ti7e017 ign Thite Go Ban - Cg nghé vi ign tr Tir phién siicon dé chip thanh phim (Ph I) 4 ©Chuyén cung cap cae gidi php lien quan @ Acrosemi, ~ tencongnsie sin dinvavi dente — TEE VETTeNcuSH Him nay li: Th Siu, ny 17 hog 13 im 2017 INTRO TRANGCHU CONG TY SAN PHAM KIENTHUC CO BAN TU VANKY THUAT NHANGIACONG THONG TIN LIEN HE Kién Thite Co Ban (GBng nghé vi dign tu - TH phign silicon in chip thanh phim Nim 2006, intel quyét dion du tw 1 ty dla MY vio Vit Nam 28 xBy cung nnd may déng gO va Kim tra ehétIuang chip tal kau Céng noe cao SBI gbn (www shipvn.org) sau d Cong ty nay 88 quyét coh nding s6 vn dBu tu Tin 2 ty a la My ‘va nna may cis Intel a3 chinnthde dude kndi eng naay 28/3/2007" Tap doan Hang Hal (Hon Hal recon Industry Coy tte!) tan thane moi lb Foxconn rt s8 vn len nS ty GB vio Ma tinh SBe Ninh va BAe Giang ve cOng nghé vi dn eth Sy quan tam cia xd hal Vist nam can cho nganh cag nghé nay cing tr nn s8i déng hon bao go het, @6u nay cing tho thay cb chen chun vb th tring lao dong tel Viet Nam tga cong, gan dn G8" leo ding go Nel chat xm va ot {Bu by ba ba. Loat bal vit ndy 56 cdnh G6 m6 td cho Abc Td cé Sl nin 8 rang hen vi ngsnh cng nghé nay. G phn {utes chang t3i 28 gia thigu 28 ge vB cOng nghé w ign tv evge then nanh trang phong sach (clean room). y ahng cuBi ning nBm 1960,cée mach align Ws vee cd thign mBt chen #8 rét 8 vB hige nang, ve chu ning va a9 én gioh nich hep ede vi ng ban din tr met chp Dieu nay dim bdo cho veh gi thanh sd phd, tang cong suat san xual. Vb 36 ng chinh i kt ud eda euge eden mang théng tnéra tin. Tu go tl nay mat tS hap a beng ban ar da tang len shenh chong Be bee val su NS trg cla cla cba rahe ‘han khong, khi chinh xée, quang hoc, nganh cing nané vi didn tu vn ls nganh ing aghé lim thay a6 thé oid. Tam slicon = vét lieu ban dau eUng trang nganh cag highé vl dién tia cde phign sitcon (silean wafer) c& BB day c2 400 miro-mét val {4aina kinh khSe nhau (tm sion e8 Gung kinn ln snSt md nal eo thé ehé tao 18 12 nen, nghia [a tueng duong mot che pia ln). Tam silzan c6,auong Kinh cing ten 1b cing Kh en tgo, nit by dann cho cdng nané tS tn cing tn kém nung 6 lsh keg thu dugetran met tam lat duge nang cao Phong sach - Mol qué wioh cing nghé ché tao mach &6 hop dude tiéa hanh trong phsng seen, 56 8 ne con ngush can phai xu W ebe trang 98 mel trvbn nur nhs C8, 188 dm va ku thang kn 209 eho 28 hat ow cd trong mbt on v the ts lens nan a nine so wih mb: trvdng binh thJdng. 98 s9eh ea phoag seen Khi dv che too pha {dn thu ng tu chudn ISO khde nau (01150 1 én 150 9 trong dé 150.2 co a Sach cao Ahst tasne dung wei 10 hat byl Ken tue nhs han O.1 micron trong mot phn kn) 68 acm eng Ten th eh ph vn Minh cing tn kém. De gid c6 the thom nao nhang phong sach loa! nay tal Intel Coporation ho§c AMD. Xi yb mbt - 4618 vie dau tién ngudl lam cing nghé can thye hig trong pring Sach, Cong dean lam sach b8 mat phn (Siicon) Uwing dze thy hign nnd cdc axt moth, ee chit cé tinh x hod nh HNOS, H2S04 H2O2 vi HF Vige xd IY Se mie s8 ‘up ching te lai 98 nntng tap ve ca, h2v cw hoge eal Nang trén BE mat eam siican rude kh cnuyn né vo nrg bute cing nahe Wd theo, 8xi hos - trong qu trian eh tae mech tery hop nau te thuing pha ding tp SiOz tron bE mst tinh thé Si. Sp S102 nay od hé 23.can nd nhse gin b8ng NE =6 gn ne nhigt ola Si, vel ng s5 gin m= 4, 6 tae dung bao vé bE mat ede in Klén ban on ab te dung cao mol Vung bbén ngod, che endn B8 msl Si rng aud (rn Kruéen bin dn x ede tap cht nh P vs B, Ngodl ra lap $102 cin duvet f4ung fam eve (gate) cia cho béng oan din (eransister). Co nhi2u pruang phap tao ra lap SIOZ nhung ahudng nap duce ''Gung rong rai nhs 68 ohén ldp SiOz Ie phuong prp bry hos d nhie dc (knodng 10000C "13000C), Kush tan - [3 Kj thubt due sit dung trong cing noh bin din 46 tgo céc ving chuyén tiép cha transitor. C6 nhibu Druting chap & uhusch tan tap tao vung cuuyen tgp PLN khae nhau nhy ohuténg pgp Khuch tan @ nhie d6 exo, prong pnép cy fon. Tuy thuse vio a8 slcon vi muc dien cia vide pha tap nau lam cong nase 88 phbi dng hal fol tap he Bian anata Baran (B} hose prétpho (} cho qua trish nay. ‘Quang khéc (photolithography) - la t#p hap céc qué tinh quang hod ohm tgo ra cdc ch tit rn bB mét phn siicon eS ki thude va hinh dang giéng shy thie ké, D& lim duge dtu nay cin phil co shh BO mat ng (mask), chit cdm fquang (pretoresis) ngun sang UV va dune dlch hign fin (developer). wat ha thuong la ma tam touy anh RE es UGE Dini mot mang erém tran 28 knge how nhng eh et phi hop val tide KE ela elm BIEN Mage mach tien Nap (IC) Nou ta phi ln trén b8 mit phignslcon ob tinh chit nhdy sing dlc bist 99 {nat can quang (protoresit) ~ thuang use gol la chat cam quang. Chat cam fang phi bao dam hol tinh Bl: = Wnby quan; ~ BEn ving Ieong che eung mB Bxit hog kim. Chit cim quang cé nhigm vu la lp bio v8 cd hinn dang cin tit ho bE mat khéib tde dung cua cdc dung mdi hod hoe. Naud ta phan log: cdr fuang thanh cim quang dung va cim quang Sm cua vio ea ché han ng xy Fa tong cam quang 4h bi chy sang va sy thay 6 tinh chat trong Qua tenn {hid sang. Cm quang dm ki bi chiéu sing trd nén Khng | hob tan tong ee ung mél tzéng ing. Can eée eam quang dutang *h nguge fl, Hh! Bl ehlgu sang $2 hos tan trong eae dune meh ung dich hign Develozer cho phép hig inh nhng chi tet tao ra trén lap chm fquang de tie dung cia nguon UV. Qua Wink nay sing nhu qua wlan ria anh trong Ky thugt,aniép dnh. mt ng du tien gus tenn quang khBe dude the hign kh den gidn: dBt phn silcon len thiet Isp ede dtu Kien cBn she nhu chSn khong, khi nen, cme €® bep xe, ing sust Uv, thal ian EniGu sang » v8 chigu séng. Tuy vay a8 en€ tgo mat mach t6 gp nau ta pha dung tah nna Db mat na khic nau. Dé che ch tet trén mat na, tn phién silicon cua lan ené tye true do (vel met mat kh trong c& D8) [Pung ene fan ning ci tet cua mat na hign tal ng va phat dung mét Ky thuat gol la Ky thuge dang china (so mask hay mas algner. KV Cust ndy due thue hie théng qua hing d8u hv gol [8 @8u so (mask marks) v8 su t= glup quang hie (kin ign vi, CoD camérs.) v8 he wt ehinh ki thea cae enau X¥ va chinh méo. Tang gua ching afu go ese Bt By ngudt ta ed thé ende ehdn dvge rng mol ch UBL tren phi sileon nvr auge tebe mBt np Khe nau 1 trong Kh in ahau. Tong qué tinh ené tao photoaiét chung ta sé st dung mBt 26 03 mBt 9. ign nay mit 8, néng bén dla trén mbt enip agty mt tana nn ngodl Kj thus quang Khe cén nhiBu Kf shut knée cho Php khée len tren ip chm quang nding eh Vat vAl phan gal vs me 8 tinh wt hs ek BU nh Ky thu e-beam Fesography (ky thuat khde dung chum aign i), hoe ta Xx. hip wwaacrosemi.corWafer2Chip him Tim kim 12.ti7e017 Kin Thite Co Ban - Céng nghé vi din tir ~ Tr phién siican én chip thanh phim (Phan |) An man - twong obog nah vi didn be tb es 8 Feit Sion 1b mbt ky ust ede hay duge sil dung. Cé hal pruang phap an man chinh a." an man Udt va Sn mn ane An man wbt — 08y 1 ki thus hing dng ahs trong cong nghé ban cin. Noay ti céng doan phién ap mal dvge ev re kndi thor stion tf nha may sn ut phd, cbc hoa chat 3 dude su dung 28 mal Fghign va ann béng cusi cing ching ta thu duce ‘mat tds sileon phéng ve nhn- OB! veh nhhg hee blan Ie hoge macn ten hao cd kch tude 189 (> 3 im), nod chat an man due su dung dé kde ining hog tit v8 mB ua 58 Win lp vat du dién mat Ain man khé - trong Kj thuidt Sn min kd, td Sion duge dus vio rong buBng chan khéng, seu a6 hn hop ki cing eho am man duce dua vso tong bd’ phan dng. @ chan khan thien hp, Gud tae dung: eba ngubn cao tin, Ki n mon, B fon hod vi fog ta thu age hn ha plasma cua kn ndierén bo gm cbe ion Fr do d8 SiO hose S'_ bi Bn mon va tg ra ede san phém phan ng tone dng Nn kg trust nay mo ching, mang Ts key thug wo! na 8 We aw (saureao) Ft ln. Ty theo d® diy va vat du ma ngs ta chon ede ené 48.an mon Knge nna Vai kj thubt nay ede Nana sin xu8t Ten cb te prin doar - teuét Bl dan ring cho qua winh an mon "néng” vl és val Pleromet chidu su cho et tht bl cé thé Sn mn qua tm Sion (€8 400 miré-rdt) chi wong hai gi Théng tn them V8 thyse nobe Hf thuBl Br mén kh 6 Une in thSy tat ‘wi stsysteme com vi ww adie com Ia hal nha dn xude the by Bn men khd ni téng mht hen May. Kj thust ming méng ~ chil yu a8 tao rkng lip vat liu c6 8 dy ary mong mun len tran mét op vat bu kde: By fd trnn 26 hat kd neu kién the ba vung nh KY thuat cham knbng, cau ence vat lu. cae ky thudt e2 ban 28 tee mang méng 8 aBy g3m hai ohucna pnép ~ vét If vi hos hoe. Pruang phsp vBt W bao gem: phi xa (sputtering), be Bay Inlet (evaporation), phueng php prun tich dién.. Trane Kh 26 prong phép hed hoc cé: léng dong hoa oc aha ha (Cv), ting dong Nos hoe pha hot p SuBt ths (LPCVD), v8 Solel Bo dae vi khio sét thing $8 Sng noh ~ aBy 18 gal dogn sou hi phisn Eicon & i qua cde buse céng nghe tone phong s9cn, © insu nay nou Ky fu cB née dlnh che OBe tay Tov, COV nage djen td (R), dong do, CoE db lam vige..ta inh ign. Lie nay, cdc chip van nim. én phién. 96 eS ts tide han eae bute tgp soy, nguct A) su phat eBt rat cde chip én tam silcon, vb 89381 doan nay ehip con duce gp la 'ie™ Nh wy, ching tof quo me SB bude ca ban nhat cia qua tinh che tao np wong prong sack. 0 phan Sau ching t8 sé trinn by KnBUu g6ng vé, mot trong rang cong dogn quan {Gong trong ca quy tinh ehé tga chip bn din ai Tay Phong Shen \W. Whyte, "Cleanroom Design” Secand Esiton, John Wiley, 1999 Prk. Gray and R,G, Meyer, “Analys@ and design of analog Inteprated cut", ohn Wiley, New York, 1984, 5. . Ste, “Physics of Semiconductdr Device", Wiey, New York, 1981, SLM. Sze, "Samicanduetor devices, Physics and technology”, Wiley, lew York, 1985. "Semiconductor Devices, Universi¢gwente, 1998. ‘Trang thong tin wwe intecom ‘wea ips br. com www adien.com Ina (Print) (© 2005-2010 AcroSemi Corparation. Al rights reserved hip wwaacrosemi.corWafer2Chip him 22.