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Principle and Analysis of a Two-dimensional On-Chip Magnetophoresis of Bioparticles for Contamination-free Biochemical Reactors View project
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approaches to organize and pattern particles fall into two Fmx = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv = ∫∫∫ ⎜ ⎟.dv
µ0 v ⎝ ∂x ∂x ∂x ⎠ 2µ0 v ⎜⎝ ∂x ⎟⎠
categories. The first method involves paramagnetic or
superparamagnetic particles, or para-/superparamagnetic (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (2)
Fmy = ∫∫∫ ⎜⎜ Bx + By + Bz ⎟⎟.dv =
p
∫∫∫ ⎜ .dv
v ⎝ ∂ ∂ ∂ ⎠ 2 ∂ ⎟
labeling of the target particles [2-4,6,7]. However, the µ0 y y y µ0 v ⎝ y ⎠
microdroplets and particles are in contact with labelling (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (3)
Fmz = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv =
p
∫∫∫ ⎜ .dv
materials, magnets or surfaces [7]. Adsorption and µ0 v ⎝ ∂z ∂z ∂z ⎠ 2µ0 v ⎝ ∂ z ⎟⎠
position of the particle can be determined from the balance of at x=0 and y=0. Therefore, the microparticle will stabilize at
forces. x=0, y=0 and z= 4.2µm.
r r
Fd = 6 ⋅ π ⋅ Rp ⋅η ⋅ Vp (4) 3
Fmz (pN)
r 4 r
Fg (pN) (a)
Fg = ⋅ π ⋅ Rp ⋅ ρp ⋅ g (5) 2
12
0
3 x=y=0
r 4 r 0 112
Fa = − ⋅ π ⋅ Rp ⋅ ρm ⋅ g (6) (7) (2) (1)
3
00
where Rp is the particle radius, η is the dynamic viscosity of z(µm)
7
4
3
5µm B. On-chip magnet microarrays
6
5 3µm
2
1
Different magnet microarray configurations were designed
4
0 2.5µm and fabricated as shown in Fig.5.
3
-1
2 7 µm 5 µm 15 µm
-2
1
2.5µm -3 5µm
0
-4
-1
-5
-2
-6
-5 -4 -3 -2 -1 0 1 2 3 4 5 6 X -6 -5 -4 -3 -2 -1 0 1 2 3 4 5 6 X
Fig. 2 (a) Side view, and (b) top view of a matrix of four cubic magnets.
Fig. 5 Electroplated CoPt micro-magnet arrays.
Relation between the components of magnetic force and
displacements of the particle are reported in Fig.3. The A brief summary of the fabrication of micro-magnet arrays
gravitational force value Fg and Fmz illustrated in Fig. 3(a) is described in Fig. 6. First, a thin conductive layer of gold
demonstrate two equilibrium positions but only the position was spotted above a silicon wafer (1). Then, patterns were
(1) is stable as the balance of forces is null and δFmx/δx, formed through a thick NFR15 photoresist (2). Then, a 10µm-
δFmy/δy and δFmz/δz are <0 at this position. The components thick CoPt layer was electroplated (3). Finally, photoresist
Fmx and Fmy demonstrate respectively that the particle is stable layer was removed (4).
CB-03 3
(3) (4)
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