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Journal of Micromechanics and Microengineering

A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist
Che-Hsin Lin1, Gwo-Bin Lee2, Bao-Wen Chang2 and Guan-Liang Chang1
Published 21 June 2002 • Journal of Micromechanics and Microengineering, Volume
12, Number 5

41st Aerospace Sciences Meeting and Exhibit


Microfluidics Research in MEMS Propulsion Systems
(doi: 10.2514/6.2003-783)
Microfluidics Research in MEMS Propulsion Systems
Andrew Ketsdever, Air Force Research Laboratory
41st Aerospace Sciences Meeting and Exhibit Reno, Nevada

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