Experimental Design Data from "Design and Analysis of Experiments" by M

Actual Standard Nitride

Run Run A B C Etch
Order Order
1 7 0.8 200 325 1075
2 3 0.8 200 275 633
3 4 1.2 200 275 642
4 5 0.8 125 325 1037
5 7 0.8 200 325 1063
6 4 1.2 200 275 635
7 2 1.2 125 275 650
8 3 0.8 200 275 601
9 1 0.8 125 275 550
10 2 1.2 125 275 669
11 8 1.2 200 325 729
12 6 1.2 125 325 749
13 6 1.2 125 325 868
14 1 0.8 125 275 604
15 5 0.8 125 325 1052
16 8 1.2 200 325 860

1 Response
3 Factors
2 Replications
No Centerpoints
nd Analysis of Experiments" by Montgomery