SENSIMER: A MEMS HEATER BASED

EXPERIMENTATION PLATFORM

LABORATORY MANUAL

MEMS-SENSIMER LAB MANUAL NANOSNIFF TECHNOLOGIES PVT .LTD.

 List of figures

Fig 1.1: Sensimer block diagram

Fig 1.2: Software snapshot to select ‘Heater Test’ mode
Fig 1.3: Software snapshot to show response to heater1 voltage as 1V
Fig 1.4: Software snapshot to show response to heater1 voltage , when increased to 2V
Fig 1.5: Sample graph of heater temperature vs voltage
Fig 2.1: Software snapshot to select ‘Standard Input’ mode
Fig 2.2: Software snapshot to show response to heater1 voltage as 2V Sine wave with time period 1sec and
offset 0V
Fig 2.3: Software snapshot to show response to heater1 voltage as 2V Sine wave with time period 1sec and
offset 2V
Fig 2.4: Software snapshot to show response to heater1 voltage as 2V Square wave with Ton 1sec and offset 0V
Fig 3.1: Software snapshot to select ‘Custom Input’ mode
Fig 3.2: GUI snapshot to set experiment schedule
Fig 3.2: GUI snapshot that shows heater profile preview
Fig 3.2: GUI snapshot that shows result of experiment upon completion
Fig 4.1: Software snapshot to select ‘Custom Input’ mode
Fig 4.2: GUI snapshot to set experiment schedule for both heater
Fig 4.3: GUI snapshot that shows heater profile preview
Fig 4.4: GUI snapshot that shows result of experiment upon completion
Fig 5.1: GUI snapshot that shows result of experiment upon completion

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Introduction To Microheaters
Micro heaters are micrometer sized, thin suspended membranes that have a resistive heater coil sandwiched
within an electrically insulating, but thermally conducting material. The mass of the micro-heater is kept very
small and thermally isolated from the supporting structure (refer to fig 1.1).

The entire membrane structure can be heated by passing an electrical current through the heater coil. (Refer
Fig 1.2)
Semiconductor device fabrication is the process used to MEMS structure like micro-heater. It is a multiple-step
sequence of photographic and chemical processing steps during which the device is gradually created on a
wafer made of pure semiconducting material. Silicon is the most commonly used semiconductor material today.
The process of fabricating these devices using standard microfabrication processes is depicted below:

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 SiO2

Platinum

Gold

Silicon

Silicon Nitride

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 Experiment1
Aim: Measure the temperature of the heated membrane for a given voltage excitation.

Items required: Sensimer, Micro heater.

Theory:

The system has been designed for recording the thermal response of micro-heaters and analyzing their
characteristics such as temperature ramp rate and dependence on thermal mass. The sensor PCB consists of
two micro-heaters embedded with RTDs (temperature dependent resistor). Using device, Both micro-heaters
can be independently powered with specific voltages set by software.

Fig 1.1: Sensimer block diagram

Depending upon the voltage applied, the temperature of micro-heaters varies. This in turn changes the
resistance of the RTD. The resistance of RTD( RT )varies according to following formula:
RT  R 0(1  T )
R 25  R 0(1  T 25)
RT  R 25  R 0   (T  T 25) ............................(1)
Where,
T = Temperature at which the resistance is heated
 = Temperature Coefficient of Resistance (TCR)of RTD material = 0.002724/oC
R 0 = Resistance at 0o C

The RTDs are supplied with a constant current. The Differential voltage across two RTDs is sensed and amplified.
Voltage output of amplifier can be determined by following formula
Vout  G  ((I1  R1) - (I2  R2))
Where,

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G = Gain of amplifier
I 1 = constant current flowing through RTD1
R1 = Resistance of RTD1
I 2 = Constant current flowing through RTD2
R 2 = Resistance of RTD2

At room temperature,
Vout 25  G ( I1 R125  I 2  R 225)
When heater is heated,
VoutT  G ( I1 R1T  I 2  R 225)
 V  G  I 1( R1T  R125) .........................(2)

From equation (1) and equation (2), We can deduce that voltage is directly proportional to temperature

Steps of experiment:
1. The device is connected to the PC through a USB cord and is powered up.
2. The connection between PC and device is established. Calibration is performed by entering into calibration
mode and hitting CALIBRATE button on software.
3. The base resistances of micro-heater and integrated RTD are measured.
4. Select mode as Heater Test mode.

Fig 1.2: Software snapshot to select ‘Heater Test’ mode

5. Increase voltages supplied to heater 1 and observe changes in RTD1 voltage

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Fig 1.3: Software snapshot to show response to heater1 voltage as 1V

Fig 1.4: Software snapshot to show response to heater1 voltage , when increased to 2V

6. Depending on voltage values, determine Temperature

7. Calculate temperature for different voltage values
8. Plot voltage vs temperature graph
9. Repeat the same set of experiment with Heater2 & RTD2

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Precautions:
1. Always test connection to check if device is connected to PC.
2. Always check if all microheaters and RTDs are have resistances less than 500ohms.
3. Always calibrate the sensor before proceeding to experimentation.
4. Do not touch microheater die.

Conclusion
Sample response:

Fig 1.5: Sample graph of heater temperature vs voltage

The temperature of heater is directly proportional to voltage supplied to heater.

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 Experiment 2
Aim: Study the temperature Response of heated membrane to standard voltage profiles, like Square, Ramp,
Sinusoidal etc

Items required: Sensimer, Micro heater

Theory:
The micro heater has an integrated coil made of material with a high TCR (thermal coefficient of resistance) to
act as a temperature sensor (figure). The sensor coil is thermally coupled with the heater coil and sees the
same temperature as achieved by the heater. The change in resistance of the sensor coil gives a measure of the
real-time temperature of the hotplate.

Steps of experiment:

1. The device is connected to the PC through a USB cord and is powered up.
2. The base resistances of micro-heater and integrated RTD are measured.
3. The connection between PC and device is established. Calibration is performed by entering into
calibration mode and hitting CALIBRATE button on software.
4. Select mode as Standard Input mode

Fig 2.1: Software snapshot to select ‘Standard Input’ mode

5. Select input Signal type & set the T-ON/T-OFF period, amplitude & offset of the input waveform.
6. Select the Heater to which the input is fed.
7. Start experiment by clicking LOAD & observe the thermal response of the selected heater to the
applied input.
8. Press STOP to end the experiment. The experiment data is saved in the Sensimer Directory on the
Desktop of your computer.

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Fig 2.2: Software snapshot to show response to heater1 voltage as 2V Sine wave with time period 4sec and offset 0V

Fig 2.3: Software snapshot to show response to heater1 voltage as 2V Sine wave with time period 4sec and offset 2V

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Fig 2.4: Software snapshot to show response to heater1 voltage as 2V Square wave with Ton 1sec and offset 0V

Precautions:
5. Always test connection to check if device is connected to PC.
6. Always check if all micro-heaters and RTDs are have resistances less than 500ohms.
7. Always calibrate the sensor before proceeding to experimentation.
8. Do not touch micro-heater die.
9. Do not power heater with more than 5V.

Conclusion:

The heater has a good rise time and closely follows the voltage applied. The heater has some initial dead space
where it does not respond to lower voltages.

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 Experiment 3
Aim: Study the temperature Response of heated membrane to customized voltage profiles.

Items required: Sensimer, Micro heater,

Theory:
Micro heaters are micrometer sized, thin suspended membranes that have a resistive heater coil sandwiched
within an electrically insulating, but thermally conducting material so as to heat the entire membrane structure
by passing an electrical current through the heater coil. The mass of the micro-heater is kept very small and
thermally isolated from the supporting structure so as to achieve very high temperatures (up to 600 Deg c), in a
very short time (a few milliseconds), by an electrical current of the order of tens of milli-amperes.

Rise time: The time required for a pulse to rise from 10 per cent to 90 per cent of its steady value.

Steps of experiment:
1. The device is connected to the PC through a USB cord and is powered up.
2. The base resistances of micro-heater and integrated RTD are measured.
3. The connection between PC and device is established. Calibration is performed by entering into
calibration mode and hitting CALIBRATE button on software.
4. Select mode as Custom Input mode

Fig 3.1: Software snapshot to select ‘Custom Input’ mode

5. Press EDIT SCHEDULE to make a schedule using the GUI.

6. Set the RESOLUTION at which the experiment has to be performed

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 Fig 3.2: GUI snapshot to set experiment schedule

7. Set the EXPERIMENT DURATION.

8. Set the Heater inputs at various intervals during the experiment schedule
9. Set the Heater inputs of one heater keeping the other at 0v, to observe its individual thermal response
10. INPUT PREVIEW gives a, graphical view of the heater inputs across the experiment schedule

Fig 3.2: GUI snapshot that shows heater profile preview

11. Save the schedule by clicking on SAVE SCHEDULE.

12. Click on LOAD SCHEDULE to load the Schedule created in earlier steps
13. Click RUN EXPERIMENT.
14. Observe the individual responses of the RTD to the inputs.

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Fig 3.2: GUI snapshot that shows result of experiment upon completion

Precautions:
1. Always test connection to check if device is connected to PC.
2. Always check if all microheaters and RTDs are have resistances less than 500ohms.
3. Always calibrate the sensor before proceeding to experimentation.

Conclusion:
Calculate Rise time of the microheater compare it against other heaters available in market like cartridge heater,
sillicone rubber heater, ceramic heaters etc
Sample response:

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 Experiment 4
Aim: Study the differential response of micro heaters.

Items required: Sensimer, Micro heater,

Theory:
In case of micro heaters, the resistances may vary and their rise time would be different from one another.
Because of the non uniform film thickness of heater layer, it may be very difficult to fabricate exactly similar
devices even on same wafer.

Steps of experiment:

1. The device is connected to the PC through a USB cord and is powered up.
2. The base resistances of micro-heater and integrated RTD are measured.
3. The connection between PC and device is established. Calibration is performed by entering into
calibration mode and hitting CALIBRATE button on software.
4. Select mode as Custom Input mode

Fig 4.1: Software snapshot to select ‘Custom Input’ mode

5. Press EDIT SCHEDULE to make a schedule using the GUI.

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Fig 4.2: GUI snapshot to set experiment schedule for both heater

6. Set the RESOLUTION at which the experiment has to be performed

7. Set the EXPERIEMNT DURATION.
8. Set the Heater inputs at various intervals during the experiment schedule
9. Clicking on INPUT PREVIEW gives a graphical view of the heater inputs across the experiment schedule

Fig 4.3: GUI snapshot that shows heater profile preview

10. Save the schedule

11. Load the Schedule created in earlier steps
12. Run the Experiment
13. Observe the differential responses of the RTD's to the inputs.

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Fig 4.4: GUI snapshot that shows result of experiment upon completion

Precautions:
1. Always test connection to check if device is connected to PC.
2. Always check if all micro heaters and RTDs are have resistances less than 500ohms.
3. Always calibrate the sensor before proceeding to experimentation.

Conclusion:
Plot the Graph from raw file

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 Experiment 5
Aim:Study the effect of addition of a measured mass on the heating response of the micro heater

Items required: Sensimer, Micro heater, ethanol, syringe

Theory:
Micro heaters include functionality for measuring and controlling temperature, and measuring the electrical
properties of deposited layers. As their name implies, they are particularly well-suited for examining
temperature-dependent phenomena on a micro-scale. Their rapid heating/cooling characteristics has led to the
development of low power sensors that can be operated in dynamic temperature modes. Tens or hundreds of
the micro hotplates can be integrated within arrays that serve as platforms for sensing applications.

Steps of experiment:
1. The device is powered on and is connected to the PC through a USB cord.
2. The connection between PC and device is established. Calibration is performed by entering into
calibration mode and hitting CALIBRATE button on software.
3. The base resistances of micro-heater and integrated RTD are measured.
4. Click on EDIT SCHEDULE button and set heater profile of 20 ms pulse.
5. Set CYCLE INTERVAL as 1000ms. Increase the EXPERIMENT CYCLE count to 10. Give this experiment a
proper title name. Click on RUN EXPERIMENT. Thus, the heater will be supplied with a train of ten
pulses to establish a baseline. This baseline will be used in further experimentation as a reference. SAVE
BASELINE button is used to save average of ten pulses as baseline.
6. The heater is again supplied with a train of ten pulses and the response is measured against the
reference (baseline). ‘SELECT BASELINE’ button is used to select data for reference.
7. Draw some ethanol in the syringe.
8. Put a drop of ethanol on the micro heater. Let it dry
9. Again , The heater is supplied with a train of ten pulses.
10. Observe response of heater.

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 Fig 5.1: GUI snapshot that shows result of experiment upon completion

Precautions:
1. Always test connection to check if device is connected to PC.
2. Always check if all micro heaters and RTD's are have resistances less than 500ohms.
3. Always calibrate the sensor before proceeding to experimentation.
4. While droping ethanol on top of microheater, make sure the needle tip does not touch/damage the
microheater.

Conclusion
Plot the graph based on raw file.
Try other materials and check heater’s response to the same.

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