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mode, low vacuum (LoVac) mode, and the ESEM mode. For
the HiVac mode, the typical chamber pressure is within the Zhouyang Zhang is currently
range of 10−2 to 10−4 Pa, and the operating conditions of an a Ph.D. candidate in the
ESEM in this mode are very much similar to that of a con- School of Materials Science
ventional SEM (CSEM). On the other hand, pressure ranges and Engineering, Nanchang
in LoVac and ESEM modes are 10–130 and 10–4000 Pa, University, under the supervi-
respectively, in the sample area (either the water vapor from a sion of Prof. Linfeng Fei.
built-in water reservoir, up to 2600 Pa, or a gas from an aux- Her current research mainly
iliary gas inlet can be used as the imaging gas for different focuses on in situ obser-
experiments), while the column part is still working at a high vations of dynamic phys-
vacuum of less than 10−2 Pa to generate and focus the electron icochemical processes by
beam. In principle, the LoVac mode is designed for observing electron microscope.
naked (noncoated) and nonconductive specimens, whereas
the ESEM mode is more appropriate for observing natural
samples (contain volatile components). In line with a CSEM,
ESEM has the identical advantages of good field depth, long Linfeng Fei received his B.S.
focal length, and simple preparation procedures for bulk sam- degree from University of
ples. Furthermore, the unique advantage of ESEM is the exist- Science and Technology of
ence of a gas environment in the chamber, so that samples of China, followed by a Ph.D.
any states (wet or dry, conductive or insulated) can be directly degree from The Hong
tested without surface pre-treatment. This “gas environment” Kong Polytechnic University.
usually refers to water vapor for ESEM observation and, there- Afterward, he worked as a
fore, hydrated or “wet” samples can be maintained in their postdoctoral fellow in The
native state. In this perspective, the development of ESEM Hong Kong Polytechnic
has greatly expanded the applications of SEM in materials University and has recently
research.[7,8] moved to Nanchang
Therefore, it is not surprising that hundreds of papers University. His research is
using ESEM as their major research tool are published each focused on in situ observa-
year, which cover almost every corner of modern materials tions of dynamic processes and advanced characteriza-
science (see Figure 1). However, we recently noted that, the tions at the atomic-scale for emerging materials using
latest holistic review of ESEM and its applications was pub- electron microscopy.
lished over 16 years ago.[7] More importantly, as the research
focus has changed a lot during this period, a great amount of
seminal papers have been published with the help of ESEM. Haitao Huang is a professor
For example, Kiselev et al. reported the direct observations of in the Department of Applied
deposition growth of aligned ice crystals on feldspar;[9] the in Physics, The Hong Kong
situ observations performed by Huang et al. demonstrated the Polytechnic University. His
formation of nanowire arrays proceeds via a selective vapori- current research interests
zation process of the bulk crystals;[10] and Toth et al. achieved include electrochemical energy
fabrication and slimming of nanostructure by beam-induced storage and conversion, and
deposition and etching in ESEM.[11] Actually, the total number ferroelectric materials for
of papers is over 3000 in the last 16 years. These significant energy applications. He is
achievements and contributions have inspired us to present currently the board committee
a comprehensive summary of ESEM applications on mate- member of the International
rials science, focusing mainly on the breakthroughs in recent Academy of Electrochemical
years. Energy Science (IAOEES).
Our review will be organized as follows. First, we will
briefly introduce the operation principle and structural con-
figuration of ESEM, together with some functional acces-
sories. Second, we will emphasize the recent developments
in application scenarios of ESEM. These applications will be water, wetting, water transportation, and so on), 2) observa-
categorized into common static observations (ex situ) and in tions on material changes with the participations of water (del-
situ dynamic observations. For static observations, we will iquescence, metallic corrosion, fabrication of nanostructure,
focus on biological hydrated samples (e.g., organisms, cells, hydration process of cements, and so on), and 3) in situ obser-
bacteria, proteins, etc.) and insulated samples (e.g., fossils, vations on other dynamic processes in ESEM (reactions in bat-
cements, skeletons, polymers, etc.). The in situ observations, teries, growth of 2D materials and nanomaterials, crystalliza-
which is the most important application of ESEM nowadays, tion of oxides at high temperature, and so on). Finally, we will
is classified into three parts: 1) observations on phase changes try to give our outlook on both technical perspectives of ESEM
of water (morphological changes during phase transition of and their possible applications in future materials science.
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Component Function
Electron source The electron beam is emitted within a small spatial volume at a small angular spread and selectable energy.
Lens and scanning system The electron beam enters the lens system consisting of several electromagnetic lenses and exits to hit the specimen surface. The scan-
ning system generated signal, fed to the deflection systems, moves the beam in a raster pattern over the specimen area.
Detection unit Electrons striking the specimen react with its surface, producing three basic types of signal: backscatter electrons, secondary electrons,
and X-rays. The detection system picks up these signals, converts them into an amplified electrical signal which is sent to the control PC
and displayed on the monitor.
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Figure 2. Schematic illustrations of ESEM. a) The optical layout of the ESEM column. b) The cascade amplification process during the imaging of
hydrated/insulated samples.
chamber has become a micro-processing laboratory which are to be observed under ESEMs at HiVac mode, they must
can satisfy various testing requirements by supplying specific be vacuum-friendly (no volatile components) and electrically
gas environment and combining with functional accessories. conductive (especially the surfaces). Samples as biological
Hence, it is now available for scientists to accomplish a series materials, food, cells, etc., which contain water and oils that
of in situ observations on dynamic processes with rational can volatilize at a certain vacuum degree and may break the
experimental designs, by controlling specific gas, variable tem- vacuum as well as contaminate the electron source, are not
peratures, variable pressures, variable humidity, and so on. allowed to be observed unless they have gone through a series
of pre-treatments (chemical fixing, dehydration, freeze-drying,
and so on). Additionally, in order to enhance the surface con-
3. Recent Applications ductivity, less conductive or insulated samples must be treated
via sophisticated procedures (to be coated with a thin layer of
3.1. Common Static Observations conductive metallic material such as gold, platinum, palla-
dium, and chromium, etc.). The subsequent observation can
As mentioned above, there are generally three working modes be very similar to that in CSEM. However, the aforementioned
in ESEMs (HiVac, LoVac, and ESEM modes). When samples “treatment” may usually interfere with scientific judgments on
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Figure 3. ESEM images of biological materials under water vapor. a) The surface of a raw eggshell is composed of beads and pits on the intact cuticular
colloid layer. The inset is the CSEM image in which the cuticular colloid layer cannot be found. Reproduced with permission.[48] Copyright 2011, Springer
Nature. b) The structures of spider silk. 1,2) Structures of the dry spider silk. 1) Low-magnification image of periodic puffs and joints surrounding two
main-axis fibers. 2) Magnified image of puff composed of countless nanofibers. 3) Periodic spindle-knots structure linking with slender joints of spider
silk after wet-rebuilding. 4) Magnified image of random nanofibers on the spindle-knot. 5) Magnified image of aligned nanofibers on the joint region.
Reproduced with permission.[50] Copyright 2010, Springer Nature. c) A cell captured on the hierarchical nanowire structures with both horizontal and
vertical nanowire branches of ITO nanowire array. The structures make the substrate topographically match better with cell filopodia and provides
more binding sites for cell capture. Reproduced with permission.[56] Copyright 2016, American Chemical Society. d) ESEM cross-sectional image of
pork biceps femoris muscle of raw meat. Reproduced with permission.[71] Copyright 2012, Institute of Food Technologists.
surface features because the damage or cover of structural and intrinsic advantage of ESEM, direct characterization of bio-
chemical details may be likely generated on the native sample logical samples which usually contain something volatile (like
surface during manual handling. Moreover, longtime prepara- water), including organisms, microorganisms, and biomole
tion from sampling to fixation, dehydration, drying, and metal cules, is allowed. The comparative study of ESEM and CSEM
coating can raise the risk of introducing various undesirable on biological samples suggested that, ESEM observations
artifacts. In addition, samples through coating treatments could can provide new information and data for understanding the
induce the loss of valuable compositional contrast and give only morphology and structure. For example, as shown in Figure 3a,
a morphologic contrast. Thanks to the development of ESEM, Zhou et al. used ESEM to observe the colloid membrane of raw
samples with no prior preparation could be directly imaged and eggshell and found that there are some roughness of beads and
analyzed in its environmental chamber with the existence of pits on the amorphous colloid layer, which cannot be observed
a certain atmosphere.[43] ESEM can be used to image samples under CSEM because the layer was destroyed during sam-
(damp, filthy, or greasy), and contaminations (from the sample) pling. Compared to CSEM image, the ESEM results, appar-
do not damage the instrument and do not reduce the quality ently, give more details of the raw eggshell.[48] Of course, other
of imaging. Insulators can also be well observed without any natural organism samples, from either plants or animals, are
coating layer. In this review, except for those observations in also very common in ESEM study, such as spider silks,[49,50]
HiVac,[44–47] we focus on observations of samples in the gaseous leaves,[51] insects/mites,[52] etc. Zheng et al. investigated the
modes (LoVac or ESEM). Note that in most ESEM experiments, relationship between the microstructures of spider silk and
water vapor is used as the background gas. its directional water-collecting ability from humid air. The
Up to now, there is no doubt that biological samples account structures of dry and wetted silk were observed by ESEM at
for a large proportion in the application of ESEM. Due to the an accelerating voltage of ≈4 kV. The structures of dry spider
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silk (Figure 3b-1,2) were composed of two main-axis fibers Also, Pollitt et al. observed the structure of the Staphylococcus
covered by joints and periodic puffs of countless highly hydro- aureus comets in ESEM considering that ESEM could enable
philic nanofibers. The spider silk showed a directional water- the observation of the comets structure to perform at a high
collecting ability when it was placed in humid environment. magnification and without disrupting the comet structure. So
The nanofibers could generate a unique fiber structure after that the ESEM data could be a convictive information to com-
wetting, and the process was called structural wet-rebuilding. plete their work with the light microscope.[61]
Under condensed water droplets, the puffs were made to For food systems, such as potato,[68] chocolate,[69] apple,[70]
shrink into periodic spindle-knots and joints (Figure 3b-3). and pork,[71] ESEM could also facilitate the microstructural
The periodic spindle-knots were made of random nanofibrils analysis, so as to contribute to the development of food science.
and separated by joints which were made of aligned nanofibers These samples have complex surface topologies as well as water
(Figure 3b-4,5). These ESEM results clarified the mechanism of inside, and ESEM observation is a convenient way to discover
directional water collection behavior of spider silk which relied their native structures. As shown in Figure 3d, this microscopic
on the changes of its microstructures.[50] Similarly, in order to technique has been successfully employed to characterize the
analyze the morphology of lotus leaf surface under different microstructures of pork muscle. In order to investigate the effect
humid conditions, Zheng et al. used ESEM to carry out the of high pressure and salt on pork meat quality, Duranton et al.
observation under both low and high relative humidity (RH). imaged the pork under at a low temperature (3.4–3.9 °C), with
The observation under low RH of ≈70% showed that the leaf 84% to 86% RH and a pressure of 650 to 680 Pa in the ESEM
surface is composed of numbers of papillae which were cov- chamber to prevent dehydration of the samples. The observa-
ered with countless nanohairs. The observation under high RH tions show that the negative effects of texture and water holding
(≈100%) revealed that some thin layers of liquid are on the tops capacity on pressure-treated/cooked pork were caused by the
of papillae and accompanied by liquid immerging in the inter- general shrinkage of the structure, and the addition of 1.5% salt
spaces among nanohairs, which indicated that wettability gra- could counteract these negative effects by inducing the break-
dient is formed along the exterior surface of papilla and the top down of structure.[71] The research shows that the integrity of the
might be a more wettable region.[51] muscle after treatment can be evaluated by ESEM which repre-
Besides, for investigation of microorganisms and biomacro- sents a new development in the field of meat quality assessment.
molecules, such as cells,[53–59] bacteria,[60–64] and proteins,[65–67] Furthermore, for deformable or “soft” particles, while the
it is more appropriate to image these samples with an ESEM samples must endure tedious preparation of drying, fixing, and
than a CSEM. In order to improve the imaging quality, these coating to maintain their “original” morphologies in CSEM obser-
samples sometimes are treated through a simple processing vations, it is very suitable for them to be observed under ESEM
before observation, e.g., fixing and drying, which is still sim- for imaging their “real” morphologies. Polymer particles, as the
pler than the preparation for CSEM. Zhang et al. discussed classic representative of these soft particles, can usually shrink
the effect of hierarchical structures of indium tin oxide (ITO) or swell in response to environmental conditions such as tem-
nanowire arrays on their cell-capturing ability using ESEM. perature, pH, salt concentration, light, solvent composition, etc.
To observe morphologies of cells captured on anti-EpCAM- Many studies related to polymers have been done with the help
coated different substrates, the cells were fixed with glutar- of ESEM.[72–78] Figure 4a shows the morphology of pH-sensitive
aldehyde (2.5% in phosphate-buffered saline) for more than water-soluble imprinted hydrogels under pH = 2.0, the hydrogel
4 h at room temperature after the cell-capture experiments. The is in a largely swollen state under acidic conditions as compared
substrates were immersed in a series of alcohol aqueous solu- with its relatively compact state. The particles containing water
tion with different volume fractions (0, 30%, 50%, 75%, 85%, were directly mounted without drying on metal stubs and meas-
95%, and 100%) in sequence before drying in carbon dioxide ured under a low vacuum (≈10-3 atm.) and relatively low tem-
under supercritical condition. Based on the ESEM observa- perature (near 4 °C in ESEM to obtain this snapshot.[77]
tions at low vacuum (93 Pa), they found that these arrays with Additionally, in archaeological research, high-resolu-
both horizontal and vertical nanowire branches, which could be tion images on morphologies of precious fossils should be
regarded as a new 3D fractal nanobiointerface, could enhance preferentially captured by ESEM, so as to prevent the native
the efficient capture of cancer cells, as shown in Figure 3c.[56] surface from damage by either the conductive coating or the
Figure 4. ESEM images of material systems with nonconductive surfaces in water vapor. a) The morphology of pH-sensitive water-soluble imprinted
hydrogels under pH = 2.0. Reproduced with permission.[77] Copyright 2010, Wiley–VCH. b) Microstriations indicative of cutting with a stone tool
on fossil rib bone. The direction of the rib head is indicated by the black arrows. Reproduced with permission.[81] Copyright 2010, Springer Nature.
c) Microstructures of virgin bitumen. Reproduced with permission.[100] Copyright 2017, Taylor & Francis.
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Apparently, the configuration of ESEM makes it feasible to mineral dust) under ESEM to clarify the dominate reason in
design in situ experiments of phase transitions of water, in regulating the ice-nucleation properties on specific substrates.
case of the rational controlling over the chamber temperature The observation was conducted in an ESEM with a double-stage
and pressure. For example, the icing process of water and the Peltier element, with its low temperature limit down to 213 K.
melting process of ice, which can provide the fundamentals The results gave a direct experimental evidence to indicate that
for phase transitions of water, are frequently observed and the active sites for ice-nucleation on the surface of feldspar
examined by in situ ESEM experiments in terms of structural are the surface patches with (100) crystallographic orientation.
and morphological changes.[9,104–106] Kiselev et al. investigated These patches occurred exclusively at surface steps, cracks, and
the nucleation and growth of aligned ice crystals from water cavities, which are thought to be responsible for the prefer-
vapor on feldspar (an atmospherically important component of ential nucleation of ice. As shown in Figure 5, the ice crystal
Figure 5. Dynamic ESEM observation of gas–solid phase transition of water at 251 K. a–e) An ice crystal nucleated on the patch with (100) orienta-
tion of feldspar. The patch was thought as an ice-nucleating active site which was on the inner wall of a cavity in the (010) face of the specimen. The
relative orientation of crystal planes is shown in yellow, with (010) facing up. f) Schematic drawing of ice crystals nucleating from their (0110) planes
on the steps with (100) orientation [red filled surface and the hidden face of the step on the (010) face of feldspar; the relative position of ice crystals
to each other and with respect to crystal faces of feldspar specimen corresponds to the case shown in (e)]. Reproduced with permission.[9] Copyright
2017, American Association for the Advancement of Science (AAAS).
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Figure 7. ESEM observation on nucleation of dew on a moss awn surface at 4 °C. Time and pressure are increased from (a) to (f). a–c) The pressure in
chamber increases from 706.6 to 879.9 Pa and the water vapor pressure of water is 813.5 Pa at this temperature. The nanogrooves (purple arrowheads)
are initially filled by nucleated water. d–f) The vapor pressure is slowly increased, and the developing thin water film covers the nanogrooves (purple
arrowheads) and fills the microgrooves (yellow arrowheads) of the awn. The scale bar in (a) also applies to (b–f). Reproduced with permission.[118]
Copyright 2016, Springer Nature.
observations.[114] Recently, Zhang et al. demonstrated in situ levels of RH. Figure 7 shows their observation of nucleation
ESEM observation, as a straightforward pathway, to under- process with respect to the increasing vapor pressure and time
stand the wetting behavior on adaxial and abaxial surfaces of a in ESEM. First, water molecules were condensed on the nano-
bamboo leaf. They microscopically and quantitatively identified grooves within a microgroove or a shallow cavity on the leaf sur-
the surface-structure-dependent water droplet growth dynamics face (Figure 7c). After a period, more water was appeared in the
of the bio-related materials and provided the evidence that the nanogrooves and eventually filled the microgrooves (Figure 7d–
ESEM observation is a convenient and efficient tool for quanti- f). Moreover, based on further ESEM observations, they also
tative and qualitative study of this phase transition.[117] revealed the mechanisms of water collection from limited water
It must be mentioned that, specific surfaces/structures/ sources and transportation on the mosses, and presented the
materials, which are designed for collecting water from air, physics-based evidence of how bryophytes adapt to scarce water
could be easily characterized on in situ ESEM observations. For environments by efficiently using their small structures.[118]
example, plants grown in desert usually have unique leaf struc- Besides, morphological or structural changes of materials
tures, which are adapted to collecting water by promoting water caused by gas–liquid transition of water can also be character-
droplet nucleation from humid air. Pan et al. investigated the ized using in situ ESEM observations. The volume of hygro-
leaves of desert mosses, which are featured with ample awns scopic materials, especially cellular materials, usually swell
and can collect water rapidly in humid environment (such as after absorbing water. The structural changes of these samples
dew, fog, mist, and rain). Nucleation of dew on the surface of against the changes of humidity or processes of water conden-
a moss awn at 4 °C was observed by ESEM, while the pres- sation/evaporation can, of course, be studied by in situ obser-
sure in ESEM chamber was controlled to simulate the different vations in the ESEM chamber.[119–124] Ha et al. investigated the
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Figure 8. ESEM observations of morphological changes on the mate- Figure 9. ESEM observation of micro-transportation behavior based on
rials during the water condensation. a) Merging of micropores due the gas–liquid phase transition of water. a) Condensation of water at
to hygroscopic expansion of the cellulose sheet. The pores start to the closed end of the tube with two bubbles trapped inside the liquid.
grow when the RH exceeds 90%, and they coalesce with their neigh- b–f) Dynamic behavior of a water plug close to the open end of the tube.
bors. The scale bar in (1) also applies to (2) and (3). Reproduced with The meniscus shape changes when, at a constant stage temperature, the
permission.[123] Copyright 2018, AAAS. b) A film at different humidity vapor pressure of water in the chamber is changed: b) 5.5 Torr, c) 5.8 Torr,
levels. 1) The initial film thickness of 2.9 µm at 0% and 10% RH and d) 6.0 Torr, e) 5.8 Torr, and f) 5.7 Torr, where the meniscus returns to
2) the film thickness of 18.6 µm at 100% RH. The scale bar in (1) the shape seen in (b). The shapes of the meniscus are asymmetrical,
also applies to (2). Reproduced with permission.[120] Copyright 2007, especially the complex shape of the meniscus on the right side in
Springer Nature. (b) and (f). Reproduced with permission.[125] Copyright 2004, American
Chemical Society.
evolution of microscale wall pores in hygroscopically responsive
multiscale porous materials during the wetting process by in water/humidity-sensitive materials and will make further con-
situ observation under ESEM. As shown in Figure 8a, when the tributions to biological and medical fields.
RH was increased by suppling water vapor to the chamber at In addition, water micro-transportation, which is very impor-
2 °C, the sponge underwent drastic shape changed by absorbing tant in the development of nanofluidic devices, can also be
water molecules as the environmental humidity reached approx- well defined using in situ observations on gas–liquid transi-
imately 90%. They found that the deformation underwent two tion. Rossi et al. investigated the condensation, evaporation,
steps, which were the growth of pore size and the coalescence and transportation process of water inside carbon nanotubes
of the expanded pores. On the contrary, the deformation of (CNTs) by in situ fluidic experiment in ESEM. They observed
sponge was insignificant when RH was below 90%, indicating complex meniscus shapes and slow liquid dynamics caused by
that water molecules hardly infiltrated into the sponge until the water confinement and strong interaction with the hydrophilic
vapor pressure reaches a critical value.[123] Similarly, Kang et al. tube walls. Due to the heating effect of electron beam on the
directly imaged the swelling of a film by ESEM to study the liquid inclusions, complex interfaces form between the liquid
effect of humidity on swelling behavior. Figure 8b shows such and the gas inside the nanotube, which move under the action
a swelling of the film. The thickness of film increased from an of bubbles formed in the bulk liquid (Figure 9a). Figure 9b–f
initial value of 2.9 to 18.6 µm as the RH increased form 0% shows the dynamic behavior in meniscus (shape and size) of
to 100%.[120] Hiranuma et al. also determined the hygroscopic water plug in response to varied pressures at a constant tem-
properties of agricultural aerosols in ESEM, which was used to perature of 4 °C. The contact angle (formed between water and
acquire not only a qualitative description of the shape and mor- the CNT) was approximately 5°–20° (Figure 9b). The shape of
phology but also the detailed images of samples as a function menisci within the CNT behaved asymmetric on both sides,
of RH. They found that most of the agricultural particles did especially for the complex shape of the meniscus on the right
not take up significant amounts of water when exposed up to side in Figure 9b,f (which was caused by different vapor pres-
96% RH.[121] These observations demonstrated that ESEM is a sures on different sides of water plug, resulting from the closed
simple yet powerful tool to characterize the material response to right end of the tube and presence of liquid at the tube tip in
water or other liquids. It has a wide significance in the study of contrast with the open left end of the tube (Figure 9a)).[125] This
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Figure 12. In situ ESEM study on ambient degradation of few-layered BP at a low water vapor under electron beam irradiation. Sequential images of
BP flakes when they are exposed to a small amount (≈8 Pa) of H2O vapor: a) Pristine BP, b) [BMIM][PF6]-treated BP, and c) [BMIM][BF4]-treated BP
flakes. The observation was made in ESEM with a 20 kV, 1.35 nA electron beam. Reproduced with permission.[137] Copyright 2017, Wiley–VCH.
undisputed advantage for ESEM (rather than CSEM et al.). In As shown in Figure 13, a Li2O2 particle was formed at the CNT-
recent years, more and more in situ ESEM observations have solid-state electrolyte-oxygen three-phase interface (TPI) and
been highlighted across the literatures of materials science, grew up to 1.5 µm after 3000 s during the discharge process
including physical changes and chemical reactions, as well as the (Figure 13a). Then the decomposition of Li2O2 particle initiated
interactions between materials and environment. Some repre- from its surface at the charge cycle with a constant potential of
sentative examples will be sequentially reviewed in this section. 8 V (on SACNT vs Li) (Figure 13b), because the electronic and
First, for chemical reactions or dynamic processes which are ionic conductivities of surface were much higher than those in
sensitive to ambient air (or require strict control over the envi- the bulk and the oxygen release caused by Li2O2 decomposi-
ronment), it is extremely difficult to perform comprehensive tion was also much easier on the surface. The results showed
studies concerning the segmented mechanisms during reac- detailed morphological evolution of Li2O2 products during the
tion/process using post-mortem characterizations. Instead, in charge/discharge process of the all-solid-state Li-O2 battery,
situ ESEM observations have an ability to follow the growth, which shed light on the understanding of battery reactions at
morphological change, evolution, and disappearance of mate- the microscale. This experimental design may find its applica-
rials during reactions/processes. A typical example of these tion in revealing similar processes.[138]
processes is the cell reaction.[138,139] In an attempt to elucidate Second, in recent years, there are also increasing interest
the detailed dynamic process of electrochemical reaction in the in the fabrication of low-dimensional materials using high-
all-solid-state Li-O2 battery, which was regarded as the potential resolution ESEM, considering that low-dimensional materials
candidate to meet the ever-increasing demand for high-energy have received extensive attention in many fields due to their
storage in electric vehicles, Zheng et al. realized the direct visu- unique structural and electronic properties, such as graphene
alization of discharge and charge processes of a microscale all- flakes,[28,29] nanowires,[10,26,140] etc. For example, aiming at the
solid-state lithium-oxygen battery with an ESEM equipped with exploration of interlayer coupling and the illustration of stacking
a nanoprobe system. The battery was composed of Li metal sequence of few-layer graphene (FLG), Wang et al. took in situ
(anode), a native oxide layer Li2O (solid state electrolyte), and imaging on isothermal growth and etching experiments of FLG
super aligned CNTs (SACNTs, cathode). They first observed the under ESEM. After isothermal chemical vapor deposition (CVD)
discharge process of a Li-O2 battery under a constant potential using C2H4 performed in ESEM chamber, graphene layers were
of −3 V (on SACNT vs Li) with an O2 partial pressure of 200 Pa grown on polycrystalline Pt foils. Then, in situ monitoring of
and imaged the growth and morphological changes of dis- etching on FLG at 900 °C in an atmosphere of 25 Pa hydrogen
charge product (Li2O2). Moreover, an electrochemical cycle was gas was performed by characterizing the shape and size evo-
conducted to follow the formation and decomposition of Li2O2. lution of graphene layers. As shown in Figure 14, shrinking
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Figure 15. Reaction between Na3RuO4 and SBN glass occurred during in
situ heat treatment in ESEM. The reaction started at 520 °C and a) was
recorded at T = 400 °C (no reaction). The arrow in (b) shows the interme-
diate phase formed at 660 °C. Incorporation of the Na3RuO4 crystals in
the SBN melt at c) 733 °C and d) 746 °C. Reproduced with permission.[144]
Copyright 2012, American Chemical Society.
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Figure 17. In situ tensile fracture process of an as-deposited LDMD Ti-6Al-4 V specimen at 650 °C for the displacements of: a) 900 µm, b) 1150 µm,
and c) 1204 µm for fracture. The loading direction was horizontal. Reproduced with permission.[148] Copyright 2019, Elsevier.
grew at the expense of amorphous material that was consumed diffraction (EBSD) in ESEM. For instance, Reichmann et al.
in the electron-irradiated region (Figure 16f,g), whereas the performed in situ compression test on ferroelectric BaTiO3
nonirradiated region remained unchanged (Figure 16c,h). The material, and EBSD measurements were performed before
results showed that the sea urchin spine regenerated through and after the experiments to determine the misorientation
the initial deposition of ACC and indicated that single crystals between two neighboring domains.[20] These mechanical tests,
with complex morphology could be produced by the deposition apparently, can be further extended by combining other envi-
of transient amorphous phases which may promote the devel- ronmental controlling systems in the chamber of ESEM and
opment of sophisticated materials.[145] therefore, extracting more fascinating mechanical properties
Finally, specific accessories, such as various mechanical test for metal/ceramic/glass/organic materials as well as emerging
systems, can be equipped on the ESEM to achieve the obser- nano and 2D materials.
vations of deformation behavior of samples under the action
of elongation or compression. For example, Bos and Donald
investigated the compressive behavior of elementary flax 4. Summary and Prospect
fibers under a modified loop test with ESEM. They showed
that the flax fibers presented very different deformation As we reviewed above, in situ/ex situ ESEM studies on mate-
behaviors due to the difference in chemical composition and rials and physicochemical processes of materials have indeed
morphology, and the lateral strength of the fibers was lower made significant contributions to the understanding of funda-
than its tensile strength,[146] Similarly, Wang et al. studied the mental science and mechanisms by providing direct, visual,
effect of microstructure and corrosion on the fracture behavior and dynamic evidences. Yet, we have to point out that there
of Sn-3.0Ag-0.5Cu solder alloys using a three-point bending are still several urgent challenges awaiting to be resolved in the
test in ESEM.[38] Besides, Koester et al. performed an in situ development of the microscope/microscopy, including achieve-
measurement in ESEM to identify the mechanism of propa- ment of a better resolution, minimizing beam-induced damage
gation of physiologically pertinent short (< 600 µm) cracks in during observation, and more hardware designs on in situ
both the transverse and longitudinal orientations in cortical experiments for widening the applications of ESEM, etc.
bone. The in situ test of samples soaked in Hanks’ balanced First, ESEM is regarded as one of the best solutions for
salt solution was carried out at 25 °C using a Gatan Microtest imaging insulated and hydrated samples, even under different
2 kN three-point bending stage. The instrument was operating harsh conditions (including water and oil). It is quite feasible
in backscattering mode at 15 kV and a pressure of 35 Pa to to obtain true and noninvasive images concerning the micro-
monitor the crack path. The results revealed the crack initia- morphological, structural, and compositional characteristics
tion and growth behavior and the development of the extrinsic of materials in their native states, because ESEM has a spe-
toughening mechanisms in cortical bone.[147] Additionally, to cial capability to allow gases to be existed in the chamber, and
reveal the deformation mechanisms of laser direct melting opens up a new field of application in observations of noncon-
deposited (LDMD) Ti-6Al-4 V alloys (which are mainly used ductive samples without complex preparation that were previ-
in aerospace fields), Wang et al. used an in situ tensile test ously impossible in CSEM. However, the chamber gas is also
based on ESEM to identify the initiation of cracks and pro a double-edged sword in ESEM in consideration of its negative
pagation mode of slip bands. They compared the microstruc- effects as a result of compensating the charges induced by the
tural evolution during the fracture process at 23 and 650 °C. environmental gas. The most common problem is that, the
Figure 17 shows the in situ macroscopic deformation at high ambient pressure in the chamber intensifies the scattering
650 °C. When the displacement was increased from 900 µm of electrons by gas, which then increases the astigmatism of
(Figure 17a) to 1150 µm (Figure 17b), the specimen showed the image and reduces the contrast and signal-to-noise ratio.
uniform deformation and smooth necking; while, as the elon- For in situ observations, the presence of gas in the chamber
gation attained 1204 µm (Figure 17c), the sample fractured. can severely degrade the image resolution and contrast, and it
The results showed that the grain structure was greatly elon- is a challenge to perform a high-resolution and high-sensitivity
gated with good plastic flow behavior over long stretching imaging during dynamic interactions at high-pressure condi-
distance, and the elongation of the alloy was higher at 650 °C tion. The resolution of CSEM can reach sub-nanometer scale
than at 23 °C.[148] Moreover, such in situ mechanical experi- in the latest models, while the resolution of ESEM remains at
ments can be combined with the characterization of crystal- 1–3 nm by far. Considering this factor, in practical scenes for
lographic orientation information with electron backscatter ESEM, the pressure is usually kept below 1000 Pa to obtain a
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good spatial resolution and image contrast.[7] In this regard, decrease the electron beam losses and hence improve the image
significant improvement in resolution under environmental quality.[156] On the other hand, more functional accessories could
gas pressure is urgently needed in the future development also be developed to solve complex physical/chemical processes
of ESEM. Fortunately, pioneer contributions have been done which is useful in modern materials science (e.g., the electric/
by using state-of-the-art software technologies. For example, magnetic field assisted sintering process[157]) In addition, a wise
Zhang et al. presented an ESEM technique for enhanced reso- combination of three working modes (HiVac, LoVac, and ESEM)
lution using phase reconstruction to improve the image quality may create extra possibilities in realizing novel experimental
with the operation pressure ranging from 1000 to 2500 Pa in techniques through rational design. Wan et al. have adopted
dynamic processes during the water droplet condensation. This an innovative method to directly observe the effect of hydrogen
work suggested a practical method to achieve high-resolution (H) on fatigue crack growth behavior of pre-cracked single-edge
observation at high pressure without changes on the hardware, notched tensile (SENT) specimen.[158] They performed in situ
and is expected to expand the application of ESEM in static and H-plasma charging on the SENT in the low vacuum environ-
dynamic processes.[149] However, we are also looking forward ment in ESEM, and then imaged it in HiVac mode when the
to modifications on current ESEM hardware that can push the H-plasma was switched off (the normal GSED cannot work in
resolution limit further. H-plasma). So, the “in situ imaging” here was actually “in situ
Besides, during the imaging on biological samples or ultra- in position” plus “ex situ in environment.” Moreover, new hard-
thin nanostructures in ESEM, undesirable morphological ware and software technologies, such as MEMS (micro-electro-
changes have been frequently reported which are resulted mechanical system) and AI (artificial intelligence), are also
from the interactions between the electron beam and sam- very promising to be incorporated into next-generation ESEM
ples.[150–152] Moreover, the exposure of specimen under elec- machines to play their roles in materials science.
tron beam sometimes causes irreversible damages, which is a In summary, ESEM observations have offered significant
serious problem for in situ analysis. To minimize such risk of opportunities in materials characterization over the past few
induced sample damage by electron beam, we should pay spe- years. The including of various gases in the sample chamber
cial attention to the choice of observation parameters of ESEM, has not only allowed the direct observations on wet and insu-
such as reducing the acceleration voltage and the spot size. In lated samples without extensive preparation procedures, but
view of this situation, we also suggest that a trail experiment also provided unprecedented chances in investigating complex
regarding the electron beam damage on these samples should physicochemical processes under controlled environments
be performed to evaluate the impact before the observation. (temperature, pressure, humidity, etc.). Assisted by modern
For example, two samples can be put in the same environ- ESEM, scientists and engineers have achieved a wide range
ment, with one of them irradiated by the electron beam while of successes in either static or dynamic characterizations of
the other is not. This comparative experiments of two samples almost all sorts of materials. In the era of nanotechnology, we
can be conducted to analyze the morphological changes within believe that ESEM will play an even greater role in materials
a specified time limit to help us know the degree of damage science in the near future with rational experimental designs
and give us the hint on how to avoid it. Furthermore, quantita- and hardware/software evolutions.
tive evaluation scheme of beam-induced damage on interested
samples is essentially needed for comprehensive ESEM study,
either static or dynamic ones.[153]
Last but not least, compared with the technological advance- Acknowledgements
ments arisen from other types of microscopes, the hardware/ The authors acknowledge the financial support from the National
software improvements in ESEM in the last one or two decades Science Foundation of China (Project no.: 51972159) and Jiangxi’s
seem to be unsatisfactory, at least from scientists’ view (e.g., for Natural Science Foundation Key Projects (Project nos.: 20192ACB21018
TEMs, there have been rapid developments on achieving better and 20171ACB20006). Y.Z. acknowledges the funding support from the
images in the past 20 years, including spherical and temporal National Science Foundation of China (Project no.: 11864022). This work
was also supported by the Research Grants Council of the Hong Kong
resolutions, as well as new types of sample holders for control-
Special Administrative Region, China (Project no.: PolyU152140/19E)
ling of the sample’s micro-environment[154,155]). We anticipated and the Hong Kong Polytechnic University (1-YW2W).
that these relevant technical advancements on similar electron-
optic systems can inspire more contributions on ESEM, so that
ESEM can finally evolve into a “micro-environmental lab” for
materials characterization. In this perspective, we are glad to Conflict of Interest
find that initial attempts have been made. For example, one The authors declare no conflict of interest.
long-lasting problem in ESEM is that the electron beam cur-
rent loss inside and above the pressure-limiting aperture (PLA,
which separates the high vacuum and low vacuum regions in
ESEM, see Figure 2a), which is caused by the electron beam Keywords
collides with gas molecule before entering the chamber, signifi-
ESEM, in situ observations, materials science, static observations
cantly reduces the image quality during observation. Danilatos
et al. compared the electron beam loss above the PLA on three Received: August 24, 2019
different ESEMs (each with a different PLA geometry) and the Revised: November 3, 2019
results showed that an optimized PLA design can be useful to Published online: December 4, 2019
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