×10G 4 85 ×10G 4 85

(a) (b)
5
9.6
4 0.4
9.6
Actuator response

Response of sensor
0.2
2
1 0.0
0
-0.2
-1
-2 -0.4
-3
-4 -0.6
2.45 ×10G 3.35 ×10G
4 4
2.2 2.25 2.3 2.35 2.4 3.1 3.15 3.2 3.25 3.3
Time (sec) Time (sec)

×10G 4 ×10G 4 Back

surface Front
(c) (d) surface
5 Back Front reflection
reflection
surface surface 0.4
4
reflection reflection
3

Response of sensor
0.2
Actuator response

2
1 0.0
0
-0.2
-1
-2 -0.4
-3
-0.6
-4
5.0 ×10G 5.0 ×10G
4 4
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5
Time (sec) Time (sec)