SEMASPEC Test Method for

Determination of Valve Flow

Coefficient for Gas Distribution
System Components

SEMATECH
Technology Transfer 90120394B-STD
SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc.

1996 SEMATECH, Inc.

 SEMASPEC Test Method for Determination of Valve Flow Coefficient
for Gas Distribution System Components
Technology Transfer # 90120394B-STD
SEMATECH
February 22, 1993

Abstract: This SEMASPEC establishes a test method for determining the flow coefficient (CV) of a valve for
use in gas service. Application of this test method is expected to yield comparable data among
components test for the purposes of qualification for installation.

This document is in development as an industry standard by Semiconductor Equipment and

Materials International (SEMI). When available, adherence to the SEMI standard is recommended.

Keywords: Equipment, Equipment Performance, Valves, Facilities, Gas Distribution Systems, Specifications,
Components, Component Testing, Flow Rates

Authors: Jeff Riddle

Approvals: Jeff Riddle, Project Manager

Venu Menon, Program Manager
Jackie Marsh , Director of Standards Program
Gene Feit, Director, Contamination Free Manufacturing
John Pankratz, Director, Technology Transfer
Jeanne Cranford, Technical Information Transfer Team Leader
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SEMASPEC #90120394B-STD
SEMASPEC Test Method for Determination of Valve Flow Coefficient for Gas
Distribution System Components
1. Introduction
Semiconductor cleanrooms are serviced by high-purity gas distribution systems. This
document presents a test method that may be applied for the evaluation of one or more
components considered for use in such systems.
1.1 Purpose
1.1.1 The purpose of this document is to define a method for testing components being
considered for installation into a high-purity gas distribution system. Application of this
test method is expected to yield comparable data among components tested for purposes
of qualification for this installation.
1.1.2 This document establishes a test method for determining the flow coefficient (Cv) of a
valve for use in gas service.
1.2 ScopeThis procedure applies to all valves used in gas service. The generally accepted
procedure for determining Cv is to determine its value using water and to assume
equivalence in gas service. Since a water-determined flow coefficient can differ from a
gas determined coefficient, the Cv should be determined using a gas-based test procedure
for components utilized in gas service.
1.3 Limitations
1.3.1 This procedure is not intended to be used for regulators because it may misrepresent the
performance of a regulator; i.e., it will give a flow coefficient at fully open,
nonregulating conditions.
1.3.2 This method is written with the assumption that the operator understands the use of the
apparatus at a level equivalent to six months of experience.
2. Reference Documents
2.1 MFC1M791 Glossary of Terms Used in the Measurement of Fluid Flow in Pipes,
ANSI/ASME 1988
2.2 582 Fluid Controls Institute.2 Recommended Voluntary Standards for
Measurement Procedure for Determining Control Valve Flow Capacity
2.3 Fluid Controls Institute. Recommended Voluntary Standard Formulas for Sizing Control
Valves
2.4 ISA S39.13 Standard Control Valve Sizing Equations For Incompressible Fluids

1
Available from American Society of Mechanical Engineers/American National Standards Institute (ASME/ANSI)

2
Available from Fluid Controls Institute, P.O. Box 9036, Morristown, NJ 07960

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2.5 ISA S39.2 Standard Control Valve Capacity Test Procedure for Incompressible Fluids
2.6 ISA S39.3 Standard Control Valve Sizing Equations For Compressible Fluids
2.7 ISA S39.4 Standard Control Valve Capacity Test Procedure For Compressible Fluids
2.8 ISA 575.02 Control Valve Capacity Test Procedure
3. Terminology
3.1 dPdifferential pressure across test valve, measured in kPa (psi).
3.2 flow coefficient (Cv)the number of standard cubic meters of air per minute that can
flow through the valve at a pressure drop of one psi. [Note: The maximum Cv is
determined with the test component in a fully open position. However, intermediate flow
coefficients can also be determined.]
3.3 Nthe numerical constant for the units of measurement used in the general sizing
equations. N is 4.17 when q is expressed in m3/hr, P is expressed in kPa, and T is
expressed in K. [Note: N is 1,360 when q is expressed in scfh, P in psia, and T in R.]
3.4 Pabsolute pressure at upstream test manifold tap, expressed in kPa (psia). [P(abs) =
P(gauge) + barometric pressure]
3.5 psipounds per square inch.
3.6 psiapounds per square inch absolute.
3.7 psidpounds per square inch differential.
3.8 psigpounds per square inch gauge.
3.9 qvolumetric flow rate.
3.10 scfhstandard cubic feet per hour.
3.11 Sgthe specific gravity of a gas relative to air; Sg approximately equals the ratio of the
mass of a gas to the mass of an equal volume of air at a specified temperature. [Specific
gravity of air = 1.0 at 15.6 C (60 F).]
3.12 Tabsolute temperature of test gas, K (or R).
3.13 test parametersthe standard cubic meter is taken at 101.3 kPa and 15.6 C, and the
standard cubic foot is taken at 14.73 psia and 60 F.
3.14 xthe ratio of differential pressure to absolute inlet static pressure, dP/P.

3
Available from Instrument Society of America, 67 Alexander Dr., Researach Triangle Park, NC 27709

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4. Test Protocol
4.1 Test Conditions
4.1.1 PrecautionsThis test method may involve hazardous materials, operations, and
equipment. This test method does not purport to address the safety considerations
associated with its use. It is the responsibility of the user to establish appropriate safety
and health practices and determine the applicability of regulatory limitations before using
this method.
4.1.2 Test pressure is to be 414 kPa gauge (60 psig) or the maximum pressure rating of the
valve, whichever is lower.
4.1.3 ActuationThe test is to be conducted with the valve fully open.
4.1.4 The test gas is to be clean, dry air. Other gas is allowed only with appropriate correction
factors.
4.2 Apparatus
4.2.1 MaterialsA clean gas supply filtered to <0.02 m is required.
4.2.2 Instrumentation
4.2.2.1 A flow meter, a temperature transducer or gauge, an upstream pressure transducer or
gauge, differential pressure transducer or gauge, a test specimen, and two throttling
valves are required.
4.2.2.2 Instruments shall be calibrated regularly per manufacturer's instructions.
4.2.3 Setup and Schematic
4.2.3.1 Construct a test stand for the measurement of gas flow rates for known pressure drops
across the test valve according to the schematic drawing shown in Figure 1. Nitrogen gas
supply from a liquid nitrogen source is filtered by a 0.01 m filter before it is delivered
to the test valve through a throttling valve. The test valve is isolated between two
throttling valves to allow for careful control of pressure drop across the test component.
Inlet pressure is measured immediately upstream of the test valve by a pressure gauge,
with an accuracy of 0.25 percent. Pressure drop across the test specimen is measured by
an electronic differential pressure transmitter capable of reading 0 to 50 in. H2O across
the test device. Flow measurement is carried out downstream of the throttling valve
located downstream of the test piece by a mass flow meter (MFM) or laminar flow
element (LFE). Both the differential pressure transmitter and its digital readout should
be calibrated before their use to display pressure drop in kPa.
The LFE or MFM is calibrated using known gas flow rates and measuring pressure drop
across the unit using an inclined manometer. Temperature of the gas is measured at two
locations by thermocouples installed both upstream of the test valve and downstream of
the LFE. The thermocouples are connected to a digital readout unit to directly display
and read the inlet and outlet gas temperatures.
4.2.3.2 Table 2 shows the piping requirements for a standard test section configuration (see
Section 5.3).

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4.2.3.3 Figure 2 gives the recommended pressure connection to be followed in constructing the
test apparatus. Install a pressure connection whose diameter is about 7 percent of the pipe
diameter (see Section 5.4).

Figure 1 Valve Flow Coeffiecient Test Schematic

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4.3 Test Procedures

4.3.1 Assemble the test valve into the test apparatus. Record the barometric pressure.
4.3.2 Open the test valve fully.
4.3.3 Adjust the upstream and downstream throttling valves so that the initial pressure on the
valve is 414 kPa gauge (60 psig) and the ratio of differential pressure to absolute inlet
pressure (x) is 0.01.
4.3.4 Record P1, DP1, q, T, and barometric pressure.
4.3.5 Repeat steps in Sections 4.3.3 and 4.3.4 for xvalues of 0.015 and 0.02.
4.3.6 Calculate Cvi using the following formula for each x value, xi:

0.5
C vi = [ qi / N Pi ] ( T i S g / xi )

4.3.7 Calculate the valve Cv using the following formula:

n
Cvi
i =1
Cv = , where n = 3
n

4.4 Data Analysis

4.4.1 Complete Table 3. (See Section 5.)

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5. Illustrations
5.1 See Figure 1 for schematic diagram.

Table 1 Definitions of the Symbols Used

T Temperature (K) degrees Kelvin

P Pressure (kPag) kiloPascal, gauge

q Flow rate (Nm3/hr) normal cubic meters per hour

P(H) Differential (kPad) kiloPascal, differential

pressure
of housing

P(T) Differential (kPad) kiloPascal, differential

pressure
of total

P(C) Differential (kPad) kiloPascal, differential

pressure
of cartridge

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Table 2 Piping RequirementsStandard Test Sections

A *, ** B C D Standard Test Section Configuration
At least 18 2 nominal pipe 6 nominal pipe At least 1 nominal
nominal pipe diameters of diameters of pipe diameter of
diameters of straight pipe. straight pipe straight pipe
straight pipe

Figure 2 Recommended Pressure Connection4

4
Reprinted by permission. Copyright Instrument Society of America 1988. From ANSI/ISA-S75.02-1988.

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Table 3 Valve Flow Coefficient Data Table

Valve Identification____________________________________

Test Number__________________
Date __________________
Operator Name __________________
Barometric Pressure __________________ kPa

N = 4.17 (air at 15.6 C and 101.3 kPa)

Sg = 1.0 (air)

n T P P x q Cvn
(K) (kPa-a) (kPa-d) (P/P) (Nm3/hr)
1
2
3
Equation:

Cv 1 + Cv 2 + Cv 3
Cv =
3

Enter Values:

+ +
Cv =
3

Result:

Cv =

NOTICE: SEMATECH DISCLAIMS ALL WARRANTIES, EXPRESS OR IMPLIED,

INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR
A PARTICULAR PURPOSE. SEMATECH MAKES NO WARRANTIES AS TO THE
SUITABILITY OF THIS METHOD FOR ANY PARTICULAR APPLICATION. THE
DETERMINATION OF THE SUITABILITY OF THIS METHOD IS SOLELY THE
RESPONSIBILITY OF THE USER.

SEMATECH Technology Transfer # 90120394B-STD

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