample using the atomic forces between the tip and the sample. To perform measurement, tha user moves the cantilever, equipped with a sherp tip (probe) at its end, into proximity of a sample surface to a distance of several nanometers. In order to maintain a constant force between the tip and the sample (a constant deflection ofthe cantiover), the ‘atomic force microscope gives feedback tothe piezo scanner while scanning, ‘The displacement provided as feedback to the piezo scanner is measured to obtain the z-avial displacement, which isthe surface structure, A.comion way of measuring the displacement of the piezo scanner is the adoption of the optical lever method in which a laser beam ic emitted on the back side ofthe cantilever and the reflected beam ie detoctod by four-segment {or two-segment) photodiodes 20<<< Advantages >> '© High resolution (resolution: minimum distance between resavable points) © Capable of 30 measurement with super-high magnification, Collected data can be processed ‘© Observation in atmospheric conalitons is possible, nat ceding protieatment of sample © Capable of analyzing physical properties (electrical property, magnetic property ition, viscoelasticity etc.) <<> © Incapable of ow magnification (wide range) measurement. Samples with signfeant aspariy (lev difrence grater than {few um = 2px. 0.1 Ml) cannat be measured. © Difcurtiae in positioning due tothe need to narrow down the fad of view ‘Analysis for each sample takes time © Inability to measure large samples due tothe need fr pretvatment and processing © Relatively dificult operations; Experience required for cantilever replacement, etc Very small measurable range Tha atomie force microscope (AFM) is a magnifying observation tl capabla of massuring 2D textures of a minuscule ‘area. Unlike scanning electon microscopes, it can acquire height data in sumer values, which enable quantification of sample and data post processing, The AFM also allows for measurements in normal atmospheric conditions and is free from restictions such as the need for sample pretreatment and electrical conductivity, On the other hand, however, itis subject to the limitation of narrow measuring range (XYZ) due to its high resolution capabilities. The AFM also suffer the difcuties of ‘accurately positioning the probe to the measurement area and the need for knowledgeable operation correct mounting ot tho cantilever, ete.) 3-8 | White Light Interferometer Light intororence eceurs who thor is a difarence in cstanco traveled by the light (ight path) from the surface of target object to a certain | pont Tho whit ght refsromes uses hs peromoren meas he Snes surface roughness ofa sample. The fgue on the lefts a structural diagram coma loe ‘of an interforomater. Tha light emittad rm the source (semiconductor | = mer" lager, etc.) separated into reference and measurement beams, White the rn — reference beam is passed tothe reference mirror through a hall miro, the = ‘measurement beam is reflected and guided to the sample surface. The i — passed beam is reflected by the relerence mitt to the CCD image sensor and forms an intrference pattern. The other beam is rflocted off the sample surface, passes the half minor, and forming an image at the CCD image sensor. aom ‘The white ight interferometer is designed sa that the optical pathlength from the CCD clement to the reference mirror and that from the CCD element to the sample surface are the same. The aspetity on the sample surface causes these path lengths to be unequal \which results in forming an interference patter at the CCD element, The numberof lines in the interforence patter i translated to peaks and troughs (heights) on the sample surlace. << Advantages >> ‘© Capable of moasuring a wide fold of viow. Massutementin sub-nanametr ange is posible (© Quick measurement << Disadvantages >> © No or limited angular characteristic © Use is limitad on certain abjocts Wa ight intrteromete can oly measure when thera is great. Tercera, doce not suppor ihe meatuemart ct avanty tebe Measurement may alco not b pesible when reas sanfcar ifrence etwoan he ight rect em the rforence mire and hat afte from te maasurement aa. White lgt irtroremetar hands mirresutaces wel, but cannot measure spk or bumpy sarpes or nan. tetova ject.) © Requires tit correction Priore measuremant, sala tit crrecton must be pertamec using the crnems sag, Tiad samples can cause ccs. spaced iterloranc pate, which hinders accurate meas.rament. Same whit ight inreromaty systoms are equipped wih ait machanim that automaticaly comocs he samp it © Low resolution for XY stage measurement ‘Tho esoluton for X stage moasaroments sow duo to tha low numberof sapling data sts (aporoxmatly 300,000), Some white ht iterferomety systems can scalp o use approximately 960 000 dataset © Sensitive to vibrations aco of instalation sod dv oto quia gh sonst to viratons, Shock absorbing lablas ae nacossar for salon 23-4 | 3D Laser Scanning Microscope © Laser beam emitted from the laser source passes the XY scanning ‘optical system and scans the sample surlaca © Laser light-receiving elements detect the reflection information ofthe position in the focus ofthe confocal optical system, © A confocal image is created by at curulating the in-focus position information in the Z direction @ Atthe same time, by memorizing the objective lens positions forthe in-focus positions, the laser scanning microscope measures the 3D profile ofthe surface << Advantages >> © Deep depth of focus; Target object can be observed in color ‘© Produces 3D proilas and displays color 3D images Capable of measuring fim thickness of translucent objcts such as esis for semiconductor fabrication ‘© Analysis in atmosphere conditions is possible, not needing pretreatment of sample © No limitation on sample size and material; Easy operation makes for excellent general-purpose use. << Disadvantages >> Incapable of high-dafition observation and high-precision maasuremant (below 1 rm) Information ofthe surfaces of he sample that de nt receive laser beam emission (such asthe sides) cannot be acquited Incapable of measuring materials that absorb laser beam wavelength ‘AD laser scanning micrescope is an observation’measuring equipment that enables both the SD measurement and deep focus depth observation atthe same time. It has no restrictions onthe size or material ofa sample and allows for ‘observation under normal environmental conditions. In addition, the 3D la ‘operability similar to that of an optical microscope, Samples do not need pretreatment bofere measurement. Observation can bo done in color, which helps accurate analysis ofthe conditions ofthe targat object. ASD laser scanning microscope ccan also be used for measuring the thickness of films, as well as for observing the surface, inside, and back side of 2 scanning microscope features user-iendly translucent object While the 2D laser scanning microscope is better than a scanning electrcn microscope or an atomic force microscope in terms of operabilty, ie infrior in ebsorvation magnification and measurement resolution. Bottom parts with high aspect ratio and sto wih laige angles cannot be measured or observed, because they do nat reflect the laser beam, 23uy | comer vom cat oct —— KKEYENCE (|) t-s88-kevence www.keyence.com 4, ™tmomaran ERE ER ee Somaya AEyEHcE CORPORATION OF AMERICA ‘Corporte Offee 669 River Drive, Sute 409, Emcod Park NJGTAGT PHONE 8-S90-0609 FAK A55-500-0128 Ema Keyence@kayancecom Sales & Marketing Head Ofies 1100 Nort Aringon Highs Root Site 270 Rasen, 09143 PHONE: 888-580-2629 FAX: 859-500-0128 ‘Regional ofees CO Demer IN Indanapols MI Devo NJ Exmcod Pak OM Cocina PA Pasbuch TX Austin WL Milnaibce AL Bingham Felon MS Keneae ty AM) Granite NY fines” OM Gwen SC Grerie TE Balas GK NCntorma GA Anrin RY Luau,” MN Mieneapels” NE Chatone’ OR Fenlnd. TW Knonlle” VA. Rho A Cosingeles MLS Chage MA Gzocn'” MO St Laas” NE Agog BA Padua TN Nash Wa Seat KEYENCE CANADAING, avec xi 5.8, DE Head Offee PHONE: Gc 9567655 FAX-908 986122 E koyenescaadh hoyeron comm PHONE: ss. 220-7000. 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