Scanning Electron Microscope

Dr. Fatimah Al-Hasani

 Specimen Stage
In general, the specimen is observed at a high magnification in an electron
microscope. Thus, a specimen stage, which stably supports the specimen and
moves smoothly, is required. The specimen stage for a SEM can perform the
following movements: horizontal movement (X, Y), vertical movement (Z),
specimen tilting (T), and rotation (R). The X and Y movements are used for the
selection of a field of view. While the Z movement provides the change of
image resolution
 Secondary Electron Detector
The secondary electron detector is used for detecting the secondary electrons
emitted from the specimen.
1- A scintillator (fluorescent substance) is coated on the tip of the detector and a
high voltage of about 10 kV is applied to it.
2- The secondary electrons from the specimen are attracted to this high voltage
and then generate light when they hit the scintillator.
3- This light is directed to a photo-multiplier tube (PMT) through a light guide.
4-Then, the light is converted to electrons, and these electrons are amplified as an
electric signal.
A supplementary electrode, called the collector, is placed before the scintillator.
In general, in order to help the scintillator acquire secondary electrons, a few
hundred volts is applied to this collector. By changing this voltage, you can control
the number of secondary electrons to be collected. This type of the detector was
originally developed by Everhart and Thornley, so this detector can be called the E-
T detector. Many SEMs incorporate this detector in the specimen chamber;
however, when a SEM is equipped with a strongly excited objective lens for higher
resolution , a secondary electron detector is placed above the objective lens and
secondary electrons are detected by utilizing the lens magnet- ic fields. This
detector is often called the TTL (Through The Lens) detector.
Secondary Electron Detector
 Image Display and Recording
The output signals from the secondary electron detector are amplified and
then transferred to the display unit. Since the scanning on the display unit is
synchronized with the electron-probe scan, brightness variation, which
depends on the number of the secondary electrons, appears on the monitor
screen on the display unit, thus forming a SEM image. A cathode-ray tube
(CRT) was used for many years as a display unit; however in recent years, a
liquid-crystal display (LCD) has been widely used. In general, the scan speed
of the electron probe can be changed in several steps, An extremely fast scan
speed is used for observation and a slow scan speed is used for acquisition or
saving of images.
To record an SEM image, in the past, the SEM image appearing on the CRT
was photographed with a camera. But recently, the image has been recorded
in a digital format (electronic file). This is because it is now difficult to get a
high-resolution CRT and there are many advantages of electronic file. That is,
it is easier to process images and convenient to send or receive image infor-
mation. Note that an image format with 1M pixels is generally used for the
electronic file.
 Vacuum System
The inside of the electron optical system and the
specimen chamber must be kept at a high vacuum of 10-3
to 10-4 Pa. Thus, these components are evacuated
generally by a diffusion pump. If a user desires an oil-free
environment, a turbo molecular pump may be used.
When a SEM incorporates an FE gun , a sputter ion pump
is used because the FE gun needs an ultrahigh vacuum.
To exchange a specimen, either of two methods is
applied. One vents the entire specimen chamber at the
time of specimen exchange. The other uses a specimen
pre-evacuation chamber (airlock chamber) while keeping
a high vacuum in the specimen chamber.
 Magnification of SEM
When the specimen surface is two-dimensionally scanned by the
electron probe, a SEM image appears on the monitor screen of the
display unit. At this time, if the scan width of the electron probe is
changed, the magnification of the displayed SEM image is also
changed. Since the size of the monitor screen is unchanged, decreasing
the scan width increases the magnification, whereas increasing the
scan width decreases the magnification. For example, when the size of
the monitor screen is 10 cm and the scan width of the electron probe
is 1 mm, the magnification is 100 times, whereas the scan width is 10
µm, 10,000 times. In terms of historical background, the magnification
is expressed for a screen of 12 cm (horizontal) and 10 cm (vertical) as
the standard (slightly different depending on a SEM manufacturer). If a
display unit has a larger monitor screen compared to the standard size,
the magnification of the displayed SEM image becomes larger. In such
a case, the magnification and the size of an object is calculated with a
scale bar displayed on the screen as a reference.
Concept of SEM magnification
 Why Images Are Visible?
Since the SEM image appears as if you observe an object with the naked eye, you may
intuitively understand the features of the object. However, the SEM image often
produces a contrast that is difficult to explain. To fully understand the contrast of the
SEM image, you must understand the principle of the formation of the SEM image.
Interactions of Electrons with Specimens
When electrons enter the specimen, the electrons are scattered within the specimen
and gradually lose their energy, then they are absorbed in the specimen. The
scattering range of the electrons inside the specimen is different depending on the
electron energy, the atomic number of the elements making up the specimen and the
density of the constituent atoms. As the energy is higher, the scattering range is larger.
To the contrary, if the atomic number and density are large, the scattering range is
smaller. The Monte Carlo simulation enables us to understand these phenomena the
Figure is a schematic diagram that illustrates various signals emitted from the
specimen when the incident electron beam enters the specimen. The SEM utilizes
these signals to observe and analyze the specimen surface (or just beneath the
surface). The SEM is not a sim- ple morphology-observation instrument, but a versatile
instrument capable of performing elemental analysis and state analysis
Emission of various electrons and electromagnetic waves from the specimen.
Difference in the contrast of secondary
electron images depending on the
accelerating voltage.
Specimen: Plate-like crystals of boron
nitride
 compares the OM and SEM images of a fractured surface of a screw. This fractured surface has
large irregularity, leading to a fact that only a small part of the surface is actually focused with the
OM. But, due to the large depth of focus of the SEM, the entire observed surface is in sharp
focus.
Colorized scanning electron micrograph of an apoptotic cell (red) heavily infected with SARS-
COV-2 virus particles (yellow), isolated from a patient sample. Image captured at the NIAID
Integrated Research Facility (IRF) in Fort Detrick, Maryland. Credit: NIAID.