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EU, has resulted in an increased demand for instruments that can perform trace, rapid
analysis of a wide range of samples. With an even greater level of sensitivity and
expedition, the EDX Series meets this demand, enabling both trace and rapid analysis
An EDX fluorescence spectrometer irradiates a sample with X-rays, and then measures
the energy of the generated fluorescent X-rays to determine the type and amount of
elements comprising the sample. This nondestructive analysis technique allows
measurement of a wide variety of sample types (solids, powders, liquids, thin films, etc).
EDX Series instruments are used in a variety of fields.
2 Chemical Industry
Analysis of organic and inorganic materials and products, catalysts,
pigments, paints, rubbers and plastics
5 Medical Supplies
Analysis of materials and products and analysis of catalysts during synthesis
Analysis of sulfur (S), chlorine (Cl) and bromine (Br)
9 Environment
Analysis of soil, effluent, ashes and filters
10 Other Applications
Analysis of archaeological samples and precious stones
Features
Large Sample Chamber with Automatic Simple Operations Start Fully Automatic
Opening/Closing Door Measurement – Even Any Analyst Can
Equipped with an automatic Perform Simple, Accurate Measurement
opening/closing door, the large sample There is no need to set Step 1: Select conditions
4
Excellent Performance and High Operability
P r i nc i pl e a n d F e a t u r e s
With X-ray fluorescence spectrometry, a sample is irradiated with Sample compartment
X-rays emitted by an X-ray tube and the resulting characteristic cover: CLOSE
X-rays generated in the sample (fluorescent X-rays) are detected.
Atmosphere: Air Measurement time: 300 sec
In particular, X-ray fluorescence spectrometers that use Vacuum level: Air Dead time: 25%
semiconductor detectors are called "energy dispersive". Advantages
of these spectrometers include the ability to perform simultaneous
Sample Liquid mode: OFF
measurement of many different elements, a compact design, and
Detector Collimator: 10 mm
the distance between the sample and the detector can be small Shutter: OPEN
because there are no driving mechanical parts. In addition, using Filter: OUT
2. FP Method
Perform Bulk Analysis and Analyze Thin Films, Organic Materials and etc. without Standard Samples!
With the FP method, the X-ray intensity is obtained and quantitative analysis is performed
using theoretical calculation. This method is very effective for quantitative analysis of
unknown samples for which standard samples are not provided. Shimadzu EDX Series is
equipped with Shimadzu's high-performance FP software, which was developed based on
our many years of experience with wavelength-dispersive spectrometers. This software
includes the Bulk FP method, which can be used to analyze samples such as oxides, metals,
and resins, and the Thin-Film FP method, which can be used for film-thickness and
compositional analysis of coatings and thin films without standard samples.
FP Method Setting Window
Representative
Filter Without filter
RhLa-
measurement elements
#1 Cl
-RhLb1
BrKa-
1000
-PbLb1
#2
-BrKb
Cr
Without filter
#3
-PbLa
*1:Hg, Pb, Br, Bi
-HgLa
*2:Hg, Pb, Br, Bi (high sensitivity type) 500
With filter
#4 *1:Rh-Cd/*2:Cd (high sensitivity type) -K Ka
With filter
-ClKa
#5 Cd 0
*1: EDX-800HS 10.00 11.00 12.00 13.00 [keV]
*2: EDX-720 Trace element: Chlorine
(removal of characteristic lines) Trace element: Lead (reduces background)
6
Changing the Measurement Atmosphere Enables High-Sensitivity
Measurement of Light Elements
[cps/uA] Na-Fe
Vacuum Unit (Option) / He Purge Unit (Option)
CaKa–
SiKa–
Since the energy of fluorescent X-rays generated from light
elements is weak, energy is absorbed if air is present between the
sample and detector, which may worsen detection sensitivity.
Setting the measurement chamber to a vacuum atmosphere is
Blue line : Vacuum
effective in increasing sensitivity when measuring light elements. Red line : Air
0.200
He purging is useful in the analysis of light elements contained in
–CaKb
samples that, for example, generate liquids or gases and that
cannot be set to a vacuum atmospheric state.
–RhLa
–K Kb
100
80
–K Ka
0.100
–RhLb1
–AlKa
Relative intensity
60
He
–MgKa
Air
–NaKa
40
–S Ka
20
0
0.000
5 15 25 30 45
2.00 4.00
Atomic No.
Comparison of Vacuum and Air Atmosphere Profiles
Relative Intensities of Air and He After Purging (with vacuum taken as 100) (sample: water glass)
Example of Using 16-Sample Turret (for Solids) Example of Using 8-Sample Turret
A nal ys i s o f F o r e i g n M a t t er
Analysis of Foreign Matter on Tablets
Fluorescent X-ray analysis is effective in the analysis of foreign smaller than the instrument's minimum irradiation diameter
matter adhering to or contained in food, drugs, and other (1 mm), a location that contained the foreign matter and one
products since it allows elements to be analyzed that did not (i.e. blank) were measured, and the two profiles
non-destructively. Micro-contaminants can also be easily were overlapped and subjected to subtraction processing to
analyzed by using a CCD camera and collimator. assess the sample.
We analyzed foreign matter on a tablet. Since the sample was
Analysis Target Analysis Result Standard Deviation Processing Analysis Line Intensity
Quantitation-FP
Quantitation-FP
Quantitation-FP * This analysis sample was prepared at Shimadzu
Quantitation-FP by attaching foreign matter, especially for
Quantitation-FP assessment.
Matching Results
Matching
M hi C Conditions
di i
Analysis Results
8
Thin-Film Measurement
Measurement of Film Thickness of Electroless Ni-P Plating and Its Composition Ratio
The thickness and composition of not only single-layer but also multilayer films can be obtained by the thin-film FP method. The amount of
deposition can also be measured.
This method demonstrates its effectiveness also in the measurement, for example, of Pb in plating.
Layer
Component
Component
Component
Component
Quantitative Analysis Result
* With the thin-film FP method, the lamination layer order
including the base and the content element information must
be entered.
—PbLa
—TiKa
Cd
—CrKa
Cr 2.00
PbLb1
0.40 0.00200
—RhKaC
—NiKa
—CrKb
— CdKa
0.30
Pb
—TiKb
0.20 1.50
—RhKa
—SnKa
0.10
0.00 1.00 0.00100
—PbLg1
—RhKbC
—RhKb
—SnKb
0.50
—TiKa
—CrKa
—SnLb1
—SnKb2
—PbLn
—PbLL
—CuKa
—SnLa
—NiKa
—CrKb
—TiKb
0.00 0.00000
10.00 20.00 [keV] 22.00 23.00 24.00 [keV]
Analysis of Hazardous Substances in Resin Materials Used in Power-Supply Adapter Casings, Wire-Coating Materials, and Electronic-Device Casings
Result
Method by ED-XRF
Std.Deviation(ppm)
103
1.3
16.8
1.0
0.5
1.4
12.9
3.6
5.3
0.5
Judgment NG OK OK OK OK
—PbLb1
Cd Pb Hg Cr Br
0.0040 0.020
—CdKa
—PbLa
0.0020 0.0020
0.004
0.002
0.0020
—BrKa
0.010
—CrKa
0.0010 0.0010
0.002
—HgLa
0.0000
12.50 13.00 13.50 [keV] 0.000 0.000 0.0000 0.000 0.0000
23 24 [keV] 10 11 [keV] 9 10 [keV] 5 6 [keV] 11 12 [keV]
10
Ot her Ana l y s i s E x a m p l e s
Control Analysis of Metal Materials
The EDX can be used for judging metal scrap and for checking product contained in cast iron. The table shows that although carbon cannot be
types. Also, it can be made good use of in control analysis of samples detected, the coefficient of variation of other elements is about several
subjected to pretreatment such as grinding. percent and that the values demonstrate sufficient performance for
The table below summarizes example analysis values for elements product management and acceptance inspections at secondary user sites.
Si Mn P S Cu Ni Cr Mo
Degree of Accuracy (%) 0.023 0.019 0.0048 0.0046 0.0048 0.0075 0.0051 0.0060
Quantitative Value (%) 2.53 0.40 0.050 0.086 0.086 0.069 0.051 0.093
Reproducibility (%) 0.02 0.010 0.007 0.002 0.004 0.005 0.004 0.002
Coefficient of Variation (%) 0.78 2.4 14 2.2 4.5 7.3 8.1 2.3
Sample Container
Sample Name P S K Ca Mn Fe Cu Zn Rb Sr
1 4300india-assam 2799.0 2350.1 19092.2 4503.8 540.8 60.4 12.4 27.1 863.9 13.7
2 4303india-assam 2434.4 2203.7 19635.4 5440.8 634.0 222.5 8.0 21.1 657.0 10.8
3 4304india-assam 3128.7 2353.6 19348.2 5591.7 899.6 100.3 9.0 21.4 827.0 11.3
4 4305india-assam 2191.5 2207.4 19397.8 5547.4 428.9 111.3 10.1 20.3 680.7 13.4
5 4501ceylon-dimbula 1853.2 2156.9 18837.0 5286.2 325.1 41.5 12.5 22.9 605.0 15.0
6 4502ceylon-dimbula 1975.3 1807.4 16173.0 5542.1 263.9 68.1 13.7 26.6 150.2 12.9
7 4520ceylon-uva 2027.7 2099.5 17872.7 4999.0 529.8 77.1 11.8 21.6 473.6 20.0
8 4530ceylon-kandy 2576.7 2326.3 18135.7 5129.2 397.5 101.2 12.2 31.5 489.3 18.8
9 4540ceylon-ruhuna 2699.2 2427.0 18372.5 3827.7 384.8 86.5 12.0 19.9 856.9 9.5
10 4701china-anhui 3802.5 2555.6 17849.0 4240.6 818.5 223.4 16.7 41.4 977.7 14.0
11 4702china-anhui 3693.5 2511.6 18023.0 4413.2 1009.7 257.3 12.6 36.2 749.7 16.8
13 4750china-yunnan 3041.6 2427.0 19761.1 5765.7 723.7 362.6 10.1 32.3 1295.5 19.2
P Mn Fe Zn Rb
India Average Value 2638.4 625.9 123.6 22.5 757.2
Ceylon Average Value 2226.4 380.2 74.9 24.5 515.0
China Average Value 3246.9 782.2 287.4 34.6 915.8
Overall Average Value 2741.9 563.7 149.9 27.3 721.0
EDX-720
New Filters Improve Sensitivity in Analysis of Hazardous Elements
The S/N ratio is improved by adopting two types of new filters that efficiently cut the continuous X-rays component from the X-ray tube. It
is possible to perform the trace analysis with high sensitivity by reducing the background.
CdKa
BrKa
200
BrKb
500
HgLa
0 New filter 0
10.00 11.00 12.00 13.00 [keV] 22.00 24.00 [keV]
CdKa
P re v i o u s
and in metal samples, which generate a large amount of fluorescent X-rays from the main model
500
component, it has been difficult to get information about trace elements because almost all
250
counted signals are for scattered or fluorescent X-rays from the base material. The count rate
attained with the EDX-720 is more than twice that of previous models and detection sensitivity 0
22.00 23.00 24.00 [keV]
is significantly higher. It is possible to reduce the analysis time significantly because the same
Comparison using Standard PVC Resin Sample
level of precision can be attained in half the time required with previous models. Containing 100-ppm Cadmium
M axi m i z i n g D e t e c t a b i l i t y o f Lig h t E le me n ts P ro v id e s
Hi gh-Sens i t i v i t y A n a l y s i s
EDX-800HS
Special Detector Window Material Reduces Absorption of Light Elements and Provides
High-Sensitivity Measurement
Analysis of light elements must be measured in helium or vacuum atmospheres. However, even
EDX-800HS
in these kinds of atmospheres, particularly with organic component elements such as oxygen
EDX-720
(O) and fluorine (F), the detector window itself can act like an absorbing material and adversely
affect the detection efficiency.
With the EDX-800HS, an ultrathin film consisting of a special material is used for the detector
window to perform high-sensitivity analysis of elements lighter than sodium.
12
Specifications
Mai n Spec i f i c a t i o n s
Measurement principle X-ray fluorescence spectrometry
Measurement method Energy dispersive
Applicable sample type Solid, liquid, or powder
Measurement range 11Na to 92U (EDX-720)
6C to 92U (EDX-800HS)
In s t al l at i o n R e q u i r e m e n t s
Temperature 10°C to 30°C
Relative humidity 40% to 70%
800
Stroke : 10 mm
Feed : 1 mm per revolution
Inner diameter of standard holder : 31 mm (can be used with the attached sample cell)
16-Sample Turret (for Solid Samples) P/N 212-22665-91 8-Sample Turret P/N 212-22665-93
This turret is used for the sequential analysis This turret is used for the sequential analysis
of solid samples with diameters less than 32 of larger samples less than 52 mm dia.
mm. It is particularly effective for analysis in
helium or vacuum atmospheres.
16-Sample Turret (for Liquid Samples) P/N 212-22665-92 8-Sample Turret with Spinner P/N 212-22345
This turret is used for the sequential analysis A turret with spinner used to acquire
of up to 16 liquid or powder samples averaged information of heterogeneous
contained in sample cells. samples like minerals, foods, soil by spinning
samples. To be used with solid or small
sample holders.
* A turret drive unit is required with each of the above turrets.
Sample Cells
3571 31 mm Open-End X-Cell 3577 Micro X-Cell
P/N 219-85000-55 (100 pcs/set) P/N 219-85000-54 (100 pcs/set)
(Outer diameter: 31.6 mm; Volume: 10 mL) (Outer diameter: 31.6 mm; Volume: 0.5 mL)
This polyethylene sample cell is used for liquid and The cell is used for trace samples. In order to reduce
powder samples. It is used with Mylar or the scattered radiation emitted from the sample cell, it
polypropylene film. is recommended that a collimator is used with this cell.
Mylar Film for Sample Cell Polypropylene Film for Sample Cell
P/N 202-86501-56 (500 sheets/set) P/N 219-82019-05 (73-mm wide, 92-m long)
This film is effective for the trace analysis of light
elements in vacuum and helium atmospheres.
14
Sample Observation Camera** Automatic Collimator**
P/N 212-22750-95 P/N 212-22320
The camera displays an image of the sample to check the analysis Collimator with aperture exchange mechanism in 4 steps of either
position. Images can be stored in files. 1, 3, 5, or 10mm dia.
The energy dispersive type features less attenuation of sensitivity
for a small area than the wavelength dispersive type.
Vacuum Unit
with RP : P/N 212-22460
without RP : P/N 212-22460-01 Helium Purge Unit
(RP : oil rotary vacuum pump) without He gas Cylinder : P/N 212-22495-01
This unit is used for the high-sensitivity analysis of light elements. Used in direct analysis of a liquid sample. By replacing air with a He
Samples must not contain water or oil, and powder samples must atmosphere, X-ray absorption is reduced and sensitivity for light
be pressed before analysis. When analyzing a large number of elements is improved. In addition, it is effective for eliminating Ar
samples, this unit should be used together with a sample turret. peaks.
212-22685-91 Turret Drive Unit** Drives 8/16-sample turrets. Used together with a turret.
212-22354 Solid Sample Holder for Spinner A sample holder for the analysis of a sample less than 52 mm dia.
212-22357 Small Sample Holder for Spinner A sample holder for the analysis of a sample less than 11 mm dia.
Note : Items with ** mark are options to be installed at Shimadzu. (Factory option)
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