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Review

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Applications of ESEM on Materials Science: Recent


Updates and a Look Forward
Zhouyang Zhang, Yangbo Zhou, Xinli Zhu, Linfeng Fei,* Haitao Huang,* and Yu Wang

world, which is also an essential step for


The microscopic understanding of materials relies on the development of understanding the development of new
microscopy. Historically, the technological evolution from optical micro- materials and science. However, due
scopes to electron microscopes has directly stimulated many discoveries to the limit of light wavelength, optical
of new physical and chemical fundamentals as well as advanced materials. microscope, with the best resolution at
≈200 nm, is evidently not enough for
Scanning electron microscopy (SEM) is, undoubtedly, the most widely used
materials science. Therefore, a new micro-
tool for microscopic characterization in modern materials science. Especially, scope technology with a shorter-wave-
the incorporation of a gas pressure around the sample area of conventional length light source for better resolution is
SEM, i.e., the environmental scanning electron microscope (ESEM), has needed. In 1931, German physicists Ruska
opened new possibilities in observing samples in their natural states, leading and Knoll fabricated the first transmis-
sion electron microscope (TEM). Although
to unprecedented chances for studying the details of biological, organic,
with a magnification of only 16, it is still
and hydrated samples. What is more, in recent years, in situ ESEM studies an epoch-making invention, for electrons
concerning materials change and chemical reactions have played a more was first employed as the light source for
important role in the field of materials science. Herein, the recent applica- a microscope.[1] Since then, great efforts
tions of ESEM in materials science are comprehensively reviewed, in terms of have been made to improve the spatial
common static observations for various materials and in situ investigations resolution of electron microscope (EM),
as well as to develop new applications for
of dynamic processes in controlled experimental environments. Moreover,
such instrumentation. For example, based
the problems concerning state-of-the-art ESEM experiments are discussed, on the EM technique, scanning electron
as well as possible solutions. Looking forward, the rapid developments on microscope (SEM) was designed later to
instrumentation and fundamental science of ESEM can bring a clear vision of obtain microscopic topological informa-
materials in the near future. tion of bulk samples. In 1942, Zworykin
constructed the first SEM with a resolu-
tion of ≈50 nm.[1,2] In the design of an
SEM, the requirement of high vacuum for
1. Introduction observation, typically around 10−3 to 10−5  Pa, is needed to focus
the electron beam and minimize the electron scattering through
About 300 years ago, when optical microscope was successfully the column. As a result, an issue was raised in the application
invented by Leeuwenhoek for studying the microstructures of SEM, i.e., the sample needs to be “pre-treated” to enhance
of organisms, it is the first time that human was empowered its surface conductivity to avoid surface charging during the
with the capability to explore unprecedented details of this SEM observation. To explore the “real” surface of a sample in
SEM and for experimental convenience, since 1953, a number
Z. Zhang, Prof. Y. Zhou, Prof. L. Fei, Prof. Y. Wang of hardware configurations, including differential pumping
School of Materials Science and Engineering system, aperture-limited system, and thin-film windows, were
Nanchang University proposed to achieve an “environmental chamber” in EM.[2–4] It
Nanchang, Jiangxi 330031, China was until the late 1980s that the first commercial environmental
E-mail: flf@ncu.edu.cn
SEM (ESEM) was demonstrated by Electroscan Corporation for
Dr. X. Zhu
observations of wet or insulated samples in their native states
Thermal Fisher Scientific
Building 8, 399 Shengxia Road, Zhangjiang Hi-Tech Park without any surface treatments, whose nominal specimen
Shanghai 201210, China chamber pressure could go up to 25 Torr (3300 Pa).[1,5] By far,
Prof. L. Fei, Prof. H. Huang the most advanced ESEM can reach a secondary electron image
Department of Applied Physics resolution of ≈1.3 nm at an accelerating voltage of 30 kV, and
The Hong Kong Polytechnic University the maximum chamber pressure can be up to 4000 Pa.
Hung Hom, Kowloon, Hong Kong, China
E-mail: aphhuang@polyu.edu.hk The ESEM has been defined as an SEM capable of main-
taining a minimum water vapor pressure of at least 609 Pa
The ORCID identification number(s) for the author(s) of this article
can be found under https://doi.org/10.1002/smtd.201900588. in its specimen chamber.[6] Nowadays, depending on the
different vacuum levels in the chamber area, there are usu-
DOI: 10.1002/smtd.201900588 ally three working modes for ESEMs: high vacuum (HiVac)

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mode, low vacuum (LoVac) mode, and the ESEM mode. For
the HiVac mode, the typical chamber pressure is within the Zhouyang Zhang is currently
range of 10−2 to 10−4  Pa, and the operating conditions of an a Ph.D. candidate in the
ESEM in this mode are very much similar to that of a con- School of Materials Science
ventional SEM (CSEM). On the other hand, pressure ranges and Engineering, Nanchang
in LoVac and ESEM modes are 10–130 and 10–4000 Pa, University, under the supervi-
respectively, in the sample area (either the water vapor from a sion of Prof. Linfeng Fei.
built-in water reservoir, up to 2600 Pa, or a gas from an aux- Her current research mainly
iliary gas inlet can be used as the imaging gas for different focuses on in situ obser-
experiments), while the column part is still working at a high vations of dynamic phys-
vacuum of less than 10−2 Pa to generate and focus the electron icochemical processes by
beam. In principle, the LoVac mode is designed for observing electron microscope.
naked (noncoated) and nonconductive specimens, whereas
the ESEM mode is more appropriate for observing natural
samples (contain volatile components). In line with a CSEM,
ESEM has the identical advantages of good field depth, long Linfeng Fei received his B.S.
focal length, and simple preparation procedures for bulk sam- degree from University of
ples. Furthermore, the unique advantage of ESEM is the exist- Science and Technology of
ence of a gas environment in the chamber, so that samples of China, followed by a Ph.D.
any states (wet or dry, conductive or insulated) can be directly degree from The Hong
tested without surface pre-treatment. This “gas environment” Kong Polytechnic University.
usually refers to water vapor for ESEM observation and, there- Afterward, he worked as a
fore, hydrated or “wet” samples can be maintained in their postdoctoral fellow in The
native state. In this perspective, the development of ESEM Hong Kong Polytechnic
has greatly expanded the applications of SEM in materials University and has recently
research.[7,8] moved to Nanchang
Therefore, it is not surprising that hundreds of papers University. His research is
using ESEM as their major research tool are published each focused on in situ observa-
year, which cover almost every corner of modern materials tions of dynamic processes and advanced characteriza-
science (see Figure  1). However, we recently noted that, the tions at the atomic-scale for emerging materials using
latest holistic review of ESEM and its applications was pub- electron microscopy.
lished over 16 years ago.[7] More importantly, as the research
focus has changed a lot during this period, a great amount of
seminal papers have been published with the help of ESEM. Haitao Huang is a professor
For example, Kiselev et al. reported the direct observations of in the Department of Applied
deposition growth of aligned ice crystals on feldspar;[9] the in Physics, The Hong Kong
situ observations performed by Huang et al. demonstrated the Polytechnic University. His
formation of nanowire arrays proceeds via a selective vapori- current research interests
zation process of the bulk crystals;[10] and Toth et al. achieved include electrochemical energy
fabrication and slimming of nanostructure by beam-induced storage and conversion, and
deposition and etching in ESEM.[11] Actually, the total number ferroelectric materials for
of papers is over 3000 in the last 16 years. These significant energy applications. He is
achievements and contributions have inspired us to present currently the board committee
a comprehensive summary of ESEM applications on mate- member of the International
rials science, focusing mainly on the breakthroughs in recent Academy of Electrochemical
years. Energy Science (IAOEES).
Our review will be organized as follows. First, we will
briefly introduce the operation principle and structural con-
figuration of ESEM, together with some functional acces-
sories. Second, we will emphasize the recent developments
in application scenarios of ESEM. These applications will be water, wetting, water transportation, and so on), 2) observa-
categorized into common static observations (ex situ) and in tions on material changes with the participations of water (del-
situ dynamic observations. For static observations, we will iquescence, metallic corrosion, fabrication of nanostructure,
focus on biological hydrated samples (e.g., organisms, cells, hydration process of cements, and so on), and 3) in situ obser-
bacteria, proteins, etc.) and insulated samples (e.g., fossils, vations on other dynamic processes in ESEM (reactions in bat-
cements, skeletons, polymers, etc.). The in situ observations, teries, growth of 2D materials and nanomaterials, crystalliza-
which is the most important application of ESEM nowadays, tion of oxides at high temperature, and so on). Finally, we will
is classified into three parts: 1) observations on phase changes try to give our outlook on both technical perspectives of ESEM
of water (morphological changes during phase transition of and their possible applications in future materials science.

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to specimen chamber. As shown in Figure  2a, the final pres-


sure limiting aperture PLA1 separates the specimen chamber
from the rough vacuum region, which is further separated by
aperture PLA2 from the column part where the electron beam
moves in a high vacuum with a high energy. The maximum
pressure allowed in the specimen chamber at LoVac or ESEM
mode is thus influenced by the design of the PLAs.[12] The
gas flows freely along sideways between these two apertures.
The most commonly used gas in ESEM experiments is water
and, of course, other gases (nitrogen, carbon dioxide, nitrogen
dioxide, helium, argon, CxHy, and so on) can also be used as
the imaging gas. Compared with environmental TEM (ETEM)
which provides observations at a higher resolution in gaseous
atmosphere (up to 2000 Pa for N2), ESEM still holds its advan-
tages including an easy sample preparation procedure, a good
depth of field, and a higher permitted gas pressure (which is
extremely important for biological samples). It is worthy of
noticing that the gas not only can offer a gaseous environ-
ment for stabilization of the sample but also play a significant
role in signal amplification for imaging. Considering that the
widely used Everhardt–Thornley detector in CSEM would lead
to arcing in the presence of gas, a special gaseous secondary-
electron detector (GSED) was developed for usage in ESEM.
As shown in Figure 2b, a positive potential of 300–500 V is
applied on the GSED during imaging, and an electric field was
established between specimen and detector to attract those sec-
ondary electrons (SEs) emitted from the specimen after inter-
acted with the incident electron beam. Electron collisions with
gas molecules occur during the acceleration of SEs, causing the
partial ionization of gas molecules and generating additional
electrons (so-called “cascade” of electrons). In this way, signals
obey the cascade amplification process before reaching the
detector.[13] Furthermore, the positive ions resulting from these
Figure 1. a) Number of publications identified using the topic word cascades can move around the sample surface to compensate
“ESEM,” showing a marked increase after 2006 and a steady tendency for negative charge build-up of the insulated sample so it does
over the past decade. b) The distribution of publications across different
research areas. The data are acquired from the Web of Science Core Col-
not need to carry out any conductive treatments on samples in
lection (accessed in June 2019). the ESEM test. Besides, ESEM also supports the backscattered
electron imaging mode beyond the secondary electron imaging
mode.[5]
2. Operational Principle As indicated above, the insulated samples without surface
preparations can be observed in ESEM under a notable gas
Generally, there are three main components to ensure the pressure to maintain their native state including the hydrated
normal operation of ESEMs, which are the electron source, state, in contrast to CSEM. Additionally, the specimen chamber
lens and scanning system, and detection unit. Table  1 shows has enough space to guarantee the operation of a range of
the functions for each component. Meanwhile, to obtain the functional accessories, as shown in Table  2 (the relevant data
“environmental chamber” with the existence of gas, pressure are provided by the Thermal Fisher Scientific). Besides, in spe-
limiting apertures (PLAs) are used to form a pressure gra- cific experiments, one or more accessories can be used inde-
dient along with the electron beam motion from electron gun pendently or simultaneously in ESEM. In fact, the specimen

Table 1.  Main components of ESEM.

Component Function
Electron source The electron beam is emitted within a small spatial volume at a small angular spread and selectable energy.
Lens and scanning system The electron beam enters the lens system consisting of several electromagnetic lenses and exits to hit the specimen surface. The scan-
ning system generated signal, fed to the deflection systems, moves the beam in a raster pattern over the specimen area.
Detection unit Electrons striking the specimen react with its surface, producing three basic types of signal: backscatter electrons, secondary electrons,
and X-rays. The detection system picks up these signals, converts them into an amplified electrical signal which is sent to the control PC
and displayed on the monitor.

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Figure 2.  Schematic illustrations of ESEM. a) The optical layout of the ESEM column. b) The cascade amplification process during the imaging of
hydrated/insulated samples.

chamber has become a micro-processing laboratory which are to be observed under ESEMs at HiVac mode, they must
can satisfy various testing requirements by supplying specific be vacuum-friendly (no volatile components) and electrically
gas environment and combining with functional accessories. conductive (especially the surfaces). Samples as biological
Hence, it is now available for scientists to accomplish a series materials, food, cells, etc., which contain water and oils that
of in situ observations on dynamic processes with rational can volatilize at a certain vacuum degree and may break the
experimental designs, by controlling specific gas, variable tem- vacuum as well as contaminate the electron source, are not
peratures, variable pressures, variable humidity, and so on. allowed to be observed unless they have gone through a series
of pre-treatments (chemical fixing, dehydration, freeze-drying,
and so on). Additionally, in order to enhance the surface con-
3. Recent Applications ductivity, less conductive or insulated samples must be treated
via sophisticated procedures (to be coated with a thin layer of
3.1. Common Static Observations conductive metallic material such as gold, platinum, palla-
dium, and chromium, etc.). The subsequent observation can
As mentioned above, there are generally three working modes be very similar to that in CSEM. However, the aforementioned
in ESEMs (HiVac, LoVac, and ESEM modes). When samples “treatment” may usually interfere with scientific judgments on

Table 2.  Common functional accessories for ESEM.

Accessory Function Applications Examples


EDS Analyze elemental composition for microstructures Qualitative/quantitative distribution of elements across [14–18]
isolated/“wet” surfaces for archaeology/geology/material
science
EBSD Characterize the crystallography Obtain quantitative crystallographic (grain size, domains [19–22]
orientation, etc.) and microstructural information
STEM Extract information on internal structure of samples by trans- Observation on nanoscale objects in complex environment [1,23–25]
mission imaging (liquid cells, etc.)
Gas supply system Provide low pressure gases in sample chamber (usually water Achieve specific experimental environment for [26–29]
vapor, also including H2, O2, CO2, N2, NH3, and so on) observations
Cooling stage Control the sample temperature around the ambient (usually Accurately cool samples for observing hydrated samples, [30–33]
from −25 to +55 °C) and performing in situ experiments at low temperature
Heating stage Control the sample temperature up to > 1000 °C In situ heating observations (metallic corrosion, ceramic [34–36]
crystallization, etc.)
Mechanical test system Apply static/dynamic compress/tensile stresses on samples Achieve in situ observations on samples during mechan- [37–40]
ical process
Homemade accessories Satisfy specific requirements for individual experiment Nanorobotic system, etc. [41,42]

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Figure 3.  ESEM images of biological materials under water vapor. a) The surface of a raw eggshell is composed of beads and pits on the intact cuticular
colloid layer. The inset is the CSEM image in which the cuticular colloid layer cannot be found. Reproduced with permission.[48] Copyright 2011, Springer
Nature. b) The structures of spider silk. 1,2) Structures of the dry spider silk. 1) Low-magnification image of periodic puffs and joints surrounding two
main-axis fibers. 2) Magnified image of puff composed of countless nanofibers. 3) Periodic spindle-knots structure linking with slender joints of spider
silk after wet-rebuilding. 4) Magnified image of random nanofibers on the spindle-knot. 5) Magnified image of aligned nanofibers on the joint region.
Reproduced with permission.[50] Copyright 2010, Springer Nature. c) A cell captured on the hierarchical nanowire structures with both horizontal and
vertical nanowire branches of ITO nanowire array. The structures make the substrate topographically match better with cell filopodia and provides
more binding sites for cell capture. Reproduced with permission.[56] Copyright 2016, American Chemical Society. d) ESEM cross-sectional image of
pork biceps femoris muscle of raw meat. Reproduced with permission.[71] Copyright 2012, Institute of Food Technologists.

surface features because the damage or cover of structural and intrinsic advantage of ESEM, direct characterization of bio-
chemical details may be likely generated on the native sample logical samples which usually contain something volatile (like
surface during manual handling. Moreover, longtime prepara- water), including organisms, microorganisms, and biomole­
tion from sampling to fixation, dehydration, drying, and metal cules, is allowed. The comparative study of ESEM and CSEM
coating can raise the risk of introducing various undesirable on biological samples suggested that, ESEM observations
artifacts. In addition, samples through coating treatments could can provide new information and data for understanding the
induce the loss of valuable compositional contrast and give only morphology and structure. For example, as shown in Figure 3a,
a morphologic contrast. Thanks to the development of ESEM, Zhou et al. used ESEM to observe the colloid membrane of raw
samples with no prior preparation could be directly imaged and eggshell and found that there are some roughness of beads and
analyzed in its environmental chamber with the existence of pits on the amorphous colloid layer, which cannot be observed
a certain atmosphere.[43] ESEM can be used to image samples under CSEM because the layer was destroyed during sam-
(damp, filthy, or greasy), and contaminations (from the sample) pling. Compared to CSEM image, the ESEM results, appar-
do not damage the instrument and do not reduce the quality ently, give more details of the raw eggshell.[48] Of course, other
of imaging. Insulators can also be well observed without any natural organism samples, from either plants or animals, are
coating layer. In this review, except for those observations in also very common in ESEM study, such as spider silks,[49,50]
HiVac,[44–47] we focus on observations of samples in the gaseous leaves,[51] insects/mites,[52] etc. Zheng et al. investigated the
modes (LoVac or ESEM). Note that in most ESEM experiments, relationship between the microstructures of spider silk and
water vapor is used as the background gas. its directional water-collecting ability from humid air. The
Up to now, there is no doubt that biological samples account structures of dry and wetted silk were observed by ESEM at
for a large proportion in the application of ESEM. Due to the an accelerating voltage of ≈4 kV. The structures of dry spider

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silk (Figure 3b-1,2) were composed of two main-axis fibers Also, Pollitt et al. observed the structure of the Staphylococcus
covered by joints and periodic puffs of countless highly hydro- aureus comets in ESEM considering that ESEM could enable
philic nanofibers. The spider silk showed a directional water- the observation of the comets structure to perform at a high
collecting ability when it was placed in humid environment. magnification and without disrupting the comet structure. So
The nanofibers could generate a unique fiber structure after that the ESEM data could be a convictive information to com-
wetting, and the process was called structural wet-rebuilding. plete their work with the light microscope.[61]
Under condensed water droplets, the puffs were made to For food systems, such as potato,[68] chocolate,[69] apple,[70]
shrink into periodic spindle-knots and joints (Figure 3b-3). and pork,[71] ESEM could also facilitate the microstructural
The periodic spindle-knots were made of random nanofibrils analysis, so as to contribute to the development of food science.
and separated by joints which were made of aligned nanofibers These samples have complex surface topologies as well as water
(Figure 3b-4,5). These ESEM results clarified the mechanism of inside, and ESEM observation is a convenient way to discover
directional water collection behavior of spider silk which relied their native structures. As shown in Figure 3d, this microscopic
on the changes of its microstructures.[50] Similarly, in order to technique has been successfully employed to characterize the
analyze the morphology of lotus leaf surface under different microstructures of pork muscle. In order to investigate the effect
humid conditions, Zheng et al. used ESEM to carry out the of high pressure and salt on pork meat quality, Duranton et al.
observation under both low and high relative humidity (RH). imaged the pork under at a low temperature (3.4–3.9 °C), with
The observation under low RH of ≈70% showed that the leaf 84% to 86% RH and a pressure of 650 to 680 Pa in the ESEM
surface is composed of numbers of papillae which were cov- chamber to prevent dehydration of the samples. The observa-
ered with countless nanohairs. The observation under high RH tions show that the negative effects of texture and water holding
(≈100%) revealed that some thin layers of liquid are on the tops capacity on pressure-treated/cooked pork were caused by the
of papillae and accompanied by liquid immerging in the inter- general shrinkage of the structure, and the addition of 1.5% salt
spaces among nanohairs, which indicated that wettability gra- could counteract these negative effects by inducing the break-
dient is formed along the exterior surface of papilla and the top down of structure.[71] The research shows that the integrity of the
might be a more wettable region.[51] muscle after treatment can be evaluated by ESEM which repre-
Besides, for investigation of microorganisms and biomacro- sents a new development in the field of meat quality assessment.
molecules, such as cells,[53–59] bacteria,[60–64] and proteins,[65–67] Furthermore, for deformable or “soft” particles, while the
it is more appropriate to image these samples with an ESEM samples must endure tedious preparation of drying, fixing, and
than a CSEM. In order to improve the imaging quality, these coating to maintain their “original” morphologies in CSEM obser-
samples sometimes are treated through a simple processing vations, it is very suitable for them to be observed under ESEM
before observation, e.g., fixing and drying, which is still sim- for imaging their “real” morphologies. Polymer particles, as the
pler than the preparation for CSEM. Zhang et al. discussed classic representative of these soft particles, can usually shrink
the effect of hierarchical structures of indium tin oxide (ITO) or swell in response to environmental conditions such as tem-
nanowire arrays on their cell-capturing ability using ESEM. perature, pH, salt concentration, light, solvent composition, etc.
To observe morphologies of cells captured on anti-EpCAM- Many studies related to polymers have been done with the help
coated different substrates, the cells were fixed with glutar- of ESEM.[72–78] Figure 4a shows the morphology of pH-sensitive
aldehyde (2.5% in phosphate-buffered saline) for more than water-soluble imprinted hydrogels under pH = 2.0, the hydrogel
4 h at room temperature after the cell-capture experiments. The is in a largely swollen state under acidic conditions as compared
substrates were immersed in a series of alcohol aqueous solu- with its relatively compact state. The particles containing water
tion with different volume fractions (0, 30%, 50%, 75%, 85%, were directly mounted without drying on metal stubs and meas-
95%, and 100%) in sequence before drying in carbon dioxide ured under a low vacuum (≈10-3 atm.) and relatively low tem-
under supercritical condition. Based on the ESEM observa- perature (near 4 °C in ESEM to obtain this snapshot.[77]
tions at low vacuum (93 Pa), they found that these arrays with Additionally, in archaeological research, high-resolu-
both horizontal and vertical nanowire branches, which could be tion images on morphologies of precious fossils should be
regarded as a new 3D fractal nanobiointerface, could enhance preferentially captured by ESEM, so as to prevent the native
the efficient capture of cancer cells, as shown in Figure 3c.[56] surface from damage by either the conductive coating or the

Figure 4.  ESEM images of material systems with nonconductive surfaces in water vapor. a) The morphology of pH-sensitive water-soluble imprinted
hydrogels under pH = 2.0. Reproduced with permission.[77] Copyright 2010, Wiley–VCH. b) Microstriations indicative of cutting with a stone tool
on fossil rib bone. The direction of the rib head is indicated by the black arrows. Reproduced with permission.[81] Copyright 2010, Springer Nature.
c) Microstructures of virgin bitumen. Reproduced with permission.[100] Copyright 2017, Taylor & Francis.

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high vacuum environment in CSEM. Moreover, in order to 3.2. In Situ Observations


obtain the elemental distribution on the natural (“real”) sur-
faces which have not been destroyed or covered by sample In recent years, in situ analysis has become an important
preparation, energy dispersive X-ray spectrometer (EDS) can research direction in the field of materials science, i.e., to observe
be also integrated in ESEM for those electrically insulated and record dynamic physicochemical processes of materials in
samples. However, the EDS analysis must be performed at the real-time, so as to reflect more “process” information rather than
lowest possible chamber pressure, considering the formation of traditional static observations either from “start point” or “end
the “skirt electrons” caused by the interaction between the elec- point.” The aim of in situ analysis is to clarify the mechanisms
tron beam and the chamber gas.[4] In this case, the information of interactions between materials and the environment that have
of shape/arrangement of microstructures and element distribu- not been clearly understood in the past. The in situ monitoring
tions on fossils can be extracted by ESEM so that to provide of dynamic processes, including in situ spectrum and in situ
paleogeographic environmental data of stratigraphic formation imaging, has gradually replaced the post-mortem analysis or
for determining geological age and stratigraphic correlation. static observation and been applied more and more widely.[101–103]
Many studies about fossils based on ESEM have hence made Of course, in situ studies in materials research based on ESEM
significant contributions to cultural heritage conservation.[79–83] were also remarkably expanded in the past few years.
For example, McPherron et al. observed the fossilized bones The main purpose of sample preparation in CSEM imaging
under ESEM and found unambiguous stone-tool cut marks for is to fix the sample to ensure that it does not change during
flesh removal and percussion marks for marrow access. This the vacuum process. In this regard, however, one of the con-
discovery of bones was the oldest direct evidence of stone tool sequences of those preparations is that it is almost impossible
manufacture. Figure 4b shows microstriations indicative of to perform any in situ observations under CSEM. Thanks to
cutting with a stone tool on the fossil surface in ESEM under the development of ESEM, the directly exposed sample sur-
water vapor.[81] Also, Rybczynski et al. performed the mineral face (without coating) makes it possible for various potential
analysis on the unprepared fossil camel bone using an ESEM applications of in situ observations on the interaction between
equipped with an energy dispersive spectrometer. The results the sample and various environments, especially in case of the
provide geochemical details of preservation by the analysis of availability of those functional accessories (see Table 2). Actu-
surface morphology and chemistry.[83] Similarly, ESEM provides ally, the chamber of ESEM armed with multifarious functional
a nondestructive examination of surface morphology observa- accessories can now be looked as an independent micro-
tion and compositional contrast on various other samples, such laboratory where the samples can be processed in precisely
as rocks and minerals,[84–87] skeletons,[88–90] teeth,[91–94] etc. controllable experimental conditions (including temperature,
One more thing, for building materials (such as cements gas environment, humidity, etc.) throughout the observations.
and bitumen), it is difficult to handle the bulk samples as they Consequently, in situ observations based on dedicated ESEMs
are always insulated and may contain volatile contaminants. have played an important role in revealing the relevant truths
As mentioned above, in ESEM, the SEs collide with the gas during dynamic physical–chemical processes in materials sci-
to produce a large number of positive ions and electrons, and ence, such as material growth, chemical reaction, phase trans-
the positive ions move on the sample surface and interact rap- formation, dissolution, crystallization, adsorption, humidifica-
idly with the accumulated electrons. Thus, the phenomena tion, dehydration, corrosion, etching, etc.
of charge and discharge can be eliminated in ESEM and Considering that the most significant part of ESEM is the
provide a chance for a direct observation on these materials chamber with a controllable gas environment, and the most
(cements[95–97] and bitumen[98–100]). Ye et al. characterized the common gas being used in ESEM experiment is water vapor,
morphological changes of the pore structures during cement the following discussions on in situ ESEM observations will be
hydration process which was comparable with the stimulation categorized into three sections, roughly according to whether
results. They concluded that both ESEM technique and ste- or how the water interacts with the samples during the whole
reology theory in the study of cement-based materials on the dynamic process.
relationship between the microstructure and their macroscopic
properties can contribute to the understanding and designing
cement materials with improved performance.[95] Also, 3.2.1. Phase Transitions of Water
Mikhailenko et al. studied the effects of oxidation, blending,
and freezing/heating on bitumen fibril structure. The obser- Water is considered as a good imaging gas in the ESEM with a
vation was carried out at accelerating voltage of 20 kV and a built-in water reservoir. Meanwhile, it is also the most common
chamber pressure of 0.8 mbar. Figure 4c shows the micro- and important substance in nature, which participates in every
structure of virgin bitumen, where the fibril diameter was aspect of people’s daily life. Moreover, because of its unique
relatively large at around 15–20 µm, and the structure itself thermal properties, a large number of ESEM studies focused on
was relatively loose and sparse. Then they compared the rela- the phase changes of water. Water normally has three phases of
tive density, organization, and fibril size of this sample with solid, liquid, and gas, and phase transitions could occur under
other structures after treatments and the results showed the certain conditions (temperature, pressure, etc.). Therefore,
potential use of ESEM for the observation of bitumen micro- dynamic processes related to the physical phase changes of
structure.[100] These ESEM studies advance the understanding water under various circumstances can be directly visualized
of the building materials and contribute to the development in under ESEM to provide detailed evidence to the mechanism of
practical applications. these phase transitions.

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Apparently, the configuration of ESEM makes it feasible to mineral dust) under ESEM to clarify the dominate reason in
design in situ experiments of phase transitions of water, in regulating the ice-nucleation properties on specific substrates.
case of the rational controlling over the chamber temperature The observation was conducted in an ESEM with a double-stage
and pressure. For example, the icing process of water and the Peltier element, with its low temperature limit down to 213 K.
melting process of ice, which can provide the fundamentals The results gave a direct experimental evidence to indicate that
for phase transitions of water, are frequently observed and the active sites for ice-nucleation on the surface of feldspar
examined by in situ ESEM experiments in terms of structural are the surface patches with (100) crystallographic orientation.
and morphological changes.[9,104–106] Kiselev et al. investigated These patches occurred exclusively at surface steps, cracks, and
the nucleation and growth of aligned ice crystals from water cavities, which are thought to be responsible for the prefer-
vapor on feldspar (an atmospherically important component of ential nucleation of ice. As shown in Figure  5, the ice crystal

Figure 5.  Dynamic ESEM observation of gas–solid phase transition of water at 251 K. a–e) An ice crystal nucleated on the patch with (100) orienta-
tion of feldspar. The patch was thought as an ice-nucleating active site which was on the inner wall of a cavity in the (010) face of the specimen. The
relative orientation of crystal planes is shown in yellow, with (010) facing up. f) Schematic drawing of ice crystals nucleating from their (0110) planes
on the steps with (100) orientation [red filled surface and the hidden face of the step on the (010) face of feldspar; the relative position of ice crystals
to each other and with respect to crystal faces of feldspar specimen corresponds to the case shown in (e)]. Reproduced with permission.[9] Copyright
2017, American Association for the Advancement of Science (AAAS).

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nucleated with its primary prism plane (1010) on the (100)


crystallographic plane of feldspar, and the ice always seemed
to grow at defect sites (as ice-nucleation active sites) where
(100) patches may be exposed.[9] This research shows that the
strict experimental conditions of water vapor pressure and tem-
perature could be readily controlled in ESEM to provide direct
and visual investigations on the reaction process, particularly
in those studies related to phase transitions of water on the
fundamental issues of atmospheric and environmental sci-
ence. Recently, Zhang et al. also recorded the process of direct
ice formation from a supersaturated water vapor environment
under ESEM.[106] They revealed a step-by-step growth pathway
of hexagonal ice crystals (with the steps coming from screw dis-
locations and initial steps), and demonstrated the quantitative
relationship between the edge-length (of hexagonal ice crystals)
and the growth time. On the other hand, dynamic observations
on ice melting process can also be performed with the help of
ESEM. Yang et al. obtained the first series of in situ dynamic
micrographs during evaporation of frost flowers with the exist-
ence of NaCl in both temporal and spatial dimensions. The
chamber temperature ranged from −5 to −18 °C and the pres-
sure was controlled above 500 Pa. Here, the major heat source
for ice melting was the energy from the scanned electrons.
Their results well explained several previous observations: the
frost flowers were not a direct source of sea-salt aerosols and
the saline ice crystals under evaporation could accelerate the
heterogenous reactions of bromine liberation.[104] With the help
of ESEM, these fundamental studies exhibit potential signifi-
cance in a variety of application scenarios, including the prepa-
ration of advanced materials (e.g., anti-icing materials[107]), the
solutions for practical problems (e.g., elimination of freezing-
induced disasters[108]), and a thorough understanding of atmos-
pheric science.[109]
On the other side, the gas–liquid phase transition of water,
namely, condensation and evaporation, can also be realized
and observed in situ in ESEM. Interestingly, this transition
was always characterized to reveal the properties of other mate-
rials. For instance, wettability, which is a common liquid–solid
interaction, is related to microstructural features of materials
surfaces. Therefore, many work based on ESEM have demo­
nstrated the relationships between surface microstructures
and wettability by observing the evolution of water droplets
on the material surface during condensation, aiming to obtain
a comprehensive evaluation of surface wetting of the mate-
rial rather than traditional contact angle measurement.[110–116]
For example, Cheng et al. reported an in situ observation of
water condensation and evaporation on lotus leaf surfaces to
reveal the evolution of contact angle and droplet size during
the process.[112] Moreover, such in situ observations can show
a further real-time kinetic information of the wetting pro- Figure 6.  In situ observation of gas–liquid phase transition of water at
a water vapor pressure P  = 1200 ± 12 Pa and substrate temperature
cesses. Miljkovic et al. investigated in situ water condensation
TS  = 9 ± 1.5 °C. a–h) Time lapse images of both partially wetted (PW)
on superhydrophobic nanostructured surfaces using ESEM. and suspended (S) droplets during water condensation which show the
Droplet growth on the surfaces was characterized at a water difference in growth behaviors including droplet morphology and growth
vapor pressure P  = 1200 ± 12 Pa and substrate temperature rate. Droplets A, B, C, and D are in the PW state, whereas E and F are in
TS  = 9 ± 1.5 °C with backscattered detection mode. As shown the S state. The scale bar in (h) also applies to (a–g). Reproduced with
in Figure 6, they observed the changes of morphologies of dif- permission.[114] Copyright 2012, American Chemical Society.
ferent condensed droplets, including suspended droplets on top
of the nanostructures and partially wetted droplets on the base than that of suspended ones. Based on the ESEM observations,
of the nanostructures. Consequently, they found initial droplet the growth dynamics of droplets were discussed and a droplet
growth rates of partially wetted droplets were six times larger growth model was developed to explain the experimental

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Figure 7.  ESEM observation on nucleation of dew on a moss awn surface at 4 °C. Time and pressure are increased from (a) to (f). a–c) The pressure in
chamber increases from 706.6 to 879.9 Pa and the water vapor pressure of water is 813.5 Pa at this temperature. The nanogrooves (purple arrowheads)
are initially filled by nucleated water. d–f) The vapor pressure is slowly increased, and the developing thin water film covers the nanogrooves (purple
arrowheads) and fills the microgrooves (yellow arrowheads) of the awn. The scale bar in (a) also applies to (b–f). Reproduced with permission.[118]
Copyright 2016, Springer Nature.

observations.[114] Recently, Zhang et al. demonstrated in situ levels of RH. Figure  7 shows their observation of nucleation
ESEM observation, as a straightforward pathway, to under- process with respect to the increasing vapor pressure and time
stand the wetting behavior on adaxial and abaxial surfaces of a in ESEM. First, water molecules were condensed on the nano-
bamboo leaf. They microscopically and quantitatively identified grooves within a microgroove or a shallow cavity on the leaf sur-
the surface-structure-dependent water droplet growth dynamics face (Figure 7c). After a period, more water was appeared in the
of the bio-related materials and provided the evidence that the nanogrooves and eventually filled the microgrooves (Figure 7d–
ESEM observation is a convenient and efficient tool for quanti- f). Moreover, based on further ESEM observations, they also
tative and qualitative study of this phase transition.[117] revealed the mechanisms of water collection from limited water
It must be mentioned that, specific surfaces/structures/ sources and transportation on the mosses, and presented the
materials, which are designed for collecting water from air, physics-based evidence of how bryophytes adapt to scarce water
could be easily characterized on in situ ESEM observations. For environments by efficiently using their small structures.[118]
example, plants grown in desert usually have unique leaf struc- Besides, morphological or structural changes of materials
tures, which are adapted to collecting water by promoting water caused by gas–liquid transition of water can also be character-
droplet nucleation from humid air. Pan et al. investigated the ized using in situ ESEM observations. The volume of hygro-
leaves of desert mosses, which are featured with ample awns scopic materials, especially cellular materials, usually swell
and can collect water rapidly in humid environment (such as after absorbing water. The structural changes of these samples
dew, fog, mist, and rain). Nucleation of dew on the surface of against the changes of humidity or processes of water conden-
a moss awn at 4 °C was observed by ESEM, while the pres- sation/evaporation can, of course, be studied by in situ obser-
sure in ESEM chamber was controlled to simulate the different vations in the ESEM chamber.[119–124] Ha et al. investigated the

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Figure 8.  ESEM observations of morphological changes on the mate- Figure 9.  ESEM observation of micro-transportation behavior based on
rials during the water condensation. a) Merging of micropores due the gas–liquid phase transition of water. a) Condensation of water at
to hygroscopic expansion of the cellulose sheet. The pores start to the closed end of the tube with two bubbles trapped inside the liquid.
grow when the RH exceeds 90%, and they coalesce with their neigh- b–f) Dynamic behavior of a water plug close to the open end of the tube.
bors. The scale bar in (1) also applies to (2) and (3). Reproduced with The meniscus shape changes when, at a constant stage temperature, the
permission.[123] Copyright 2018, AAAS. b) A film at different humidity vapor pressure of water in the chamber is changed: b) 5.5 Torr, c) 5.8 Torr,
levels. 1) The initial film thickness of 2.9 µm at 0% and 10% RH and d) 6.0 Torr, e) 5.8 Torr, and f) 5.7 Torr, where the meniscus returns to
2) the film thickness of 18.6 µm at 100% RH. The scale bar in (1) the shape seen in (b). The shapes of the meniscus are asymmetrical,
also applies to (2). Reproduced with permission.[120] Copyright 2007, especially the complex shape of the meniscus on the right side in
Springer Nature. (b) and (f). Reproduced with permission.[125] Copyright 2004, American
Chemical Society.
evolution of microscale wall pores in hygroscopically responsive
multiscale porous materials during the wetting process by in water/humidity-sensitive materials and will make further con-
situ observation under ESEM. As shown in Figure 8a, when the tributions to biological and medical fields.
RH was increased by suppling water vapor to the chamber at In addition, water micro-transportation, which is very impor-
2 °C, the sponge underwent drastic shape changed by absorbing tant in the development of nanofluidic devices, can also be
water molecules as the environmental humidity reached approx- well defined using in situ observations on gas–liquid transi-
imately 90%. They found that the deformation underwent two tion. Rossi et al. investigated the condensation, evaporation,
steps, which were the growth of pore size and the coalescence and transportation process of water inside carbon nanotubes
of the expanded pores. On the contrary, the deformation of (CNTs) by in situ fluidic experiment in ESEM. They observed
sponge was insignificant when RH was below 90%, indicating complex meniscus shapes and slow liquid dynamics caused by
that water molecules hardly infiltrated into the sponge until the water confinement and strong interaction with the hydrophilic
vapor pressure reaches a critical value.[123] Similarly, Kang et al. tube walls. Due to the heating effect of electron beam on the
directly imaged the swelling of a film by ESEM to study the liquid inclusions, complex interfaces form between the liquid
effect of humidity on swelling behavior. Figure 8b shows such and the gas inside the nanotube, which move under the action
a swelling of the film. The thickness of film increased from an of bubbles formed in the bulk liquid (Figure  9a). Figure 9b–f
initial value of 2.9 to 18.6 µm as the RH increased form 0% shows the dynamic behavior in meniscus (shape and size) of
to 100%.[120] Hiranuma et al. also determined the hygroscopic water plug in response to varied pressures at a constant tem-
properties of agricultural aerosols in ESEM, which was used to perature of 4 °C. The contact angle (formed between water and
acquire not only a qualitative description of the shape and mor- the CNT) was approximately 5°–20° (Figure 9b). The shape of
phology but also the detailed images of samples as a function menisci within the CNT behaved asymmetric on both sides,
of RH. They found that most of the agricultural particles did especially for the complex shape of the meniscus on the right
not take up significant amounts of water when exposed up to side in Figure 9b,f (which was caused by different vapor pres-
96% RH.[121] These observations demonstrated that ESEM is a sures on different sides of water plug, resulting from the closed
simple yet powerful tool to characterize the material response to right end of the tube and presence of liquid at the tube tip in
water or other liquids. It has a wide significance in the study of contrast with the open left end of the tube (Figure 9a)).[125] This

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work demonstrates that ESEM has a potential application for in


situ fluidic experiments at the nanoscale, by using the ability
to see through the nanotube walls, and to study the liquid flow,
condensation, and evaporation inside these nanotubes.

3.2.2. Material Changes with the Participations of Water

As reviewed above, water itself is so important in materials sci-


ence and engineering that its three-phase transitions have been
frequently highlighted in literatures. However, in many circum-
stances water can also influence, or even participate in physico-
chemical processes of other materials, causing notable changes
in morphology, structure, or property of these materials. Plenty
of examples can be found across the fields of biology, materials
science, and chemical industry. Therefore, by adopting similar
experimental protocols to those in the above part, people can
also design and conduct in situ ESEM experiments concerning
dynamic processes of advanced materials (even micro- or nano-
materials), especially in the cases that water can exist in the
environment (act as both imaging gas and reactant in these
processes). Actually, a large number of achievements have been
done using ESEM as a tool to observe relevant processes of
materials changes with the participation of water, and we will
summarize them in this section.
First of all, many chemical reactions induced by water
molecules, and the corresponding changes in microstructures
of materials have been investigated by in situ ESEM, which
mainly include metal corrosion,[126–129] hydration process of
building materials (cement),[130,131] and decomposition/deli-
quescence/degradation of materials.[132–136] For example, Chen
et al. performed in situ ESEM observation aiming to charac-
terize the process of hydrogen generation around micro-drop-
lets on as-cast AZ91 magnesium alloy in an atmosphere of
water vapor.[128] Jonsson et al. investigated the oxidation of iron
Figure 10.  Applications of ESEM in imaging material chemical changes
under three O2/H2O mixtures (water vapor, wet air, and dry air)
with the participations of water. a) Plan-view images of iron surface upon
at 500 °C using ESEM in secondary electron mode to under- exposing to water vapor. The experiment was carried out at 500 °C in low
stand the effect of water on the oxidation. Figure 10a shows the vacuum level (2.5 Torr). (1) and (2) show the surface morphology after
development of surface morphology of iron in water vapor after 17 and 24 min exposure, respectively. The black dotted line represents the
17 and 24 min. It can be seen that both thin and thick oxide boundary between the two regions with different thickness. Reproduced
regions are created. The thin oxide region has much smoother with permission.[126] Copyright 2009, Elsevier. b) In situ monitoring of
the hydration process of K-PS geopolymer cement with ESEM, (1) and
surface with less faceted oxide grains (Figure 10a-1), and more
(2) show microstructures after 30 min and 1.5 h of hydration, respectively.
faceted oxide grains can be seen after longer time exposure Reproduced with permission.[130] Copyright 2004, Elsevier. c) Dissolution
(Figure 10a-2). In combination with further in situ observa- and melting of the chrysotile fibers in the presence of low melting glass
tions under dry and wet air, different oxide growth modes were with water vapor as the chamber gas (2.5–3.6 Torr), recorded at a tem-
observed under different water contents.[126] In addition, Rossil perature of 1) 155 °C, 2) 630 °C, 3) 691 °C, and 4) 750 °C. Reproduced
et al. monitored the initial stages of the corrosion process (pro- with permission.[133] Copyright 2008, Elsevier.
moted by sodium chloride solution) occurred on zinc and mag-
nesium surfaces using ESEM. The water vapor pressure was paste from 10 min to 4 h after mixing have been recorded during
changed in ESEM chamber (and consequently, the RH was also the experiment. Figure 10b shows the detailed information in
changed), so as to obtain direct information of corrosion pro- this process. In the hydration, sponge-like amorphous gels were
cesses. By further conduction of ESEM experiments under the gradually generated and filled the voids among the metakaolin
humidostatic chamber, the authors demonstrated that in situ particles, and hence the microstructure of K-PS geopolymer
ESEM technology could indeed simulate the corrosion behav- cement paste became more and more compacted.[130] Simi-
iors (as that occurs in traditional accelerated tests).[129] larly, Zhang et al. observed the paste microstructure at different
Sun et al. carried out another in situ study on the hydration hydration periods in ESEM to explain the modification mecha-
process of K-PS geopolymer cement under 4.2 Torr, 80% RH nism of epoxy resin on cement-based materials.[131]
environment in ESEM with an accelerating voltage of 20 kV. The The hydration capabilities of the ESEM can also contribute
morphological changes of the fixed location in K-PS geopolymer to the study of the mechanism of discoloring interactions

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between paint pigments. White et al. investigated the interac-


tion (between cadmium yellow and malachite pigments) in
aqueous media and the in situ imaging showed the growth of
the discoloration along the interface.[132] What is more, in situ
ESEM analysis has also been a powerful tool in studying the
dehydroxylation of chrysotile present in cement-asbestos and
the subsequent recrystallization into nonhazardous minerals.
Gualtieri et al. studied the effect of gas type (He and water
vapor) on the kinetics of thermal transformation of chrysotile
fibers using an ESEM equipped with a 1500 °C hot stage. The
experiments were carried out at 20 kV acceleration voltage and Figure 11.  Applications of ESEM in slimming process on the nanostruc­
a working distance of about 20 mm. The comparative obser- tures by using H2O precursor under the electron beam irradiation.
vations under different atmospheres were performed in He a) Carbonaceous nanowires fabricated by EBID on a bulk SiO2 substrate.
pressure (1.9−3.5 Torr) at 25–1150 °C and water vapor pres- 1,2) Two frames of a H2O etch process used to slim the wire in (1) (depo-
sition, t  = 60 s, I0  = 400 pA; etch, P  = 81 Pa, V0  = 15 kV, I0  = 77 pA,
sure (2.5−3.4 Torr) at 25–1300 °C, respectively. The secondary
tD = 6 µm pixel−1). 3–5) Similar nanowires slimmed to produce diameters
electron images provided a direct evidence of the negative effect in the range of 13–17 nm. b) A carbonaceous film and a nanowire fabricated
of water vapor on the dehydroxylation of chrysotile. Moreover, by EBID on a SiO2 substrate. 1–3) Pits pre-etched into the carbonaceous
the decomposition of cement-asbestos with the addition of a film using 1,2) a scanned and 3) a stationary electron beam. Reproduced
low melting glass was further investigated by in situ observa- with permission.[11] Copyright 2007, American Chemical Society.
tion at relatively low temperature (600−750  °C). As shown in
Figure 10c, the images demonstrated the use of a low melting amount (≈8 Pa) of H2O vapor. Two types of samples (pristine
glass may greatly decrease the melting temperature of chryso- BP and ionic liquid-treated BP flakes including [BMIM][PF6]-
tile as a result of rapid decomposition inside the glassy phase treated BP and [BMIM][BF4]-treated BP flakes) on the SiO2/Si
induced by unstable contact of the asbestos fibers with B- and substrate were imaged using an electron beam of 20 kV and
Si-rich forming glass.[133] 1.35 nA, with a scan rate of 3.36 ms per line and 1452 lines
It should be noted that, the incident electron beam and water per frame. The background mechanism of this process is, obvi-
gas in the ESEM chamber have chances to promote interesting ously, a typical chemical etching of BP flakes, resulting from
changes of samples, especially during the investigations on the highly reactive radicals which were generated by elec-
sensitive nanomaterials and 2D materials. Toth et al. realized tron irradiation under the imaging conditions (these radicals
the fabrication of functional nanostructures and slimming pro- can certainly give rise to oxidation in the vicinity of the elec-
cess by electron beam-induced deposition (EBID) and etching tron beam). As shown in Figure  12, the radicals gave rise to
(EBIE) in ESEM, respectively. By overcoming the charging and the rapid degradation of pristine BP within 15 min, while the
delocalized deposition issues in CSEM (or focused ion beam, [BMIM][PF6]-treated BP and [BMIM][BF4]-treated BP flakes
etc.), high-resolution nanostructures were produced. First, car- can withstand up to 120 and 180 min, respectively. The images
bonaceous structures deposited on bulk SiO2 was constructed indicated that the ionic liquid (IL)-treated samples are much
by EBID using a mixture of styrene and N2. Then, slimming more robust and hence can withstand more aggressive elec-
of the EBID structures can be done by EBIE using H2O pre- tron exposures. This in situ ESEM study demonstrates that the
cursor. During EBIE process, the working pressure (P), acceler- reactive oxygen species play a dominant role in BP degradation,
ating voltage (V0), current (I0), and dwell time (tD) were in the and ionic liquid treatment can effectively improve the stability
range of 60–81 Pa, 10–30 kV, 77–446 pA, and 3–6 µm pixel−1, and prevent the photooxidative degradation of BP flakes under
respectively. As shown in Figure  11, there are two types of ambient conditions.[137]
etching methods regarding the different EBID structures. For
the EBID nanowires, Figure 11a shows the slimming process
of them where the decrease in nanowire width is largely driven 3.2.3. Other Dynamic Processes
by secondary electrons emitted from the wire sidewalls during
imaging. For EBID film, Figure 11b shows an alternative slim- Except for the above in situ observations concerning the changes
ming process. The structures can be controlled by pre-etching of water itself or the interactions between water and samples,
pits into deposits by growth of these pits in a H2O environ- there are still many other dynamic processes that have been per-
ment due to EBIE driven by electrons emitted from the pit formed and analyzed by in situ ESEM technique. As discussed
sidewalls.[11] The process of sequential EBID–EBIE nanofabri- above, ESEM can be equipped with a wide range of accesso-
cation methodology based on the ESEM provides an inspiring ries, such as cooling, heating, stretching, gas supplying as well
insight of decreasing the minimum dimensions of structures as homemade systems. Two or more accessories may work
or removal of thin films produced unintentionally during EBID. together for complex experiments. Thus, the functions of ESEM
Additionally, it is also very practical to study the degradation can be further extended, which is extremely suitable for in situ
behavior of 2D materials in ESEM (using simulated environ- experiments. Therefore, controllable environmental parameters,
ment), as these materials are usually sensitive to the environ- including different gases, pressure, temperature, and humidity
ment (water, temperature, oxygen, etc.). Walia et al. used ESEM can be readily tuned to match other in situ experimental con-
to monitor the degradation rate of few-layered black phos- ditions (such as force or electrical field, etc.), enabling direct
phorous (BP) in real time while they were exposed to a small visual analysis on very complex dynamic processes, which is an

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Figure 12.  In situ ESEM study on ambient degradation of few-layered BP at a low water vapor under electron beam irradiation. Sequential images of
BP flakes when they are exposed to a small amount (≈8 Pa) of H2O vapor: a) Pristine BP, b) [BMIM][PF6]-treated BP, and c) [BMIM][BF4]-treated BP
flakes. The observation was made in ESEM with a 20 kV, 1.35 nA electron beam. Reproduced with permission.[137] Copyright 2017, Wiley–VCH.

undisputed advantage for ESEM (rather than CSEM et al.). In As shown in Figure 13, a Li2O2 particle was formed at the CNT-
recent years, more and more in situ ESEM observations have solid-state electrolyte-oxygen three-phase interface (TPI) and
been highlighted across the literatures of materials science, grew up to 1.5 µm after 3000 s during the discharge process
including physical changes and chemical reactions, as well as the (Figure 13a). Then the decomposition of Li2O2 particle initiated
interactions between materials and environment. Some repre- from its surface at the charge cycle with a constant potential of
sentative examples will be sequentially reviewed in this section. 8 V (on SACNT vs Li) (Figure 13b), because the electronic and
First, for chemical reactions or dynamic processes which are ionic conductivities of surface were much higher than those in
sensitive to ambient air (or require strict control over the envi- the bulk and the oxygen release caused by Li2O2 decomposi-
ronment), it is extremely difficult to perform comprehensive tion was also much easier on the surface. The results showed
studies concerning the segmented mechanisms during reac- detailed morphological evolution of Li2O2 products during the
tion/process using post-mortem characterizations. Instead, in charge/discharge process of the all-solid-state Li-O2 battery,
situ ESEM observations have an ability to follow the growth, which shed light on the understanding of battery reactions at
morphological change, evolution, and disappearance of mate- the microscale. This experimental design may find its applica-
rials during reactions/processes. A typical example of these tion in revealing similar processes.[138]
processes is the cell reaction.[138,139] In an attempt to elucidate Second, in recent years, there are also increasing interest
the detailed dynamic process of electrochemical reaction in the in the fabrication of low-dimensional materials using high-
all-solid-state Li-O2 battery, which was regarded as the potential resolution ESEM, considering that low-dimensional materials
candidate to meet the ever-increasing demand for high-energy have received extensive attention in many fields due to their
storage in electric vehicles, Zheng et al. realized the direct visu- unique structural and electronic properties, such as graphene
alization of discharge and charge processes of a microscale all- flakes,[28,29] nanowires,[10,26,140] etc. For example, aiming at the
solid-state lithium-oxygen battery with an ESEM equipped with exploration of interlayer coupling and the illustration of stacking
a nanoprobe system. The battery was composed of Li metal sequence of few-layer graphene (FLG), Wang et al. took in situ
(anode), a native oxide layer Li2O (solid state electrolyte), and imaging on isothermal growth and etching experiments of FLG
super aligned CNTs (SACNTs, cathode). They first observed the under ESEM. After isothermal chemical vapor deposition (CVD)
discharge process of a Li-O2 battery under a constant potential using C2H4 performed in ESEM chamber, graphene layers were
of −3 V (on SACNT vs Li) with an O2 partial pressure of 200 Pa grown on polycrystalline Pt foils. Then, in situ monitoring of
and imaged the growth and morphological changes of dis- etching on FLG at 900 °C in an atmosphere of 25 Pa hydrogen
charge product (Li2O2). Moreover, an electrochemical cycle was gas was performed by characterizing the shape and size evo-
conducted to follow the formation and decomposition of Li2O2. lution of graphene layers. As shown in Figure  14, shrinking

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Figure 14. In situ observation on shape evolution of graphene layers


during H2 etching at 900 °C in an atmosphere of 25 Pa hydrogen.
a–d) Time-lapse image series show the etching of single-layer graphene
(SLG) and the topmost layers in bi-layer graphene (BLG) and tri-layer gra-
Figure 13.  In situ ESEM observation toward the formation and decom- phene (TLG). The green arrows indicate the up-step and down-step direc-
position of Li2O2 in an all-solid-state Li-O2 battery during an electro- tions of Pt terraces. The scale bar in (a) also applies to (b–d). Reproduced
chemical cycle. a) During discharging, the spherical particle grows up at with permission.[28] Copyright 2016, Springer Nature.
a CNT-solid-state electrolyte-oxygen TPI which is indicated by the yellow
arrows. b) The decomposition of the same particle initiates locally at the
surface and proceeds into the bulk upon charging process. Red arrows weaker than the coupling strength between first layer and the
indicate the position where the particle decomposes. Reproduced with Pt substrate, according to the comparison of etching rates. This
permission.[138] Copyright 2014, American Chemical Society. in situ ESEM study gave a promising insight to guide the con-
trolled production of FLG with defined number of layers.[28]
behavior took place simultaneously at the periphery of each indi- Similarly, Huang et al. performed an in situ heating experiment
vidual layer during hydrogen etching, and diffusion of etching in ESEM equipped with a home-made laser heating stage and a
products from graphene edges in each layer to the surrounding gas supply unit to directly monitor the growth dynamics of CdS
atmosphere was not hindered by the other layers. This behavior nanowire arrays. Under 700 °C, using a flow of H2/Ar (5%:95%)
indicated that new layers grow on the topmost layer, and the gas mixture at a chamber pressure of 60 Pa, at an acceleration
isothermal CVD growth of FLG on Pt substrates followed the voltage of 12.5 kV, they captured the secondary electron images
wedding cake type stacking. Moreover, the dynamic data of time- of the formation of nanowire arrays during in situ observa-
depended perimeters of each individual layer were given by the tion. The results revealed the morphological evolution of the
in situ observation, which indicated that the interlayer coupling CdS from the particle shape to the nanowire array architecture.
strength between the second and third layers was significantly The in situ observation clearly demonstrated that the nanowire

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Figure 15.  Reaction between Na3RuO4 and SBN glass occurred during in
situ heat treatment in ESEM. The reaction started at 520 °C and a) was
recorded at T = 400 °C (no reaction). The arrow in (b) shows the interme-
diate phase formed at 660 °C. Incorporation of the Na3RuO4 crystals in
the SBN melt at c) 733 °C and d) 746 °C. Reproduced with permission.[144]
Copyright 2012, American Chemical Society.

arrays formed through a selective vaporization process of the


bulk crystals, which validated the formation mechanism of the
nanowire arrays. [10]
Third, for crystallization/sintering processes occurred
at either high or low temperature (relative to room temperature,
≈25 °C), the corresponding morphological evolution and growth
mechanism can, of course, be monitored under ESEM by using
different temperature-controlling stages. For example, the evo-
lution of morphology and size distribution of reaction products
during crystallization or sintering of glass/ceramic materials can
be imaged by ESEM at high temperature.[141–144] Boucetta et al.
observed the changes in morphology and composition of the Figure 16. ESEM observation toward crystallization over a period of
≈15 min for regenerated fresh microspines with an ACC sheath. The
ruthenium compounds formed during an in situ heat treatment spine was observed under a humid atmosphere (pH2O = 6.6 Torr, 5 °C),
in ESEM operated at 30 kV. Figure  15 shows a direct incorpo- and the electron beam (10 kV) provides the energy required to induce
ration of ruthenates in a glass frit. There was no obvious reac- crystallization. a) Microspine at the beginning of the observation. b–h)
tion until the temperature reached 520 °C (Figure 15a) while Pictures taken in succession every 2–5 min at the same magnifica-
an intermediate phase began to form at the Na3RuO4−SBN tion. Between (b) and (c) and between (g) and (h), the viewing frame
(SiO2−B2O3−Na2O) glass interface induced by the initial reaction was moved along the axis of the microspine to compare the condi-
tion of a nonirradiated region of the microspine relative to the irradi-
between Na3RuO4 crystals and the glass at 520 °C (Figure 15b).
ated region. Lines in (c) and (h) show the boundaries of the previous
With increasing temperature, the reaction became faster and frames. Arrows in (d) show the growing crystal faces. The scale bar in
local melting of SBN glass frit took place at temperatures higher (a) also applies to (b–h). Reproduced with permission.[145] Copyright
than 670 °C (Figure 15c). Finally, at about 750 °C, the Na3RuO4 2004, AAAS.
crystals clearly started to dissolve in the melt (Figure 15d).[144]
On the other hand, local crystallizations at relatively low goes on. The crystallization of the amorphous sheath and the
temperature have also attracted considerable attentions. For tip of microspines into calcite was directly captured by in situ
example, an interesting phenomenon on large single crystals observation with an ESEM in a wet atmosphere (water vapor
of calcite with smooth convoluted fenestrated morphologies pressure of 6.6 Torr) at 5 °C. In this experiment, the electron
was shown in the skeletons of adult echinoderms. In order to beam provided the energy required to initiate crystallization. As
explain this phenomenon, Politi et al. focused on a sample sea shown in Figure  16, at initial stage, the tip of the microspine
urchin (one of the echinoderms) which is able to regenerate underwent a reduction in volume (Figure 16a; compared with
broken spines by transforming a thin covering layer of amor- Figure 16b,c). Then, a single crystal gradually formed as thin
phous calcium carbonate (ACC) into crystalline calcite as time plates with well-defined edges (Figure 16d,e). Later, the crystal

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Figure 17.  In situ tensile fracture process of an as-deposited LDMD Ti-6Al-4 V specimen at 650 °C for the displacements of: a) 900 µm, b) 1150 µm,
and c) 1204 µm for fracture. The loading direction was horizontal. Reproduced with permission.[148] Copyright 2019, Elsevier.

grew at the expense of amorphous material that was consumed diffraction (EBSD) in ESEM. For instance, Reichmann et al.
in the electron-irradiated region (Figure 16f,g), whereas the performed in situ compression test on ferroelectric BaTiO3
nonirradiated region remained unchanged (Figure 16c,h). The material, and EBSD measurements were performed before
results showed that the sea urchin spine regenerated through and after the experiments to determine the misorientation
the initial deposition of ACC and indicated that single crystals between two neighboring domains.[20] These mechanical tests,
with complex morphology could be produced by the deposition apparently, can be further extended by combining other envi-
of transient amorphous phases which may promote the devel- ronmental controlling systems in the chamber of ESEM and
opment of sophisticated materials.[145] therefore, extracting more fascinating mechanical properties
Finally, specific accessories, such as various mechanical test for metal/ceramic/glass/organic materials as well as emerging
systems, can be equipped on the ESEM to achieve the obser- nano and 2D materials.
vations of deformation behavior of samples under the action
of elongation or compression. For example, Bos and Donald
investigated the compressive behavior of elementary flax 4. Summary and Prospect
fibers under a modified loop test with ESEM. They showed
that the flax fibers presented very different deformation As we reviewed above, in situ/ex situ ESEM studies on mate-
behaviors due to the difference in chemical composition and rials and physicochemical processes of materials have indeed
morphology, and the lateral strength of the fibers was lower made significant contributions to the understanding of funda-
than its tensile strength,[146] Similarly, Wang et al. studied the mental science and mechanisms by providing direct, visual,
effect of microstructure and corrosion on the fracture behavior and dynamic evidences. Yet, we have to point out that there
of Sn-3.0Ag-0.5Cu solder alloys using a three-point bending are still several urgent challenges awaiting to be resolved in the
test in ESEM.[38] Besides, Koester et al. performed an in situ development of the microscope/microscopy, including achieve-
measurement in ESEM to identify the mechanism of propa- ment of a better resolution, minimizing beam-induced damage
gation of physiologically pertinent short (< 600 µm) cracks in during observation, and more hardware designs on in situ
both the transverse and longitudinal orientations in cortical experiments for widening the applications of ESEM, etc.
bone. The in situ test of samples soaked in Hanks’ balanced First, ESEM is regarded as one of the best solutions for
salt solution was carried out at 25 °C using a Gatan Microtest imaging insulated and hydrated samples, even under different
2 kN three-point bending stage. The instrument was operating harsh conditions (including water and oil). It is quite feasible
in backscattering mode at 15 kV and a pressure of 35 Pa to to obtain true and noninvasive images concerning the micro-
monitor the crack path. The results revealed the crack initia- morphological, structural, and compositional characteristics
tion and growth behavior and the development of the extrinsic of materials in their native states, because ESEM has a spe-
toughening mechanisms in cortical bone.[147] Additionally, to cial capability to allow gases to be existed in the chamber, and
reveal the deformation mechanisms of laser direct melting opens up a new field of application in observations of noncon-
deposited (LDMD) Ti-6Al-4 V alloys (which are mainly used ductive samples without complex preparation that were previ-
in aerospace fields), Wang et al. used an in situ tensile test ously impossible in CSEM. However, the chamber gas is also
based on ESEM to identify the initiation of cracks and pro­ a double-edged sword in ESEM in consideration of its negative
pagation mode of slip bands. They compared the microstruc- effects as a result of compensating the charges induced by the
tural evolution during the fracture process at 23 and 650 °C. environmental gas. The most common problem is that, the
Figure  17 shows the in situ macroscopic deformation at high ambient pressure in the chamber intensifies the scattering
650  °C. When the displacement was increased from 900 µm of electrons by gas, which then increases the astigmatism of
(Figure 17a) to 1150 µm (Figure 17b), the specimen showed the image and reduces the contrast and signal-to-noise ratio.
uniform deformation and smooth necking; while, as the elon- For in situ observations, the presence of gas in the chamber
gation attained 1204 µm (Figure 17c), the sample fractured. can severely degrade the image resolution and contrast, and it
The results showed that the grain structure was greatly elon- is a challenge to perform a high-resolution and high-sensitivity
gated with good plastic flow behavior over long stretching imaging during dynamic interactions at high-pressure condi-
distance, and the elongation of the alloy was higher at 650 °C tion. The resolution of CSEM can reach sub-nanometer scale
than at 23 °C.[148] Moreover, such in situ mechanical experi- in the latest models, while the resolution of ESEM remains at
ments can be combined with the characterization of crystal- 1–3 nm by far. Considering this factor, in practical scenes for
lographic orientation information with electron backscatter ESEM, the pressure is usually kept below 1000 Pa to obtain a

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good spatial resolution and image contrast.[7] In this regard, decrease the electron beam losses and hence improve the image
significant improvement in resolution under environmental quality.[156] On the other hand, more functional accessories could
gas pressure is urgently needed in the future development also be developed to solve complex physical/chemical processes
of ESEM. Fortunately, pioneer contributions have been done which is useful in modern materials science (e.g., the electric/
by using state-of-the-art software technologies. For example, magnetic field assisted sintering process[157]) In addition, a wise
Zhang et al. presented an ESEM technique for enhanced reso- combination of three working modes (HiVac, LoVac, and ESEM)
lution using phase reconstruction to improve the image quality may create extra possibilities in realizing novel experimental
with the operation pressure ranging from 1000 to 2500 Pa in techniques through rational design. Wan et al. have adopted
dynamic processes during the water droplet condensation. This an innovative method to directly observe the effect of hydrogen
work suggested a practical method to achieve high-resolution (H) on fatigue crack growth behavior of pre-cracked single-edge
observation at high pressure without changes on the hardware, notched tensile (SENT) specimen.[158] They performed in situ
and is expected to expand the application of ESEM in static and H-plasma charging on the SENT in the low vacuum environ-
dynamic processes.[149] However, we are also looking forward ment in ESEM, and then imaged it in HiVac mode when the
to modifications on current ESEM hardware that can push the H-plasma was switched off (the normal GSED cannot work in
resolution limit further. H-plasma). So, the “in situ imaging” here was actually “in situ
Besides, during the imaging on biological samples or ultra- in position” plus “ex situ in environment.” Moreover, new hard-
thin nanostructures in ESEM, undesirable morphological ware and software technologies, such as MEMS (micro-electro-
changes have been frequently reported which are resulted mechanical system) and AI (artificial intelligence), are also
from the interactions between the electron beam and sam- very promising to be incorporated into next-generation ESEM
ples.[150–152] Moreover, the exposure of specimen under elec- machines to play their roles in materials science.
tron beam sometimes causes irreversible damages, which is a In summary, ESEM observations have offered significant
serious problem for in situ analysis. To minimize such risk of opportunities in materials characterization over the past few
induced sample damage by electron beam, we should pay spe- years. The including of various gases in the sample chamber
cial attention to the choice of observation parameters of ESEM, has not only allowed the direct observations on wet and insu-
such as reducing the acceleration voltage and the spot size. In lated samples without extensive preparation procedures, but
view of this situation, we also suggest that a trail experiment also provided unprecedented chances in investigating complex
regarding the electron beam damage on these samples should physicochemical processes under controlled environments
be performed to evaluate the impact before the observation. (temperature, pressure, humidity, etc.). Assisted by modern
For example, two samples can be put in the same environ- ESEM, scientists and engineers have achieved a wide range
ment, with one of them irradiated by the electron beam while of successes in either static or dynamic characterizations of
the other is not. This comparative experiments of two samples almost all sorts of materials. In the era of nanotechnology, we
can be conducted to analyze the morphological changes within believe that ESEM will play an even greater role in materials
a specified time limit to help us know the degree of damage science in the near future with rational experimental designs
and give us the hint on how to avoid it. Furthermore, quantita- and hardware/software evolutions.
tive evaluation scheme of beam-induced damage on interested
samples is essentially needed for comprehensive ESEM study,
either static or dynamic ones.[153]
Last but not least, compared with the technological advance- Acknowledgements
ments arisen from other types of microscopes, the hardware/ The authors acknowledge the financial support from the National
software improvements in ESEM in the last one or two decades Science Foundation of China (Project no.: 51972159) and Jiangxi’s
seem to be unsatisfactory, at least from scientists’ view (e.g., for Natural Science Foundation Key Projects (Project nos.: 20192ACB21018
TEMs, there have been rapid developments on achieving better and 20171ACB20006). Y.Z. acknowledges the funding support from the
images in the past 20 years, including spherical and temporal National Science Foundation of China (Project no.: 11864022). This work
was also supported by the Research Grants Council of the Hong Kong
resolutions, as well as new types of sample holders for control-
Special Administrative Region, China (Project no.: PolyU152140/19E)
ling of the sample’s micro-environment[154,155]). We anticipated and the Hong Kong Polytechnic University (1-YW2W).
that these relevant technical advancements on similar electron-
optic systems can inspire more contributions on ESEM, so that
ESEM can finally evolve into a “micro-environmental lab” for
materials characterization. In this perspective, we are glad to Conflict of Interest
find that initial attempts have been made. For example, one The authors declare no conflict of interest.
long-lasting problem in ESEM is that the electron beam cur-
rent loss inside and above the pressure-limiting aperture (PLA,
which separates the high vacuum and low vacuum regions in
ESEM, see Figure 2a), which is caused by the electron beam Keywords
collides with gas molecule before entering the chamber, signifi-
ESEM, in situ observations, materials science, static observations
cantly reduces the image quality during observation. Danilatos
et al. compared the electron beam loss above the PLA on three Received: August 24, 2019
different ESEMs (each with a different PLA geometry) and the Revised: November 3, 2019
results showed that an optimized PLA design can be useful to Published online: December 4, 2019

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