Professional Documents
Culture Documents
Fabrication of PMOS Transistors
Fabrication of PMOS Transistors
c c
cc
c
c
c
c c
c
c c
cc
v
c
£
èc c cccc cc! cc cc c" #! c
èc c!$ccc c%&c
! cc$ c c
c
r
c
c
c
c ) c*c) c( ccc
c
ccccccc c$c c'c( cc$c$cc c c#ccc c
cc cc cc cc" c c#cccc#cc ccc
cc cc c$c!cc
c
c
c
c
=
c
c
cc!+c! ccccccc## cc c&cccccc
c!$ccc$ ccc!$cc,-...c !c c cccc!$ccc
!c c ccc!# cc#cc$ c c# cccc cc c
cc! c cc ccc c c ccc" /ccc ccccc
c)c cc ! cc cc cc#c c ccc c
cccc c!c cc!# cccc cc c c*.0.1c
cc#c cc $ccccc cc!cc c!# c
#cc c c ccc" /cc)c -ccc cc c# ccc
" /ccc#c cc!c!# cccc cc$ccccc
#cc c c ccc cccc ccc!#c
c cc" /ccc c$ ccc&cc!c c$c c,-...c
!c cc c!$ccc ccc# #cc cc
c
2c#c cccc c3*004c ccc$ ccccc cc
c ccc*cc2 cc##cc# ccccccc c! cc
! cc ccc# c c c! cc# c c cc c cc(*ccc
$c ccc5 c cc#ccc cc! ccc! cc
c cc# c$ c% c$ cc c ccc c cc ccc
cc ! cc!c! cc# c##cc c c c c c c# cc
cc c cc (#cc% cc*00cc# cc ccccc#c
!c ccc cc##&!c*.0.6cc7.c! cc cc# c cccc
# ccc cc c c c8cc2 cc cc ccccc
cc!# cc ccc c ccccc!$ccc#c c
c
790:;c3 !4 79,79c3 !4c
709;.c3 !4 7,*:*c3 !4c
70;9;c3 !4 7:889c3 !4c
79.*,c3 !4 79;<8c3 !4c
79:9*c3 !4c
c
c*c$ cc c3*004c
c
c
£ &%
' %&% ' %&%
"# $ %
c
c ) c8c( c# c#c c! cc
#(#c c c cc c!c c cc c
c cc cc
c
c c c c c c
c 0<;7c 0<<.c 0;;.c 0;<7c 0;*7c 0;:0<c
c
c
c c8c$ cc)c%&c
c
c
ccc&cc c#cc! ccc&c% ccccc&cc0..c
!c2cc cc& cc ccc&cc cc! c$c c c
cc0..c !c2cc c! cc c$ ccc&c cc cc!cc
( cccc cc&cc cc cc c c;c
c
c
>c
c )c %&c
%&c
c
(#c (#c
c
c(#c
c
) c;c)c c>c%&c( c
c
r
c
cc!c cc# c c#c#c c&#ccc#c!$c=;c c
# c c ! !c c# c c#c!$c=<c cc#c!$c=;cc#c
c!c c#ccc c#+c2c ccc!cc#ccc#c c
cc!#ccc#c2cccc$c cc!cc!cc;c c!cc
cc!c#c ccc
$ cccc !c ccccc !cc c
c ccc cc ! ccccc ccc##&!c c! -c cc
ccccccc2 ccc cc c5ccc cccccc
c c ccccc c##&!c*,cc8.c! cc!( ! c c
c c c c0cc5cc cc/cccccc cc#cc*cc
cc##ccc c#cc#c% c!$c=;cc&#c c#cc
cc! c&c c c# c ! !ccc$ ccc ! !c
# cc;...c !c cc! cc ccc cc ccccc# c
-ccc c ! !c c cccc# #ccc c5c 'cccc
" cc;...c !c2ccccc!cc c c# c cc cc cc
cc!$cc
c
c
c
c
c
) c<c2c8-c cc&#c
c !c c>c ! c
) c0c2c*c##ccccc##&!c*,c! ?c
c!$=;c
) c9c2c=8cc#! cc!$c=<cccc c! c
c ccccccc cc cc ! c
(
)cc ccccc<.c!ccc!c c c97,.c!ccc c
c2c ccc!c cc08c!c cc c ccc! ! ccc c
cccccc+ c c ccc ccc cc c ccc c
cc! ccccccc5c c c cc cc;cc c c
c cc!c c cc ccc cc#c c c c ccc
c5c ccc ccc!# c cc&ccc cc ccc cc
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c
c ) c:cccc# cccc c cc7ccccc c c
c c c ! !c# ccccc! c c% ccccc
c ccc ccccc ! !ccc
c cc c c
c " c:-c7-c*.-cBc*8c!cc c c#ccc
c
% cccccccc c'c cccc! c c cc c#c
cc;c@c0cccccc cccccccccc c##cc
cc*-c8-c c;cAc2c c c cc c c ccc !cc#c
ccc&# ccc!$c=;cc#cc cc ! c! ccc
!c cccc cc#ccc cccc
c
c
c
r
r
X c X c
Xc Xc X
Xc c
c X c
c
Xc
Xc
c
Xc X Xc X
c
c<c2c8ccAc
c cccc8cAc
c
c c;c2c8ccAc
c cccc*cAc
c
c
c
c
r
c X c
c
c c X
c c X
c
c
c
c
c
c
c
c
c c
c
Xc
X c
c
c
c0c2c8ccAc
c cccc;cAc
c
M
c
c
ccc
!!/c ccccc
(
c
c<c cc c# c c0c cc ! !c# c
c cc cc
cc # c
cc #
c cc
cc
c c :.*,cEc <.cEc
! c 08cEc
c
c c 9:<*cEc <:cEc
! c ! c c
9
c
0
A>cGc*
< A>cGc8 c
; A>cGc;
c
8
c3A>cGc;4
*
c3A>cGc*4
c
c3A>cGc84
.
(* . 8 < 9 , *. *8 c
c
) c:c %
c cc cc ccc3*(;A4ccc
c##ccc c c ccc cccc cc c
c
#c cccc cc
c
#'
r ' £( " )" ( # cc
r