Hirata CE EC DECLARATION OF CONFORMITY We, the undersigned, ke wé#id. 1S0-00785B-01-1/1 Manufacturer SG Hirata Corporation Address (Ef 1016-6 Kusuno, Kita, Kumamoto 861-5511 Country [8% Japan Phone nunber 2st 481 (0) 96-245-1333 FAX number FAX #45 481 (0) 96-245-0816 Under our sole responsibility, declare that the following apparatus: BA OWES BUT FEMS Equipment 38% Wafer Transfer Robot Model No. 83% AR-Wn230CL Series Wanipulator) HNC-960 Series (Control ler) (Gi of HNC-9601 stands for total axis number.) Serial No. BUF No. SANPLE Function 35807 Wafer transfer atmospheric robot Conplies with the provision of following European Directives. FigicR TWIN HOMIE THAT ESC CICMATS. European Directive MINdit Machinery Directive, 2006/42/BC RIRHG4 ENC Directive, 2014/30/BU ENC #4 Applied Harmonized Standards: _iamsete Nachinery Directive, 2006/42/EC EN TSO 10218-1:2011, EN 180 12100: 2010, EN [SO 13849-1:2015,_EN 60204-1:2006/A1:: 2009 ENC Directive, 2014/30/80 EMI: EN 61000-6-4:2007/A1:2011 EMS: EN 61000-6-2:2005 The Technical documentation is kept at the following address. #tiici OM) Omi Company Hirata Corporation. Kusuno-plant Name 5G% Koji Narita Address (i 1016-8, Kusuno-machi, Kita-ku, Kumamoto-shi, Kumaomto-ken Country 4 Japan if Phone number asa +96) (245) 1333 | FAX number FAX a5 96> (245) 0816 Note: This declaration becomes invalid, if technical or operational modifications are introduced without the manufactures consent. AA OBR Li + RKSNABS, COMALTBSRMTHS. Disclaimer: Supplier will have fol lovings 1. In the event of customer requirement (s) is (are) not compliant to European Directives. 2 In the event of customer supplied part (s) and designated part (s) are not compliant to European Directives. RG BADLUGMI, FRO TH. 1 OTL SOMMTIC AES Clore, 2 MEDS OA PREABLMM I ROME AES THEME. Place and date of issue KUMAMOTO, JAPAN; December 27, 2019 Name and position of person \ Binding the manufacturer or his 8 Authorized representative Ysignaturdy MOsZOMMAEAOREERSAORERERE — | Kaguhheo Toda Equipment Business Division / General Manager Hirata Corporation