K thut cm bin

TS. Nguyn Th Lan Hng

B mn K thut o v Tin hc Cng nghip
 Ti liu tham kho

[1] Cc b cm bin trong k thut o lng v iu khin,

Nh XB Khoa hc K thut (2001), Ch bin tp PGS.TS.
L Vn Doanh
[2]Cm bin, Nh XB Khoa hc k thut (2000), Phan Quc
Ph, Nguyn c Chin
[3] Process/Industrial Instruments and Controls Handbook,
Mc GRAW-Hill (1999), Gregory K.McMillan; Douglas M.
Considine,

2
 Ni dung ging dy

Khi nim cm bin v xu hng pht trin

c tnh k thut ca cm bin
Cc k thut cm bin c bn dng trong cng nghip
Nguyn l v hiu ng vt l ca cc chuyn i s cp
ng dng cc chuyn i s cp cho vic o cc i
lng vt l- thit b v cm bin o
o nhit
o p sut, o lu lng
o ti trng
o mc
o tc ng c
o gia tc chuyn ng

3
 Chng 1. Khi nim v cc c tnh k thut ca
cm bin
Cm bin l g ?
B bin i t i lng khng in thnh i lng i lng
in

i lng khng
in l nhng i
lng no?
Cc i lng in:
in p, dng in, in tch
Thng s mch in
Cn li l cc i lng khng
in
 Chng 1. Khi nim v cc c tnh k thut
ca cm bin (2)
S cc cm bin trong cng nghip

RS-232,485
L X U, I 4-20mA
KC C
TNH ADC XL 4-20mA
X CB SC DAC
RLC

CB tng t

CB thng minh

5
 1.1 Phn loi Cm bin

Theo nguyn l hot ng

Chuyn i in tr
Chuyn i in t
Chuyn i nhit in
Chuyn i in t v ion
Chuyn i ha in
Chuyn i tnh in
Chuyn i lng t
Theo kch thch: quang, c hc, m hc
Theo tnh nng
Theo ng dng
Theo m hnh thay th: Tch cc v th ng

6
 V d v cm bin th ng

i lng Thng s bin i Vt liu lm cm bin

Nhit in tr sut Kim loi : platine, nickel,

ng, cht bn dn
Nhit rt thp Hng s in mi Thu tinh
in tr sut Hp kim niken v silic m
Bin dng Hp kim st t
t thm
V tr in tr sut T tr

T thng ca bc x in tr sut Bn dn
quang
m in tr sut Chlorure de lithium
Hng s in mi Hp kim polymere
Mc Hng s in mi Cch in lng
7
 V d v cm bin tch cc

i lng vt l cn o Hiu ng s dng Tn hiu ra

Lc
p sut p in in tch
Gia tc
Nhit Nhit in in p

Tc (vn tc) Cm ng in t in p

V tr Hiu ng Hall in p

Hoa quang in tch

T thng bc x quang Pht x quang Dng in
Hiu ng quang p in p
Hiu ng quang
8 in t in p
2.2. c im ca cc phng php o cc i lng khng
in

c. Cc loi cm bin hay c s dng trong cng

nghip v dn dng

Cm bin o nhit (37,29%*)

Cm bin o v tr (27,12%*)

Cm bin o di chuyn (16,27%*)

Cm bin o p sut (12,88%*)

Cm bin o lu lng (1,36%*)

Cm bin o mc (1,2%*)

Cm bin o lc (1,2%*)

Cm bin o m (0,81%*)

*: Xp theo s lng cc loi cm bin bn c ti Php nm

2002
9
 c im ca cc phng php o cc i lng khng
in

d. Cc lnh vc ng dng

Xe hi : (38%*)

Sn xut cng nghip: (20%*)

in gia dng : (11%*)

Vn phng: (9%*)

Y t: (8%*)

An ton: (6%*)

Mi trng: (4%*)

Nng nghip: (4%*)

*: Xp theo s lng cc loi cm bin bn c ti Php nm

2002
10
 S chuyn i gia cc i lng - cc loi
cm bin
1
Encoder
U, I
2
Bin tr T
Di chuyn Trt T (L,U) (R, U)
kch thc 3
in
(L) R
cm T ( , L)
4 T
in (L, U)
T dung T (L,C) L
(L,) p 5
in T (M,U)
6
in tr
Khi lng lc cng T (M,R) C
lc (M) 7 T
p t (C, U)
T (M,L)
8
T Nhit
(M,t) in T (t,U)

Nhit T Nhit 9
(Ls,t) in tr T (t,R)

T Quang 10
(t,) in T (,U)

Quang T Quang 11
(M,) in tr T (,R)

T 11
(L,)
1.3. Bin i gia cc i lng (in) ca tn
hiu- Bin i thng nht ha

12
 A. Cc dng bin i chun ho thng gp

Ho hp ti gia cm bin v mch o

Cp ngun cho cm bin th ng

Tuyn tnh ho c tnh phi tuyn ca cm bin

Tuyn tnh ho tn hiu ra ca mnh o (VD cu
Wheastone)

Khuych i tn hiu ra ca cm bin

Lc nhiu tc ng ln tn hiu ra ca cm bin

Khuych i o lng trit tiu hoc lm gim cc
nhiu tc ng (in p k sinh v dng in r trn ng
truyn)

13
 Vn ca b thng nht ho

Thch ng v tr khng
tuyn tnh ho Thng nht Signal
Cm
Cmbin
bin Ho cm bin
th ng
Khuch i

Thng nht ho Signal Chun ho tn

Tn hiu
Cm
Cmbin
bin cm bin hiu thng nht
th ng ho

14
 B. V d

Chuyn i /tn hiu Thng nht ha tn hiu

Khuch i, tuyn tnh ho

Cp nhit ngu v b u t do

Ngun nuI, cu hnh 4 dy

Nhit in tr RTD v 3 dy, tuyn tnh ha

Ngun in p cung cp
Cm bin in tr cho cu, cu hnh v
lc cng tuyn tnh ho

t chung Khuch i cch ly

hoc n p cao (cch ly quang) Thit b DAQ

Cc tI yu cu chuyn Rle in c hoc rle

mch xoay chiu hoc bn dn
dng in ln

Cc tn hiu vi
Lc thng thp
nhiu tn s cao
15
 Ho hp tr khng

Ngun p
R2
VO = Vi .
R1+R2
R1 R2
Vi 0

Mt chui o c th coi l mt Ngun Ti o lng

phn p kiu mch lp li

Ngun dng
R1 R2
VO = Vi . R2
R1+R2
Vi

Z1 << Z2 ti o
Ngun lng b bin i
16
dng - p
 Ho hp tr khng
Ngun in tch

khuch i in tch
in tch c a vo mt t in khng i Cr, khi tch lu vo t to ra mt in p trn
cc ca t in t l vi in tch np vo

Khuch i o lng

Mch
Mchvo
vovivisai
sai
17
 1.4. Thng s k thut ca cm bin

Di o, ngng nhy v phn gii kh nng phn ly

nhy v Tnh tuyn tnh ca thit b
Sai s hay chnh xc
c tnh ng
Mt s thng s khc nh: cng sut tiu th, tr
khng, kch thc, trng lng ca thit b

18
 A. nhy
Phng trinh c bn
Y= F(X,a,b,c...)

F/X - nhy vi x (Sensibility)

F/a - nhy ca yu t anh hng a hay nhiu
F/X = KXt- nhy theo X Xt hay ngi ta cn k hiu l S

Khi K=const -> X,Y l tuyn tnh.

K=f(X) -> X, Y l khng tuyn tnh - > sai s phi tuyn.

Vic xc nh K bng thc nghim gi l khc thit b o. Vi mt gi tr

ca X c th c cc gi tr Y khc nhau, hay K khc nhau.
dKXt/KXt (Repeatability)Th hin tnh n nh ca thit b o hay tnh lp li
ca thit b o .
dKXt/KXt = dS/S=s- Sai s nhy ca thit b o -> nhn tnh.
(Hysteresis)
19
 nhy

20
Tr hay tr ca thit b (Hysteresis)

21
Tnh lp li

22
 B. H s phi tuyn ca thit b

nh gi tnh phi tuyn ca thit b o ta xc nh h s

phi tuyn ca n. Y
H s phi tuyn xc nh theo cng thc sau:
X max
K pt = Y
Xn
X
. Xmax- l sai lch ln nht
X
Ta thng dng khu b phi tuyn
Scb.Sb= K
(Nonlinearity Error)

23
 C. Khong o, ngng nhy
v kh nng phn ly
Khong o (Span/Full Scal/Range): Dx = Xmax
Xmin
Ngng nhy, kh nng phn ly (Resolution):
Khi gim X m Y cng gim theo, nhng vi X X khi
khng th phn bit c Y, X c gi l
ngng nhy ca thit b o.
Kh nng phn ly ca cm bin
-Thit b tng t
Dx
RX =
X

-Thit b s: DX
RX = = Nn
g
24
 D. c tnh ng ca thit b (1)

Hm truyn c bn : Y(p)=K(p).X(p)
c tnh ng:
+ c tnh qu
+ c tnh tn
+ c tnh xung X
X1 X2 X3 X4

Khi i lng X bin thin theo thi gian ta s c quan h

(t)=St[X(t)]
Quan h c biu din bng mt phng trnh vi phn. Phng trnh
vi phn y c vit di dng ton t.
(p)=S(p).X(p)
S(p)- Gi l nhy ca thit b o trong qu trnh o i lng ng

25
 c tnh ng ca cm bin (2)

Khi i lng X bin thin theo thi gian ta s c quan h

 (t)=St[X(t)]
Quan h c biu din bng mt phng trnh vi phn. Phng trnh vi phn y
c vit di dng ton t.
(p)=S(p).X(p) 26
S(p)- Gi l nhy ca thit b o trong qu trnh o i lng ng
 (t)

c tnh ng ca cm bin (2)

Xt

Nu i lng vo c dng xung hp

X(t)= Xt(t-). t
S(p)- th hin di dng hm h(t) c trng cho c tnh xung ca
thit b o.
c tnh xung thit b o c th c giao ng hoc khng tu theo
S(p)
Nu i lng c dng xung bc nhy
Xt=Xt.1(t-)

S(p) - th hin di dng h(t) theo quan h

S(p) c trng cho c tnh qu ca thit b o v tu theo
phng trnh c tnh ca n, n c th giao ng hoc khng giao
ng .
27
Mt s dng p ng bc 1

28
 Chng II. Cc cm bin o nhit

Cm bin nhit in tr

Cm bin cp nhit ngu

Cm bin da trn lp chuyn tip bn dn

Cm bin da trn bc x quang hc

29
 2.1. Nhit k nhit n tr
Nhit in tr l l in tr thay i theo s i nhit ca n: RT = f(t0),
o RT c th suy ra nhit .
Nhit in tr c chia ra thnh:
Nhit in tr kim loi v nhit in tr bn dn.

in tr kim loi ( RTD) theo nhit RT =R0(1+ t + t2 + t3)

Vi Pt: = 3.940. 10-3 /0C
= -5.8 10-7/ oC2 ; 0 trong khong 0-6000C; = -4 10-12 /0C3
vi ng t -500C n 2000C: = 4.27 10-3/0C
v trong phm vi s dng v chnh xc khng cao th coi nh khng ng
k v quan h RT v t coi nh tuyn tnh.

30
A, Nhit in tr kim loi

in tr chun ho R0=100 ti 00C

31
 H s nhit ca mt s kim loi
Cu Ni Pt W

Tf, 0C 1083 1453 1769 3380

C, J0C1kg-1 400 450 135 125

t, W0C-1m-1 400 90 73 120

l, 0C-1 16,7.10-6 12,8.10-6 8,9.10-6 6.10-6

, m 1,72.10-8 10.10-8 10,6.10-8 5,52.10-8

32
 Nhit in tr kim loi
o nhng nhit t -500C -6000C ngi ta thng dng nhit in tr
PT-100 (Platin 100 00C
Cu -100 (ng 100 00C)
Ni-100 (Ni 100 00C)
nhit Quan
-200 h gia
-190 nhit v in
-180 -170 tr ca
-160 Pt100
-150 -140 -130 -120 -100 nhit
, 0C , 0C

17.28 21.65 25.98 39.29 34.56 38.80 43.02 47.21 51.38 55.52

0 0
C -100 -90 -80 -70 -60 -50 -40 -30 -20 -10 C

59.65 63.75 67.84 71.91 75.96 80.00 84.03 88.04 92.04 96.03

0 0
C 0 10 20 30 40 50 60 70 80 90 C

100.0 103.9 107.9 108.5 115.7 119.7 123.1 127.4 131.3 135.2
0 6 1 8 0 0 9 7 4

33
 B, Nhit in tr bn dn (NTC-PTC)

Nhit in tr bn dn RT = Ae /T

A v u khng n nh. Ta cng c th tnh

= (-2.5% +-4%)/ 0C

Thng thng c ch to t cc oxit bn dn a tinh

th: MgO, MgAl2O4, Mn2O3, Fe3O4, Co2O3, NiO, ZntiO4

Cc bt oxit c trn theo mt t

l thch hp, sau c nn vi nh
dng v thiu kt nhit 10000C
34
 Nhit in tr bn dn

Mt s nhit n tr bn dn
a) KMT v MMT b) MKMT c) Quan h gia RT(0t)
35
1.Nhit in tr ng 2. Nhit in tr bn dn
Nhit in tr bn dn

36
 C, Cu to
u bt

u dy Nt y
bn trong
tm chn
Gi

mi hn
ng cch
nhit ng bo v

Phn t
in tr

Mi hn

Cu to bn ngoi Cu to bn trong
37
38
39
 D, Mch o- phng php ngun dng

R2 R2
U R = U Rt = I .Rt
R1 R1

40
Mch to ngun dng

Iref = Vref/R1.

41
 Phng php s dng ngun p

B in tr dy

Rt R4
UR = E
R
t + R2 R3 + R4

42
V d S b bin i nhit in tr

 Ngun dng 2.5mA to ra mt s bin thin in

p trn in tr l 100mV/1000C.
RT = R0 (1+t); = 0.385% / 0C
 Nu RT c cung cp bng ngun dng 2.58 mA
th khi nhit bin thin 1000C
U = RT . I. = 0.385 x1000Cx 2.58 =100mV
 in p ri trn RT c a vo khuch i b
in p 00C v bin i p thnh dng (4-20mA)
a vo h thng thu thp s o.

1- Nhit in tr 2- Modul vo
3- Dng cung cp (hng)
4- in p mt chiu khuch i
5- Modul ra 6- iu chnh in p

Mch chun ho
43
 2.2. Cp nhit ngu
Nguyn l : Hiu ng Seebeck
Da trn hin tng nhit in. Nu hai
dy dn khc nhau (hnh v) ni vi nhau
ti hai im v mt trong hai im c
t nng th trong mch s xut hin mt
dng in gy bi sc in ng gi l sc
in ng nhit in, c cho bi cng
thc
ET = KT (tn - ttd)
Trong : KT - h s hiu ng nhit in
t2
tn - nhit u nng
ttd - nhit u t do a
b

t1
t1 44
45
46
 Mt s hiu ng nhit in khc

Hiu ng Peltier: Hiu in th tip xc ca gia hai

dy dn khc nhau v bn cht
VM-VN = PTA/B

Hiu ng Thomson: trong mt vt dn ng nht, gia

hai im c nhit khc nhau sinh ra mt sut in
ng
TN

E ATM TN = hA dT
TM

47
 V chng nc cho
B, Cu to u bn trong
Np

Khi bn
trong

u va
chm

Mi hn

ng
bo v
Phn
cch ly
C nhiu hnh dng
khc nhau Phn t
cp nhit

48
Giao
im
V d cu to bn trong ca cm bin

49
50
 Cc kiu cp nhit ngu
K hiu K hiu hinh Vt liu cu thnh Dc im cn lu tm
thc

B - Patin Rhodium 30- Dy dng nh l hp kim 70%Pt, 30% Rh.

Platin.Rhomdium 6 Dy m l hp kim 94%Pt, 6% Rh. Loi B
bn hn loi R, giai o nhit n
18000C, con cc c tnh khc th nh loi
R
R - PtRh 13 - Pt Dy dng l loi hp kim 87% Pt, 13%
Rh. Dy m l Pt nguyn cht. Cp ny rt
chnh xc, bn vi nhit v n nh. Khng
nn dng nhng mi trng c hi kim
loi
S - PtRh10-Pt Dy dng l hp kim 90% Pt, 10%Rh.
Dy m l Pt nguyn cht. Cc c tnh
khc nh loi R
K CA Cromel-Alumel Dy dng l hp kim gm ch yu l Niv
Cr. Dy m l hp kim ch yu l Ni. Dng
rng ri trong Cng nghip, bn vi mi
trng oxy ho. Khng c dng mi
trng c CO, SO2 hay kh S c H
E CRC Cromel- Constantan Dy dng n ivi loi K. Dy m nh
loi J. C sc n ng nhit in cao v
51 thng dng mi trng acid
Cc kiu cp nhit ngu

52
 Gii hn nhit v cc ng bo v

Dng knh ca dy Gii hn nhit lm vic ng bao v O.D x I.D

Dng ca cp nhit
k hiu ng gii hn gii hn trn ng bao v bng ng bao v
knh bn chun im loi ( mm) khng bng kim
ngoi loi ( mm)
B Pt Rh 30%/ Pt L 0.5 15000C 17000c _ 15 x11
Rh 6%
R Pt Rh 13%- Pt L 0.5 14000C 16000C _ 15 x 11

S Pt Rh 10%-Pt L 0.5 14000C 16000C _ 15 x 11

K (Chromel_Alumel) D 3.2 10000C 12000C 21.7 x 16.1 17 x 13

C 2.3 9000C 11000C 21.7 x 16.1 17 x 13

B 1.6 8600C 10500C 15 x 11 15 x 11

A 1.0 7500C 9500C 12 x 9 15 x11

H 0.65 6500C 8500C 10 x7 10 x 6

53
 C, Phng php o nhit bng cp nhit ngu

Thng nht ho bng mch in p tch cc

B u t do
B in tr dy ni

R5 R1 + R3
U ra = E 1 +
R4 R2

54
55
 B nhit u t o
Mch b nhit u t do c thc hin bng 1 mch cu 4
nhnh trn y c mt nhit in tr, hot ng ca n nh sau: 00C
4 nhnh ca cu cn bng in p ng cho cu U=0, khi
nhit trn u hp ni dy tc l nhit u t do thay i:

U CC R T U CC
U = = t td
4 RT 4
Ta li c ET = KT (tnng- ttdo) = KT tnng -KTtt do

b nh hng ca nhit u t do ta c
U CC 4K T
K T t t do = t t do U CC =
4

56
V d B cp nhit ngu ca SIEMENS

IA v UH - Tn hiu ra mt chiu v ngun cung cp.

1- Cp nhit ngu 2- u vo ca mch
cu
3- u lnh ca cp nhit 4- ngun dng hng
5- in p mt chiu khuch i 6- Modul ra
7- iu chnh in p

57
V d

IA v UH - Tn hiu ra mt chiu v ngun cung cp.

1- Cp nhit ngu 2- u vo ca mch
cu
3- u lnh ca cp nhit 4- ngun dng hng
5- in p mt chiu khuch i 6- Modul ra
7- iu chnh in p

58
 2.3. o nhit bng it v transitor
Da trn lp chuyn tip bn dn
Quan h ca dng n theo nhit
qv
I = I 0 exp 1
kT

n p ra ca it c th vit nh sau:
kT kT kT
v = v + LogI .mLogT .LogC
q q q

Thng thng nhy -2,3 mV/0C vi

dng in khong 1uA

59
60
V d v LM335

61
Nhit in tr bn dn
Ngun p : LM35

Mch o vi nhit in tr bn dn

62
 Nhit in tr bn dn
nhy nhit
ca diode v
trans. mc theo
kiu diode:
S=dV/dT c
-25mV/0C

Mch chun ho
k I k
VB1 VB 2 = T ln C 1 avec = 86 ,17 V /
q IC 2 q
Gi s 2 Transistor ging nhau, c cng nhit
r
R1 I C 1 = R2 I C 2 VB 2 = S
r + R

R kT R1
T : S = 1 + B1
V + ln S = fct(T) c ci thin

r q R2
63
64
Mch o

65
V d B bin i thng minh o nhit
Siemens

66
u vo
Cc du vo (2)
Hp knh MUX (3)
Khuch i (4)
Ngun dng dng o nhit
Nhit in tr (1)
Mch khc (9)
Vi iu khin(10)
B bin i tng t s (5)
Lc thng thp l bng kt qu (6)
Khi tuyn tnh ho phc v cho cc c tnh phi tuyn ca cm bin (7)
B iu ch rng xung u ra (8)

67
 u ra
B cch ly v in (13)
B ra vi tn hiu xung iu ch rng (17) v b bin i s tng t
u ra kim tra theo di tn hiu ra (18)
Cm bin ph, rle (14)
Kim tra v hin th
Giao din ni tip (11) hi p v t cc thng s
Nt n kim tra cho nhit in tr hay khc cc cm bin in
tr
u bo (lm vic v c s c)
Ngun cung cp 24V mt chiu ni vo li in

68
 2.4. Ho quang k
 o nhit khng tip xc di nhit cao >
16000C
 Mt ph nng lng pht x theo bc sng ca
vt en l tng khi b t nng
1
E = C15 C / T
e 2 1
- bc sng; T - nhit tuyt i ;
C1= 37,03 .10-17 Jm2/s0C ; C2= 1,432. 10-2 m0C
 3 phng php:

Ho quang k bc x

Ho quang k cng sng

Ho quang k mu sc: 69
70
Phn b ph ca cc vt

71
 2.4.1. Ho quang k bc x

a) b)
- a) C u to ca ho quang k bc x
b) Cp nhit hnh r qut cromel-copel

1. Thn dng c 2- vt chnh vt knh

3- Vt knh 4- Rnh t cp nhit thu
5- Thn g cp nhit 6- Toa nhit u t do
7- u ra ca b thu 8- Gi vt knh
9- vt knh 10- lc nh sng
11- u dy cp ra 72 12 - ng dn cp ra
13- Tai g thit b 14- chnh tiu im
 2.4.2. o nhit bng phng php quang
hc: hng ngoi IR
Nng lng bc x:
ET=.Ebx=T4
Ngi ta dng it hng ngoi thu nng lng ny
Ngi ta t mt it lazer pht ra mt trm tia hp song
song vi vi trc ca ho quang k. Vng trn sng ca
Lazer chnh vo vng ta o nhit

73
74
 2.4.3. Ha quang k mu sc

c tnh ph ca
vt t nng
(nhit thp i
tng pht ra nh
sng , nhit
cao pht ra nh
sng xanh n
tm)

75
Ha quang k mu sc

76
 V d. Ha quang k mu sc
A- i tng o nhit ; 1- vt knh;
2- a lc xanh ; 3- mt ng b;
4- t bo quang in; 5- khuch i;
6- T ng chnh h s khuch i; 7- lc
8- kho i ni; 9- logomet chia xanh

a)
b)
a) c tnh ph c vt t nng
b) s khi ca ho quang77k mu sc
 2.4.3. Ha quang k cng sng

1. n si t
2. Vt knh, chnh vt knh 1 2
3. ng trt v vt knh
4. Chit p chnh dng in t
n
5. Thu knh 5 4 3

a) Nhit dy n bng nhit i

tng
a) b) c)
b) Nhit dy n cao hn nhit i
tng
c) Nhit dy n thp hn nhit
i tng

78
Nguyn l ca ha quang k cng sng

79
Chun thit b

80
V d

81
Camera hng ngoi

82
V d

83
84
Chng 3. Cm bin o lc, bin dng, p
sut, hiu p sut v lu tc
 3.1. Cc loi cm bin c s dng o
lc
Cm bin in tr lc cng
Cm bin p in
Cm bin in cm
Cm bin p t

86
 A, Cm bin n tr lc cng

Nguyn l lm vic : hiu ng tenzo (piezoresistive/ strain

gauge),

Cm bin loi ny c 3 thng s chnh
 Kch thc ca
 Gi tr in tr Rcb
 Dng n ti a cho php
a) in tr lc
cng l mng;
b) in tr lc
cng kiu mng
mng

87
 A, Cm bin n tr lc cng (2)

Ta c R l
= f( )
R l
hay R = l
Mt khc ta c R l S
= +
R l S

R= + l - S
Trong c hc ta c S =-2KPl ; Kp h s Poisson
R = l (1+ 2Kp + m) = Kl
nhy ca chuyn i: K = R/l = 1+ 2Kp + m

88
89
Bng gi ca cm bin

90
 B. Cm bin p in

Da trn hiu ng p in.

Vt liu dng ch to cc chuyn i p in thng
l tinh th thch anh (SiO2), titanatbari (BaTiO3), mui
Xenht, tuamalin ...,, ngay nay ngi ta cn tm ra cc vt
liu polymer nh PZT,PVDF, ..

Lc FX gy ra hiu ng p in dc vi in tch q=d1Fx

Nu tc ng mt lc theo
trc Y, gy ra hiu ng p in
ngang vi in tch q, ph thuc
vo kch thc hnh hc ca
chuyn i: q= -d1(y/x)Fy.
d1 - hng s p in ( gi l mdun p
in)
y, x - kch
91 thc ca chuyn i theo
trc X v Y
V d : hiu ng p in trn mt tinh th thch anh

Mch tng ng
T in !!!

92
B. Cm bin p in (2)

93
 Tn s dao ng ring ca tinh th p in

l- chiu dy ca tm tinh th
C- h s ca tinh th
Nh vy tn s dao ng thay i trong khong

94
V d

95
Mt s thuc tnh ca vt liu p in

96
97
98
 C. Cm bin p t

in cm ca
chuyn i p t

W 2 W 2 ..S
L= =
R l

Di tc dng ca bin W- s vng cun dy

dng n hi c hc, t R- t tr ca mch t
S, l - din tch v chiu di ca mch t
thm v cc tnh cht
t thm ca li thp
khc ca vt liu st t
thay i. 99
 D. Cm bin in cm

Nu b qua in tr thun ca cun dy v t tr ca li

thp W 2 W 2 . 0 .S
L= =
R 100

 E. Cm bin in cm

Nh vy c tuyn ca chuyn i in cm khi d di khe

h khng kh thay i Z=f() thng l phi tuyn v ph
thuc vo tn s ca ngun kch thch. Tn s dng kch
thch cng ln th nhy cng cao.

L L
dL = dS + d
S
Z / Z 0 1
S =
'
=
/ 0
2

1 +
0

101
E. Cm bin h cm

T thng tc thi
iW1 W1 0 Si
t = =
R
i- gi tr dng tc thi trong
cun dy kch thch W1.
Sc in ng ca cun dy
o W2:

d t W2 .W1 0 S di
e = W2 =
dt dt

102
 3.2. o bin dng

Mi cm bin dng o
l chiu di hay di chuyn
Bin dng l =
di l u c th dng o bin
dng

103
 o bin dng (tip)

Chn v tr o bin dng v d kin gi tr bin dng ti

ni o.

Vic chn v tr o bin dng da trn s phn tch v lc
phn b trn cc chi tit.

Dn cm bin vo chi tit : Nguyn tc dn cm bin l
cm bin bm cht vo chi tit cho bin dng ca chi tit
truyn vo cm bin.

S dng mch cu v khuch i dng o bin dng.

104
Mt s cch dn cm bin

105
 V d o bin dng

in p ra ca ng cho cu ca
cu 2 nhnh hot ng c tnh:
U R cb U CC R2 R CB
U = CC = k cb l
2 R cb 2 UCC
kcb l nhy ca cm bin ( nu cm
U
bin l dy mnh hay l mng kcb=1.8- R3 R
CB
2.2 cn cm bin bn dn kcb c th
ln ti 200)
o U c th suy ra l

U ch c gi tr c mV v
vy cn phi khuch i
trc khi vo b t ghi hay
b thu thp s liu 106
V d my kim tra bin dng

107
 3.3. o lc v trng lng

Hin nay cc lc k da trn nguyn tc sau:

F : Lc bin thnh bin dng
F : Lc bin thnh di chuyn
Lc k kiu b: Fxll = Fklk
ll cch tay n bn phi lc o
lk tay n bn pha lc b

108
Cn bng cch tay n

109
 A, Lc k kiu bin dng ( Load Cell)

Trong loi lc k ny lc tc dng F

gy ra ng sut v bin dng, sau
bin dng c bin thnh in p
hoc tn s
Cm bin
ngang

Cm bin
dc

110
 V d

Siemens ch to loadcell SiwarexK vi cc thng s sau

Ti trng 2.8 6 13 28 60 130 280 tn
Sai s 0.2% 0.1%
H s nhit 0.050%/ 0C.
nhy 1.5mV/V
in tr ra 245 0.2
in tr cch in >20M

111
V d

112
 Lc k kiu bin dng
F
Bin dng c tnh l =
F - lc tc ng ln loadcell
SE
S- tit din phn t n hi
E - modul n hi thp lm loadcell
Cm bin in tr lc cng c nui cy trn phn t n hi. N gm 4 n
tr, 2in tr dc l in tr tc dng, 2 in tr ngang l in tr b nhit . 4
in tr ny c ni thnh cu hai nhnh hot ng. in p cho cu:
U CC R U CC
U = = k l
2 R 2
UCC - in p cung cp cho cu
R - bin thin in tr do bin dng ca phn t n hi
R
l - bin dng tnh theo cng thc trn
k - nhy ca cm bin in tr lc cng.
Khi ch to xong nh ch to cho ta nhy ca load cell l (mV/V)
113
 Lc k kiu bin dng xuyn

ng
F

a) b) c)

a) bin dng ngang v dc ca dm hnh xuyn. b) cu to bn ngoi ca cm bin

sirieR ca Siemens. c) cu to v kch thc ca cm bin

114
115
Moun n hi ca mt s vt liu nh sau

116
Chuyn i kt cu

n hi

117
Chuyn i kt cu (tip)

118
119
 Bi tp

Mt cm bin tng t (4-20mA) on trng lng c

nhy cu l 1,5mV/V. Trng lng ca vt l 0-50kg.
Tnh in p ca cu khi c mt khi lng 25kg bit
phn gii l 500. Tnh dng in ca cm bin.

120
 B, Lc k kiu di chuyn

Mt phn t hay mt dm n hi, lc chu tc dng

ca mt lc, s c bin dng v to ra di chuyn (kt
cu cng xn)

F
h
l 1 Fl 3
a) =
2 EJ
F
h
b) l
bh 3
J=
a) Dm cng xn tit din u 12
b) Dm dng cng xn ng sut u

121
 B, Lc k kiu di chuyn (2)

Fr 3
v = 0.149 Lc k dm cng
EJ xn kp
Lc k dm ko

Lc k nn hnh Lc k ko hai u
xuyn dng bin tr

122
 Cm bin h cm

C cu n hi bin lc thnh di
chuyn
Cm bin c gn cun dy
phn tnh ln im c nh ngoi
dm, li thp di chuyn c gn
vo dm v c th chuyn ng
(M + M)I k (M 0 M )I k
trong cun dy phn tnh. Bng U = E1 E 2 ; U = 0
2 2
s cm bin h cm vi sai , ta
c
M- bin thin ca h cm lc
li thp di chuyn
- tn s ca ngun cung cp
Ik - dng kch t s cp
M=f(), nh vy U=g().
Quan h ny khng tuyn tnh 123
do phi b sai s phi tuyn.
V d v lp t h thng cn

124
 3.3. o p sut
F
p sut: P=
S
F- lc tc dng ln b mt tc dng
S- Din tch thnh ca mt tc dng
p sut tuyt i
p sut tng i
n v o

M thng dng n v psi

125
A. Bng chuyn i gia cc n v

126
Mt s loi hnh chuyn i p sut

127
Mt s loi hnh chuyn i p sut (2)

128
 B. Cc loi cm bin o p sut

Cm bin s dng nguyn l ca t in (cm bin in

dung): sai s ln, nhy thp, khong o khong 107Pa
Mng do

129
 C. o p sut

Ap sut c truyn ln mt mng o,

l mt mng bin dng trn y c mt
cu o bng 4 in tr lc cng bn
dn. Trn mng bin dng ny bin
dng ( tm) c tnh: t
2R
d

PR
= 0.49 2
Ed
P
Bin dng di tc
ng sut bin PR 2
dng ca P
b = 0.75 ?
d2
PR 4
Di chuyn to nn tm mng = 0.17 3
130
Ed
D. Mch o

131
Bin dng mng

pe- p sut, bin u vo

IA, UH - tn hiu vo v ngun cung cp
1 -ng dn kt ni
2 -mng chn
3 -cht lng truyn p sut
4 -cm bin n tr lc cng mng silic
5 -khuch i o lng
6 -chuyn i p tn
7 -vi iu khin
8 -chuyn i s tng t
9 -hin th tng t ( la chn)
132
V d: p sut MPX (s dng cm bin Piezo)

133
Cu to ca cm bin

134
135
136
c tuyn ca cm bin loi ny

137
3.5. o hiu p sut

2 - 60 mbar loi C
8.3 - 250 mbar loi D
20 - 600 mbar loi E
53 -1600 mbar loi F
160 - 5000 mbar loi G

1 - u nhn p sut P1P2; 2 - thn ca b bin i

3- Cht lng truyn p sut 4 - mng mng
5 - vng O; 6 - gia ca mng
7 - cm bin in tr lc cng silic
8 - khuch i o lng
9 - chuyn i p tn; 10 - vi x l
11 - chuyn i s tng t; 12 - LCD
138
13 - ch th tng t
139
 3.6. o lu tc- hiu p sut
Mt trong nhng phng php c dng rt nhiu trong Cng nghip l cm
bin hiu p sut.
Trong mt ng dn cht lng hoc kh, khi c mt vt chn t trn ng dn th
dng chy b ri v to ra mt hiu p sut trc v sau vt chn. Theo cng thc
Berloulli

h
q v = kS q g = kS h

qV - lu tc tnh bng th tch ca cht lng.
qg - lu tc tnh bng trng lng ca cht lng.
k- H s ph thuc vo hnh dng h s bin i kch thc gia ng v l
chnvv..
- nht ca cht lng.
S- Din tch ca ng dn
h- hiu p sut trc v sau l chn. 140
- trng lng ring ca cht lng.
Cng thc Bernoulli

141
Mt s kiu l chn

142
 Mn chn

q 0 1 3 5 8 10 20 30 40 50 60 70 80 90 100%

0 0.0 0.09 0.2 0.6 1 4 9 16 25 36 49 64 81 100%

p 1 5 4

143
 B. Lu tc k kiu cm ng

Cht lng c chuyn trong mt ng cch in (Teflon) 2 in cc t vung

gc vi t trng tc ng, t i tm qua ng dn. Quan h gia sc in
ng cm ng v lu tc cho bi e = BdV
e- sc in ng cm ng (V)
B - t cm ng ca t trng xuyn qua cht lng (Tesla)
d- ng knh trong ca ng (m)
V- tc trung bnh
144
ca cht lng (m/s)
145
146
 c im ca phng php

Di kch thc rng, c th dng o dng lng hng

chnh xc c th t ti 0,5%
Khng nh hng bi s thay i ca nht v t trng
cht lng
Ch o c cht lng c dn in cao 5S/cm (
trng hp c bit 0,1 S/cm). C th o c cht trn
phc tp
Phi m bo cc lp tch t khng bm vo bn cc

147
C. Lu tc k kiu siu m

148
 C. Lu tc k kiu siu
Ft SA
m Thu
tinh th p SA
in thnh
ng
p in
C

a) Hiu ng Doppler trong o lu tc bng siu m.

b) nguyn l my o lu tc bng siu m

Nu b pht siu m v b phn thu t cch nhau 1 khong D, ta c thi gian

truyn ca sng siu m t u pht n u thu:
D
Thun chiu T1 =
D Ngc chiu T2 =
C+V CV

1 1 2v D
= v = (F1 F2 )
v ta c T 1 T2 D149 2
Vn tc ca m thanh trong cc mi trng khc
nhau

150
Mt s la chn tn s siu m

151
 Mt s la chn tn s siu m

ng dng Tn s lm vic (kHz)

Trong khng kh 50-60

Trong y t Thng s dng di dng xung

152
Nguyn l truyn sng siu m

153
Nguyn tc truyn sng m

154
 Nguyn tc pht sng siu m

Da trn tn s cng hng ca lp tinh th

Kch thch cng hng bng mt in p

155
156
D. Lu tc kiu cnh qut

o tc quay ca cch qut c th suy ra v.

157
Tn hiu ra

158
E. o lu lng bng phng php nhit dn

C th phn tch thnh 6 dng o nh sau:

159
 Dng dy si t v phim t

Phng trnh in tr ca dy dn nh sau

Trong : R- in tr ca dy dn nhit T
Rr- in tr ca dy dn nhit Tr
h s nhit
Thng dy dn kim loi l Pt; volfram, Pt-Iridi
Da trn cng sut ta nhit (chnh lch nhit ) m suy
ra lu lng ca dng chy

160
 Dng dy si t v phim t (tip)

B tr trn knh dn

161
Cc dng u o nhit

162
Mch o c bn (1)

163
Mch o c bn (2)

164
Phng php o thng qua cng sut ta nhit

Phng php ny o thng qua phn b nhit xung quanh

u t nng

165
Phng php o thng qua thi gian truyn nhit

166
Chng 4. Thit b o mc
Bng la chn cm bin theo mc

168
Tip

169
 4.1. o mc bng phng php phao ni

Khi qu nng ri xung puli quay v gc quay bin

puli
thnh s xung 2
0 = R

x - gc quay n
sensor quang

NX - s xung m c
0 - gc ca mt lng t gc quay
hx
n- s xung tng ng vi 1 vng quay ca Hch
encoder.
Ngi ta b tr nh sau: Khi qu nng i qua mt hmc

im chun, mt t bo quang in khi ng b m.

Khi qu nng tip xc vi mt nc mt b phn t
ng (rle ti hn) ng mch in. Ta c
hx = Hch - hmc = (NX/n)2R
170
Mc nc : hmc = Hchun - hx
Cu hnh ca thit b o

171
Bin tr trt

172
173
V d Phng php kiu phao

174
4.2. Phng php mc p sut

p sut di y ca mt ct nc
c tnh
P = h.
P- p sut y ct nc
- trng lng ring ca cht lng
h- chiu cao ct nc hay mc
nc
175
 V d:

Tnh tan p sut ca ct nc cao 5m ?

Trng lng ring ca nc 9800N/m3
p sut ca ct nc
9800 x 5m = 49 kN/m2 = 49kPa

176
177
 4.3. Phng php n dung o mc
in dung ca mt t phng c tnh S
C- in dung ca t in
C=
d
- hng s n mi ca cht cch in gia hai bn cc
d - khong cch cc in cc

Khi mc du 0 tc l trong thng khng c du, ta c

C0 - in dung ca t khi in mi l khng kh
h - chiu cao bn cc 0 ( H h0 )b
C0 =
b - chiu rng bn cc d
d - khong cch cc bn cc
d hb
Khi y du Cd =
d
Khi du mc hx ta chia c thnh hai phn d h b 0b( H h0 h)
Cx = +
d d
o Cx c th suy ra h. Trong cm bin ny C0, CX u nh
178 (c pF) v
th nn mch o thng dng tn s cao.
V d i vi nc

179
Cng thc tnh ton t in

180
Hng s in mi

181
182
183
 4.4. Dng siu m o mc

Ni dung phng php nh sau: trn nh xil t

mt ngun pht siu m mnh. Ngun pht pht ra
lung siu m theo chiu xung y xil. Khi lung
siu m gp mt cht lng (hot ht) n phn x ln v
n u thu, thi gian t lc pht n lc thu

2d
TX =
C
TX - thi gian t lc pht n lc thu siu m
d- khong cch t nh xil n mt cht lng.
C - tc truyn siu m trong khng kh (vo
khong 300m/s).

184
 Mch o

To dao ng

185
o in dung bng phng php m xung

Mch o tn s
186
Mt s m hnh cng tc mc

187
M hnh h thng ng ngt mc

188
Chng 5 . Phng php o thng s chuyn
ng v kch thc hnh hc
 Cc thng s chuyn ng

Di chuyn hay khong di A

dA
Tc chuyn ng v=
dt
Gia tc chuyn ng
dv d 2 A
= = 2
dt dt
i vi chi tit giao ng hnh sin th tc giao
ng
d(A m sin t )
vi = = A m cos t
dt
Gia tc
dv
t = = A m 2 sin t
dt
190
 5.1. o di chuyn

Di chuyn thng bng bin tr trt

S dng cm bin in cm, h cm.
S dng cm bin in dung

191
H thng dn ng di chuyn

192
 A. Cc php o di chuyn
V d nh in cm- h cm

193
 o di chuyn bng in dung

in dung

194
 5.2. o khong cch

Thng thng y s dng sng m,laze, hay rada, nh

sng
Phng php pht tia laze/rada vi khong cch xa- thng
qua thi gian truyn sng
Tnh gc lch pha ca sng
Phng php quang hc

Phng php thng qua vn tc quay

195
 A. Phng php thi gian truyn (TOF)
Xc nh thi gian truyn sng: Pht v thu sng sau khi
phn x

Phng php ny dng nhiu nht l sng siu m

C th o ti 35ft, gc nghin l 120

196
 B. Phng php thi gian truyn (TOF)

TOF tnh theo bin phn x ln nht

197
 C. Di chuyn theo gc lch pha

Ch s dng khi khong cch nh hn mt bc sng

198
S ca thit b

199
200
V d

201
 V d v loi n Laser

Kh Helium-Neon

202
 5.3. o vn tc
A. Phng php in cm
S dng my pht tc: mt chiu v xoay chiu

t = max sin t
Sc in ng cm ng: E= KWn
dt
Sc in ng cm ng e= e = max cos t = E m cos t
dt

203
B. o di chuyn kiu a quang

204
V d: Encorder

- Photoit
TX - To xung
KT- Kho in t
X- m xung
CT- Ch th
k - iu khin

TX KT X CT

205 K
Tng quan v phng php o

206
Chiu quay

207
 C. Cm bin quang

Photo diot (t bo quang in)

Quang tr (quang in tr)

208
 T bo quang in

I = f().
I: dng quang in pht ra t pht dit.
: Quang thng t bo quang in.

209
Mch tng dng ca photodiot (a) v c
tuyn Vn-Ampe (B)

210
Mch o thng thng

211
 Quang in tr

Cng nh photo diot quang in tr l in tr thay i

theo quang thng nh sng chiu ln quang tr R:
R = f().

212
 Vt liu ch to cm bin
Cm bin quang thng c ch to bng cc bn dn a
tinh th ng nht hoc n tinh th, bn dn ring hoc
bn dn pha tp, th d:
- a tinh th: CdS, CdSe, CdTe
PbS, PbSe, PbTe
- n tinh th: Ge, Si tinh khit hoc pha tp Au,Cu,Sb,In
SbIn,AsIn, Pin, CdHgTe

Vng ph lm vic ca mt s vt213liu quang dn

Mch o- S dng chuyn i dng thnh p

214
D. Cm bin Hall o di chuyn

Di chuyn gc

Di chuyn thng

215
 Hiu ng Hall

Sc in ng Hall c tnh

Cng in trng H

Trong : N s in t t do;
Cng nh sng c

216
Mch tng ng ca cm bin Hall

217
V d: Mt s c tnh ca cm bin Hall

218
219
 D. Phng php cm ng

Mq=KI.B.IC

E K B K 1K 2 B 2
I c = cu = 2 Mq =
R R R

=K. hay =Kn. Tc k mu cm bin

1- a nhm; 2- kim ch; 4- l xo
phn khng

220
V d v

221
 5.4. Phng php o gia tc

Cm bin p in
Cm bin in dung

222
 B. Gia tc k kiu p in
in tch sinh ra trong chuyn i p in q=d1F

q gy ra in p trn in cc ca chuyn i p in
d1M
q=CU U=
C

Gia tc k kiu p in
1- Thn cm bin; 2- Ren
bt vo i tng; 3-
Chuyn i p in ; 4-
Khi qun tnh; 5- u dy
ra; 6- cp ng trc
223
224
C. o gia tc kiu in dung

226
227
228
 5.6.o mmen xon- cng sut

Cng thc tnh cng sut ca mt vt chuyn ng

N=M.
Trong : M- mmen xon (N.m); - vn tc gc

229
Gin b tr cc thit b c dng o
mmen v cng sut

230
Phng php o gc lch ca 2 cun dy cm ng

231
 5.7. Cc loi cm bin tim cn

T tnh
Cm ng
Siu m
Vi sng
Quang
in dung

232