High Voltage probe arms for

contacting the device under

test Interlock LED indicator connected to
Interface Panel to the
B1505 B1505. Signal is only applied when system
is completely safe

Compound Microscope
and camera system for
automatic alignment.

Spring loaded chamber for extra High Voltage protection can be

protection while allowing Z high accomplished by dark box or
manipulation Infrared light curtain
Thin wafer handling
-60C to 300C

Control system via SemiProbe

Pilot software. System can be
master or slave to the B1505
4 Terminal Setup for High Voltage
 Interface Panel for High Voltage

Protection Box Resistor Box with

with Connection connection to the
to the B1505 Triax B1505 HV SMU

Interlock
connection to the
B1505
Chuck Protection Chamber
 Interface Connection to the Arms
Resistor Box Protection Box
with SHV Coax With SHV Triax

SHV Triax
connectors

Chuck Triax
connection