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Yeau-Ren Jeng1

Professor
Static Atomistic Simulations of
Department of Mechanical Engineering,
National Chung Cheng University, Nanoindentation and
Chia-Yi, Taiwan
e-mail: imeyrj@ccu.edu.tw Determination of Nanohardness
Chung-Ming Tan
Department of Mechanical Engineering, This paper develops a nonlinear finite element formulation to analyze nanoindentation
National Chung Cheng University, using an atomistic approach, which is conducive to observing the deformation mecha-
Chia-Yi, Taiwan nisms associated with the nanoindentation cycle. The simulation results of the current
and modified finite element formulation indicate that the microscopic plastic deformations of
Department of Mechanical Engineering, the thin film are caused by instabilities of the crystalline structure, and that the commonly
Wufeng Institute of Technology, used procedure for estimating the contact area in nanoindentation testing is invalid when
Chia-Yi, Taiwan the indentation size falls in the nanometer regime. 关DOI: 10.1115/1.1988349兴

1 Introduction Hence, this present study utilizes an alternative approach which


resembles FEM methodology and is referred to hereafter as the
Nanoindentation has evolved into a valuable means of deter-
modified FEM approach 关9,10兴. Traditionally, FEM is formulated
mining the mechanical properties of thin films and surfaces in
basing on the constitutive law, i.e., the stress-strain relation. In
nanometer regimes 关1–4兴. In conventional hardness tests, “hard- contrast, the modified FEM is formulated from the basis of the
ness” is defined as the maximum load divided by the area of the interatomic potential. And it uses the concept of the energy mini-
residual impression. The prevailing definition of “nanohardness” mization scheme 关6,7兴 using second derivatives such as the
during nanoindentation is the maximum load divided by the con- Newton-Raphson method. Since atoms oscillate thermodynami-
tact area at that load, which is calculated from an analysis of the cally around their minimum-energy positions, the proposed ap-
load-depth curve based on Hertzian continuum mechanics contact proach simply calculates the incremental changes in the
theory. minimum-energy positions during the indentation process. In this
Computer simulation has attracted an increasing interest in re- way, the indentation process becomes quasistatic, thereby reduc-
cent years as a means of gaining valuable insights into the atomic ing the computational task. This study employs the modified FEM
processes associated with the nanoindentation cycle. Perez et al. approach to simulate elastic-plastic deformations in a copper sub-
关5兴 employed total-energy pseudopotential calculations to study strate during a complete nanoindentation cycle. Furthermore, the
the plastic behavior which occurs during nanoindentation, and relative influences of indenter geometry and indentation depth
concluded that these plastic deformations are activated by charge upon the nanohardness are explored and discussed.
delocalizations. Zimmerman et al. 关6兴 conducted atomistic simu-
lations to clarify the surface step effects on nanoindentation. Their 2 Methodology
results indicated that the yielding load decreases when indentation
takes place in the vicinity of a surface step. Fuente et al. 关7兴 2.1 Atomistic Model. As shown in Figs. 1共a兲 and 1共b兲, the
studied nanoindentation using scanning tunneling microscopy and simulated system configurations include a perfect three-
atomistic simulations, which successfully reproduced the disloca- dimensional crystalline slab of copper atoms with a 共001兲 surface,
tion loops observed experimentally. Knap et al. 关8兴 addressed the and two indenters of different geometries The first indenter is in
effects of the indenter radius size on the nanoindentation of Au the form of a sphere whose outer surface atoms form many facets
共001兲, and demonstrated that the indenter force is an unreliable due to a crystalline structure. Meanwhile, the second indenter has
indicator of the onset of dislocation for indenter sizes in the ex- a triangular pyramidal form. In the simulation, it is assumed that
perimental range. the hardness of the indenter’s diamond tip far exceeds that of the
In the main, these studies adopted a Molecular Dynamics 共MD兲 thin copper film, and hence indenter deformation may be ne-
approach to investigate the dislocation activities induced by the glected during the indentation process. The simulation assumes
incipient plasticity of single perfect crystals during nanoindenta- boundary conditions in which the atoms located at the four sides
tion. However, MD simulation is very time-consuming with re- and base of the simulated film are fully constrained. The inter-
spect to static atomistic simulations since it involves time resolu- atomic potential of the copper substrate is modeled using the
tions of a picosecond or less. Furthermore, nanoindentation Sutton-Chen potential 关11兴, which has the same functional form as
experiments are performed under quasistatic conditions in order to an EAM potential, i.e.,
avoid dynamic effects such as heating and creep and to provide a
clearer view of the deformation mechanisms of the substrate.
U= 兺U
i
i 共1兲
However, MD simulation of quasistatic conditions incurs signifi-
cant computational costs.

1
Ui =
1

2 j⫽i
␾共rij兲 + F共␳i兲 = ␧
1
冉 兺冉 冊 冑 冊
a
2 j⫽i rij
n
− c ␳i 共2兲
To whom correspondence should be addressed.
Contributed by the Applied Mechanics Division of THE AMERICAN SOCIETY OF where ␳i is an electron densitylike term for atom i, which is de-
MECHANICAL ENGINEERS for publication in the ASME JOURNAL OF APPLIED MECHANICS. fined as

兺 f共r 兲 = 兺 冉 r 冊
Manuscript received by the Applied Mechanics Division December 30, 2004; final
m
revision January 19, 2005. Associate Editor: Z. Suo. Discussion on the paper should a
be addressed to the Editor, Prof. Robert M. McMeeking, Journal of Applied Mechan- ␳i = ij 共3兲
ics, Department of Mechanical and Environmental Engineering, University of j⫽i j⫽i ij
California—Santa Barbara, Santa Barbara, CA 93106-5070, and will be accepted
until four months after final publication in the paper itself in the ASME JOURNAL OF where rij is the distance between atoms i and j. The copper con-
APPLIED MECHANICS. stants ␧共eV兲, a共Å兲, c, m, and n have values of 1.238⫻ 10−2, 3.6,

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The differential of the atomic distance with respect to 兵u其i can
be expressed as
1
drij = 关xi + ui − x j,y i + vi − y j,zi + wi − z j兴d兵u其i = 关B兴d兵u其i
rij
共7兲
The principle of minimum work enforces the minimization of
the total energy of the whole system 共Etotal = 兺iEi兲 with respect to
兵u其i such that
⳵Etotal
⳵兵u其i
= 兺
j⫽i
冋 ⳵F ⳵ f

+
⳵F ⳵ f

+
⳵␾
⳵␳i ij ⳵␳ j ij ⳵rij
r r

− 兵F其i = 兵0其. 共8兲

Equation 共8兲 expresses the equilibrium equation at atom i,


which represents the equilibrium of the forces acting on atoms i.
The unbalance force, 兵␰其i, can then be defined as

兵␰其i = 兺
j⫽i
冋 ⳵F ⳵ f
+
⳵F ⳵ f
+
⳵␾
⳵␳i ⳵rij ⳵␳ j ⳵rij ⳵rij
− 兵F其i 册 共9兲

In order to solve this nonlinear equilibrium equation in an effi-


cient iterative way, it is necessary to differentiate 兵␰其i with respect
to 兵u其i, i.e.,

d兵␰其i = 再 冉兺 冊冉兺 冊 兺 再冉
⳵ 2F
⳵␳i2
⳵F 关B兴
⳵␳i rij
⳵F 关B兴T
⳵␳ j rij
+
⳵F ⳵F
+
⳵␳i ⳵␳ j

册冎 兺 冋冉
j⫽i j⫽i j⫽i

⫻ 冋冉 ⳵2 f 1 ⳵ f
2 −
⳵rij rij ⳵rij

关B兴关B兴T +
1 ⳵f
rij rij
关I兴 +
⳵ 2␾
⳵rij2

册冎
j⫽i


1 ⳵␾
rij ⳵rij

关B兴关B兴T +
1 ⳵␾
rij rij
关I兴 d兵u其i = 关KT兴id兵u其i 共10兲

Subsequently, the conventional finite element formulation as-


sembly procedure can be employed to assemble Eq. 共8兲 in order to
obtain the total system equation, i.e.,
d兵␰其 = 关KT兴d兵u其 共11兲
Similarly, Eq. 共7兲 can be assembled to obtain the equilibrium
equation of the total system, i.e.,
Fig. 1 Atomistic model used in nanoindentation simulations
„Units: angstrom… 兺 ␰ = 兵f其
i
i internal − 兵F其external = 兵0其 共12兲

In terms of the finite element formulation, Eq. 共11兲 represents


39.432, 6, and 9, respectively. The potential between the carbon the tangent stiffness equation, while the terms 兵f其internal and
and copper atoms is simulated using the Born-Mayer potential 兵F其external in Eq. 共12兲 denote the internal force vector and the ex-
关12兴, which produces an impulsive force only. This potential has ternal force vector, respectively.
the following form: The present simulation adopts the Newton-Raphson iterative
technique to solve Eq. 共12兲 via the following displacement control
␾共rij兲 = A exp关− 2␣共rij − r0兲兴 共4兲 scheme. First, it is assumed that the external force vector 兵F其
where rij is the distance between carbon atom i and copper atom retains a specified form during the iteration process, i.e.,
j, and the carbon/copper constants A共eV兲, a共1 / Å兲, and r0共Å兲 have
values of 0.3579, 0.9545, and 2.5, respectively. 兵F其i = 兵F其i−1 + ␭i兵F̂其, i = 1, 2, . . . 共13兲
2.2 Finite Element Formulation. In this procedure, atoms where 兵F̂其 is the reference load vector.
are regarded as nodes, and their potentials are considered to be If Eq. 共13兲 is substituted into Eq. 共11兲, the iterative tangent
elements. It is assumed that atom i is located at position 共xi , y i , Zi兲 stiffness equation becomes
with displacements ui, vi, and wi in the x-, y-, and z-directions,
respectively. By defining the nodal displacement vector for the i 关KT兴d兵u其i = ␭i兵F̂其 + d兵␰其i, i = 1, 2, . . . 共14兲
atom as 兵u其i and the corresponding external nodal force vector as The iterative displacement increment can be written in a similar
兵F其i = 共f i , gi , hi兲T, the total potential energy for atom i can be ex- form, i.e.,
pressed as
d兵u其i = ␭i兵u其ia + d兵u其ib, 共15兲
冉兺 冊
i = 1, 2, . . .

1
Ei = ␾共rij兲 + F f共rij兲 − 兵u其iT兵F其i 共5兲


2 j⫽i where
j⫽i

where the atomic distance rij is given by 关KT兴兵u其ia = 兵F̂其


, i = 1, 2, . . . 共16兲
rij = 兵共xi + ui − x j兲2 + 共y i + vi − y j兲2 + 共zi + wi − z j兲2其1/2 共6兲 关KT兴d兵u其ib = d兵␰其i

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The displacement control scheme is so called because the qth
component of the incremental displacement vector is maintained
as a constant during the iteration process, i.e.,
␭iuiaq + duibq = duiq

duiq = 再 duq, i = 1
0, i ⬎ 1
冎 共17兲

The modified FEM approach yields the complete nanoindenta-


tion equilibrium path. Once the equilibrium position of each atom
has been determined, the stress tensor at the atomic site can be
determined 关13兴, i.e.,
N


1
␴km
i
= i f ijrij 共18兲
V j⫽i k m
where i refers to the atom in question, j refers to the neighboring
ij
atom, rm is the displacement vector from atom i to atom j, N is the
number of nearest neighboring atoms, and Vi is the volume of the
atom in question.
Slip vector analysis 关6兴 is utilized to observe the dislocation
activity. The slip vector is given by
ns

兺 共r − r␪兲
1
s= j
t
j
共19兲
ns j

where j is one of the nearest neighbors of the atom in question, ns


is the number of neighboring atoms which have slipped, and rtj
and r␪j are the vector differences of atom j and the atom in ques-
tion at indentation displacement steps t and ␪, respectively.

3 Results and Discussion


Figure 2共a兲 presents the variation in load 共i.e., force experi-
enced by the indenter兲 with indentation depth for spherical in-
denter nanoindentation cycles performed to maximum indentation Fig. 2 Load-depth curves for maximum indentation depths of
depths of 4 Å, 7 Å, and 10 Å. Meanwhile, Fig. 2共b兲 shows the 4 Å, 7 Å, and 10 Å: „a… spherical indenter, and „b… pyramidal
equivalent load-depth curves for pyramidal indenter nanoindenta- indenter
tion cycles. It is clear that each of the indentation cycles in Fig. 2
represents a hysteretic loop, which indicates that plastic deforma-
tions take place during the loading process. In the present study, used to calculate the slip vector at each atomic site. The majority
the stability of a crystalline structure is correlated to, and can be of the atoms do not slip. These atoms are shaded a dark blue color
monitored by, the positiveness of the modified FEM tangent stiff- in the figure. The atoms with nonzero slip vectors are shaded with
ness matrix. The irreversible plastic deformations observed in the different colors. By comparing subplots 共a兲 and 共b兲, it can be seen
simulation can be attributed to changes of the crystalline structure that the elastic dilatation and distortion of the crystal lattice are
caused by instabilities induced by high localized stress. This per- recovered and that a few more atoms have slipped following un-
spective of the plastic deformation mechanism bears witness in loading. Furthermore, comparing subplots 共c兲 and 共d兲 shows that
the work of Li et al., 关14兴, but the precise prediction of the onset the elastic deformation is recovered and that some atoms with
of incipient plasticity falls beyond the scope of the present study. small slip vectors are also recovered. Therefore, atoms with small
Figure 2 reveals that compared to pyramidal indentation, spherical slip vectors are induced by elastic distortion of the crystal lattice.
indentation leads to an enhanced yielding phenomenon, which The high stresses induced as the indenter impresses the sub-
resembles that observed in the uniaxial compression testing of strate cause structural instability of the crystal, which causes some
ductile metals. Comparing the hysteresis loops of Figs. 2共a兲 and
2共b兲, it is clear that the enclosed areas are greater in the case of
spherical indenter indentation. This indicates that more plastic
work is dissipated in indentation cycles performed with this par-
ticular indenter geometry.
Figure 3 provides a schematic illustration of the elastic-plastic
deformation mechanism observed during the present simulations.
It can be seen that irreversible plastic deformation occurs as a
result of slips in which the crystal lattice retains its shape and
orientation. In addition to plastic deformation, the change in size
and distortion of the crystal lattice also induces elastic deforma-
tion.
Figure 4 presents the atomic configurations of the copper crys-
tals at the maximum indentation depth following unloading for the
two indenters of different geometries. For clarity of observation,
the atomic configurations shown in this figure correspond to the
atomic arrangements of the single 共1 0 0兲 atomic layer located Fig. 3 Representation of elasto-plastic deformation mecha-
immediately beneath the two indenter tips. Equation 共19兲 can be nism observed in the simulations

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Fig. 4 Atomic configurations of copper crystal at maximum indentation
depth following unloading for two indenters of different geometry. Note that
„a… and „b… represent the cross sections through the indenter tip and parallel
with the „1 0 0… plane for the pyramidal indenter, while „c… and „d… present the
equivalent cases for the spherical indenter.

Fig. 5 von Mises shear stress and slip vector distributions for indentation
to a depth of 4 Å using a spherical indenter. „a…–„b… Distributions of von
Mises shear stress viewed in the †111‡ and †001‡ directions, respectively.
„c…–„d… Distributions of the norm of the slip vector viewed in the †111‡ and
†001‡ directions, respectively.

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Fig. 6 Flooded contour diagrams of contact pressure distributions on the
copper surface. „a… Spherical indenter; „b… pyramidal indenter. The two bold
contour lines represent the boundaries of the contact areas where contact
pressure vanishes. „Stress units: GPa.…

of the atoms to slip. Therefore, a correlation must exist between hc = ht − ␧Pmax/Smax 共20兲
the stresses at the atomic sites and the atom slippage. Using Eq.
共18兲, the stress tensor is calculated at each atomic site of the where ␧ = 0.72 for the pyramidal indenter, ␧ = 0.75 for the spheri-
copper crystal for indentation to a depth of 4 Å using the spherical cal indenter, and Smax is the stiffness, which is equal to the slope
indenter. Figures 5共a兲 and 5共b兲 show the distributions of von of the unloading curve 共dp / dh兲 at the maximum load 共Pmax兲.
Mises shear stress exceeding 4.5 GPa in the 关111兴, 关001兴 direc- The projected contact area is obtained by the projected contact
tions, respectively. Meanwhile, Figs. 5共c兲 and 5共d兲 present the area-to-contact depth relationship for the indenter geometry. The
distributions of the norm of the slip vector in the 关111兴, 关001兴 nanohardness is then determined by dividing the maximum load
directions, respectively. A comparison of the subplots in the upper by the projected contact area. Table 1 presents the results when
and lower rows of Fig. 5 indicates that the von Mises shear stress this procedure is applied to the simulated load-depth curves to
is a qualitatively good indicator of the plastic deformation induced determine the corresponding nanohardness values.
in the simulated nanoindentation. Table 1 shows that the nanohardness values calculated using
The principal goal of nanoindentation testing is to determine Eq. 共20兲 are far higher than those calculated using the true contact
the elastic modulus and nanohardness of the specimen material area identified by the contact pressure. Hence, Eq. 共20兲 signifi-
from experimental measurements of indenter load and penetration cantly underestimates the contact depth in all of the simulation
depth. These readings provide an indirect measure of the contact cases. The results also reveal that the nanohardness varies with the
area at full load, from which the mean contact pressure, and hence indentation depth and the indenter geometry. Therefore, it can be
the hardness, may then be estimated. Therefore, the validity of the concluded that the indentation size effect is significant in the
nanohardness and elastic modulus results depends largely upon nanoscale indentations simulated in this present study.
the analytical procedure employed to process the raw data. The It can also be seen that the nanohardness obtained using the
present simulations utilize the contact pressure to identify the true pyramidal indenter is higher than that obtained using the spherical
contact area at full load. Figures 6共a兲 and 6共b兲 present flooded indenter when the contact area is measured via the contact pres-
contour diagrams of the contact pressure distributions on the cop- sure. In contrast, if the contact area is obtained from Eq. 共20兲, the
per surface for spherical and pyramidal indentations, respectively. pyramidal indenter indentation yields a higher nanohardness. Fig-
The bold contour lines represent the boundaries of the contact ure 2 has demonstrated that the spherical indenter indentation con-
areas at which the contact pressure vanishes. Once the true contact sumes greater plastic work. This observation is consistent with the
area has been determined, the nanohardness can be computed by result that the nanohardness calculated by direct measurement of
dividing the load by the projected area of contact at that load. the contact area is higher. Therefore, it can be concluded that the
Table 1 presents the nanohardness magnitudes calculated using commonly used procedure for estimating the contact area in
this method for spherical and pyramidal indentations with maxi- nanoindentation testing is invalid when the indentation size falls
mum indentation depths of 4 Å, 7 Å, and 10 Å. in the nanometer regime. The reason why Eq. 共20兲 underestimates
In nanoindentation tests, analysis of the load-depth curve based the real contact area of nanoscale indentation depth is that the
on continuum mechanics contact theory gives an indirect measure assumption implied by Eq. 共20兲 fails significantly. In other words,
of the contact area. The contact depth 共hc兲 is estimated from the the deformation behavior at the incipient unloading is elastic-
plastic instead of purely elastic behavior implied by Eq. 共20兲.
total indentation depth 共ht兲 via
4 Conclusion
Table 1 Nanohardness values calculated using two methods In conclusion, this paper has presented a more efficient ap-
for two different indenter geometries and three indentation proach than conventional MD simulation for the investigation of
depths. the elastic-plastic deformations which occur during nanoscale in-
dentations of a thin film. The proposed approach utilizes the mini-
Nanohardness calculated Nanohardness mum energy principle via nonlinear finite element formulation to
using the true calculated reduce the indentation process to a quasistatic problem. The simu-
Geometry of Indentation contact area using Eq. 共20兲
lation results of the current modified finite element formulation
indenter depth ht 共Å兲 共GPa兲 共GPa兲
indicate that the microscopic plastic deformations of the thin film
pyramidal 4 5.1 15.7 are caused by instabilities of the crystalline structure. It has been
pyramidal 7 4.9 11.8 shown that the analytical procedure commonly adopted in nanoin-
pyramidal 10 4.7 9.5 dentation testing significantly overestimates the nanohardness.
spherical 4 7.6 8.1
spherical 7 6.2 7.3 The simulation results have confirmed that both the indentation
spherical 10 6.3 7.8 depth and the indenter geometry influence the nanohardness
results.

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Acknowledgment 165507.
关7兴 Fuente, O. R. de la, Zimmerman, J. A., Gonzalez, M. A., Figuera, J. de la,
The authors gratefully acknowledge the financial support pro- Hamilton, J. C., Pai, W. W., and Rojo, J. M., 2002, “Dislocation Emission
vided to this study by the National Science Council of Taiwan, around Nanoindentations on a 共001兲 fcc Metal Surface Studied by Scanning
under Grant No. NSC 91-2218-E-274-001, and American AFOSR, Tunneling Microscopy and Atomistic Simulations,” Phys. Rev. Lett., 88, p.
036101.
under Contract No. F62562-03-P-0378. 关8兴 Knap, J., and Ortiz, M., 2003, “Effect of Indenter-Radius Size on Au共001兲
Nanoindentation,” Phys. Rev. Lett., 90, p. 226102.
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