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Sciencedirect: Wooseok Nam, Youngsik Hahn, Sungsun Baik Wooseok Nam, Youngsik Hahn, Sungsun Baik
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crystal and melt convection causes the thermal stress and results in the dislocation generation, while the shape of
melt/crystal interface has effects on the perfection of crystal. So, most designs of hot-zone have been focused on the
improvement in ingot quality by thermal distribution control [1-3].
However, more researches have been made on the energy saving because the growers with the size of 20 inches
or more can manage the oxygen concentration contained in the ingot to 20 ppma or less. Nowadays, more and more
R&D is focused on energy saving through more efficient hot-zone or heat loss reduction [2].
Reducing heat loss from the photovoltaic industry point of view is the simplest and most important way to sustain
a company. Our factory has a total of 145 units which are 24 inches growers with single heating element, in order to
improve the productivity, we are operating ingot growth rate at 1.3 mm/min. However, since there is no bottom
heater, the melting time of silicon is long than both heating system (side and bottom heating). And if we don’t
increase bottom insulation, it is difficult to save the heat loss by the bottom. To do this, a short chamber must be
built between the main chamber and the bottom plate, or a new bottom heater must be built, all of which require a
large amount of money to 145 growers. Therefore, we have improved the structure of the hot-zone as a way to make
effective insulation with minimal amount of investment without any additional large-scale investment. However, in
the ingot grower, this method is very difficult because it requires prediction of the internal thermal distribution and
designing the shape of the heater based on the result, especially graphite side heater which is a main element in the
hot-zone. On this redesign, a commercial CFD code (CG-SIM V.15.3) was used for model prediction and the
predicted results well matched with the real operation data using S-Tech OSG puller. A benchmark group with CG-
SIM and the code developed by Jung’s group at Youngnam Univ. on the Czochralski modelling [2-8] In this report,
we focused on the effect of newly designed graphite heater, and the growth experiments with the new heater
assembly were carried out. The power reduction by different components and materials is excluded in this article
because of to match the actual operation conditions.
Nomenclature
Cz Czochralski
CFD Computational Fluid Dynamics
MCLT Minor Carrier Life Time
The study was focused on the energy save of 8.3 inches monocrystalline Si ingot growing operation using S-tech
OSG grower and 24 inches quartz crucibles. This grower was the 1st model of S-tech using 24 inches quartz crucible
and only side-heater was installed. With this kind of grower, the heat of the melt escapes to the bottom during the
process. Of course, the latest growers are equipped with bottom heaters and have high thermal efficiency. However,
this is made of carbon with excellent thermal conductivity, and since the heater is turned off during the growth of
the ingot body, it acts as a conductor that draws heat from the process to the bottom. Therefore, to prevent the heat
dissipation along the bottom heater, new hot zone design have some bottom wing structures, which can transfer the
heat from the side heater to the silicon during the melting process like the bottom heater while blocking the heat
escaping to the bottom. Unlike the bottom heater, however, the bottom wing structures are considered to prevent the
loss of the conduction heat because it is away from the bottom of grower and the middle of the graphite support of
quartz crucible.
Newly designed heater is shown in Fig. 1. We have improved three of the heater components, (1) upward centre
of heating position to prevent concentration of heat on the bottom of quartz crucible, (2) heater bottom-wall
insulation, and (3) bottom heating, to prevent the heat loss. The most important point is that it has high thermal
efficiency without using a bottom heater and additional power supply. To compare only the effects of the heater, all
other major variables were fixed and compare with the normal production at the same commercial grower, S-tech
OSG model. So, the amount of initial charge was fixed at 197 kg and P-type. The initial rotation of the crucible was
10 RPM and the seed rotates -8 RPM in the opposite direction. Operation pressure is 30 bar and Argon flow rate was
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fixed at 50 LPM, and the pulling speed of seed starts at 1.3 mm/min initially (Body length 0mm) and gradually
increases to 1.7 mm/min (Body length 100 mm) at the ingot body growth step.
LE IN PRESS
Fig. 1. Schematic of a final design of L-type heater for a OSG puller using 24 inches crucible(left) and photo with L-type
heater installed inside of grower(right); (a) Trench(minus off-set 5 mm, to raise a centre of heating position), (b) heater
bottom-wall insulation, and (c) bottom wings for insulation
The simulation tool CG-SIM ver.15.3 was used for the calculation and simulation of new hot-zone. It is a finite-
volume-based simulation package for Czochralski crystal growth modelling developed by STR IP Holdings, Russia.
The total cell number used for the calculations was about 35,000~50,000. Each calculation took about 3~5 hrs of
CPU time in a work station (HP Z800, Xeon dual CPU 2.93GHz). Some physical properties used for simulation are
listed in Table 1 for reference.
Materials
Graphite support and
Ar Quartz Si (liquid) Si (solid)
Heater
Properties
Conductivity 6.5957+85.4736 0.5590+0.0485 238318+314.46
0.01+2.5e-5T 24.6+2.02e-2T
(W/m∙K) exp(-0.9e-4T) exp(0.2e-3T) exp(-3.6e-3T)
Heat 2416.6587T/ 722.26+0.29T
Capacity 520.8 753.94 961.35
(J/kg∙K) (258.5866+T) -7.3e-5T2
Emissivity 0.689+1.5e-4T
(-) - 0.85 0.318 0.9-2.62e-4T
-5.8e-8T2 +7.6e-12T3
depending on
Density 2330-2.14e-2T
(kg/m3) experimental 1820 1780 2915.9-0.2T
-3.2e-6T2
condition
Viscosity 8.5e-6+5.4e-8T 6.15e-3-5.3e-6T
- - -
(Pa∙s) -8.7e-12T2 +1.26e-9T2
Some properties were modified based on references and real production results and have been converted to
functions for Kelvin temperature and these equations have been entered into the simulation program.
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The 4 major properties of ingot grown through the experiment, the resistivity (4-point probe method), oxygen and
carbon content (FTIR) and MCLT (Minor Carrier Life Time, µ-PCD) were measured and compared with those of
ingots grown using conventional heaters. Even 2 or 3 years ago, for P-type ingots, adjusting the oxygen
concentration below 20 ppma did not significantly affect the quality of the solar cell, because the influence of
oxygen on the lifetime was found less obvious. However, as monocrystalline solar cells gradually decrease in
efficiency gap with multi-crystalline solar cells, the importance of oxygen concentration as a control element for
higher efficiency has increased. Nowadays, in order to mass-produce high-efficiency solar cells or PERx cells, there
is a growing demand from solar cell manufacturers to control the oxygen concentration of wafers processed to the
top position of the ingot to 18 ppma or less. Of course, in this case, the ingot producer must not have an ingot that
cuts off because the oxygen concentration is 18 ppma or more for mass production of ingots and wafers. If ingots
produced over a long period of time cannot be commercialized and cut off, mass productivity will be reduced.
Therefore, the new heater should not heat the round position of quartz crucible, to reduce the melting of oxygen
from surface of quartz crucible to Si melt at silicon melting, stabilization, seeding and necking step. The heat
distribution inside the grower was confirmed by simulation using the new heater designed before the heater was
manufactured. The major verification subjects were the heating condition of the heater and the thermal distribution,
convection of the silicon melt and oxygen distribution in the melt. The calculation was performed by interfacial
temperature analysis in accordance with the melting temperature of silicon of 1685K.
3. Results
3.1 Simulation
(a) (b)
Fig 2. Comparison of thermal distribution inside the grower (left) inside the Si melt (right) temperature distribution of heater and
periphery; (a) normal heater, (b) newly designed L-type heater, ① trench shape, ② heat insulation state of upper of heater wing
However, such concentration of heat has a disadvantage that oxygen is generated by heating the bottom of the
crucible. Another problem is the heat loss from the melt through the bottom of crucible support to bottom of grower.
The simulation result of the newly designed L-type heater is positively derived like Fig. 2(b). First of all, the
position of heat concentration is moved up by the trench structure. Because heat is mainly generated in the area
where the electrical cross-section area is reduced like Fig. 2(b)-①. The optimal position, depth, and width were
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calculated through simulation. Based on the calculation results, the optimal shape was selected by comparing the
power of the heater at the same ingot length under each trench condition. And the bottom wings are electrically
isolated. Therefore, only the heat of the heater is conducted, and this heat cancels the heat escaping from the crucible
to the bottom of grower. So, the inside of the grower becomes a little warmer than normal heater condition like Fig.
2(b)-②. According to the simulation result, the newly designed heater will produce the same result with less power
about 1.5 kW on average.
Fig. 3. Comparison of flow pattern (left) and thermal distribution in molten melt (right); (a) normal heater, (b) L-type heater
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Fig. 3 shows the results of the temperature and stream trace between normal heater and the L-type heater,
respectively. There are 3 vortices in the melt: the buoyancy-thermocapillary vortex near the wall, Taylor-Proudman
vortex under the crystal, and secondary vortex between them. The oxygen impurity originating from the quartz
crucible wall is solved into the silicon melt. This is prevented at the crystal-melt interface by the suppression of the
flow motion of the Taylor-Proudman vortex and carried to the free surface of the melt by the buoyancy-
thermocapillary vortex [6, 24-26].
Generally, the maximum temperature at the crucible wall appears at the intersection of the vertical and bottom
wall. However, when L-type heater is used, the maximum temperature is seen in the vertical wall because the center
of the heating position is raised, as show in Fig. 2(b). The melt flow patterns are similar due to the small difference
in the maximum temperature between normal heater and L-type heater and the same combination of rotation rates of
crucible and seed. Therefore, the distributions of the isotherms and oxygen concentration isolines in the melt are
also similar.
According to the experimental data, distributions of Oi level at the top position of ingot were 17~19 ppma on
average using normal heater condition, and similar results were obtained using other heater, fortunately. The optimal
location of the trench was set through simulation. These results are compared with actual production results for each
heater, and it is confirmed that they are similar to each other and shown in Fig. 5.
Fig. 5. Comparison of Oi level of ingots produced according to heater type using same grower and growing condition.
Comparing the actual production results, the oxygen concentration was lower than that of the general heater by
about 0.4 ppma based on the median value. Therefore, by increasing the heating center of the L-type heater and the
insulation of the lower part of the graphite crucible using the wings of heater helped control the oxygen precipitation.
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The comparison of average heater power trends between commercial operation and experiments is shown in
Fig. 6. For comparison, we used a single grower. The average power consumption range is decreased from about
52.5 to about 50.7 kW.
The average pulling rate (growth rate) at the body step was about 1.3 mm/min, Ar flow rate was kept 30 LPM
and pressure was 30 torr. As shown, the power consumption was slightly decreased. What this means is that the
newly designed heater works as intended. As mentioned above, the thermal distribution, shown in Fig. 2(b), was
much higher temperatures under the bottom of crucible than normal heater. This means that it is possible to reduce
the amount of heat required to maintain the Si melt by effectively blocking the heat loss to the bottom.
Fig. 6. Comparison of average heater power histories by ingot growth using normal and L-type new heater.
According to the result, the power of about 0.87 kWh/mm is required for 8.3 inches ingot growth using a normal
heater. On the other hand, in case of L-type heater, it can grow with power of about 0.85 kWh/mm (calculated by
raw data integration). In conclusion, the newly designed heater worked as intended. Therefore, we will save
approximately 40 kWh/ingot reduction in body step based on 2,000 mm ingot.
4. Conclusions
We have designed new hot-zone for commercial 8.3 inches diameter ingot growth in S-tech OSG puller. The
simulation using CG-SIM was found reasonably consistent with experimental observations in the power
consumption, and oxygen content. The average power reduction is about 1.8 kW, which is similar to the simulation
result of 1.5 kW.
The other properties except oxygen concentration are the same as those of mass-produced ingots. Despite the
inside temperature of grower increasing, the concentration of oxygen was suppressed to 19 ppma or less as in a
normal heater. Particularly, it is very encouraging that the oxygen concentration for the high efficiency solar cell is
18 ppma or less based on the median value. And the other three major indicators for the solar cell performance were
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all similar. From these results, it can be seen that the ingots have the same quality for PV applications. The newly
designed heater has worked successfully and is expected to be of industrial benefit.
Acknowledgements
The authors would like to thank the Korea Institute for Advancement of Technology(KIAT) of S. Korea, for the
support of this work through Project No. N0001972.
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