Presentation Topic 2

Group 1 :

I. Describe how silicon is formed from raw material

II. Draw the block diagram of ultra-pure polysilicon formation process
III. Write the chemical reactions involved in 2.1.2
IV. Define single crystal silicon

Group 2 :

I. Describe the method of growing single crystal silicon:

a. Czochralski process
b. Float zone process

Group 3 :

I. Explain the process involved in transforming the silicon ingot into wafer
II. Illustrate epitaxial layer
III. Explain why epitaxial layer is important for wafers

Group 4 :

1. Understand the integrated circuit basic fabrication process

Explain oxidation process in IC fabrication:
a. Dry oxidation
b. Wet oxidation

Group 5 :

1. Understand the integrated circuit basic fabrication process

Explain doping process in IC fabrication:
a. Thermal diffusion
b. Ion implantation
Presentation Topic 2

Group 6 :

1. Explain photolithography process in IC fabrication

Group 7 :

1. Explain metallization process in IC fabrication

Group 8 :

1. Explain etching process in IC fabrication

Group 9 :

1. Explain the two problems that exist in CMOS transistor fabrication and method to prevent:
a. Latch-up
b. Parasitic capacitance

Group 10 :

Know the concept of MEMS

1. Define MEMS
2. List MEMS applications
3. List the advantages of MEMS