pS U LSS Principles of Physical Vapor Deposition of Thin Films KS. Sree HarshaPRINCIPLES OF PHYSICAL VAPOR DEPOSITION OF THIN FILMS Ct) ELSEVIERELSEVIER BY. ELSEVIER Ine. ELSEVIER Lid ELS La. Radarweg 29 52518 Steet, Suite 190) ‘The Boulevard, Langford Lane 84 Theobald’s Road P.O.Box211,1000AE Amsterdam San Dicgo,CA%2001-H95 Kidlington, Oxford OXS1GB_—Loadon WCIX SRR, The Netherlands l UK UK © 2006 jer Ltd, All rights re Tis work is protected under copyright by Elsevier Ltd., and the following tems und conditions apply to its use: Phetocopying Single photocopies of single chapters may be made for personal use as allowed by national copyright laws, Permission ‘of the Publisher and payment o equired for all other photocopying, inchudi copying for advenising or promotional purposes, resale, and all forms of document delivery. Special rates are avi for educational institutions that wish 10 make photocopies for non-protit educational classtoom use, wakiple oF systematic copy lal Permissions may be sought divectly from Elsevier's Rights Department in Oxford, UK: phone (+44) 1865 843830, fax (44) 1865 853333, e-mail: permissions@elsevier.com, Requests may also be completed on-line via the Elsevier homepage (hitp:/www.elseviercom’ locateipermissions). In the USA, users may clear permissions and make payments through the Copyright Clearance Center, Inc. 222 Rosewood Drive, Danvers, MA 01923, USA: phone: (1) (978) 7508400, fax: (+1) (978) 7SM74M, ard in the UK threugh the Copyright Licensing Ageney Rapid Clearance Service (CLARCS), 9 ‘Tottenham Court Read, London WIP OLP, UK: phone: (4-44) 20 7631 S855; fax: (414) 20 7631 S500. Other countries may have a local seprographic rights ageney for payments, Derivative Works Tables of contents may be reproduced for internal circalation, but permission of the Publisher is required for external resale or distribution of such material. Permission of the Publisher is required for all other derivative works, ineludin compilations and translations. Electronic Storage or Usage Permission of the Publisher is requited to store or use electronically any material contained ia this work, including any chapter of part of a chapter E form or by any means, electronie, mechanical, photocopy fof the Publisher ‘cept as outlined above, no part of this work may be reproduced, stored in a retvieval system or transmitted in any recording or otherwise, without prior written permission Address permissions requests to: Ehevier’s Rights Department, at the fas and e-mail adresses noted above Notice No responsibility is assumed by the Publisher for any injury andior damage to persons or property as a matter of products Fability, negligence or otherwise, or from any use or operation of any methods, proguets, insinuctions or ideas comained in the material herein. Because of rapid advances in dhe medical sciences, in particular, independent verification of diagnoses and drug dosages should be made. First edition 2006 ISBN-13: 978.0.08-044699-8 ISBN 16; 0.08-041690.X, Printed in Great Britain, 06 U7 0809.10 19ST HS4321 Working together to grow libraries in developing countries wowekeviercom | wwyrbookaid.org | www.sibre org ELSEVI Paty International