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Cat5952 PDF
Cat5952 PDF
Comparison of basic static load ratings Comparison of elastic deformation under downward load
HIGHER THAN HIGH RIGIDITY LONG UNIT -,,
MLC 3HORT TYPE
OF DEFLECTION AGAINST HIGH RIGIDITY LONG UNIT UNDER . ON -,,
MLG9 T1 Preload (IGH RIGIDITY LONG UNIT
"ASIC STATIC LOAD RATINGS N
$EFLECTIONS μm
ML 3TANDARD TYPE MLL9 T1 Preload %XTRA HIGH RIGIDITY LONG UNIT
S t r uct ur e of M L
,OADS N
[ Track rail ]
[ Slide unit ]
Contributing to downsizing of guide mechanism!
Enable downsizing of the machines and devices in same height.
Casing
Extra high rigidity long
unit is debut!
C-Lube
Steel ball
Ball retaining band
End plate
3TANDARD UNIT
Comparison of sectional height Comparison of slide unit length Comparison of basic static load ratings
11040 N
10mm
End seal
ML9 FOUR UNITS
Oil hole
ML series is a linear motion rolling guide of the super-small size invented by an original small sizing technology. Stabilized
accuracy and rigidity can be obtained even under the usage in which load that of the direction and the size change and
compound load even though it is extremely small because of the structure of the arrangement of the steel ball with four point
%XTRA HIGH RIGIDIRY LONG UNIT
3AME HEIGHT
60mm
%QUIVALENT
10 600 N
10mm
MLL9
contacts in two row raceways.
TWO UNITS
Variation of C-Lube Linear Way ML 50mm
Size
Shape Length of slide unit Model
5 7 9 12 15 20 25
3HORT Achieving of precision transferring mechanism! mm
8 0m
m
MLC 500
Enable to achieve ultra-high precision transferring mechanism due to about
3TANDARD a half of running accuracy comparing with High rigidity long unit.
3TANDARD TYPE ML mm
180
(IGH RIGIDITY LONG
MLG 80mm
2UNNING DEVIATION μm
■ 4EST CONDITIONS
%XTRA HIGH RIGIDITY LONG
MLL %XTRA HIGH RIGIDITY 2UNCUT 0.53μm
3AMPLE
80mm
LONG UNIT MLL9
0RELOAD T1 0RELOAD
Size
Shape Length of slide unit Model
10 14 18 24 30 42 180mm
2UNNING DISTANCE mm
3HORT 91mm
2UNNING DEVIATION μm
MLFC ■ 4EST CONDITIONS
2UNCUT 1.16μm
7IDE TYPE (IGH RIGIDITY LONG UNIT
3TANDARD 3AMPLE
80mm
MLF MLG9
0RELOAD T1 0RELOAD
(IGH RIGIDITY LONG
MLFG
2UNNING DISTANCE mm
2EMARK )NTERCHANGEABLE SPECIFICATION WHICH ENABLES COMBINATION OF SLIDE UNIT AND TRACK RAIL FREELY IS AVAILABLE
CAT-5510.1 C-Lube Linear Way MH CAT-57180 C-Lube Linear Ball Spline MAG
MHTG15, MHSG15 MAG(T)4, MAGL(T)4, 5, 6, 8
[ Track rail ]
[ Spline shaft ]
[ Slide unit ]
[ External cylinder ]
Expanding size of high Casing
Steel ball
The smallest size among the External cylinder body
MH series is a high rigidity linear motion rolling guide with the greatest load capacity by assembling of large diameter balls in. MAG series is a linear motion rolling guide which achieves endless linear motion of an external cylinder along a spline shaft.
Stabilized accuracy and rigidity can be obtained even under the usage in which load that of the direction and the size change and As steel balls make rolling contact with the spline grooves, radial loads as well as rotating torque can be received. This product
compound load. is most suitable for mechanisms that perform linear motion while transmitting rotating torque.
Variation of C-Lube Linear Way MH Variation of C-Lube Linear Ball Spline MAG
Size Length of Size
Shape Length of slide unit Model Shape Model
8 10 12 15 20 25 30 35 45 external cylinder 4 5 6 8 10 12
&LANGED TYPE 3TANDARD 3TANDARD
MOUNTING FROM BOTTOM MH
MAG
(IGH RIGIDITY
LONG MHG 3TANDARD TYPE
3TANDARD SOLID SHAFT
* * * * * * * (IGH RIGIDITY LONG
&LANGED TYPE
MHT
MAGL
MOUNTING FROM TOP (IGH RIGIDITY
LONG MHTG
%XTRA HIGH 3TANDARD
RIGIDITY LONG MHTL
MAGT
3HORT
* * *
MHDC 3TANDARD TYPE
HOLLOW SHAFT
"LOCK TYPE 3TANDARD (IGH RIGIDITY LONG
* * *
MOUNTING FROM TOP MHD MAGLT
(IGH RIGIDITY
* * *
LONG MHDG
%XTRA HIGH 3TANDARD
RIGIDITY LONG MHDL &LANGED TYPE
SOLID SHAFT MAGF
#OMPACT BLOCK TYPE 3TANDARD
* * * *
MOUNTING FROM TOP MHS
3TANDARD
(IGH RIGIDITY &LANGED TYPE
LONG MHSG HOLLOW SHAFT MAGFT
2EMARKS 3TAINLESS STEEL TYPE IS ALSO LINED UP IN THE MODEL MARKED ON*
)NTERCHANGEABLE SPECIFICATION WHICH ENABLES COMBINATION OF SLIDE UNIT AND TRACK RAIL FREELY IS AVAILABLE 2EMARK )NTERCHANGEABLE SPECIFICATION WHICH ENABLES COMBINATION OF EXTERNAL CYLINDER AND SPLINE SHAFT FREELY IS AVAILABLE
TO HIGHER THAN FORMER TYPE
Comparison of basic static load ratings
TO HIGHER THAN FORMER TYPE
CRWG...H CRWG...H
"ASIC DYNAMIC LOAD RATINGS N
"ASIC STATIC LOAD RATINGS N
Former type Former type
,ENGTH OF WAY
Size 3
,ENGTH OF WAY
Size 4
,ENGTH OF WAY
Size 3
,ENGTH OF WAY
Size 4
Usable safely even for applications such as Cage creeping issue cannot be occurred Any corrective operation for cage creep is
CRWG…H series is a linear motion rolling guide structures that cylinder rollers are built between two ways with V-shaped raceway
a vertical axis that a former type was hard to even in increasing operating speed. not necessary even for a long time operation.
grooves, which are two planes. Due to rack and pinion gear mechanism, cage-creep cannot be occurred. Also, extremely highly be adopted.
accurate and smooth linear motion can be performed while receiving all directions load. Moreover, great load ratings have been
achieved by thoroughly reviewing of specification of the contacting area in raceways comparing with the former type.
S t r uct ur e of C R W G. . . H
Interchangeable in dimensions!
Pinion gear
The same external dimensions as on former type make easier to be replaced without any modification.
H
0INION GEAR
Way
End screw
Rack gear
Way
Smooth and accurate operation!
Combination of precisely finished raceways and non-recirculating cages with super high precision rollers provides superbly smooth
motion with very high accuracy.
[ Roller cage ]
Superb corrosion resistance!
Corrosion-resistant stainless steel is used on all steel parts.
Lubricant selection
Fluorine-based grease is recommended. Please pay attention to the relation also between vapor pressure and temperature of fluorine-based
as shown in following graph when selection of grease. For detail information, please refer to catalog of grease manufacture.
Linear Roller Way enables
■ Relationship example between vapor pressure and
to be used in vacuum temperature of fluorine-based grease ■ Typical brands of fluorine greases
environment is debut!
Name of lubricant Manufacturer
New Vacuum Environment Linear Roller Way Super X is a series of roller-type linear motion rolling guides that combine a corrosion- BARRIERTA SUPER IS/V NOK Kluber Co., Ltd.
6APOR PRESSURE Pa
resistant stainless-steel casing with resin parts, such as a super-engineering plastic (PEEK resin) end plate, to solve this problem, thereby
achieving excellent low out-gassing characteristics. It consistently exhibits the superb characteristics of a roller-type linear motion rolling DEMNUM™ GREASE L-200 Daikin Industries, Ltd.
guides, such as high load-carrying capacity, high rigidity and smooth and low-friction running performance, in a vacuum environment.
S t r uct ur e of V a c u u m E n v i r o n me n t Li near R ol l er Way S uper X FLUOTRIBO VAC KYODO YUSHI CO., LTD.
Remarks 1. FOMBLIN® is a registered trademark of Solvay Solexis.
[ Track rail ] 4EMPERATURE ℃
2. KRYTOX® is a registered trademark of DuPont.
Specifications
[ Slide unit ]
Please contact to for a choice of optimal specifications customised for your using conditions.
Casing
Customization Material of main component
Cylindrical roller
End plate
Cylindrical roller Martensitic stainless steel
Grease nipple Applicable type LRXD20…SL
End plate Super-engineering plastic (PEEK resin)
End pressure plate
ball screws.
No sensor rail for mounting sensors, which contributes to space saving.
■ Sectional height
70
60
50
46
The smallest size
33
26
among the series, TE50 is debut!
50 50 60 60 86 86
■ Mass
Motor bracket
Note(1)The mass of whole table with single slide table is shown. The mass of motor is not included.
High positioning accuracy!
End bracket
Maintenance free!
Groove for sensors
Long-term maintenance free operation due to unique C-Lube lubrication part built in the linear motion rolling guide and the ball screw.
This can reduce labor time for lubrication and increase the reliability of the equipment.
C-Lube ball screw
Slide table
Bed
Amazing low prices!
Excellent cost performance thanks to adoption of less components and improvement in parts shapes.
Maintenance-free
Long-term maintenance-free feature is achieved by lubricating part, C-Lube built-in
■ Lubricant is distributed by the circulation of the ■ Lubricant is deposited directly to the surface of the
steel balls steel balls
specification is debut!
Selectable control method! Lubricant is supplied directly to the steel balls. As the
steel balls circulate, the lubricant is distributed to the
The surface of C-Lube is always covered with the
lubricant. Lubricant is continuously supplied to the surface
loading area along the track rail. This results in adequate of steel ball by surface tension in the contact of C-Lube
CTX...M lubrication being properly maintained in the loading area surface and steel balls. New oil permeates automatically
(X-Y axis) for a long time. from the core of C-Lube to the internal surface that comes
in contact with steel balls.
#
,UBE
#YLINDRICAL ROLLER
#YLINDRICAL ROLLER #YLINDRICAL ROLLER
/IL FILM
3URFACE TENSION
UNIT
F SLIDE #APILLARY ACTION
CTION O #
,UBE #
,UBE
RAIL E DIRE
TX...M
(Single axis) 4RACK 3TROK
High Precision Positioning Table TX has realized almost as high positioning performance as the air stage by incorporated the
ultimate rolling guide Liner Roller Way Super X in
and high rigidity as the base.
Precision Positioning Table LH which is well-known for high accuracy
Ultimate positioning performance!
S t r uct ur e of TX...M and CTX...M
due to super-high accuracy linear encoder Linear Roller Way Super X
Slide table
By directly feeding back positional information from the super- Rolling guide type of ultimate running accuracy thanks to good
C-Lube ball screw high accuracy linear encoder of a resolution of 0.016 µm, a combination of components that are machined and assembled
Sample:CTX220M-4030 Sample:CTX220M-4030
!TTITUDE ACCURACY SECONDS
0OSITONING ACCURACY μm
X-axis X-axis pitching X-axis yawing
Y-axis Y-axis pitching Y-axis yawing
3TROKE LENGTH mm 3TROKE LENGTH mm
[ Linear encoder ]
Head
Scale
Bed
Selectable control method to fit for use!
Suitable control method can be selected because AC servomotor and stepper motor are prepared with optional linear encoder.
[ Measuring Condition ]
Item Condition Clean bench in clean room
(Clean air withdrawing in acrylic cover)
Air velocity in
measuring zone
2.5 m/s
Measuring zone
Air velocity 2.5m/s
Measuring air amount 28.3 L (1cf)
Example of measurement data [cleanliness evaluation result with upper limit density of cleanliness]
■ TC60E300 3TROKE LENGTH 200mm ■ TC86E940 3TROKE LENGTH 800mm
-OVING SPEED 500mm/s -OVING SPEED 560mm/s
(Lead of ball screw: 10mm) )NTERNAL SUCTION AMOUNT 30L/min (Lead of ball screw: 20mm) )NTERNAL SUCTION AMOUNT 40L/min
.UMBER OF PARTICLES .UMBERM
.UMBER OF PARTICLES .UMBERM
5PPER LIMIT DENSITY OF )3/ 5PPER LIMIT DENSITY OF )3/
CLASS CLASS
Cleanroom Precision Positioning Table TC…E is light-weight, low-cross section, and compact precision positioning table, which 5PPER LIMIT DENSITY OF )3/ 5PPER LIMIT DENSITY OF )3/
is TE table with tight-sealing structure with stainless sheet and side covers that prevent dust generating from the table to the CLASS CLASS
surrounding environment to correspond to cleanliness ISO Class 3 (Federal Standard 209D class1). C-Lube lubrication parts are 5PPER LIMIT DENSITY OF )3/ 5PPER LIMIT DENSITY OF )3/
CLASS CLASS
built-in the linear motion rolling guide integrated in the slide table and the ball screw, achieve long-term maintenance-free feature. -EASUREMENT DATA -EASUREMENT DATA
5PPER LIMIT DENSITY OF )3/ 5PPER LIMIT DENSITY OF )3/
CLASS CLASS
Motor
Motor attachment
μm OF LARGER μm OF LARGER
0ARTICLE DIAMETER
μm OF LARGER μm OF LARGER μm OF LARGER μm OF LARGER
0ARTICLE DIAMETER
μm OF LARGER μm OF LARGER
Motor bracket
Light-weight, Low-cross section, and Compact!
Light-weight and compact positioning table using high-strength aluminum alloy for its main components.
Low cross-section (54 mm high for TC60E and 67 mm high for TC86E) due to optimum designing of linear guides and ball screws.
Side cover
Pipe threads for suction conector
High positioning accuracy!
Higher precision positioning by one rank due to a combination of unique linear motion rolling guide technology and
End bracket
precision-ground ball screws.
Stainless sheet
The main composition parts, which are made from high strength aluminum alloy coated with alumite treatment and stainless sheet,
are excellent in corrosion resistance.
Slide table
Bed