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Treefrog Toe Pad-Inspired Micropatterning for High-Power


Triboelectric Nanogenerator
Van-Tien Bui, Qitao Zhou, Jong-Nam Kim, Jung-Hwan Oh, Kwan-Woo Han, Ho-Suk Choi,
Sang-Woo Kim, and Il-Kwon Oh*

1. Introduction
Inspired by treefrog’s toe pads that show superior frictional properties,
herein, an industrially compatible approach is reported to make an Today, portable and wearable electronic
efficient dielectric tribosurface design using customizable nonclose- devices, smart sensors for environmental
protection and healthcare monitoring sys-
packed microbead arrays, mimicking the friction pads of treefrogs, in
tems, and wireless sensing networks for
order to significantly enhance electrification performance and reliability the Internet of Things (IoT) are becoming
of triboelectric nanogenerator (TENG). The approach involves using indispensable in people’s modern lives.
an engineering polymer to prepare a highly ordered large-area concave With the technological advances of these
film, and subsequently the molding of a convex patterned triboreplica in assisting facilities, the quality of human
which the concave film is exploited as a reusable master mold. A nature- life has been improved a lot, but these
devices are also simultaneously driving
inspired TENG based on the patterned polydimethylsiloxane (PDMS)
an energy crisis and pollution problems
paired with flat aluminum (Al) can generate a relatively high power density are becoming more serious due to the
of 8.1 W m−2 even if a very small force of ≈6.5 N is applied. Moreover, the use of limited lifetime rechargeable bat-
convex patterned PDMS-based TENG possesses exceptional durability teries as a traditional power source.[1] In
and reliability over 25 000 cycles of contact–separation. Considering the addition, while the power consumption
of microelectronics is on a decreasing
significant improvements in power generation of TENG; particularly at
trend, the amount of units has increased
very small force, together with cost-effectiveness and possibility of mass dramatically, leading to an impossible task
production, the present methodology may pave the way for large-scale of recharging or replacing huge number
blue energy harvesting and commercialization of TENGs for many practical of batteries.[2] Therefore, an innovative
applications. kind of energy harvester, the triboelectric
nanogenerator (TENG), which can harvest
electric energy from abundant mechanical
energy in the living environment for self-
Dr. V.-T. Bui, Dr. Q. Zhou, J.-N. Kim, Dr. J.-H. Oh, K.-W. Han, Prof. I.-K. Oh powered and autonomous integrated systems, was developed
Creative Research Initiative Center for Functionally Antagonistic by Zhong Lin Wang and has attracted great attention from
Nano-Engineering academic and industrial societies.[3] In general, TENGs are
Department of Mechanical Engineering constructed from two dielectric layers with different electron
Korea Advanced Institute of Science and Technology (KAIST)
291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
affinities, assembled face-to-face with two electrodes adhering
E-mail: ikoh@kaist.ac.kr to the backsides. TENGs generate electricity based on the
Dr. V.-T. Bui conjunction of triboelectrification and electrostatic induction
Faculty of Materials Technology during periodic contact and separation of the dielectric layers.[4]
National Key Lab. of Polymer and Composite Materials It has been demonstrated that TENGs have many advantages
HoChiMinh University of Technology such as light weight, robustness, simple fabrication, and high
Vietnam National University
HoChiMinh City 10288, Vietnam efficiency, especially for harvesting energy from irregular, low-
Prof. H.-S. Choi frequency (<5 Hz) motions.[5] Therefore, TENGs not only are
Department of Chemical Engineering and Applied Chemistry suitable for microelectronic systems but also have potential as
Chungnam National University a promising technology for harvesting large-scale energy from
220 Gungdong, Yuseong-gu, Daejeon 305-764, Republic of Korea ocean waves or wind.
Prof. S.-W. Kim Many studies investigated boosting the electrical output per-
School of Advanced Materials Science and Engineering
Sungkyunkwan University (SKKU)
formance of TENGs based on materials selection, new design,
Suwon 16419, Republic of Korea and surface engineering.[3b,6] Among those studies, surface pat-
The ORCID identification number(s) for the author(s) of this article terning methods including soft lithography, block-copolymer
can be found under https://doi.org/10.1002/adfm.201901638. lithography, colloid template, and plasma treatment have been
proved to be valuable surface modifications that can produce
DOI: 10.1002/adfm.201901638 high-performance TENGs.[7] However, the development of such

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devices often suffers from obstacles such as high cost, low friction under both dry and wet conditions. As a part of the
throughput, high time consumption, complicated processes, efforts to create powerful friction tribosurfaces for high-perfor-
and difficulty in adjusting pattern features; these obstacles mance TENGs, we have developed a new method to produce
definitively constrain practical applications of TENG, especially highly ordered hexagonally nonclose-packed micropattern
for megascale energy harvesting, in which huge numbers of arrays on the dielectric surface. The overall fabrication process
large-area TENG devices must work together. To simplify the of the convex patterned PDMS film is depicted in Figure 1b. As
fabrication procedure and realize mass production, Li and can be seen, the process begins by using our improved phase
co-workers demonstrated the use of sand paper to increase the separation (IPS) method to prepare a highly ordered large-scale
roughness of the tribosurface.[8] Alternatively, nature-replicated concave film with a uniform thickness. Subsequently, the corre-
structures were created by soft lithography using surface mor- sponding convex patterned PDMS was fabricated via a molding
phologies from nature (lotus leaf, rose petal, and cicada wing) method in which the as-prepared concave film was exploited as
as molds.[9] In addition, Xu and co-workers reported the fabrica- a reusable mother mold. Details of the experiment are provided
tion of a polydimethylsiloxane (PDMS) film with a microlens in the Experimental Section. Compared to the conventional
array via a combination of breath figure (BF) and micromolding BF method, the newly developed IPS method has advantages
methods.[10] These approaches are valuable and possess advan- of fabricating an almost ordered concave film and relying on
tages for simple and large-scale fabrication; however, perfor- methanol as a suitable nonsolvent that can induce the forma-
mance of TENGs has still been low in the former strategy due tion of a polymer layer that stabilizes droplets, enhancing the
to random and low porous structure, and due to the difficulty of lateral capillary force between adjacent droplets and facili-
controlling the microlens array in the latter strategy. Moreover, tating the formation of an ordered structure. As a result, the
the BF method requires not only an expensive block copolymer IPS method requires neither specially designed polymers nor
but also a highly humid environment which, to some extent, additional humid air, and thus large area highly ordered con-
increases the production cost, lowers the reproducibility, and cave films of engineering PMMA were successfully obtained.
constrains the super-large area production of TENG.[11] There- Indeed, using the IPS method, a variety of commercial poly-
fore, developing a new approach for producing high-perfor- mers including polystyrene, poly(lactic acid), polyvinyl chloride,
mance TENGs at low cost and with large-scale micropatterned and polyimide can be used to make highly ordered concave
surfaces still remains a challenging issue. films (see Figure S1 in the Supporting Information). Moreover,
Inspired by treefrog’s toe pads where they possess hexag- it is worthwhile to note that the preparation of a concave film
onal micropattern structures which are able to maximize real by IPS just took a few minutes, while the fabrication of convex
contact with surface profile of various substrates and thereby patterned PDMS films by molding method took within 4 h.
enhance frictional properties. This study presents treefrog toe Therefore, this strategy possesses advantages of time-saving as
pad-inspired micropatterning of dielectric tribosurfaces using well as mass production.
customizable nonclose-packed microbead arrays, revealing a The convex patterned PDMS based-TENG was assembled in
morphology that resembles friction pads of treefrogs in order a basic vertical contact–separation mode; its working principle
to significantly enhancing electrification performance and reli- in single cycle operation is shown in Figure 1c. In the original
ability of TENG. The approach involves the large-scale fabrica- state, there is no charge generated on either the PDMS or Al
tion of a concave poly(methyl methacrylate) (PMMA) film via an surfaces. Once two tribosurfaces are brought into physical
improved phase separation method; then, a convex patterned contact, positive charges are formed on the Al surface, while
PDMS is formed using the concave film as a reusable mother corresponding negative charges are generated on the PDMS
mold. The pore array features of the concave film can be pre- surface according to the working principle of contact elec-
cisely controlled, meaning that the surface morphology of the trification.[12] Due to charge accumulation, the triboelectric
corresponding convex patterned PDMS can be adjusted in term charge density on the dielectric surface gradually increases and
of both pattern size and separation between the patterns. The reaches a saturation state after a number of contact–separation
as-prepared convex PDMS was coupled with aluminum (Al), cycles; the negative charges can be well-preserved on the PDMS
which serves as both friction surface and electrode, to form a surface due to the inherent insulator-nature of PDMS. When
vertical contact–separation mode TENG. The influence of sur- contacting surfaces are being separated, the electrostatic field
face features of the convex PDMS film on the performance of rising from the charges on the dielectric surface and the top Al
the TENG device was systematically investigated and compared. surface drives electrons in the attached bottom electrode to flow
Finally, the treefrog toe pad-inspired micropattern PDMS-based through the external load to the top electrode until electrostatic
TENG device was used to directly drive an electronic thermom- equilibrium is established. The charge density of the bottom Al
eter and to turn on several light-emitting diodes (LEDs). electrode is a function of the gap distance between the dielec-
tric and the top electrode. When the two surfaces become closer
again, the electrostatic field drives transferred electrons to flow
2. Results and Discussion back from the top Al electrode to the attached Al electrode,
until the system goes back to the fully pressed equilibrium
Mimicking natural structures has been considered a remark- state. Thereby, single cycle operation is achieved. The working
able strategy of achieving advanced multifunctional materials. principle can be validated by current signals generated during
For instance, hexagonal surface micropattern that resembles one cycle contact–separation of TENG (Figure 1d).
the microcosmic structure of treefrog’s toe pads (Figure  1a), It has been thought that the enhancement of triboelectri-
has gained significant interests in relation to controlling fication output of the micro/nanostructured surfaces can

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Figure 1.  a) Picture illustrating a treefrog animal standing on a leaf and closed-up microstructure of its toe pads. b) Scheme representing the fabri-
cation process of the ordered concave polymer film and the convex PDMS replica. c) Sketch demonstrating the electrical generation during 1 cycle
contact–separation of TENG. d) Current signals generated during 1 cycle contact–separation of a flat PDMS based-TENG and a convex PDMS based-
TENG, respectively.

mainly be attributed to the increase in friction area. However, Recently, Wu et al. proved that the amount of charge transfer is
in some cases, particularly in a surface structured with cylin- not only determined by the friction area, but also significantly
drical micropatterns, the increase in contact area might not be affected by stress in the contact region.[14] In other words,
sufficient to explain the significant improvement of the output the deformation magnitude of surface patterns critically gov-
electrification compared to that of the planar surface.[13] erns the output performance of the patterned surface-based

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TENGs. Otherwise, a sticky issue often associated with par- Surface morphologies of a typical as-prepared concave film
tial contact can occur with two flat surfaces because tiny air and its corresponding convex patterned PDMS are shown
bubbles can be trapped inside closed regions formed by the in Figure 2. Figure 2a–c shows the large-area uniformity and
pressed surfaces, reducing the reliability and performance of highly ordered honeycomb concave structures of the PMMA
TENGs. Nevertheless, these issues can be overcome by pat- film. Note that a super-large-area concave film with ordered
terning the surface with continuously draining channels.[15] honeycomb structure (i.e., A4 size honeycomb film) can be
Based on the above findings, we propose that the rational produced using this strategy (see Figure S3 in the Supporting
design of an appropriate micro/nanopatterned surface that Information). In a typical experiment using a methanol con-
achieves the largest contact area, maximum deformation mag- tent of 15 vol%, the size of pores is ≈2.7  µm, with separation
nitude, and longest draining channel is crucial for fabricating between pores of ≈0.8  µm (Figure 2b). From a cross-sectional
high-performance and reliable TENG devices. In addition, view (Figure 2c), it can be clearly observed that the monolayer
it has been reported that porous structures can induce addi- of isolated pore array formed on the surface of the polymer
tional charges and also enhance final capacitance by reducing film; in this monolayer, each pore has a spherical jar shape. The
the dielectric film thickness, resulting in enhancement of the inset fast Fourier transform (FFT) pattern further confirms the
output performance of TENGs.[7e,16] In this case, uniformly long-range ordered hexagonal structure of the pore array. Sub-
nonclose-packed microbead arrays with tunable separation sequently, convex patterned PDMS films were fabricated using
between patterns were prepared. Note that the uniform pat- the corresponding concave films as mother molds. As shown
tern array with a special curved geometrical structure helps in Figure 2d–f, a large-area monodispersed microlens array
to enhance the contact area,[17] while a proper separation is was observed and all figures confirm the uniformity of the con-
favorable for achieving large deformation under a specific cave film throughout the coated surface. The microlens has a
pressure. Figure S2 in the Supporting Information presents spherical bead-shape with diameter of ≈3.7  µm and uniform
force signals obtained by a force sensor on flat and convex height of ≈1.6 µm, which corresponds to the pore shape of the
patterned surfaces under the same external amplitude. It can concave film. It is worthwhile to note that the concave PMMA
be observed that the impulses obtained with the flat surface film is flexible and has sufficient mechanical strength to retain
are larger than the ones obtained with the patterned surface the micropatterned structure after several iterations of the
for both pressing and releasing states. This is because exces- stamping mold process (see Figure S4 in the Supporting Infor-
sive stress in the pressing state and a sticky phenomenon in mation), resulting in reduced processing time and improved
the releasing state should occur for the flat surface, whereas reproducibility of producing the convex patterned triboelectret.
elasticity associated with large deformation can occur in con- The convex patterned PDMS films with different pattern
tact regions of the patterned surface. This result obtained is sizes and separations between patterns (Figure  3b2–d2,b3–d3)
consistent with previous report.[17] Therefore, the tribosurface were fabricated using their corresponding concave films as
with appropriate micropattern array prepared by this method mother molds, which were prepared by IPS method with varied
demonstrates dramatic enhancement of the output electric methanol contents (Figure 3b1–d1). For comparison, another
generation compared to that of the unmodified flat surface, as porous PMMA film and its corresponding convex PDMS film
can be clearly seen in Figure 2d. were also prepared using the BF method (Figure 3a1–a3). As

Figure 2.  Surface morphologies of a typical concave film prepared with a chloroform/methanol ratio of 85/15 at an ambient atmosphere (i.e., tem-
perature of 25 °C and humidity of 55%), and its corresponding convex PDMS replica. From left to right are optical microscope images, surface SEM
images, and cross-sectional SEM images, respectively, of the concave honeycomb film a–c) and the convex patterned PDMS film d–f). The inset of
(b) is the corresponding FFT pattern obtained from SEM image of the concave film.

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Figure 3.  Surface morphologies of concave polymer films and their corresponding convex patterned PDMS replicas. a1–d1) FESEM surface images
of concave porous films prepared by static BF method and IPS method with different methanol contents (10–20%). Porous polymer films with IPS were
prepared in normal ambient air with temperature of 25 °C and relative humidity level of 55%, while film with static BF was prepared under humidity
of ≈80%. a2–d2) FESEM surface images of corresponding convex patterned PDMS replicas prepared using concave porous films as mother molds.
a3–d3) FESEM cross-sectional images of PDMS replicas. Scale bars are 10 µm.

can be seen, the concave films prepared by IPS method dem- method is highly desirable for the fully packed TENG where no
onstrated uniformly ordered structures with methanol content gap between electrodes is needed.[17]
ranging from 10 to 20 vol%, whereas a nonuniform porous PDMS films with different microlens arrays were prepared
film was obtained using the BF method. As a result, the and exploited as negative tribosurfaces for vertical contact–sepa-
corresponding convex patterned PDMS films with uniform ration mode TENGs. Three convex patterned PDMS films pre-
microlens arrays were obtained using the IPS method, while a pared by IPS method with methanol contents of 10%, 15%, and
nonuniform convex pattern was obtained using the BF method. 20% were denoted as IPS10, IPS15, and IPS20, respectively. The
In addition, the microlens arrays obtained by IPS method pos- effect of the film surface morphology on the electrical output
sessed larger pattern size than the one prepared with the BF performance of the TENG devices was systematically investi-
method, and the size increases with increasing methanol con- gated and compared with the case of flat PDMS-based TENG
tent. Moreover, isolated microlens arrays were obtained with as a control. The open-circuit voltage and current density of the
IPS method at methanol content below 15%, while intercon- TENG devices assembled with different PDMS films are shown
nected microlens array was obtained using BF method and IPS in Figure 4a,b. As can be seen, both the output voltage and cur-
method at methanol content over 20%. The calculated surface rent density of the TENGs with structured PDMS films were
features of the convex patterned PDMS film prepared by BF significantly enhanced compared to the case of using nonmodi-
and IPS methods are provided in Figure S5 in the Supporting fied flat PDMS film. Among the structured PDMS films, the
Information. three films prepared with the IPS method in a methanol content
It is reported that ordered honeycomb films can be pre- range of 10–20% demonstrated better electrical generation effi-
pared via BF methods with special polymers such as amphi- ciency than that of film prepared with BF method; this is because
philic polymers, star-shape polymers, and block copolymers; TENGs based on IPS10, IPS15, and IPS20 films have higher
however, close-packed structures are usually obtained.[10,11,18] voltages and current densities than those of the TENG based
Nonclose-packed patterns that can be directly obtained by the on BF film. Moreover, the TENG with PDMS film, which was
newly developed IPS method with avoiding additional postsyn- prepared via IPS method with methanol content of 10%, exhib-
thetic steps thus making the process more cost-effective may ited the highest electrical output performance with a voltage of
offer additional benefits over their close-packed analogues for ≈490 V and current density of ≈24.4 µA cm−2 under an applied
TENG application such as improved degree of deformation due force of ≈38 N and triggering frequency of 5 Hz. This output
to increased separation between adjacent deformation sites.[19] voltage and current density are 2.4 and 9 times higher, respec-
Therefore, well-controlled micropattern array prepared by this tively, than those of the flat PDMS-based TENG. In addition,

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Figure 4.  Output open-circuit voltages a) and short-circuit current density b) of TENGs using flat and various-structured PDMS friction layers, respec-
tively. Dependence of output voltage and current density of TENG with IPS10 on resistance of external loads c). Variation of instantaneous power of
TENGs with flat, BF, and IPS10 on resistance of load d). Durability test of convex-TENG for 25 500 cycles e). Triggering conditions for these charac-
terizations were frequency of 5 Hz and applied force of ≈38 N.

the transfer charge densities of the TENGs using different the triboelectric effect.[7a,20] Based on this concept, uniform pat-
structured PDMS friction layers were compared as shown in tern arrays (IPS10 and IPS15), which have definitively larger
Figure S6 in the Supporting Information. It demonstrates the actual friction area, should possess higher electrical generation
similar tendency with short-circuit current densities as shown ability than nonuniform pattern arrays (BF and IPS20). The
in Figure 4b. Particularly, the TENG with IPS10 possessed the experimental results obtained agree well with theoretical expec-
highest transfer charge density of 41.3 µC m−2; this value is tations. However, the increase in friction surface might not
almost 8 times higher than that of the TENG using a flat PDMS be sufficient to explain the performance enhancement of uni-
and it is also much higher than that of the TENGs based on form pattern arrays with different densities, since IPS15 has a
other structured PDMS layers. The effect of micropatterns on higher friction surface but lower electrical generation efficiency
the performance enhancement of TENG device has been thor- than IPS10. As discussed above, the amount of charge transfer
oughly discussed in previous studies; improvement is mainly not only is governed by the friction area, but also strongly
attributed to increase in friction area of the patterned surface depends on the degree of deformation at the contact region.
compared with the planar surface, leading to enhancement of As shown in Figure S5b in the Supporting Information, the

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separation/diameter ratio, which is closely related with the microbead array can be attributed to its elasticity. Therefore, the
deformation ability of patterns, was calculated and found to be slight decrease in output voltage can be attributed to contami-
slightly higher on IPS10 than on IPS15. Therefore, IPS10 has nation of the PDMS surface by dust from the air. The output
higher potential than IPS15 to obtain maximum deformation performance recovers to the initial value when dust is removed
and stress, resulting in output performance of IPS10-based by nitrogen blowing or a simple washing process. These results
TENGs larger than that of IPS15-based TENGs. The highest suggest that the TENG based on the as-prepared convex pat-
output obtained with IPS10 agrees with the result by Dudem terned PDMS film has exceptional structural durability and
et al. They proved that the patterned surface with optimal superior performance stability.
stress and contact area would result in the highest electrical The output performance of the TENG is strongly related to
performance of TENG devices. Moreover, we conducted addi- the compressive force on the contact region; accordingly, large
tional experiments to prove the effect of deformation degree force yields higher output, as shown in Figure 5a. The increase
on performance enhancement of a convex patterned surface- of the output voltage and current density of the TENG can be
based TENG. In the first experiment, separation of IPS15- attributed to the increase in contact area and effectiveness of
mircrolens array was increased by stretching the film, thereby the triboelectrification as well as reduction of the final thick-
increasing the deformation potential of the microlens array. ness of the convex patterned PDMS film with increasing com-
As expected, the TENG based on the prestretched IPS15 film pressive forces. The electric output of the TENG device under a
showed a considerable enhancement of both output voltage and certain triggering force has been considered as the most impor-
current compared with the case of using pristine IPS15 film tant factor to determine the energy conversion efficiency of
(see Figure S7 in the Supporting Information). In the second the device. Therefore, the variation of the instantaneous power
experiment, the separation of the IPS15-microlens array was densities of the IPS10-based TENG device corresponding to
kept at the original level, while the film was divided into several the change of external loads under different applied forces
smaller pieces and the effect of separation between the sepa- was investigated (see Figure S10 in the Supporting Informa-
rated pieces on the output performance was investigated. As tion). Beyond this, we conducted a comparative study of the
can be seen in Figure S8 in the Supporting Information, TENG density of the power generated by the TENG device developed
performance first increased with increasing separation, but in this study with other PDMS-based TENGs from selected
decreased with too-large separation. Based on these results, it is previous reports (Figure 5b).[5b,7e,16b,21] It is obviously demon-
clearly confirmed that TENG performance can be enhanced by strated that the newly developed TENG device possesses much
increasing the deformation degree of the electret film. higher power density than those of all other selected PDMS-
In order to determine the power generation effective- based TENGs for a wide range of applied forces. Importantly,
ness of the as-prepared TENG device to external loads, the the present TENG can yield superior power density (8.1 W m−2)
IPS10-based TENG was connected to resistors with different especially under small applied force (6.5 N), and this result
resistance values. As shown in Figure 4c, the instantaneous is believed to be highly meaningful for practical applications.
voltage increased gradually while the current density decreased The merit of the tribomaterial produced by this method lies on
with increasing external load from 103 to 109 Ω, demonstrating the special nonclose-packed microbead array which is inspired
a trade-off phenomenon due to ohmic loss. Based on this by the microcosmic structure of treefrog’s toe pads showing
result, the instantaneous output powers generated by IPS10 enlarged real contact with surface profile of various substrates,
2
based-TENGs on the loads were calculated (Wd = I peak R); results thereby large contact area and maximized deformation magni-
are depicted in Figure 4d. As can be seen, the power density tude can be propagated even if a very small compressive force
of the IPS10-based TENG first increased and then reached is applied. In addition, a comparison in output performance
a maximum value of ≈24 W m−2 at a matched resistance of of TENG devices based on micro/nanopatterned triboelectrets
4.3 MΩ before decreasing with increase in the resistance value. including previously reported works and this work was con-
With the same characterization method, the variation of power ducted, as shown in Table S1 in the Supporting Information.
density of the TENG devices assembled with flat PDMS and BF The effect of the triggering frequency and the size of the device
were also obtained (Figure 4d). The maximum output power on the TENG performance were also investigated and depicted
densities of the BF-based TENG and flat PDMS-based TENG in Figure 5c,d. (Their raw data are given in Figures S12 and S13
were 6.8 and 3.4 W m−2, respectively, at the same external load in the Supporting Information.) The output voltage and current
of 100 MΩ. These results indicate that the IPS10 film boosts density slightly increased with increase in the frequency from 1
the output power of the TENG device to 3.5 and 7 times higher to 10 Hz. However, the voltage increased while the current den-
than those of the BF-PDMS film and unmodified planar PDMS sity decreased when the size of TENG device becomes larger.
film, respectively. In order to demonstrate the high energy harvesting effi-
Long-term durability is an important feature of TENG ciency and high power output of the as-prepared TENG devices,
devices for practical applications. The cyclic stability of the as- the IPS10-based TENG device was used to charge commercial
prepared TENG device was evaluated by continuous testing for capacitors through a rectifier bridge. The charging rate curves
25 500 cycles under the highest applied force used in this study of capacitors charged using TENG devices with size of 3 × 3 cm2
(≈38 N) at a frequency of 5 Hz (Figure 4e). The output voltage under applied force of ≈30 N at a frequency of 20 Hz are shown
signal of the as-prepared TENG device was uniform and no in Figure  6a. As can be seen, capacitors with small capacities
obvious change after 25 500 cycles was observed. The micro- (0.1, 1, and 10 µF) can be quickly charged to over 10 V, while
lens array of the PDMS film was well preserved (see Figure S9 a relatively large 100 µF capacitor can reach a voltage of ≈3 V
in the Supporting Information). The high durability of the within 150 s. In addition, a 1000 µF capacitor was chosen as

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Figure 5.  Dependence of output voltage and current density of IPS10-based TENG device on applied force a), triggering frequency c), and size of device
d). b) Comparison of power densities of TENG devices obtained in present study and in previous reports. The selected references used in (b) are
provided in the Supporting Information.

a storage component to power an electronic thermometer after therefore able to successfully power the thermometer in normal
a charging process supported by the TENG under the same working condition for at least 30 s, which is long enough for
triggering conditions. The charging curve of the capacitor several right tests (see Figure 6c). An arch-shaped three-friction-
(Figure 6b) showed that it was charged to ≈2 V within 420 s; it is layered TENG device was fabricated in order to enhance the

Figure 6.  a) Charging curves of capacitors with different capacitances for IPS10-based TENG device with size of 3 × 3 cm2 applied force of ≈30 N at
frequency of 20 Hz. b) Charging and discharging process of 1000 µF capacitor by TENG device under identical triggering conditions and powering
electronic thermometer. c) Photographs illustrating experimental setup and possibility for use of TENG to charge capacitor and then to power tem-
perature sensor. d,e) TENG device with three friction layers used to instantly turn on 400 blue LEDs under simple hand pressing. f) Output voltage of
three-friction-layer TENG device under simple hand pressing.

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total output power, as depicted in Figure 6d. Two convex pat- For comparison, porous PMMA film was also prepared by static
terned PDMS films (4.5 × 4.5 cm2) were symmetrically attached BF method. Accordingly, a 10 wt% PMMA solution in chloroform was
to the inside surfaces of the top and bottom Al electrodes, which casted onto a copper surface in a highly humid environment (humidity
of ≈80%). After drying, porous PMMA film was obtained.
play roles of negative friction surfaces, while the center Al elec- The convex patterned PDMS film was fabricated by micromolding
trode serves as the positive friction surface. 400 light-emitting method using the as-prepared concave PMMA film as mother mold.
diodes can be instantaneously lit using this device to harvest The base PDMS and its crosslinker with ratio of 10:1 w/w was
energy from simple hand pressing (see Figure 6e and Video thoroughly mixed and then casted onto the concave film. Note that the
S1 in the Supporting Information). The output voltage of the casting film should be carefully degassed in vacuum to ensure liquid
device was also measured to prove its high capability for pow- PDMS completely fills the micropores. The PDMS precursor was cured
at 70 °C for 4 h, and then carefully peeled off from mold to obtain
ering many electronic devices, with results shown in Figure 6f.
the convex patterned PDMS film and leave the concave PMMA mold
without any damage. The concave PMMA mold can be reused many
times.
3. Conclusion Assembly of TENG: Two polystyrene plates with aluminum adhering
to their inner surfaces were used as top and bottom mechanically
We presented a simple, fast, scalable, and cost-effective method supporting substrates for TENG. The convex patterned PDMS was
then fixed onto the bottom substrate by adhering its smooth surface to
to pattern a dielectric tribosurface with highly ordered and
the Al while its patterned side served as friction surface. Al on the top
nonclose-packed microbead arrays, mimicking the friction pads substrate served both as friction surface and electrode. To investigate
of treefrogs. The pattern features, such as the size and separa- the influence of the surface morphology of the PDMS film on the
tion between adjacent patterns, can be tuned by adjusting the performance of the TENG, devices with size of (2 × 2 cm2) were used.
methanol content. The nature-inspired TENG based on the The separation distance of two triboelectric layers of the TENG was fixed
structured PDMS film prepared with methanol content of 10% as about 5 mm.
and paired with flat Al as two friction surfaces demonstrated an Characterization: The surface morphologies of the concave PMMA
films and the convex patterned PDMS films were characterized using
instantaneous power density of 23.9 W m−2 with output voltage field-emission scanning electron microscopy (FE-SEM, S-4800, Hitachi,
of 490 V and current density of 24.4 µA cm−2 under moderately Japan). A mechanical shaker (Model No. ET-126-4, Labworks Inc.) was
applied force of ≈38 N at frequency of 5 Hz, indicating a sev- used to apply vertical impulse impact to the TENG. A digital phosphor
enfold power density enhancement relative to the case of a flat oscilloscope (Model No. DPO 3052, Tektronix, Inc., Beaverton,
PDMS-based TENG. Moreover, both the concave PMMA film OR, USA) and a low-noise current preamplifier (Model No. SR570,
and the convex patterned PDMS film demonstrated high flex- Stanford Research Systems, Inc., Sunnyvale, CA) were used for
electrical measurements. The input force applied to the TENG was
ibility and mechanical robustness because the concave film can
measured by a force sensor (Model No.1051V3, Dytran Instrument,
be reused many times without damage, while the convex pat- Inc.,USA) integrated with an ICP sensor signal conditioner
terned PDMS based-TENG possessed an exceptional durability (Model No.480E09).[6a]
and reliability for over 25 000 cycles of contact–separation. We
believe that the presented methodology can promote significant
progress in the green energy harvesting field owing to its sig-
nificant advances in facility, cost-effectiveness, efficiency, and
Supporting Information
capability for mass production, giving this device great poten- Supporting Information is available from the Wiley Online Library or
tial for many practical applications. from the author.

4. Experimental Section Acknowledgements


Materials: PMMA engineering polymer (PMMA EG920) was kindly This work was supported by the Creative Research Initiative Program
supplied by LG Chem Co. (Seoul, Korea). PDMS and curing agent (2015R1A3A2028975), funded by the National Research Foundation
(Sylgard 184) were purchased from Dow Corning. Copper film (thickness of Korea (NRF). This work was supported by the Defense Acquisition
of 0.1 mm) was obtained from 4Science (Seoul, Korea). The copper films Program Administration and the Agency for Defense Development in
were successively cleaned with acetone, 0.1 m sulfuric acid solution, Korea under the contract UD170023DD.
and distilled water, followed by blow-drying in nitrogen gas prior to
use. Chloroform (anhydrous, with amylenes as stabilizers; 99.8%) and
methanol (anhydrous; 99.8%) were purchased from Sigma-Aldrich and
used as received. Conflict of Interest
Fabrication of Concave and Convex Film: Large-scale concave film The authors declare no conflict of interest.
with uniform thickness was prepared by IPS method, as reported in
the previous work.[22] Briefly, a 10 wt% solution of PMMA in chloroform
was spin-coated or bar-coated onto the copper surface and dried.
Subsequently, the polymer film was exposed to the mixture of chloroform Keywords
and methanol (methanol content ranged from 10 to 20 vol%) before
drying in air (i.e., temperature of 23 °C and humidity of 55%). The mass fabrication, nonclose-packed, surface patterning, Treefrog toe pads,
dipping conditions were dipping time of 5 s and withdrawal speed of triboelectric nanogenerators
60 cm min−1. Ordered concave film spontaneously formed on copper
substrate after complete drying process. Note that it was possible to Received: February 23, 2019
obtain super-large-scale concave film with industrial coating techniques Revised: April 15, 2019
such as doctor blade coating or “roll-to-roll” coating. Published online:

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www.advancedsciencenews.com www.afm-journal.de

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