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    2019 - Patent - Method for Producing Metal-based Carbon Fiber Composite Material

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    19 views21 pages

    2019 - Patent - Method For Producing Metal-Based Carbon Fiber Composite Material

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    ECE IV Year
    CXCXCX

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    US 2019000165241 2) Patent Application Publication co) Pub. No.: US 2019/0001652 A1 cu») United States MIZO (34) METHOD FOR PRODUCING METAL-CARBON FIBER COMPOSITE, MATERIAL. (71) Applian: SHOWA DENKO KK., Tokyo (IP) (02) Inventor: ‘Tatsubiro MIZO, Tochigi QP) (3) Assiance: SHOWA DENKO K:K., Tokyo (1P) Appl. No. 161065,680 PCT Filed: Aug. 25, 2016 PCT Nos PCT/SP2016/074733 § 371 (XI), (2) Date: Jun, 22, 20185 G0) Foreign Application Priority Data Dee. 24, 2015 UP) Publication Classification GI) Inc B32B 37018: (2006.01) B20 1508 (2006.01) 328 15720 (2006.01) _—10A(10) a (43) Pub. Date: Jan. 3, 2019 a2 3710 200501) B28 3800 (2006.01), BOSD 1728 (200501), 62) US.¢ coe 328 37/15 (2013.01); B32B 1908 (2013.01); 8328 19720 201301): B32B 370 (2013.01y, 8328 2255726 (2013.01); BOSD 1/28 (2013.01), B32B 2307/304 (2013.01), {B32B 2262/106 (2013.01); B32B 2255/06 (2013.01); 8328 38/0036 (2013.01) on ABSTRACT A method for producing a meta-carbon fiber composite ‘material includes the steps of: obtaining a coated fil (12) in ‘whieh a carbon fiber layer (I1) i formed on a surface (103) cof a metal foil (10) by applying a costing liquid (8) con- ing carbon fibers (1), ee, on the surface (10a) of the cal fol (10) wih « gravure coating device (20); fonning 4 laminate in which s plurality of coated foils (12) is Jminated: and integrally joining the coated foils (12) by heating while pressurizing the laminate in a lamination rection ofthe coated foils (12). The shape ofa cell (22) of circumferential surface (21a) ofa gravure roll (21) of the ‘rave coating device 20) is cup shape sad a diameter of circle inserbed in a mouth shape of the cell (22) is set 0 1.2 times or more the average her H12A(12) Patent Application Publication Jan. 3,2019 Sheet 1 of 8 US 2019/0001652 Al Obtzining a coated foil ~[|—S1 Removing a solvent }—-]— Sta I Forming a laminate — | ~S2 Integrally sintering |_— coated foils S3 Removing a binder |-t—S3a FIG.1 Patent Application Publication Jan. 3,2019 Sheet 2 of 8 US 2019/0001652 Al zn ZN, -AA(10)) 10A(10)—<— ae 12A(12) ek? Opt ee 28 7 FIG. 2 Patent Application Publication Jan. 3,2019 Sheet 3 of 8 US 2019/0001652 Al 22(22A) =e IN wy} i . FIG. 3A ‘Ib 221 > FIG. 3B INN oe 22d-—-7 AX ween FIG. 4A 22(22B) _ 22a FIG. 4B Patent Application Publication Jan. 3,2019 Sheet 4 of 8 US 2019/0001652 AI FIG. 5A 22(22D) 2d 22a 22b FIG. 6B Patent Application Publication Jan. 3,2019 Sheet 5 of 8 US 2019/0001652 Al 22 “ _—22a ~< 22> FIG. 7A 2d 20. a aap FIG. 7B 20d 22 vy ‘gab FIG. 7C 22a * |? 20g 22c FIG. 8 Patent Application Publication Jan. 3,2019 Sheet 6 of 8 US 2019/0001652 Al 29 12A(12) _/ 12 (3 A ; an FIG. 9 FIG. 10 FIG. 11 Patent Application Publication Jan. 3,2019 Sheet 7 of 8 US 2019/0001652 Al (9,) @yeuIWe| Jo eunjesoduso | Time (min) Patent Application Publication Jan. 3,2019 Sheet 8 of 8 US 2019/0001652 Al Upper side 50a | 56 Di ee elias 55a Lower side FIG. 15 US 2019/0001652 AI METHOD FOR PRODUCING METAL-CARBON FIBER COMPOSITE ‘MATERIAL FIELD OF THE INVENTION 0001] The present invention relates to a method for producing a metal-carbon fiber composite material and a Inethod for producing an insulating subseate 0002] inthis specification and appended claims, the tem “aluminum” js used to mean both pure alumnus and an siuminum alloy unless otherwise specifi, and inthe same ‘manner, the tem “copper” is used to mean both pure eoppee and a copper alloy unless otherwise specif. 10003] A verical direction of an insulating, substrate according to the present invention is nt limited. However in this specification and appended claims forthe purpose of foeiliating the understanding of the configuration of the insulating subsite, the mounting surface side ofthe insa- Jating substrate on which a heat generating element is mounted is refered 10 a8 the upperside of the insulating substrate, and the opposite side there is refered to as the Jower sie of the insulating substrate BACKGROUND ART 10004] Asia material improved in beat dissipation of metal such as aluminum and eontrolled in fincae expansion cael Fein, an aluminuon-carbon material composite material is being stodied [0005] As method! for producing tis composite materisl ‘a method in which carbon fibers as carbon material are pul jn molten aluminum and sted and mixed (molten metal stirring method), a method of pushing molten aluminum into ‘carton molded body having cavities (moltea metal forging method), a method in which aluminum powder and carbon powder are mixed and heated under pressure (powder mel- ‘llurgy method), and a method ia which sluminum powder tnd caron powder are mixed and extruded (powder extrie sion method) are known, 10006) | However, with these methods, since molten alumi sum oral powder is sed, the production work Was ‘compligated and the producing equipment was lange 10007] Japanese Unexamined Patent Application Publi tion No, $9-76840 (Patent Document 1) diseloses a method ‘of producing a reinforced metal material by producing = precursor mokled product (prepreg) by bonding or aering fn inonganie whisker to a metal surface ofa thin metal shoot with an organic binder, and then heating snd pressurizing & plurality of precursor molded products in a laminated man- [0008] Further, Japanese Patent No. 5150005 (Patent Document 2) discloses @ method for producing a metal- bused carbon Sher composite material as a metal-carbon ‘Aber composive material. In the method, carbon fibers are mixed with an organic Binder and a solvent to prepare @ ‘coating mixmare. Subsequently, the coating mixture is adhered on a shoct-ike of fol-like metal support to form & preform foil (costed fol). Thereafter, a plurality of pre- formed foils is stacked to form a laminate. ‘Then, the laminate is heated and pressurized w integrate the preform foils with cach other. [0009] Other than the above, as other documents diselos- fing a method for producing metal-carbon fiber composite material, there are Japanese Patent No. $145591 (Patent Jan. 3, 2019 ocumeat 3) snd Japanese Unexamined Patent Application Publication No. 2015-28158 (Patent Document 4) [0010] Inthe produetion method disclosed in Patent Doou- ‘ments 210 4 deseribed above, a meal-earbon fiber compos- ite material obtained hy integrally joining a plurality of ‘metal layers and carbon fiber layers in an alterately Tami fated sate is obtained, PRIOR ART DOCUMENT Patent Document {0011} Patent Document 1: Japanese Unexamined Patent Application Publication No. $9-76840 {0012] Patent Document 2 Japanese Patent No. $150905 [013] Patent Document 3 Japanese Patent No, $148591 [oot4) Patent Document 4: Japanese Unexamined Patent Application Publication No, 2015-25158 SUMMARY OF THE INVENTION Problems to be Solved by the Invention [0015] ‘Thus, in the method for producing a composite ‘material disclosed in the aforementioned Patent Document 1 when the inorganic whisker layer bonded or adhered (0 sical surface of a metal thin plate i too thick, the metal of the metal thin plate cannot penetrate suliciently into the ‘nonuanie whisker layer, cavities ae formed in the inorganic whisker layer, and the metal thin plates disposed on both sides of the inonzanie whisker layer are not strongly joined to each other. For these reasons, the strength of the com- posite material was low. [0016] ‘The composite materials disclosed in Patent Docu- rents 2 to 4 had the following drawbacks, [0017] It should be noted hat inthis specification, ia a ‘composite material planar perpendicular 4 « lamination direction ofa metal layer and a carbon fiber layer i referred to asa “planar of a composite material”, and a planar irection perpendicular 10 the lamination direction of the ‘metal layer and the carbon fiber layer is refered to 8 a “planar direction of @ composite material” [0018] Ina composite materia, in cases where fiber diree- ‘ions of earhon fers in a carbon fiber layer are aligned in ‘ne direction within a plana ofthe composite material that js, in cases where the carbon fibers are oriented in one direction, physical properties of the composite material, sch as a linear expansion coelicient anda thermal com ductivity, greatly differ in the fiber direction (dat is, the orientation direction ofthe carbon fiber) ofthe carbon ber in the planar of the composite material and in « ditection perpendicular there, Therefore, there was a disadvantage {thatthe composite material was easily distorted when the composite material was heated. [0019] Under te circumstance, itis conceivable w form a Jaminate by laminating «plurality of preform foils such that tihor directions of earbon fibers hocome altemately perpen- cul. [0020] However in this method, the preform foils must be laminated while considering the fiber directions of the carbon fibers, so the lamination work is troublesome, More- ‘ovr, it was difficult 10 make the physical properties (eg. Tinea expansion coeicent) inthe oblique direction (ez 45 degrees direction) with respect fo the ker direction of the carbon fiber in the planar ofthe composite material equal to US 2019/0001652 AI the physical properties of the carbon fiber in the fiber direction and a direction perpendicular thereto 10021] The present invention was made in view of the slorementioned technical background, and its object ie to provide « method for producing a metal-carbon liber com- posite material which can equalize physical properties ofthe ‘composite material in a planar direction, and & method for producing un insulating Substrate, 0022] The other purposes and advantages of the present ‘vention will be made apparent from the following pre- fered embodiments ‘Means for Solving the Problea 10023] The present invention provides the following [0024] (1) A method for producing @ metal-carbon fiber ‘composite material, the method comprising the ste of 10025] obtaining «coated foi ia whieh a carbon fiber layer Js formed on a surface of a metal oil by applying a coating Fiquid containing carbon fibers, a binder, and a solvent for the hinder ina mixed state to the surface of the metal fil th a gravure costing device provided with a gravare roll, in which a numberof cells are formed on 9 circumferential surface thereof; 10026) forming 2 laminate in a state in which a plurality of ‘coed foils are laminated; and [0027] integrally joining the coated foils by heating the Jaminate to remove the binder Irom the laminate an heating the laminate while pressurizing the laminate in lamination direction of the costed foils, 0028] wherein a shape of the cell ofthe gravure rol i @ ‘cup shape and a diameter of a cirele inscribed in a mouth shape of the cells et to 1.2 times or more an average fiber Jength ofthe carbon fiers. 10029] [2 The method for producing a metal-carbon fiber ‘composite material as recited in the aforementioned Item 1, wherein the step of obtaining the coated fil includes a step ‘of removing the solvent from the earbon fiber layer formed. ‘on the surface ofthe metal fil 10030] [3] The method for producing a metal-carbon fiber ‘composite material as recited in the aforementioned Item 1, Wherein the step of obtaining the coated fil includes a step ‘of removing the solvent from the earhon fiber layer formed fon the surface of the metal foil without subjecting the surface of the carbon fer layer to slide leveling processing. 10031] [4] The method for producing a metal-carbon fiber ‘composite material as recited in any one of the aforemen- tioned Items 1 10 3, wherein in the step of integrally joining the coated fils, the binder is removed from the laminate in the middle of Heating the laminate so tht a temperature of the laminate rises toa temperature st which the coated foils are integrally joined 10032] [5] The method for producing a metal-carbon fiber ‘composite material as recited in any one of the aforemen- tioned Items Ito 4, wherein the shape of the cell at least ‘one shape selected from the group consisting of a lattice shape, a pyramid shape, a hexagonal shape, and a circular shape. [0033] (6) The method for producing a metal-carbon fiber ‘composite material as recited in any one ofthe aforemen- tioned Items Ito 5, wherein the metal fol sat least one of al foil and a copper foi Jan. 3, 2019 [0034] [7] A method for producing an insulating substrate having a plurality of insulating substrate constituent layers to be integrated in a laminated state, wherein [0035] at least one constituent layer of the plurality of ‘constituent layers is made of a metal-earboa fiber composite smatecal, and [0036] the composite material is produced by a method for producing of the metalcarbon fiber eomposite material as recited in any one of the aforementioned Items 10 6 Beets ofthe Invention 0037] The present invention exerts the following elects [0038] In the aforementioned Item [1], by adopting the steps of applying a coating liquid on a surface of metal Si forming 2 laminate in a state in whieh a plurality of coated ‘ils i laminated, and integrally joining the coated foils by pressurizing and heating the laminate, 2 metal-carbon fiber ‘composite material can be inexpensively mass-produced, [0039] Furthermore, by removing the binder from the laminate, the thermal conduetvity of the obtained composite ‘material can be assuredly increased. [W040] Furthermore, by configuring such that dhe coating apparates for applying a coating liguid on the surtace ofthe ‘tal foils the gravure coating devie,theeell shape ofthe gravure rll of the gravure coating devi pe,and the diameter ofthe circle iseribed in the mouth shape of the cell is sett 1.2 times of more the average fiber length of the carbon fiber, carbon fiber layer can be formes! on the surface of the metal foil so thatthe fiber directions of the carbon fibers in the surface of the mal foil hecome random, Fr this reason, the physical properties of the composite ‘material ia the planar direction ean be equalized. Moreover, it is unngcessary to consider the fiber dictions of the carbon fibers when forming the laminate so thatthe physical properties ofthe composite material in the planar direction can be easily equalized, [41] "In the aforementioned Hem [2], by removing th solvent fom the carbon fiber layer, iis possible to sat factorily integrally join the coated foils in the step of integrally joining the coated fils. [0042] Tn the aforementioned Item [3], by not subjecting the surface ofthe carbon fiber layer to slide leveling pro- cessing, the fiber directions of the carbon fibers in the earbon liber layer can he maintained in random state. As a resul uniformity of the physical properties of the composite ‘material in the planar direction can be aained assuredly. [0043] In the aforementioned Item [4], the production of | the composite material ean be easly performed by removing the binder from the laminate in the middle of heating the Jaminate so thatthe temperature ofthe laminate rises to the temperature at which the coated foils are integrally joined [0044] In the aforementioned Item (5). the shape of the cll is at least one shape selected from the group consisting of a ltice shape, a pyramid shape, a hexagonal shape, and ‘a citcala shape. For this reason, the carbon fiber layer ean be formed on the surfice of the metal foil so thatthe Ber directions of the carbon fibers inthe surface ofthe metal foil become random assuredly: As a result, uniformity of the physical properties ofthe composite mterial in the planar Girection can be alsined assuredly. [0045] In the aforementioned Itom 6}, since the metal foil is at least one of an aluminum foi and a copper foil, a ‘composite material having high thermal condictivity can be assuredly obtained. US 2019/0001652 AI 10046) Inthe aor 7}, insulating sub- strate having high ‘inst temperature changen such as, e.g, 8 Gold heat eyele, can be produced BRIBE DESCRIPTION OF THE DRAWINGS 10047] FIG. 1 iss fwchart showing « method for pro- ‘ducing a metal-earbonfber composite material seeorting © ‘an embodiment ofthe present iaventon [0048] FIG. 2 isa shomatie diagram illustrating steps of ‘biaiing a coated fe 10049] "FIG. 34 is a plan view illustrating an arrangement sate of lattice shape cells om circumferential surface Of sravure rol [0030]. F1G, 38383 perspective view showing the shape of the late shape cll of FIG. 3. [0081] "FIG. 44 io plan view iustratng an arrangement stat of pyramid shape cells on circumferential surface of the gravure rl 10082] FIG. 48 8a perspective view showing the shape of the pyramid shape cell of FG. 4 10083] FIG. 5A is plan view illustrating an arrangement state of hexagonal shape ells. ircumferentialsface of 2 gravure rol [0084] FIG. 8B sa perspective view showing the shape of the hexagonal shape cell of FIG. 5A. 10085) "FIG. 6 isa plan view illustrating an arrangement state of circular shape cells oo circumferential suelo of 2 gravure rol 10086) FIG. 6 isa perspective view showing the shape of the circular shape ell of FIG. 68. {0087} FIG. 7A isa side view ofa cell in a case where the bottom surface of the cell has at shape 10088] "FIG. 7B isa side view of the celina ease whore the botlom surface of the cell has a concave curved shape 10089} FIG. 7C is aside vow ofthe callin w case where the botom sree of the eels a coneave conical shape 10060} FIG. 8 is a perspective view of a cell in a case Where communication pons are provided on the innee Perinhrl side surface ofthe cll [0061] FIG. 9s schematie view when a trip member of the coated fois eut 0062] FIG. 10 is schematic side view of a laminste Forme by lasiating w phrality of cated is. 0063) FG. 11 isa schematic view for explsininga sep of integrally sintering coated fils 10064) FIG. 12 35 2 diagram (aroph) showing an example ‘of s temperature curve atthe time of beating inate the step oF intewally sintering coated oils 10065]. FIG, 13 is schematic side view of a composite ‘atrial of this embodnent obtained by integrally sintering ‘vated fil 10066] FIG. 14 is @ penpective view of « composite material showing various directions defined by a composite ‘ater ofthis embodiment 10067] FIG. 18 is aside view of an insulating substrate EMBODIMENT FOR CARRYING QUT THE INVENTION 10068] Hereinafter, an embodiment of the present iaven- tion will be deseribed with reference to the attached figures 10069] As shown in FIG. 1, a method for producing @ mmetal-carbon fer composite material (composite) accord- ing to an embodiment of the present invention ineludes Step Jan. 3, 2019 S1 of obtaining a coated fi, Step S2 of forming a Laminate, fand Step S¥ of integrally sintering the coated foils, These steps are performed in this order. [0070] Step S1 of obtaining a coated fil is a step of ‘obiaining a bel-ike strip mentber 12A of the coated fol 12 (Unt is, a bele-ike long coated fil 12) as described in detail in FIG. 2 In other words, ths step SI is a stp of obtaining ‘asiip member 12 of the coated foil 12 ia which th earboa fiber layer IL made of a coating iguid Sis formed on the surface 102 ofthe stip member 10 ofthe metal foil 10 by applying the coating liquid 5 on the surface 10 of te strip er 10A of the mital foil 10, The coating liquid 8 is ‘mixture containing a carbon fiber 1, binder 2, anda solvent 3 forthe binder 2 in mixed state [0071] Furthermore, Step SI of obtaining the costed foil 12 includes a step Sia of removing the solvent 3 from the carbon fiber layer 1 formed om the surface 10a of the strip ‘member 104 of the meal foil 10 (Gee FIG. 1) [0072] As shown in FIG. 10, Step S2 of forming a lami- ‘nae 15 is «step of forming laminate 1S in a state in which a plurality of coated foils 12 are laminated, [0073] As shown in FIG. 11, Step $3 of integrally sier= ing the coated foils 12 is a step of integrally sintering the coated foils IZby heating while pressurizing the laminate 1S in the lamination diretion of the coated foils 12 (that i, the thickness diteetion of the laminate 18), This Step S3 includes a stop SB of removing the binder 2 from the laminate 15 hy heating the laminate 15 (see FIG. 1) [0074] Step $3 of integrally sintering the coated foils 12 corresponds o a preferable example ofthe step of integrally is embodiment means a composite material ‘containing metal used as @ matrix and carbon fibers 1 a8 a ‘material to be composited with the metal (matrix) That {his composite material 17 ean be regarded ws metal matrix ‘composite material containing earbon fibers 1 [0076] As shown in FIG. 12, the composite materia 17 ‘oblained in this embodiment is a composite material ia ‘whieh a metal layer made of a metal foil 10 and a carbon fiber layer 11 mainly composed of carbon fibers 1 are integrally sintered in am altemately laminated! manner. part of mictal of the metal foil 10 is permeated into the earbon fiber layer M1. In this composite material 17, the metal comesponds 10 the matrix, and the carbon fiber 1 eorre- sponkls t0 the material be composited with the metal (nate), [0077] This composite material 17 canbe suitably used as 4 material of at least one constituent layer among the plurality of insulating substrite constituent layers SI to $8 constititing the insolating substrate 50 shossn in FIG. 1S. [0078] The insulting substrate $0 is used as an electronic ‘module substrate sueh as a power module substrate. The insulating substate 50 is composed of, as a plurality of constituent layers a Wiring layer Sa first stress bufer layer 52, a ceramic layer (inslating layer) $8, a yecond stress buler layer $4, and a metal cooling layer $8. These eon- stituent layers S1 to 88 ate integrally joined by a predator ‘mined joining means such as brazing ina state ia which the wiring layer 81 the first stress bufer layer 82, the ceramic layer 83, the second stress ulfer layer $4, andthe eooling layer $8 are laminated in the onder from the top to the bot US 2019/0001652 AI 10079] The mounting surfuce $02 of the insulating sub- ‘trite SOs configured to mount a heat generating element 6 (indicated by a two-dot chain line), sveh as, eg. an elec- tronic element, ina slate of being joined by soldering or the like, The mounting surface SMa is consid by the upper surface ofthe wiring layer I [0080] The cooling layer $5 i a layer for cooling the heat ener element 86 and includes, for example, plurality ‘of heat dissipating fins $80 which are cooling. member (including heat radiation members). Generally the evoling layer $$ is made of aluminum or copper [0081] In the composite material 17 of this embodiment, the linear expansion coelicent in the planar direction may be st toa intermediate vale between the linear expansion ‘collcient of metal and the linear expansion eoeticient of ‘ceramic, ‘Therefore, in the insulting substrate 50, i is preferable that in particular at least one of the first and sccond stress buffer layers 82 and S4 among these const ‘ent layers 51 to $5 is formed by the composite material 17 ‘of this embodiment [0082] "The composite material 17 of this embodiment ca be regarded asa metal matrix composite material reinforced with carbon fibers 1 and has high Young's modslus, Fr this reason, it can be suitably used as a material for a member rexuired to have high mechanical strength, 0083] Next, cach step will be described in detail below. 0088) [0085] The coating liquid $ used in this Step SL is ‘obtained, for example, as follows. As shown in FIG. 2 a Jarge amount of eaebon fibers 1, a binder 2, and a solvent 3 Tor the binder 2 are put in a mixing container 41, and they ae stirred and mixed with a stiring and mixing apparatus “42. Thereby, a coating liquid § containing the carbon fibers 4 the binder 2, andthe solvent 3 ina mixed state is obtained. Ais time, @ dispersant, an antfoaming agent, a surface ‘conditioner, a viscosity modifier, ete, may be added to the mixing container 41 as nevessiry and sired aod mixed therein 10086] The stirring and mixing apparatus 42 is not spe- ‘ifically limited, and a stirring apparatus with stirring blades, a planctary mixer, 2 homedisper, a bead mill, ete, may be sed, [0087] The speific explanation ofthe carbon flber 1, the binder 2, and the solvent 3 will be deseribed late. [0088] “As a coating apparatus for applying the coating liquid , a gravure coating device (eg. gravure coater) 20 is used, 10089] The gravure coating device 20 is specifically @ dlincct gravure coating device (ee. direct grivure coat), ‘and is equipped with a gravure roll 21 2 backup roll 23,2 ‘coating liquid applying means 25 for making the coating Tiguid $ adhere to the circumerenial surface 214 of the nivare roll 21, ete, On the entire circumferential surface 21a of the gravure oll 21 a large numberof ells (cecesses) 22 are provided in an orderly arranged manner (soe FIGS. 44, 5A, and 6A). Apanition Wall 216 s formes beeen wjacent cells 22, and each cell 22 is panitioned by this Partition wall 216, The backup roll 23 is arranged 90 38 t0 face the gravure roll 21. 0090] The coating liquid plying means 25 is provided ‘with a coating liquid pan 26 containing the costing liquid § Jn this embodiment, and is configured to apply the coating liquid Sto the eicumfercitial surlace 21a ofthe gravure rll 21 by rotating the gravure roll 24 about its central axis in a Jan. 3, 2019 slate in which a past ofthe citeuaer circumferential surface 2a of the gravure roll ‘immersed in the coating quid $ in the pan 26, The earboo {There 1 in the coating lguid § in the pan 26 are dispersed ia the coating liquid s0 that its fiber directions are random. [0091] In the gravure coating device 20 shown in FIG. 2 the strip memher 108 ofthe tal fil 1 unwound from the ‘unwinding roll 27a is wound by the winding roll 276 afer sequentially passing through between the gravure oll 21 and the backup roll 29 and the inside of the drying farce 28 as ‘drying appuraius at @ predetermined feed rate appeoxi- mately in the horizontal direction, 0092] The feeding direction F of the stip member 10A of | the metal foil 10 is set to the longitudinal direction of the strip member 104 of the metal fos! 10. A dzeetion parallel to the feeding direction F is the coating direction of the coating liquid § to the surface 10a ofthe stip member 108 ‘ofthe metal fil 10 by the gravure coating device 20 (more specifially, the gravure roll 21 ofthe gravure coating device 20). [0093] tn his embodiment, the gravure roll 21 is arranged fn the lower side ofthe strip member 10 of the metal fol 10 in such w manner so a8 to traverse the strip member 10 ‘of the metal foil 10 entirely in the width direction, and the backup roll 23 is disposed on the upper side of the strip member 10A of the metal foil 10 in such a manner as to traverse the stip member 10 of the metal foil 10 entirely in the width direction. Therefore, the surface Wa ofthe strip ‘member 10A of the metal foi 10 to whieh the coating lignid 5 is appiod isthe lower surlace of the strip member 10A of the metal foil 10, [0094] In the prevent invention, the surface 1a ofthe strip er 10A of the metal foil 10 to be coated hy the coating Jiquid 5 is not limited to the lower surface of the strip member 104 ofthe metal fol 10. For example, it may be the ‘upper surface ofthe strip member 10 ofthe metal fil 10 for the upper and lower surfaces ofthe stip member 10 of the metal fil 10. [0095] The coating of the coating liquid $ is performed when the strip member 10A of the metal foil 10 passes ‘hough between the gravure rll 21 and the backup soll 23. “That i, a8 the gravure roll 21 rotates, the coating Kiguid§ in the pan 26 adheres o the circumferential surface 2 ofthe gravure roll 21, and the coating liquid 5 enters each cell 22 Then, the excess coating liquid § adhered tothe cicumir- ential surface 22a of the gravure rol 21 is scraped off with the doctor blade (scraper) 24. Thereafter, the circumferential surlace 21a of the gravure rll 21 comes info contaet with the surface 10a of the stip member 10A ofthe metal fil 10, and the coating liquid § inthe cell 22 js transferred to the surface 10a of the strip member 104 of the metal foil 10. As a result, the earbon fiber Iayer 11 composed of the trans- ‘ered coating liquid § is formed over the entire surface 12 of the sttip member 10A of the metal foil 10. Thus, strip her TA of the coated foil 12 having the earhon fer layer 11 formed on the surface 104 of the strip member 10 of the metal foil 10 i obtained 10096] The rotational ditection of the gravure roll 21 is ‘normally set inthe same direction as the feeding direction F ‘ofthe sirip member 104 of the metal foil 10. The peripheral velocity of the gravure roll 21 is wally st to equal to the feed rate ofthe strip member 10A of the metal foil 10 [0097] Tae drying furnace 28 i configured to heat and dry the carbon fber layer 11 formed on the surface 10a of the US 2019/0001652 AI strip member 108 ofthe metal foil 10 (tht is, the carbo {braver 1 ofthe sip member 124 of the coated foil 12 to ease evaporation ofthe solvent 3 contin in the carbon fiber layer I fom the carbon liber layer 11 to remove i 10098) Inthe grvae oll 21 ofthe sevure coating device 20th shape ofthe cell 2s. cop shape, and its especially preferable that the shape ofthe cull 22 he shape sban- Tally closed around the entre cirsumference of the eel 22 10099} Specifically the spe of te oe 22s preferable at least one shape solcted from the group consisting of a Jatie shape 224 (see FIGS. 34 and 3B), a pyramid hope 220 (eee FIGS. 44 and 4B), » hexagonal shape 22C (see FIGS. §4 and $B), and a cizcular shape 22D (see FIGS. 68 and 6B), 10100] The late shape cll 224 is formed tobe recessed in the uuncates quodrangular pyramid shape as shown in FIGS. 34 and 3B. {0101} The pyramid shape cell 228 js formed 10 be recessed in te quadrangular pyramid shape as sbown ia FIGS. 48 and 4B. {0102} The hexagonal shape cell 22C is forme! to be recesie i the tncatd hexagon pyramid shape as showa in FIGS, SA and SB, 10103} “The cireuler shape cell 22D is formed to be recessed inthe truncated cone shape as shown in FIGS, 68 and 68 [0104] Furthermor,the shape ofthe bottom surface 226 of the cell 22 (eq. a latice shape, a pyramid shape, a hexagonal shape, a circular shape) is ot limited. Foe ‘cxample, itmay be a ft shape as shown in FIG. 7A, a concave curved shape (ea coneave spiral shape) as showin FIG. 7B, «concave conical shape (es concave pyramid shape, a concave conical shape) as shown in FIG. FC. ova shape in Which at Teast two of thse shapes are combined [0105] Further, inthis embodiment, tis preferable thatthe ‘ell 2 have a shope in which the crcumderence ofthe cll 22 js completely closed over the eine circumference, hut the present invention snot iit thereto, A shown FG. 8. the shape may be formed such that small communication ports 22e Which allow apart othe cong gui in Te cel 22 flow into the adjacent eels 22 are formed in pars of the imer peripheral side surfaces 22 ofthe cell 22 10106) tis preferable thatthe size of the ell 22 be large ‘enough for the carbon fiber 1of the average fiber lena 0 ‘oler the cell 22 in a atte substantially parallel tthe ‘pening surfve ofthe ell 22 and fr the earbon fiber tof the average fiber length conisined in the cell 2 10 be rotated by 360 degrees inthe cll 22 inthe inner circumferential Airection othe eel 22. Speifialy iis preferable that he diameter W of the circle N (more specially, cirle N inscribed in the open peripheral edge 22d ofthe cll 22) inscribed inthe mouth shape ofthe cll 22 he sett 12 times for more the average fiber length of the carbon fiber 1 {0107}. In FIGS. 3A, 44 and 84 the ice N inscribed in the mouth shape ofthe cell 2 is indicated by the two-dot cin ine In TIG. 6A, the cizcle Ninseibed inthe mouth shape ofthe cell 22maiches the opening peripheral edge 22d ‘of the cell 22 [0108] _ As described above, the shape of the cell 2 is acup shape and the diameter W ofthe ciele N inseribed inthe tmoUth shape ofthe ell 22 is set to 1.2 times or more the seme fier length of the carbon fiber I. or this reson, when the cating lghid § in the pan 26 is alee to the Jan. 3, 2019 circumferential surface 21a of the gravure roll 24 (that ‘whe the circumferential surface 21a of the grave rll js immerse inthe coating Fiquid in the pan 26), the coating liquid § enters the cell 22 so thatthe Ober directions of the catbon fers 1 in the coating liquid § bocome random ia the inner circumferential direction of the eell 22. The carbon fiber 1 in the coating liquid $ contained in the eell 22 can ‘tate inthe inner circumferential diction ofthe cell 22. In this state, asthe gravure roll 21 rotates, the coating guid S in the cell 22 is transfered tothe surface 10a ofthe stip ‘member 108 ofthe metal loi 10. Asa result, the carbon fiber layer His formed on the surface 10a of the strip member 10, of the metal foil 1030 thatthe fiber directions of the carbon fibers 1 in the surface 1a of the strip member 10 ‘of the metal foil 10 become random, [0109] On the other hand, in cases where the shape of the cell 22 is not a cup shape but an oblique line type (not shown) well known as the shape of the coll 22, when the coating liquid § in the pan 26 is adhered to the circumfer- ental surface 21a of the gravure oll 21, the coating liquid 5 js likely to enter the cell 22 so that the fiber directions of the carhon fibers 1 inthe enatng liquid are aligned in one iretion along the oblique line direction of the cell 2. In this state, asthe gravure roll 21 rotates, the coating liquid $ in the cell 22 is tansferred tothe surface 10a of the stip member 10A of the metal fol 10. As a result, the ber iretions of the carbon fibers 1 in the surface 104 of the strip member 1A of the metal foil 10 do not become random but become likely to be aligned in one direction ‘Therefore, the shape of the cell 22 mast be cup shape, not an oblique ine shape. [0110] The upper limit of the diameter W of the circle N inseribed inthe mouth shape of the cell 2 isnot imited, but is, for example, 2,500 pm. [O111] In cases where dhe shape of the opening peripheral edge 22d of tho coll 22 isa square shape (ea latice shape 22A, a pyramid shape 22B), itis preferable tat the diameter \Wof the eitele N inscribed inthe mouth shape ofthe cell 22 be larger than that when the shape of the cell 22 is a hexagonal shape 22C ora citcular shape 22D. In particule, it is especially preferable that it be 1.5 times or more the average fiber length ofthe earbon fiber 1 [0112] Ina state after the carbon fiber layer 11 is formed ‘on the surface 101 ofthe strip member 104 ofthe metal foil 10 by the gravure roll 21 and before the strip member 10A ‘of the metal foi 10 (he strip member 12A ofthe coated foil 12) enters the drying lurmace 28 (hati, before Step SLa of | removing the solvent 3 from the earbon fiber layer 11), its preferable that the surface of the carbon fiber layer 11 be not Subjected to slide leveling processing for flatening, the surlae, [0113] The tide leveling processing denoves processing of Hattening the surface of the carbon fiber layer 11 by sliding the surfice ofthe carbon fiber layer 11 with the end edge peripheral portion of slide leveling member by feeding the Sip member 10A of the metal foil 10 in the feeding irction F relative ta the slide leveling member in a sate in ‘whieh the end edge peripheral portion of the slide leveling member (eg, slide leveling plate) is in contact with the surlace of the carbon fiber layer 11 inthe direction crossing the feeding direction F ofthe strip member 108 ofthe metal {oil 10 (e4., perpendicular direction. [0114] When this slide leveling processing is applied to the surface of the carbon fiber layer M1, the fiber direeto US 2019/0001652 AI ‘ofthe carbon fibers 1 in the carbon fiber layer 11 tend to be janed in the direction slong the end edge peripheral portion of the slide leveling member. Therefore, itis prel- ‘erable aot to apply the side leveling processing t the surface of the carbon fiber layer 11 as muh as possible. In ‘eases where the slide leveling processing is nol applied 10 the surface of the carbon fiber layer IL, itis possible 10 assuredly maintain the fiber diretion ofthe carhon ber Hin the carbon fer layer IM in the surface 10a of the strip siember 10 of tue metal foi 10 in random state, With this, 's posible to assuredly equalize the physical properties of the composite material 17 in the planar direction there. [0115] The carbon fiber 1 can be used as long as itis 2 fibrous carbon particle. Specifically, for example, one of cao fibers of two or more mixed carhon fibers selected from the group consisting of a PANsbased carbon fiber, & pitch-based carbon fiber, and a carbon nanofber (eg. 2 ‘vapor-phase grow carbon fiber, 2 carbon nanotube) ean be used, [0116] Among 2 PAN-based carbon fiber and a pitch- based carbon fiber, itis particularly preferable to use 3 Pitch-hased carbon fiber. The reason is that the thermal ‘conductivity of the pitel-based carbon fiber in the fiber direction is greeter than that of the PAN-based carboa fiber 0 that a composite material 17 having higher thermal ‘conductivity can be obtained. [0117] The length ofthe carbon fiber 1 isnot limited, and tis particularly preferable thatthe average fiber length of ‘carbon fiber I be 1 ma or less, The esson is that the carbon. fiber layer Il ean be formed on the surface 10a of the strip member 104 of the metal foil 10 so thatthe fiber dreetions ‘of the earbon fibers 1 in the surface 104 of the trip member 19A of the metal foil 10 become random assuredly. With this, itis possible to more assuredly equalize the physical properties ofthe composite material 17 inthe planar diree- [0118] The lower limit of the ength of carbon fiber 1 is not Jimited. Usually the lower limit ofthe average fer longth ‘of the carbon fiber 1 is 10 pm, [0119] The fiber diameter of the carbon fiber 1 is not Timited, The average fiber diameter ofthe earhon fers 1 is, Jor example, 0.1 nm to 20 jm. In cases where the carbon {Ther I isa PAN-based earhon her or a pteh-hased earhon fiber, the carbon fiber Li, for example, a chopped fiber oF milled fiber and its average fer diameter i, for example 5 um to 15 yim. In cases where the carbon fiber vapor-phase growth nano-carbon fiber, the average fiber ameter ofthe earbon fiber Lis, for example, 0.1 am 10 20, um, 10120] The binder 2is used to impart an adhesion fore 10 the carbon fiber Ito the surface 104 ofthe strip member 108 ‘ofthe metal fil 10 co thereby suppress the carbon fiber ¥ in the earboa fiber layer II from falling off dom the surface 102 of the strip member 10A of the metal fol 10, and is usually made of resin. [0121] Furthermore, the binder 2 is likely to become @ sintered residue or an amorphous carbide of an organic Substance when heated, and they become a factor to loser the thermal conductivity ofthe composite material 17 as @ reside ofthe binder 2. Fo this reason itis preferable to use ‘binder 2 which does not earbonize ata temperature of 200° to 450°C. ina non-oxidizing atmosphere but disappears by sublimation or decomposition, As such a binder 2. a ery] based resin, a polyethylene glycol based resin, 2 Jan. 3, 2019 butylene rubber ssi, a phenol esi, ell lose based re othe like is suitably cd. These binders 2 are generally Solid at ambient temperature [0122] The solven 3 is preferably a solvent that dissolves the binder 2 at room temperature AS the solvent, water, an Alecol based solvent, ydrocarbon bse solvent, an exer sed solvent, an ether based solvent ee, are preferably vied 10123] The coating liquid $ preferably contains the carbon fiber Land the binder 2 ina mas aio of 75:25 to 99.5:05, Inthis ease, the carbon fiber 1 ean be assuredly attached to the surface Ma of the strip miembce 10. ofthe mt fit 10 in Step SI of obtaining the coated foil 12, and in Step SB of removing the binder 2. the binder 2 can be aesrodly liminated and removed. cis particulary preferable that the Costing guid S contains the carbon fiber I andthe binder 2 ina mas ratio of 80:20 0 99:1. [0124] In Step SI of obining the coated foil 12 itis preferable o apply te coating liquid tothe surface 10e oF the stip member 19A ofthe metal oil 10 so thatthe eating moutt of the earhon liber 1 contained in the carbon fiber layer IV is 40 gim® or les. The reason isa follows {0125} Thats, when the coating igus applic to the suace 10a ofthe strip member 104 of the metal oi 10 so thatthe costing amount ofthe carbon fiber | contained nthe carbon fiber layer IL is 40 qim* or fess, in Step $3 of fntegrally sintering the coated foils 12. the malo the metal {oil 10 sliienly penetrates into almost all of the cavities Jn the carbon ber layer Hand both ctl fils 10 and 10 disposed on both sides of the carbon fiber layer 11 are sulcaly sinter. Wath his, the sreagth (mechanical strength, et) ofthe composite material 17 ean be assredly ahaneed. Further, order to shorten the production time of the composite mistrial 17, itis pantiularly preferable that the coating mount of the carbon ther 1 contained ia the carbon fier layer IT be 30 git or less {0126} Its preferable to apply the coating liga $ wo dhe suace 10 ofthe strip member 108 of the metal oi 10 so that the volume of the carbon fibew 1 in the oblsined composite steal 17 less than 50% ofthe entire volume ff the composite material 17. With this, in Step S¥ of Smteprally sintering the coated eis 12, the metal of the metal {oil 10 can he assuredly impregnated ino the earbon fiber layer M1, which can assuredly integrally sinter the coated foils 12 {0127} Her, in cases where the composite materia 17 is ‘ied ag the mata of the fist stress bur layer 82 ofthe insulating substeate 0 shown in FIG. 18, iis preferable to st the ratio betecen the volume ofthe mal fil I andthe ‘Volume of the carbon fiber I so thatthe linea expansion Coscia ofthe composite misters 17 inthe planar dirs tion becomes an intermediate value boween the linear txpansion coficient of the ceramic layer 83 of the ina Jog substate $0 and the linear expansion cetcient ofthe Wiring ler 8 {0128} Further, in cases where the composite material 17 Js used asthe material of the second sess ble layer 88 of the insulating subsuate $0, iis preferable to set the ratio between the volume ofthe metal foil 10 andthe volume of to earbon fibers 130 that the linear expansion eefiient of tho composite material 17 in th planar direction becomes an Jntermasiate valve between the linear expansion eoeticict ofthe ceramic ayer $3 ofthe insulating substrate 0 andthe Tinea expansion evetcient ofthe coating layer 88. US 2019/0001652 AI 10129] In cases where the metal foil 10 is, for example, a sluninum foil, in particular, in order 19 set the linea ‘expansion coefficient of the composite material 17 in the plinar direction to aa intermediate value fabout 10%10°°1K 'o 16410-"1K) between the linea expansion coeficient (eg. about 310°%K to 5x10°%K) of a ceramic (aluminum nitride, alumina, silicon carbide, ete) which is often used as the material ofthe ceramic layer 53 and the lincar expansion ‘coctlcient (about 25x107K) of aluminum which i often tused as the material of the cooling layer 85, i is referable to sot the volume of the carbon fibers Ito 10% oF more and Jess than 50% with respeet to the entire volume of the ‘composite material 17, 10130] The metal foil 10 (the stip member 104 of the ‘ictal fil 10) i not limited to the material as longa it cam ‘withstand the coating. In particular, the metal oil 10 is, preferably at east one of an aluminum foi and a copper fel Thhe reason is that a composite material 17 having high thermal conductivity can be assuredly obained, [0131] Inthe case where the metal fil 10 is an aluminum foil the material ofthe aluminum foi s not limited, and an A1000 series aliminim alloy, an A3000 series aluminum alloy, an A600 sercs aluminum alloy, and the like are use. In general, the material of the aluminum file appropriately selected fom plural kinds of aluminum materials so that dhe physical properties (ermal conductivity, linear expansion ‘coeflcient, et.) ofthe composite material 17 o be obtained bocome desired set values, 10132] In the ease where the metal foil 1 isa copper fel the kind and the material of the copper oil are not limited, 1nd an electrolytic copper foil, a rolled copper foil and the Tike are used. In yenerl the material of the eopper fail is ‘appropriately selected from plural kinds of eopper materials, 0 thatthe physical properties ofthe composite material 17 to be obtained hocome desired set values 10133] The thickness of the metal fil 10 is not limite. ‘andthe thickness ofthe metal foil 10 can be selected so that the physical properties ofthe composite material 17 a be ‘obiained become desired set values 10134) Here, the thinnest thickness of a commercially available metal foil (alumium foil, copper Til) 10 is 6 a, For this eason, the lower limit ofthe thickness of the metal {ol 10 s particularly preferable from the view point that the metal foil 10 is readily available because the lower limit thereofs 6 um, The upper limit ofthe thickness ofthe metal {oi 10 is usually 100 um, and tis particularly proferable that the upper limit be upproximately $0 jm. 10135) The width ofthe meta foil 10 isnot limite, and is ft in aecordance withthe use of the composite material 17 For example, it is st 0.10 mm to 1,200 mm. 10136) As shown in FIG. 2, Step Sla of removing the solvent 3 is perfomned by passing the strip member 12 of the coated fil 12 through the drying furnace 28 as show ia FIG. 2. Thats, when the strip member 12 of the coated fil 12 passes through the drying fimave 28, the carbon ber Jayer 11 is heated by the drying furnace 28 and dried. As @ result, the solvent 3 contained inthe carbon fiber layer is ‘evaporated and removed from the earbon fiber layer IL Aller that, the sip member 12A of the coated foil 12 is ‘wound up on the winding roll 275. 10137] The conditions for removing the solvent 3 by the ‘drying furnace 28 are not limited as long as the solvent 3 ‘contained inthe carbon fiber layer H can be evaported and removed ffom the carbon fber layer M1. Normally, dying Jan. 3, 2019 conditions ofa drying perature of 60° C. fo 250° C. and 0 120 minstes can be applied as the solvent 3 [0138] Furthermore, ater removing the solvent 3, lage ‘evites may be somtimes Formed inthe earhon fiber layer 1, Therefore, itis also possible to nerease the bulk density of the carbon ber layer 11 by pressurizing the carbon fiber layer HV in the thickness direction with pressure rolls (not shown). [0139] [0140] tn the step of forming the laminate 18, as shown in FIG. 9, the strip member 124 ofthe coated fil 12 unwound from the winding roll 2% is cut into a predetermine shape with a cutting machine 29. With this, a plurality of coated {oils 12 each having # predetermined shape (eg. approx ‘mately rectangular shape) is cutout ffom the sp member 124 of the coated foil 12. Then, as shown in FIG. 10, by Jminating o plurality of coated foils 12, a laminate 18 in ‘which the plurality of coated foils 12 is laminated is formed. Alternatively, although not shown, the strip member 124 of the coated foil 12 unwound from the winding roll 27 may be rolled so ato form a lansinate 15 in Which a plurality of coated foils 12 is laminated. [141] ‘The laminate 15 thus formed is use a preform (sintered materia), [0142] The lamination number ofthe coated foils 12 is not limited, and is set in accordance with the thickness of the desired composite material 17. For example, itis set 10 5 10 1.000 sheets. [0143] [0144] In Step 3 of integrally sintering the coated foils 12, as shown in FIG. 11, the laminate 15 is aranged in a sintering. chamber of a sintering apparatus oining vice) 30 such as a pressure heating sintering: machine. ‘Then, the sintering apparatus 30 heats the Faminate 18 at a prodeiermined sintering temperature while pressurizing the Jaminate 15 in the lamination direction of te costed foils 12 (hat is, the thickness direction of the laminate 18) in a predetermined sintering atmosphere to thereby sinter the result, a composite material 17 of this embodiment is ‘obtained as shown in FIG. 13. [0145] In this Step 82, the Taminate 15 is pressurized and ‘heated, so that the earhon fiher layer 11 is compressed in its ‘hiekness direction. Wit this, apart ofthe metal of the metal Tail 10 permeates into the carbon fiber layer IH and flows ino fine eavities existing in the carbon fiber layer M1 (eg. ‘gap between the carbon fibers 1 in the carbon fiber layer 11), As a result, the cavities substantially disappear. As a result, the density of the composite material 17 10 be ‘blained ean be made 95% or more af the thearetical density [0146] Note thatthe theoretical density of the composite ‘material 17 means the density ofthe composite material 17 inthe case where the composite material 17 is made only of ‘the metal ofthe metal foil 10 and the eatbon fibers Land the cavities do aot exist a all inside the composite material 17 [0147] As the sintering apparates, 30, 3 hot pressing nachine (e, Vacuum hot press machine) a spark plasa sintering apparatus or the ike is preferably used [0148] The pressurization to the laminate 15 is performed by, for example, pressurizing the laminate 18 with a pair of punches 32 and 32 provided in the sintering apparatus 30, US 2019/0001652 AI [0149] The sintering atmosphere is preferably a non-oxi sizing atmosphere. The non-oxidiring atmosphere inclades an inert gas atmosphere (e-..4 ntrogen gas atmosphere, an ‘argon gas almospliere), « vacuum atmosphere, ete [0150] The sintering temperature means a temperature at Which the coated foils 12 are integrally sintered (integrally joined). Specifically, the sintering temperature is set to 9 temperature equal to or lower than the melting point of the metal of the metal foil 10, In particular, the sintering temperature is preferably set to a temperature between the melting point of the metal of the metal foil 10 and @ temperatute lower than the meting point by about 50° C. from the viewpoint thatthe coated foils 12 ean be assuredly Jmogrally sintered, In cases where the metal foil 10 is, for ‘example, an aluminum fol, the sintering temperature is preferably set within the range of 550° C. to 620° C. [O11] The pressure applied to the laminate 18 is not limited, and may be a pressurizing force to the extent of Fightly pressing the laminate 1S. Further, when the laminate 15 is pressurized at the ime of applying heat o the lansinate 15, the fluidity of the metal of the metal foil 10 may sometimes be improved. Therefore, it is especially prefer able to pressurize the laminate 1 with a pressurizing force to such an extent that the metal of the metal foil 10 does aot flow out of the laminate 15 by the pressurization 10 the Juminate 15 or to pressurize the laminate 15 in a die (aot shown) so thatthe metal ofthe metal foil 10 does not flow ‘out of the laminate 18, [0182] If the coated foils 12 are integrally sintered in 2 State in which cavities remain between the coated foils 12, the cavity portion becomes an internal delect of the com posite material 17. Therefore, in order to suppress occur rence of this deft its preferable to pressurize the laminate 15 ina vacuum atmosphere as a sintering atmosphere andor to pressurize the laminate 1S in adie [0183] In this embodiment, Step S80 of removing the binder 2 is performed by the sintering apparatus 30 in the middle of heating the laminate 18 ia Step S3 of integrally sintering the costed foils 12 by the sintering apparatus 30 from about room temperature as the inital temperature 10 the sintering temperature, Step S30 of removing the binder 2 in this case will be deseribed below. 10154) FIG. 12 is a figure @raph) showing an example of ‘temperature curve when heating the laminate 1S in Step S3 ‘of integrally sintering the coated foils 12, [0155] The temperature range from TH to T2 (T1T2) 10156] In Step $3 of integrally sintering the coated foils 12, when the temperature of the laminate 13 in the middle ‘of heating the laminate 18 by the sintering apparatos 30 so that the Temperture of the laminate 15 rises from about room temperature tothe sintering temperature T3 is within therange of TI to 72, the binder 2 disappears by sublimation ‘or decomposition ard is removed ftom the laminate 15 (nore specifically, the carbon fiber layer 11 of the coated foil 12 of the laminate 18) {0187} The time At during which the temperature of the Jaminate 1$ is within the temperature range from TI to T2 js not limited as long as it is a time period capable of removing the binder 2 from the laminate 18, and is set Jan. 3, 2019 cording to the temperature rising rate ofthe lan the sintering apparatus 30, the total amount of ‘contained in the laminate 18, the thickness of the laminate 18 (eg, the lamination number of the couted foil 12), the simering atmosphere, ete, Usually, the time is set t0 10 [0158] Further. when the temperature of the laminate 18 is ‘within the temperature range of TH to 72, the time At may be extended by temporarily stopping the temperature rising ‘or moderating the temperature ising rate, which ean assure fedly remove the binder 2. [0159] As described above, by perlorming Step S3a of removing the binder 2 in the middle of heating the laminate 15 in Stop 83 of integrally sintering the costed foils 12 up ‘o the sintering temperature T3, the number of production steps of the composite material 17 can be easly reduced whieh in turn enables easy production of the composite raterial 17. [0160] Nove that the present invention does not exclude that Step S34 of removing the binder 2 is performed inde- pendently of Step $3 of integrally sintering inteprally joining) the coated foils 12 by the sintering apparatus 30. [0161] In this case, Step S3a of removing the binder 2 is preferably performed afer Sep S2 of forming te laminate 15 and before Step $3 of integrally sintering (integrally joining) the coated foils 12. The reason is thatthe earbon hers 1 in the carbon fiber layer 11 can be assuredly prevented from falling off from the surface 100 ofthe metal {bil 10 atthe time of forming the laminate 18, Further, in this case, after performing Step S3a of removing the binder 2 and before performing Step S3 of integrally simering the coated foils 12, itis preferable to place the laminate 15 in a non-oxidizing atmosphere andor to set the temperature of the laminate 18 at 300° C. or lower. The reason i that the ‘oxidation consumption of the carbon fibers I ean be assur tedly suppressed and the oxidation of the aluminum fil ean be assuredly suppressed when the metal foil 10 is an aluminum foil [0162] In this embodiment, as described above, the coat- ing apparatus for applying the coating liquid Son the surface 109 ofthe scip member 104 ofthe mela foil 10s a gravure coating device 20, the shape ofthe cell 22 of the gravure rll 21 of the gravure coating deviee 20 isa cup shape, and the Siameter W of the eirele N inseribed in the mouth shape of cell 22 i st to 12 times or more the average fier length of thecarbon fiber 1 With this, itis possible to foem the earboa liber layer 1 on the surface 10a of the strip member 10 of the metal foil 10 so thatthe fiber directions of the earboa Iihers 1 in the surface 10 ofthe strip member 10A of the ‘etal foil 19 become random. Therefore, itis possible to equalize the physical properties ((hermal conduetvity, linear expansion eoelicient, ete.) of the composite material 17 in the planar direction [0163] Funher, it is unnecessary to consider the fiber Siretions ofthe carbon fibers 1 when forming the laminate 15, so that the equalization of the physieal properties of the composite material 17 inthe planar direction can he easily achioved [0164] Hore, the arow “P" in FIG. 14 indicates the coating direction ofthe costing liquid $ to the surface 102 ‘ofthe strip member 10. of the metal foil 10 by the gravure coating device 20, In this embodiment, the longitudinal Gircction A of the composite material 17 means a direction parallel tothe costing direction P. The width dreetion B of US 2019/0001652 AI itinal direction A ofthe composite materi 17 in the planar of the composite material 17. The oblique direction D of the composite material 17 means a direction ‘oblique t0 the longitudinal direction A of the composite ‘material 17a 45" dhe planar ofthe composite material 17 ‘The symbol "C” denotes a thickness direction of the com= posite material 17, and ths thickness diction D coincides ‘with the lamination direction ofthe costed foil 12 [0165] As shown in FIG, 14, in the composite material 17 ‘this embodiment, the physical properties of the composite material 17 in the longitudinal direction A, the physical properties ofthe composite materi 17 in the wih dirce- tion B, and the physical properties ofthe composite material 17 in the oblique direction D are substantially equal to each ‘other. Therefore inthe insnating substrate $0 shovsn in FIG, 48, by forming at least one constituent ayer among the plurality of constituent layers 1 10 58 constituting the insulating substrate $0 with the composite material 17, ua ‘nslating substrate $0 having high reliability with respect t0 the temperature changes such a a cold heat eycle ean be ‘obtained. Therefore, itis possible to assuredly suppress ‘occurrence of cracking and peeling of the insulating sub- strate 50 due to theeml strain 10166] On the other hand, in eases where the coating ‘apparatus is not @ grwure coating device 20 but a rol, ‘coating apparatus (eg rlleoate), a die coating apparatus (eae. 8 di enater) or knife coating apparatus (ee, knife ‘outer, the fiber directions of the carbon fibers 1 in the surface 100 of the strip member 104 oF the metal fil 10 are ‘easily aligned in one dicection. For ths teason, iis very hard to equalize the physical properties ofthe composite material 17 in the planar direction, 10167] Although an embodiment of the present invention Js described above, the preset invention isnot limited to the aforementioned embodiment, and various modifications can bbe made within the senpe not departing frm the gist of the present invention, 10168] Ince present invention, the metal foil to whieh the ‘outing liquid is applied inthe sep of obiaining the coated {oil is no limited to the strip member of the metal fol as shown inthe aforementioned embodiment. For example, it may bea metal foil (for example, a substantially rectangular metal foil having » preset length dimension and wit dimension) which isnot like a strip member [0169] Further, in the present invention, it is particularly preferable thatthe gravure coating device bea direct gravure ‘coin device as shown in the aforementioned embodiment However, other than the above, for example, it may be an ‘offset gravure coating device (eg. an ollet grvure coat) EXAMPLES 10170] |Next, specific examples and comparative examples ‘ofthe present invention wil be described below. It should be roted that the present invention is aot limited to the ‘examples shown below, Fxample 1 [0171] In Example 1, an aluminum-carbon fiber composite ‘material was produced by the following procedure. 10172] | Carbon fibers having an average fer length of 150 jim and an avenge fiber diameter of 10. ym, (XN-100 ‘manufactured by Nippon Graphite Fiber Co.,Ltd), a3 mass Jan. 3, 2019 6 aqueous solution of polyethylene oxide (Aleox (registered ‘eademark) E-4S manufactured by Meise! Chemical Industry Co.,Ltd. having an average molecular weight of 700,000 as binder, an isopropyl alcohol asa solvent, water, a disper- samt, anda surface conditioner were sired and mixed, whereby a coating liquid was obtained. The mass of the binder contained inthe coating liquid was 10% in terms of solid contents with respect o the mass of carbon fibers. The viscosity ofthe coating liquid was 1,000 mPa's at 25° C [0173] The coating liquid was applied to the entre lower surface ofa beltlike sip member of an aluminum foil (is ‘material: AIN30) having a thickness of 20 yn and a width ‘of SIX) mim by a gravure coater (enone specifically, 2 direct gravure coster) at a coating rate of 20 mina, With this, a ‘ited foil strip member with a carbon fber layer formed on the lower surface of the aluminum foil strip member was joblained. Thea, the solvent was removed from the earbon liber layer by passing the stip member of the coated fil ‘rough the drying Tumace. The coating amount of the carbon fibers contained in the carbon fiber layer after removing the solvent from the earbon fiber layer was 30 win [or74) {allows [0175] The mesh of the circumferential surface of the gravure rll provided inthe gravure coater was #25, te cell shape was lattice shape, and the diameter of the circle inseibed in the mouth shape ofthe cell was 1,000 um. [0176] Conditions for removing the solvent by the drying Turmace were a drying temperature of 180° C. and a drying time of 2 minutes, [0177] “Next, the strip member ofthe coated foil was cut into a square shape (its size: length SO mmsswideh 5O mm). With this, a plurality of square shaped coated foils was cut ‘out from the strip member of the coated foil. Then, a Jaminate was Formed by laminsting 200 sheets ofthe coated fils [0173] Nox, the laminate was sintered, ic. the coated {oils Were integrally sintered, by applying heat to the lami fale at a predetermined sintering temperature while pres- surizing the laminate in the lamination direetion in the ‘vacuum atmosphere by spark plasma sintering appara as a pressure heating simtering machine, Thus, an alumioum- ‘atbon fiber eomposite material was obtained. The thickness fof the composite material was 4 mm, [0179] The sintering conditions applied to this sintering were a8 follows. 0180} ‘The sintering temperature was $50° C., the reten- ‘ion time (sintering time) ofthe sintering temperature was 3 hours, the temperature rising rate from room tomperature was 50” C/min, the applied pressure tothe laminate was 15 (MPa, and the degree of vacuum was 5 Pa. [181] Further, in the step of integrally sintering the ‘atted foils as described above, the temperature rising was temporarily stopped in the middle of heating the laminate rom mom lemperature Io the sintering temperature of $50? (C, and the binder was removed from the laminate. The removal condition of the binder applied at this time was as follows [0182] ‘The heating temperature of the laminate for remov- ing the binder was 380° C., and the heating time was 30 min [0183] In the obtained composite materia, a plurality of | laminas layers formed from the aluminum foils and bon fiber layers were altemately laminated, furthermore, the The composition of the gravure coater was as US 2019/0001652 AI ‘aluminum was suliiently penetrated into the carbon fiber layers, almost no cavities existed in the carbon fiber layers, ‘and the density of the composite material was 99% of the theoretical density of the composite material Example 2 10184] In Example, an alumiauin-carbon fiber composite ralerial was produced by the following procedure. {10185} | Carbon fibers having an average fiber length of 200 jim and an average fiber diameter of 10 im (K2231IM. ‘manufactured by Mitsubishi Plastics, Inc), an aery! based resin asa binder, a propylene glycol ethyl ether acetate as a solvent, a dispersant, and a surface conditioner were stred and mixed. Thus, a coating liquid was obtained. Tbe mass of the binder contsined in te eating liquid was 20% in tems ‘of solid eoatents with respect to the mass of carbon fibers ‘The viscosity ofthe coating liquid was 700 mPa-s at 25°C. [0185] The coating liquid was applied to the entire lower surface ofthe helt-like strip member of the akuminum foil (its material: A1N30) having a thickness of 20 jum and a dh of 280 mm by a gravure coater at a eoating rate of 30 ‘vimin, With this, a coated fol strip member with a arbor fiber layer Formed on the lower surface of the aluminum foil strip member was oblained. Then, the solvent was removed from the carbon fiber layer by passing the strip member of the coated foil through the drying furnace. The coating amount of the carbon fibers contsined in the carbon fiber Jayer after removing the solvent from the carbon fiber layer was 20 gin 10187] “The configuration of the gravure coater was as follows. [0188] The mesh of the circumferential surface of the ‘gravure rol provided in the gravure coater was #30, the call, shape was a pyramid shape, and the diameter ofthe circle inseribed in the mouth shape of the cell was 830 ym 10189] Conditions for emoving the solvent by the deying Jumace were a drying temperature of 170° C. and a drying time of 1 minute 10190] |Next, the strip member of the coated fel was cut Jno a square shape (is size: length $0 mmiddh $0 mm). With this, «plurality of square shaped coated foils was eut ‘out from the strip member of the coated foil. Thea, 2 Taminate was formes by laminating 200 sheets ofthe coated foils. [0191] Next, the laminate was sintered, ie, the coated {oils were integrally sintered, by applying eat to the lami nate at @ predetermined sintering temperature while pres suring the laminate in Ue lamination direction in vacuum ‘atmosphere by a vacuum hot press machine as a pressure heating sintering machine. Thus, an aluminum-earbon fiber ‘composite material was obtained. The thickness of the ‘composite material was 4 min, 10192] The sintering conditions applied to this sintering were as follows, 10193] The sintering temperature was 600” C, the reten- tion Hime (sintering time) ofthe sintering temperature was 6 hous, the temperature rising rate from room temperature was 20° C/min. the applied pressure tothe laminate was 1S MPa, and the degree of vacuum was $10" Pa, 10194] Inthe step of integrally sintering the coated fils as described above, the temperature rising rate (20° Cin.) from room temperature was slower than that of Fxample (60° Cin.) and in the middle of heating the laminate Irom room temperature 0 the sintering temperature of 600” C., Jan. 3, 2019 the temperate rising was not stopped temporarily, Never theless, the binder was removed from the laminate [0195] In the abisined composite material, plurality of | sluminum layers formed from the aluminum foils and ear bon fiber layers were altemately laminated, furthermore, the aluminum was sulliciently penetrated into the earbon fiber layers, almost no cavities existed in the carbon fiber layers, aad the density of the composite material was 99% of the theoretical density ofthe composite material Comparative Exarnple 1 10196] In Comparative Example 1, an sluminan-eatbon fiber composite msterial was prodiced by the following proceire [0197] The same coating iid as the coating Higuid used in Example 1 was prepared. Then, the eating liguid was applet the ear lower surface of the strip mene of the aluminum fi Gis material: ATN3O) having thickness of 20 un nda width of 180 msm wih testing applicator. With ‘his, a coated oi stip member with a earbon fiber layer Tormed on the lower surface of the aluminum fol strip ‘membor was obtained. The, the solvent was removed fom the carbon Ther layer by passing the stip member ofthe cotd fil though the drying fsnace. Te coating amt ‘ofthe carbon thers contained ia the earbon the layer after removing the solvent from the carbon fiber layer was 30 win (0198) Conditions for cemoving the solvent by the dying Tumace were a drying temperature of 100" C. and a drying time of 30 mites 10199] Next, the strip member of the coated fi was cut Jato square shape (its size: lent $0 mand $0 an) With this, a platy of sguate shaped eoated fils was eut out fom the stp member of the coutal fi. Thea. a laminate was formed by laminating 200 sets of the co foils with ll the coating directions aligned {0200} Next, the laminate was sintered, ie. the coated {oils were integrally sintered, by applying heat othe Tam teat a predetermined sintering temperature while pe Suing the laminate in the lamination ciecton in. vac Atmosphere by a spark plasma sintering appara as a pressure heating sintering apparatus, This, aluminum conditions applied to this sintering were the same as those in Example 1 described above. [0202] In the obtained composite material, a plurality of aluminum layers formed from the sluminum foils and ear- bon fer layers were altemately laminated, furermore, the aluminum was sufficiently penetrated into the eatbon fiber layers, almost ao cavities existed in the carbon fiber layers, And the density of the composite material was 99% of the ‘theoretical density ofthe composite material, Comparative Example 2 [0203] In Comparative Example 2, an sluminam-carbon Iiher composite material was obtained in the sime prode- sion steps and production conditions as those in Comparative Example 1 except tht the laminate was formed by lamin ing 200 sheets of coated foils sa that the coating directions were alternately perpendicular to each othe, US 2019/0001652 AI 10203) In the obtained composite material, a plurality of aluminum layers formed from the aluminum foils and ear bon fiber layers were altemately laminated, furthermore, the sluminum was sulliciealy penetrated into the carbon fiber layers, almost no cavities existed in the carbon fiber layers, and the density of the composite material was 99% of the theoretical density ofthe composite materia 10205] [0206] As tothe composite materials of Examples 1 and 2 snd Comparative Examples 1 and 2, the thermal conductiv= ity and the linear expansion coeficient were measured, respectively, The results are shown in Table I TABLE | Thema ier expsion senses ‘efi Presese of wink Siti) cis of ee 10207] In the columns “Thermal conductivity” and ‘ear expansion coeficient” in Table 1, dinection”, °C direction” and “D dirsetion FIG. 14, means the longitudinal dincction A. the width direction B, the thickness direction C, and the oblique sirection D of the composite materia [0208] As shown in Table 1 tially equal to each other, and the linear expansion coeti-

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