Activity 2

{ <08/07/18 08:54:42> e = "Hardware Info [2]"; m = "HW.
DLL - Port2 Cassette

Arrival Detected"; }
{ <08/07/18 08:54:49> e = "FilterSetting"; m = ""; }
{ <08/07/18 08:54:50> e = "Port2 E87Disabled, GemCarrierUnloadComplete( ) error
Code 216"; m = "FA"; }
{ <08/07/18 08:54:50> e = "Port2 E87 Tranfer State Reset, return code = 216"; m =
"FA"; }
{ <08/07/18 08:54:50> e = "GemIpcwindow"; m = "rightcassetteRemoved Exit"; }
{ <08/07/18 08:54:50> e = "Hardware Info [2]"; m = "HW.DLL - Port2 Cassette
Removal Detected"; }
{ <08/07/18 08:54:57> e = "AdjSEGain"; m = "Adjusted ND filter to new filter .70D
(20%)."; }
{ <08/07/18 08:56:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 08:56:21> e = "SaveData(Rmt)"; m = "GX17-TOPVIA-NITRIDE"; }
{ <08/07/18 08:56:21> e = "StartDataUpload"; m = ""; }
{ <08/07/18 08:56:33> e = "LdWafer"; m = ""; }
{ <08/07/18 08:56:34> e = "Left Port, Slot2 "; m = "WaferID (GXW23208.1-19),
LotID (GXW23208.1) "; }
{ <08/07/18 08:56:34> e = "Test Information"; m = "RCP Path -Main System\THIN
FILM DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-NITRIDE- PATTERN Test - SITE BY
SITE"; }
(20%)."; }
{ <08/07/18 08:58:38> e = "UnLdWafer"; m = ""; }
{ <08/07/18 08:58:46> e = "LdWafer"; m = ""; }
{ <08/07/18 08:58:46> e = "Left Port, Slot3 "; m = "WaferID (GXW23208.1-9), LotID
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SITE"; }
(20%)."; }
{ <08/07/18 09:00:52> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:00:59> e = "LdWafer"; m = ""; }
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SITE"; }
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{ <08/07/18 09:03:03> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:03:21> e = "TestOperator::runEverything()"; m = "End TestOperator
tasks for cassette management"; }
{ <08/07/18 09:03:22> e = "TestOperator::RunTest()"; m = "END TestOperator task
for running a test"; }
{ <08/07/18 09:03:22> e = "End cassette run"; m = "WfrCnt=432506"; }
{ <08/07/18 09:03:22> e = "Close Operator Input Window"; m = "Main System\THIN
FILM DIELECTRICS\GX17\GX17-TOPVIA"; }
{ <08/07/18 09:03:22> e = "Close Cassette Setup Window"; m = "Main System\THIN
{ <08/07/18 09:03:23> e = "PP Select(Rmt)"; m = "Request from Host"; }
{ <08/07/18 09:03:25> e = "Open Cassette Setup Window"; m = "Main System\THIN
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD"; }
{ <08/07/18 09:03:26> e = "Open Operator Input Window"; m = "Main System\THIN
{ <08/07/18 09:03:26> e = "CarrierID"; m = "Port 2 CarrierID []"; }
{ <08/07/18 09:03:26> e = "PP Selected (QUAL/DAILY)"; m = "Main System\THIN FILM
DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD"; }
{ <08/07/18 09:03:26> e = "PP Started(Host)"; m = "Main System\THIN FILM
{ <08/07/18 09:03:26> e = "Start cassette run (Rmt)(2)"; m = "Main System\THIN
{ <08/07/18 09:03:26> e = "TestOperator::RunTest()"; m = "BEGIN TestOperator task
{ <08/07/18 09:03:26> e = "TestOperator::runEverything()"; m = "Begin
TestOperator tasks for cassette management"; }
{ <08/07/18 09:03:29> e = "LdWafer"; m = ""; }
{ <08/07/18 09:03:55> e = "LdWaferToStage"; m = ""; }
{ <08/07/18 09:04:04> e = "Right Port, Slot1 "; m = "WaferID (S7V32513.1-1),
LotID (S7V32513.10) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P DARC F5X- Polar map"; }
{ <08/07/18 09:04:10> e = "MLServeSingle"; m = "CalculateFailure DBS WL::[Lo
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{ <08/07/18 09:04:10> e = "MLServeSingle"; m = "CalculateFailure UVSE WL::[Lo
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{ <08/07/18 09:04:10> e = "MLServeSingle"; m = "CalculateFailure DUVSE WL::[Lo
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{ <08/07/18 09:04:11> e = "---"; m = "49P DARC F5X -- Calculation error:
Convergence failure in FTML::GridOptimizer::refine"; }
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{ <08/07/18 09:06:23> e = "GemIpcwindow"; m = "leftcassetteRemoved begin"; }
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"FA"; }
{ <08/07/18 09:06:23> e = "GemIpcwindow"; m = "leftcassetteRemoved exit"; }
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{ <08/07/18 09:07:15> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:07:15> e = "SaveData(Rmt)"; m = "49P DARC F5X"; }
{ <08/07/18 09:07:22> e = "LdWafer"; m = ""; }
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248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
248.00 Hi 750.00]"; }
{ <08/07/18 09:17:11> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 09:18:26> e = "Open Organizer"; m = ""; }
{ <08/07/18 09:18:36> e = "#No. of CassetteSummary Loaded"; m = "4"; }
{ <08/07/18 09:18:37> e = "Double click menu on"; m = "Main System\THIN FILM
DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-NITRIDE"; }
{ <08/07/18 09:18:37> e = "OpenRecipe"; m = "Main System\THIN FILM
{ <08/07/18 09:18:37> e = "Open Recipe Edit Window"; m = "IPIX-T1-NITRIDE"; }
{ <08/07/18 09:18:50> e = "Modified Recipe"; m = "IPIX-T1-NITRIDE: 08/07/18
9:18:50 AM"; }
{ <08/07/18 09:18:51> e = "Close Recipe Edit Window"; m = "IPIX-T1-NITRIDE"; }
{ <08/07/18 09:18:54> e = "Selected menu Rename from"; m = "Main System\THIN FILM
DIELECTRICS\IPIX\IPIX-T1\IP77-T1-FSG"; }
DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-FSG"; }
DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-FSG"; }
{ <08/07/18 09:19:00> e = "Open Recipe Edit Window"; m = "IPIX-T1-FSG"; }
{ <08/07/18 09:19:16> e = "Modified Recipe"; m = "IPIX-T1-FSG: 08/07/18
9:19:16 AM"; }
{ <08/07/18 09:19:18> e = "Close Recipe Edit Window"; m = "IPIX-T1-FSG"; }
DIELECTRICS\IPIX\IPIX-T1\IP77-T1-DARC"; }
DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-DARC"; }
DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-DARC"; }
{ <08/07/18 09:19:32> e = "Open Recipe Edit Window"; m = "IPIX-T1-DARC"; }
{ <08/07/18 09:19:43> e = "Modified Recipe"; m = "IPIX-T1-DARC: 08/07/18
9:19:43 AM"; }
{ <08/07/18 09:19:45> e = "Close Recipe Edit Window"; m = "IPIX-T1-DARC"; }
{ <08/07/18 09:19:46> e = "Close Organizer"; m = ""; }
{ <08/07/18 09:20:48> e = "Selected menu GEM Set State by"; m = "FARUQI"; }
{ <08/07/18 09:20:51> e = "SetState Online-Local"; m = ""; }
{ <08/07/18 09:20:51> e = "SECSGEM Status"; m = "Communicating Online Local"; }
DIELECTRICS\IM50\IM50-TOPVIA"; }
FILM DIELECTRICS\IM50\IM50-TOPVIA"; }
{ <08/07/18 09:21:42> e = "Select Run on Cassette Setup window"; m = "Main
System\THIN FILM DIELECTRICS\IM50\IM50-TOPVIA"; }
{ <08/07/18 09:21:42> e = "PP Select (Editor)"; m = "Main System\THIN FILM
{ <08/07/18 09:21:42> e = "HasErrorToRun"; m = "Mapping is not done yet."; }
{ <08/07/18 09:22:01> e = "PP Selected (IM50/IM50-TOPVIA)"; m = "Main System\THIN
{ <08/07/18 09:22:23> e = "Select Run from Operator Input Window"; m = "Main
System\THIN FILM DIELECTRICS\IM50\IM50-TOPVIA"; }
{ <08/07/18 09:22:23> e = "Start cassette run (Lcl)(1)"; m = "Main System\THIN
{ <08/07/18 09:22:26> e = "LdWafer"; m = ""; }
{ <08/07/18 09:22:51> e = "Left Port, Slot22 "; m = "WaferID (2018/08/07 09:23
22), LotID (IBW29004.1) "; }
FILM DIELECTRICS\IM50\IM50-TOPVIA\IM50-TOPVIA-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 09:25:39> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:25:39> e = "SaveData(Lcl)"; m = "IM50-TOPVIA-DARC"; }
{ <08/07/18 09:25:46> e = "LdWafer"; m = ""; }
23), LotID (IBW29004.1) "; }
(20%)."; }
{ <08/07/18 09:28:33> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:28:40> e = "LdWafer"; m = ""; }
25), LotID (IBW29004.1) "; }
(20%)."; }
{ <08/07/18 09:31:28> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:31:59> e = "DataSummary (Auto)"; m = "\THIN FILM
{ <08/07/18 09:32:11> e = "Selected menu Export from"; m = "Right Icon: 8/7/2018
9:22:29 AM IBW29004.1 | Main System\\THIN FILM DIELECTRICS\IM50\IM50-TOPVIA"; }
{ <08/07/18 09:32:13> e = "Export Data Summary"; m = "Main System\\THIN FILM
{ <08/07/18 09:37:19> e = "Close DataSummary Window"; m = "\THIN FILM
{ <08/07/18 09:37:26> e = "SetState Online-Remote"; m = ""; }
{ <08/07/18 09:37:26> e = "Go Online result=1"; m = "FA"; }
{ <08/07/18 09:37:26> e = "SECSGEM Status"; m = "Communicating Online Remote"; }
Code 216"; m = "FA"; }
"FA"; }
FILM DIELECTRICS\IPIX\IPIX-T1"; }
{ <08/07/18 09:38:10> e = "PP Selected (IPIX/IPIX-T1)"; m = "Main System\THIN
DIELECTRICS\IPIX\IPIX-T1"; }
{ <08/07/18 09:38:14> e = "LdWafer"; m = ""; }
{ <08/07/18 09:38:42> e = "Right Port, Slot2 "; m = "WaferID (S8W23183.1-23),
LotID (S8W23183.5) "; }
FILM DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-FSG- PATTERN Test - SITE BY SITE"; }
{ <08/07/18 09:39:17> e = "Double click menu on"; m = "Right Icon: 7/31/2018
1:05:32 PM IBU50264.21 | Main System\\THIN FILM DIELECTRICS\IM41\IM41-VIA1"; }
{ <08/07/18 09:39:17> e = "DataSummary (Manual)"; m = "\THIN FILM
DIELECTRICS\IM41\IM41-VIA1"; }
(63%)."; }
7:52:22 AM SQW21505.1 | Main System\\THIN FILM DIELECTRICS\KT07\KT07-PASS"; }
DIELECTRICS\KT07\KT07-PASS"; }
DIELECTRICS\KT07\KT07-PASS\KT07-PASS-USG"; }
DIELECTRICS\KT07\KT07-PASS\KT07-PASS-USG"; }
{ <08/07/18 09:39:51> e = "Open Recipe Edit Window"; m = "KT07-PASS-USG"; }
{ <08/07/18 09:39:55> e = "Close Recipe Edit Window"; m = "KT07-PASS-USG"; }
DIELECTRICS\KT07\KT07-PASS\KT07-PASS-NITRIDE2"; }
DIELECTRICS\KT07\KT07-PASS\KT07-PASS-NITRIDE2"; }
{ <08/07/18 09:39:57> e = "Open Recipe Edit Window"; m = "KT07-PASS-NITRIDE2"; }
{ <08/07/18 09:40:07> e = "Modified Recipe"; m = "KT07-PASS-NITRIDE2: 08/07/18
9:40:07 AM"; }
{ <08/07/18 09:40:08> e = "Close Recipe Edit Window"; m = "KT07-PASS-NITRIDE2"; }
{ <08/07/18 09:41:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:41:01> e = "SaveData(Rmt)"; m = "IPIX-T1-FSG"; }
FILM DIELECTRICS\KT07\KT07-PASS"; }
{ <08/07/18 09:41:22> e = "PP Selected (KT07/KT07-PASS)"; m = "Main System\THIN
{ <08/07/18 09:41:25> e = "LdWafer"; m = ""; }
{ <08/07/18 09:41:59> e = "Left Port, Slot2 "; m = "WaferID (SQW21505.1-2), LotID
(SQW21505.1) "; }
FILM DIELECTRICS\KT07\KT07-PASS\KT07-PASS-NITRIDE2- PATTERN Test - SITE BY SITE"; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 09:44:31> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:44:31> e = "SaveData(Rmt)"; m = "KT07-PASS-NITRIDE2"; }
{ <08/07/18 09:44:39> e = "LdWafer"; m = ""; }
(SQW21505.1) "; }
(20%)."; }
{ <08/07/18 09:47:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:47:24> e = "LdWafer"; m = ""; }
(SQW21505.1) "; }
(20%)."; }
{ <08/07/18 09:50:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:50:08> e = "LdWafer"; m = ""; }
(SQW21505.1) "; }
(20%)."; }
{ <08/07/18 09:52:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:53:07> e = "Open Cassette Setup Window"; m = "Main
System\CMP\GX17\GX17-T3NB"; }
{ <08/07/18 09:53:07> e = "Open Operator Input Window"; m = "Main
{ <08/07/18 09:53:07> e = "PP Selected (GX17/GX17-T3NB)"; m = "Main
{ <08/07/18 09:53:07> e = "PP Started(Host)"; m = "Main System\CMP\GX17\GX17-
T3NB"; }
{ <08/07/18 09:53:07> e = "Start cassette run (Rmt)(2)"; m = "Main
{ <08/07/18 09:53:10> e = "LdWafer"; m = ""; }
{ <08/07/18 09:53:40> e = "Right Port, Slot22 "; m = "WaferID (GXW23212.1-9),
LotID (GXW23212.1) "; }
{ <08/07/18 09:53:40> e = "Test Information"; m = "RCP Path -Main
System\CMP\GX17\GX17-T3NB\GX17-CMP-PO- PATTERN Test"; }
(20%)."; }
{ <08/07/18 09:54:44> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:54:44> e = "SaveData(Rmt)"; m = "GX17-CMP-PO"; }
{ <08/07/18 09:54:51> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
(20%)."; }
{ <08/07/18 09:56:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:56:07> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
(20%)."; }
{ <08/07/18 09:57:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:57:26> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
(20%)."; }
{ <08/07/18 09:58:35> e = "UnLdWafer"; m = ""; }
{ <08/07/18 09:58:58> e = "Close Operator Input Window"; m = "Main
{ <08/07/18 09:58:58> e = "Close Cassette Setup Window"; m = "Main
FILM DIELECTRICS\IM41\IM41-VIA1"; }
{ <08/07/18 09:59:01> e = "PP Selected (IM41/IM41-VIA1)"; m = "Main System\THIN
{ <08/07/18 09:59:04> e = "LdWafer"; m = ""; }
{ <08/07/18 09:59:36> e = "Left Port, Slot10 "; m = "WaferID (IBU50264.1-16),
LotID (IBU50264.20) "; }
FILM DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-NITRIDE- PATTERN Test - SITE BY SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 10:01:52> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:01:52> e = "SaveData(Rmt)"; m = "IM41-VIA1-NITRIDE"; }
{ <08/07/18 10:02:15> e = "PP Selected (GX17/GX17-TOPVIA)"; m = "Main System\THIN
DIELECTRICS\GX17\GX17-TOPVIA"; }
{ <08/07/18 10:02:18> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 10:04:51> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:04:58> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 10:07:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:07:19> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 10:09:23> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:09:31> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 10:11:36> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\GX17\GX17-T1"; }
{ <08/07/18 10:11:58> e = "PP Selected (GX17/GX17-T1)"; m = "Main System\THIN
DIELECTRICS\GX17\GX17-T1"; }
{ <08/07/18 10:12:01> e = "LdWafer"; m = ""; }
LotID (GXW16138.2) "; }
FILM DIELECTRICS\GX17\GX17-T1\GX17-T1-DARC- PATTERN Test"; }
{ <08/07/18 10:13:36> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:13:36> e = "SaveData(Rmt)"; m = "GX17-T1-DARC"; }
{ <08/07/18 10:13:44> e = "LdWafer"; m = ""; }
LotID (GXW16138.2) "; }
{ <08/07/18 10:14:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:14:55> e = "LdWafer"; m = ""; }
LotID (GXW16138.2) "; }
{ <08/07/18 10:16:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:16:07> e = "LdWafer"; m = ""; }
LotID (GXW16138.2) "; }
{ <08/07/18 10:17:12> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\CX90\CX90-VIA3"; }
{ <08/07/18 10:17:37> e = "PP Selected (CX90/CX90-VIA3)"; m = "Main System\THIN
DIELECTRICS\CX90\CX90-VIA3"; }
{ <08/07/18 10:17:40> e = "LdWafer"; m = ""; }
{ <08/07/18 10:18:15> e = "Right Port, Slot1 "; m = "WaferID (LNW22801.1-7),
LotID (LNW22801.1) "; }
FILM DIELECTRICS\CX90\CX90-VIA3\CX90-VIA3-NITRIDE- PATTERN Test - SITE BY SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 10:20:46> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:20:46> e = "SaveData(Rmt)"; m = "CX90-VIA3-NITRIDE"; }
{ <08/07/18 10:20:58> e = "---"; m = "***ERROR*** Go (GO ) TXNStatus=3fH,
SLPStatus=00H, SLPError=00H1024.75 Mins ago, Enc in 1 sec-
>Max/Min/Var=20163845/19999006/5792662037.3Cnts1024.75 Mins ago, Y time out err
(Trgt/DSP/Actl=20155956/20155956/19999607)1024.62 Mins ago, Enc in 1 sec-
(Trgt/DSP/Actl=22459752/22459752/22273252) 734.22 Mins ago, Enc in 1 sec-
>Max/Min/Var=19856683/19840404/33478648.5Cnts 734.22 Mins ago, Y time out err
(Trgt/DSP/Actl=22459752/22459752/22105936),Fw V6.60.02, Date= 06/16/2004, (c)KLA-
Tencor FaST, Cfg=ccdf 2241 0000 0000"; }
{ <08/07/18 10:21:28> e = "TO_Error"; m = "Recovery:104; Type:140; Module:6001;
TimeStamped:1"; }
{ <08/07/18 10:21:28> e = "---"; m = "CX90-VIA3-NITRIDE -- Test Aborted,User
aborted test"; }
{ <08/07/18 10:32:37> e = " Enter SSM window "; m = "FARUQI"; }
3:15:00 PM LNW22800.3 | Main System\\THIN FILM DIELECTRICS\CX90\CX90-T1"; }
DIELECTRICS\CX90\CX90-T1"; }
Code 216"; m = "FA"; }
"FA"; }
DIELECTRICS\CX90\CX90-T1\CX90-T1-NITRIDE"; }
{ <08/07/18 10:33:43> e = "Open Recipe Edit Window"; m = "CX90-T1-NITRIDE"; }
{ <08/07/18 10:33:51> e = " Exit SSM window "; m = "FARUQI"; }
10:56:16 AM LNW22806.1 | Main System\\THIN FILM DIELECTRICS\CX90\"; }
DIELECTRICS\CX90\"; }
DIELECTRICS\CX90\"; }
DIELECTRICS\CX90\CX90-VIA1\CX90-VIA1-DARC"; }
DIELECTRICS\CX90\CX90-VIA1\CX90-VIA1-DARC"; }
{ <08/07/18 10:34:03> e = "Open Recipe Edit Window"; m = "CX90-VIA1-DARC"; }
{ <08/07/18 10:34:27> e = "Start Pattern Rec. Training"; m = "CX90-CHA"; }
{ <08/07/18 10:34:27> e = "Open WaferNavigator"; m = ""; }
{ <08/07/18 10:34:27> e = "Open Trainer"; m = ""; }
{ <08/07/18 10:34:27> e = "SECSGEM Status"; m = "Communicating Equipment Off-
Lin"; }
Lin"; }
{ <08/07/18 10:38:51> e = "Close WaferNavigator"; m = ""; }
{ <08/07/18 10:38:51> e = "Close Trainer"; m = ""; }
{ <08/07/18 10:38:51> e = "PR. Trainer Operation completed"; m = ""; }
{ <08/07/18 10:38:51> e = "SECSGEM Status"; m = "Communicating Attempt On-
Line"; }
Line"; }
{ <08/07/18 10:38:53> e = "Modified Recipe"; m = "CX90-T1-NITRIDE: 08/07/18
10:38:53 AM"; }
10:38:58 AM"; }
{ <08/07/18 10:38:59> e = "Close Recipe Edit Window"; m = "CX90-T1-NITRIDE"; }
{ <08/07/18 10:39:02> e = "Close Recipe Edit Window"; m = "CX90-VIA1-DARC"; }
FILM DIELECTRICS\CX90\CX90-T1"; }
System\THIN FILM DIELECTRICS\CX90\CX90-T1"; }
{ <08/07/18 10:39:30> e = "PP Selected (CX90/CX90-T1)"; m = "Main System\THIN
System\THIN FILM DIELECTRICS\CX90\CX90-T1"; }
{ <08/07/18 10:39:36> e = "LdWafer"; m = ""; }
01), LotID () "; }
FILM DIELECTRICS\CX90\CX90-T1\CX90-T1-NITRIDE- PATTERN Test - SITE BY SITE"; }
{ <08/07/18 10:42:31> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:42:31> e = "SaveData(Lcl)"; m = "CX90-T1-NITRIDE"; }
10:17:43 AM LNW22801.1 | Main System\\THIN FILM DIELECTRICS\CX90\CX90-VIA3"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 10:45:27> e = "LdWafer"; m = ""; }
{ <08/07/18 10:45:55> e = "Left Port, Slot1 "; m = "WaferID (LNW22803.1-10),
LotID (LNW22803.1) "; }
{ <08/07/18 10:48:23> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:48:23> e = "SaveData(Rmt)"; m = "CX90-T1-NITRIDE"; }
{ <08/07/18 10:48:30> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 10:51:03> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:51:10> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 10:53:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:53:48> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 10:56:18> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:56:43> e = "LdWafer"; m = ""; }
LotID (S8W23183.5) "; }
FILM DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-DARC- PATTERN Test - SITE BY SITE"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 10:59:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 10:59:20> e = "SaveData(Rmt)"; m = "IPIX-T1-DARC"; }
FILM DIELECTRICS\IM41\IM41-PASS"; }
{ <08/07/18 10:59:45> e = "PP Selected (IM41/IM41-PASS)"; m = "Main System\THIN
DIELECTRICS\IM41\IM41-PASS"; }
{ <08/07/18 10:59:48> e = "LdWafer"; m = ""; }
LotID (IBU50264.21) "; }
FILM DIELECTRICS\IM41\IM41-PASS\IM41-PASS-USG- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 11:02:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:02:48> e = "SaveData(Rmt)"; m = "IM41-PASS-USG"; }
{ <08/07/18 11:02:56> e = "LdWafer"; m = ""; }
LotID (IBU50264.21) "; }
(20%)."; }
{ <08/07/18 11:05:23> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\LT83\LT83-MIMT"; }
{ <08/07/18 11:05:51> e = "PP Selected (LT83/LT83-MIMT)"; m = "Main System\THIN
DIELECTRICS\LT83\LT83-MIMT"; }
{ <08/07/18 11:05:54> e = "LdWafer"; m = ""; }
{ <08/07/18 11:06:29> e = "Right Port, Slot1 "; m = "WaferID (LTW17800.1-23),
LotID (LTW17800.1) "; }
FILM DIELECTRICS\LT83\LT83-MIMT\LT83-MIMETCH-NITRIDE- Quick Test"; }
(63%)."; }
{ <08/07/18 11:07:10> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:07:10> e = "SaveData(Rmt)"; m = "LT83-MIMETCH-NITRIDE"; }
{ <08/07/18 11:07:18> e = "LdWafer"; m = ""; }
LotID (LTW17800.1) "; }
(63%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 11:08:02> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:08:09> e = "LdWafer"; m = ""; }
LotID (LTW17800.1) "; }
(63%)."; }
{ <08/07/18 11:08:55> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:09:03> e = "LdWafer"; m = ""; }
LotID (LTW17800.1) "; }
(63%)."; }
{ <08/07/18 11:09:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:10:14> e = "LdWafer"; m = ""; }
{ <08/07/18 11:10:47> e = "Left Port, Slot1 "; m = "WaferID (LNW22801.1-7), LotID
(LNW22801.1) "; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 11:13:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:13:28> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
(20%)."; }
{ <08/07/18 11:16:09> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:16:16> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
(20%)."; }
{ <08/07/18 11:18:54> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:19:01> e = "LdWafer"; m = ""; }
(LNW22801.1) "; }
(20%)."; }
{ <08/07/18 11:21:42> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:22:06> e = "LdWafer"; m = ""; }
LotID (LTW20801.1) "; }
(63%)."; }
{ <08/07/18 11:23:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:23:27> e = "LdWafer"; m = ""; }
LotID (LTW20801.1) "; }
(63%)."; }
{ <08/07/18 11:24:13> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:24:23> e = "LdWafer"; m = ""; }
LotID (LTW20801.1) "; }
(63%)."; }
{ <08/07/18 11:25:10> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:25:17> e = "LdWafer"; m = ""; }
LotID (LTW20801.1) "; }
(63%)."; }
{ <08/07/18 11:26:04> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:26:29> e = "LdWafer"; m = ""; }
{ <08/07/18 11:27:04> e = "Left Port, Slot1 "; m = "WaferID (LTW20800.1-6), LotID
(LTW20800.1) "; }
(63%)."; }
{ <08/07/18 11:27:44> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:27:51> e = "LdWafer"; m = ""; }
(LTW20800.1) "; }
(63%)."; }
{ <08/07/18 11:28:38> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:28:45> e = "LdWafer"; m = ""; }
{ <08/07/18 11:28:45> e = "Left Port, Slot3 "; m = "WaferID (LTW20800.1-11),
LotID (LTW20800.1) "; }
(63%)."; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 11:29:32> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:29:39> e = "LdWafer"; m = ""; }
LotID (LTW20800.1) "; }
(63%)."; }
{ <08/07/18 11:30:24> e = "UnLdWafer"; m = ""; }
System\TFM\DAILY MONITORING\ECP\REFLECTIVITY"; }
{ <08/07/18 11:41:16> e = "PP Selected (ECP/REFLECTIVITY)"; m = "Main
{ <08/07/18 11:41:16> e = "PP Started(Host)"; m = "Main System\TFM\DAILY
MONITORING\ECP\REFLECTIVITY"; }
{ <08/07/18 11:41:19> e = "LdWafer"; m = ""; }
{ <08/07/18 11:41:46> e = "Right Port, Slot19 "; m = "WaferID (BS7W31441.1-19),
LotID (BS7W31441.1) "; }
System\TFM\DAILY MONITORING\ECP\REFLECTIVITY\CELL- Quick Test"; }
{ <08/07/18 11:42:18> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:42:18> e = "SaveData(Rmt)"; m = "CELL"; }
{ <08/07/18 11:42:26> e = "LdWafer"; m = ""; }
LotID (BS7W31441.1) "; }
{ <08/07/18 11:42:58> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
T2NB"; }
{ <08/07/18 11:45:43> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 11:47:11> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:47:18> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 11:48:28> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:48:36> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 11:49:46> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:49:53> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 11:51:03> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\IP77\IP77-VIA3"; }
{ <08/07/18 11:51:55> e = "PP Selected (IP77/IP77-VIA3)"; m = "Main System\THIN
DIELECTRICS\IP77\IP77-VIA3"; }
{ <08/07/18 11:51:59> e = "LdWafer"; m = ""; }
{ <08/07/18 11:52:28> e = "Left Port, Slot1 "; m = "WaferID (IPW23191.1-14),
LotID (IPW23191.1) "; }
FILM DIELECTRICS\IP77\IP77-VIA3\IP77-VIA3-NITRIDE- PATTERN Test"; }
(20%)."; }
{ <08/07/18 11:53:35> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:53:35> e = "SaveData(Rmt)"; m = "IP77-VIA3-NITRIDE"; }
{ <08/07/18 11:53:42> e = "LdWafer"; m = ""; }
LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 11:54:52> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:54:59> e = "LdWafer"; m = ""; }
LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 11:56:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 11:56:19> e = "LdWafer"; m = ""; }
{ <08/07/18 11:56:19> e = "Left Port, Slot4 "; m = "WaferID (IPW23191.1-3), LotID
(IPW23191.1) "; }
(20%)."; }
{ <08/07/18 11:57:31> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
System\THIN FILM DIELECTRICS\GX17\GX17-T1"; }
System\THIN FILM DIELECTRICS\GX17\GX17-T1"; }
{ <08/07/18 12:08:04> e = "LdWafer"; m = ""; }
24), LotID (GXW23215.1) "; }
FILM DIELECTRICS\GX17\GX17-T1\GX17-T1-FSGNB- PATTERN Test"; }
{ <08/07/18 12:09:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:09:57> e = "SaveData(Lcl)"; m = "GX17-T1-FSGNB"; }
{ <08/07/18 12:10:05> e = "LdWafer"; m = ""; }
25), LotID (GXW23215.1) "; }
{ <08/07/18 12:11:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:11:40> e = "SaveData(Lcl)"; m = "GX17-T1-FSGNB"; }
12:08:07 PM GXW23215.1 | Main System\\THIN FILM DIELECTRICS\GX17\GX17-T1"; }
Code 216"; m = "FA"; }
"FA"; }
DIELECTRICS\A76B\A76B-VIA3"; }
FILM DIELECTRICS\A76B\A76B-VIA3"; }
System\THIN FILM DIELECTRICS\A76B\A76B-VIA3"; }
{ <08/07/18 12:15:03> e = "PP Selected (A76B/A76B-VIA3)"; m = "Main System\THIN
{ <08/07/18 12:15:30> e = "LdWafer"; m = ""; }
14), LotID (AHW22005.1) "; }
FILM DIELECTRICS\A76B\A76B-VIA3\A76B-VIA3-FSG- PATTERN Test"; }
(20%)."; }
{ <08/07/18 12:17:08> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:17:08> e = "SaveData(Lcl)"; m = "A76B-VIA3-FSG"; }
{ <08/07/18 12:17:15> e = "LdWafer"; m = ""; }
15), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 12:18:28> e = "UnLdWafer"; m = ""; }
12:15:33 PM AHW22005.1 | Main System\\THIN FILM DIELECTRICS\A76B\A76B-VIA3"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 12:25:34> e = "PP Selected (IM50/IM50-TOPVIA)"; m = "Main System\THIN
{ <08/07/18 12:25:37> e = "LdWafer"; m = ""; }
{ <08/07/18 12:26:02> e = "Right Port, Slot20 "; m = "WaferID (IBW29004.1-22),
LotID (IBW29004.1) "; }
(20%)."; }
{ <08/07/18 12:28:46> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:28:46> e = "SaveData(Rmt)"; m = "IM50-TOPVIA-DARC"; }
{ <08/07/18 12:28:54> e = "LdWafer"; m = ""; }
LotID (IBW29004.1) "; }
(20%)."; }
{ <08/07/18 12:31:43> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:31:43> e = "SaveData(Rmt)"; m = "IM50-TOPVIA-DARC"; }
System\TFM\CUBS\ETCH_Rate2"; }
{ <08/07/18 12:32:08> e = "PP Selected (CUBS/ETCHRATE)"; m = "Main
{ <08/07/18 12:32:08> e = "PP Started(Host)"; m = "Main
{ <08/07/18 12:32:11> e = "LdWafer"; m = ""; }
{ <08/07/18 12:32:41> e = "Left Port, Slot16 "; m = "WaferID (S7W27447.1-16),
LotID (S7W27447.1) "; }
System\TFM\CUBS\ETCH_Rate2\9PTS PRE- Quick Test"; }
(63%)."; }
{ <08/07/18 12:33:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:33:20> e = "SaveData(Rmt)"; m = "9PTS PRE"; }
{ <08/07/18 12:33:27> e = "LdWafer"; m = ""; }
LotID (S7W27447.1) "; }
System\TFM\CUBS\ETCH_Rate2\9PTS PRE- Quick Test"; }
{ <08/07/18 12:34:05> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:34:05> e = "SaveData(Rmt)"; m = "9PTS PRE"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 12:36:26> e = "LdWafer"; m = ""; }
{ <08/07/18 12:36:51> e = "Right Port, Slot21 "; m = "WaferID (IBU50264.1-18),
LotID (IBU50264.21) "; }
FILM DIELECTRICS\IM41\IM41-PASS\IM41-PASS-NITRIDE2- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 12:39:23> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:39:23> e = "SaveData(Rmt)"; m = "IM41-PASS-NITRIDE2"; }
{ <08/07/18 12:39:30> e = "LdWafer"; m = ""; }
LotID (IBU50264.21) "; }
(20%)."; }
{ <08/07/18 12:42:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:42:47> e = "LdWafer"; m = ""; }
LotID (GXW23215.1) "; }
{ <08/07/18 12:44:44> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:44:44> e = "SaveData(Rmt)"; m = "GX17-T1-FSGNB"; }
{ <08/07/18 12:44:52> e = "LdWafer"; m = ""; }
LotID (GXW23215.1) "; }
{ <08/07/18 12:46:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:46:38> e = "LdWafer"; m = ""; }
LotID (GXW23215.1) "; }
{ <08/07/18 12:48:15> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:48:22> e = "LdWafer"; m = ""; }
LotID (GXW23215.1) "; }
{ <08/07/18 12:49:57> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 12:52:28> e = "LdWafer"; m = ""; }
LotID (IBU50264.20) "; }
FILM DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-USG- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 12:55:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 12:55:19> e = "SaveData(Rmt)"; m = "IM41-VIA1-USG"; }
SLPStatus=00H, SLPError=00H1168.43 Mins ago, Enc in 1 sec-
TimeStamped:1"; }
{ <08/07/18 12:55:52> e = "---"; m = "IM41-VIA1-USG -- Test Aborted,User aborted
test"; }
12:52:31 PM IBU50264.20 | Main System\\THIN FILM DIELECTRICS\IM41\IM41-VIA1"; }
{ <08/07/18 12:56:55> e = "Open Raw Data Window"; m = "\THIN FILM
DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-USG"; }
{ <08/07/18 12:57:00> e = "Close Raw Data Window"; m = "\THIN FILM
DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-USG"; }
{ <08/07/18 12:57:11> e = " Enter SSM window "; m = "FARUQI"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 13:02:29> e = "Recipe selectable calibration"; m = "Calibration name

[ ] contains special characters"; }
{ <08/07/18 13:02:29> e = "Summit Startup"; m = "Checking for advanced
diagnostics capabilities"; }
{ <08/07/18 13:02:29> e = "Summit Diagnostics"; m = "Advanced diagnostics
installed!"; }
installed!"; }
installed!"; }
{ <08/07/18 13:03:30> e = "PCIF Info"; m = "PCIF RESET Completed"; }
{ <08/07/18 13:03:30> e = "Custom Calibrations loading start "; m = "---"; }
{ <08/07/18 13:03:30> e = "Custom Calibrations loading end"; m = "---"; }
{ <08/07/18 13:03:31> e = "ENM Process Recipes Loading Start"; m = "---"; }
{ <08/07/18 13:03:31> e = "ENM Process Recipes Loading Completed"; m = "---"; }
{ <08/07/18 13:03:34> e = "Start Summit"; m = "SUMMIT� Software Version
4.90.06_SP10, FTML Version 4.11.01, F5x with DS Thin Film Measurement System"; }
{ <08/07/18 13:03:34> e = "SECSGEM Status"; m = "Disabled Online Local"; }
{ <08/07/18 13:06:19> e = "System Name (F5x with DS Thin Film Measurement System),
Serial # (200611080757)"; m = "Handler Macro version V0.8, Indexer firmware
version S01.20"; }
{ <08/07/18 13:06:19> e = "TestOperator Contructor"; m = "Begin Initializing
TestOperator"; }
{ <08/07/18 13:06:19> e = "TestOperator Contructor"; m = "End Initializing
TestOperator"; }
{ <08/07/18 13:06:19> e = "SECSGEMEnable"; m = ""; }
{ <08/07/18 13:06:19> e = "SECSGEM Status"; m = "Not Communicating Online Local";
}
}
{ <08/07/18 13:06:19> e = "---"; m = "VIDEO - Wafer Positioner has completed
successful hardware initialization.(0)"; }
{ <08/07/18 13:09:57> e = "Selected menu GEM Set State by"; m = "Guest"; }
FILM DIELECTRICS\LT83\LT83-MIM"; }
{ <08/07/18 13:11:00> e = "PP Selected (LT83/LT83-MIM)"; m = "Main System\THIN
DIELECTRICS\LT83\LT83-MIM"; }
{ <08/07/18 13:11:04> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
FILM DIELECTRICS\LT83\LT83-MIM\LT83-MIM-TpVia-USG-CMP- PATTERN Test - SITE BY
SITE"; }
(20%)."; }
{ <08/07/18 13:13:52> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:13:52> e = "SaveData(Rmt)"; m = "LT83-MIM-TpVia-USG-CMP"; }
{ <08/07/18 13:13:59> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 13:16:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:16:19> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 13:18:35> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:18:43> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 13:20:54> e = "UnLdWafer"; m = ""; }
System\CMP\LT83\LT83-T5"; }
{ <08/07/18 13:21:19> e = "PP Selected (LT83/LT83-T5)"; m = "Main
{ <08/07/18 13:21:20> e = "PP Started(Host)"; m = "Main System\CMP\LT83\LT83-T5";
}
{ <08/07/18 13:21:22> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
System\CMP\LT83\LT83-T5\LT83-CMP-PO- PATTERN Test - SITE BY SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 13:24:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:24:00> e = "SaveData(Rmt)"; m = "LT83-CMP-PO"; }
{ <08/07/18 13:24:08> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
{ <08/07/18 13:26:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:26:28> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
{ <08/07/18 13:28:47> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:28:54> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
{ <08/07/18 13:31:07> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:31:36> e = "LdWafer"; m = ""; }
{ <08/07/18 13:32:08> e = "Left Port, Slot5 "; m = "WaferID (S7W32415.1-5), LotID
(S7W32415.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P FSG CHB1- Polar map"; }
{ <08/07/18 13:34:47> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:34:47> e = "SaveData(Rmt)"; m = "49P FSG CHB1"; }
{ <08/07/18 13:34:54> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P FSG CHB2- Polar map"; }
{ <08/07/18 13:37:34> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:37:34> e = "SaveData(Rmt)"; m = "49P FSG CHB2"; }
{ <08/07/18 13:37:42> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P FSG CHC1- Polar map"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 13:40:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:40:21> e = "SaveData(Rmt)"; m = "49P FSG CHC1"; }
{ <08/07/18 13:40:28> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P FSG CHC2- Polar map"; }
{ <08/07/18 13:43:08> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:43:08> e = "SaveData(Rmt)"; m = "49P FSG CHC2"; }
{ <08/07/18 13:43:32> e = "LdWafer"; m = ""; }
LotID (IBU50264.20) "; }
FILM DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-USG- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 13:46:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:46:19> e = "SaveData(Rmt)"; m = "IM41-VIA1-USG"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
FILM DIELECTRICS\QUAL\STRESS"; }
{ <08/07/18 13:51:49> e = "PP Selected (QUAL/STRESS)"; m = "Main System\THIN FILM
DIELECTRICS\QUAL\STRESS"; }
{ <08/07/18 13:51:52> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\QUAL\STRESS\Stress_POST_CHB1- Scan Test"; }
{ <08/07/18 13:52:20> e = "Cached First Wafer WST Data"; m = ""; }
{ <08/07/18 13:53:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:53:21> e = "SaveData(Rmt)"; m = "Stress_POST_CHB1"; }
{ <08/07/18 13:53:30> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
{ <08/07/18 13:54:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:54:39> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\QUAL\STRESS\Stress_POST_CHC1- Scan Test"; }
{ <08/07/18 13:55:39> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:55:39> e = "SaveData(Rmt)"; m = "Stress_POST_CHC1"; }
{ <08/07/18 13:55:48> e = "LdWafer"; m = ""; }
(S7W32415.1) "; }
FILM DIELECTRICS\QUAL\STRESS\Stress_POST_CHC2- Scan Test"; }
{ <08/07/18 13:56:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:56:48> e = "SaveData(Rmt)"; m = "Stress_POST_CHC2"; }
FILM DIELECTRICS\GX17\GX17-VIA2"; }
{ <08/07/18 13:57:14> e = "PP Selected (GX17/GX17-VIA2)"; m = "Main System\THIN
DIELECTRICS\GX17\GX17-VIA2"; }
{ <08/07/18 13:57:16> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
FILM DIELECTRICS\GX17\GX17-VIA2\GX17-VIA2-NITRIDE- PATTERN Test"; }
(20%)."; }
{ <08/07/18 13:58:52> e = "UnLdWafer"; m = ""; }
{ <08/07/18 13:58:52> e = "SaveData(Rmt)"; m = "GX17-VIA2-NITRIDE"; }
{ <08/07/18 13:58:59> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 14:00:04> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:00:11> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 14:01:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:01:24> e = "LdWafer"; m = ""; }
LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 14:02:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:02:55> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
SITE"; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 14:05:15> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:05:23> e = "LdWafer"; m = ""; }
(GXW23212.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 14:07:22> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:07:29> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 14:09:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:09:28> e = "LdWafer"; m = ""; }
(GXW23212.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 14:11:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:11:45> e = "LdWafer"; m = ""; }
LotID (S8W23183.3) "; }
FILM DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-NITRIDE- PATTERN Test - SITE BY SITE"; }
{ <08/07/18 14:14:31> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:14:31> e = "SaveData(Rmt)"; m = "IPIX-T1-NITRIDE"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 14:17:02> e = "LdWafer"; m = ""; }
LotID (LNW22807.1) "; }
{ <08/07/18 14:19:42> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:19:49> e = "LdWafer"; m = ""; }
LotID (LNW22807.1) "; }
{ <08/07/18 14:22:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:22:19> e = "LdWafer"; m = ""; }
LotID (LNW22807.1) "; }
{ <08/07/18 14:24:34> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:24:42> e = "LdWafer"; m = ""; }
(LNW22807.1) "; }
{ <08/07/18 14:26:58> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
8:40:34 AM LNW22801.1 | Main System\\THIN FILM DIELECTRICS\CX90\CX90-T1"; }
DIELECTRICS\CX90\CX90-T1\CX41-T1-FSG"; }
DIELECTRICS\CX90\CX90-T1\CX41-T1-DARC"; }
{ <08/07/18 14:47:36> e = "Open Recipe Edit Window"; m = "CX90-T1-FSG"; }
{ <08/07/18 14:47:55> e = "Modified Recipe"; m = "CX90-T1-FSG: 08/07/18
2:47:55 PM"; }
{ <08/07/18 14:47:56> e = "Close Recipe Edit Window"; m = "CX90-T1-FSG"; }
{ <08/07/18 14:47:59> e = "Open Recipe Edit Window"; m = "CX90-T1-DARC"; }
{ <08/07/18 14:48:14> e = "Modified Recipe"; m = "CX90-T1-DARC: 08/07/18
2:48:13 PM"; }
{ <08/07/18 14:48:16> e = "Close Recipe Edit Window"; m = "CX90-T1-DARC"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 14:49:17> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
FILM DIELECTRICS\CX90\CX90-T1\CX90-T1-FSG- PATTERN Test - SITE BY SITE"; }
{ <08/07/18 14:50:25> e = "ErrorPatternRec"; m = "Cognex error ''"; }
{ <08/07/18 14:50:25> e = "IDM_ErrorEvent; "; m = "Low Mag. Alignment Site 1
Failed. CX90-T1-FSG LNW22803.1 LNW22803.1-10 489 ERRORESEVERITY_WARNING
ERRORSUBSYSNAME_PATREC"; }
{ <08/07/18 14:50:25> e = "ErrorTester"; m = "Failed to align wafer."; }
TimeStamped:1"; }
TimeStamped:1"; }
{ <08/07/18 14:50:25> e = "---"; m = "CX90-T1-FSG -- Alignment Failure,Failed to
align wafer. 'Couldn't complete alignment - 'EdgeAlign E1(TopY): Cognex error ''
Edge Prealignment processing failed.''"; }
{ <08/07/18 14:50:25> e = "---"; m = "CX90-T1-FSG -- Recipe Aborted,Couldn't move
to site"; }
{ <08/07/18 14:50:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:50:32> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
TimeStamped:1"; }
TimeStamped:1"; }
align wafer. 'Couldn't complete alignment - 'EdgeAlign E2(BottomY): Cognex error ''
to site"; }
{ <08/07/18 14:51:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:51:26> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
TimeStamped:1"; }
TimeStamped:1"; }
align wafer. 'Couldn't complete alignment - 'EdgeAlign E1(TopY): Cognex error ''
to site"; }
{ <08/07/18 14:52:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 14:52:19> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
TimeStamped:1"; }
TimeStamped:1"; }
align wafer. 'Couldn't complete alignment - 'EdgeAlign E2(BottomY): Cognex error ''
to site"; }
{ <08/07/18 14:53:06> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
2:55:10 PM"; }
1:53:04 PM CNW17167.1 | Main System\\THIN FILM DIELECTRICS\CX10\CX10-T1"; }
{ <08/07/18 14:56:19> e = "Modified Recipe"; m = "CX90-T1-FSG: 08/07/18
2:56:19 PM"; }
{ <08/07/18 14:56:54> e = "Modified Recipe"; m = "CX90-T1-DARC: 08/07/18
2:56:54 PM"; }
Code 216"; m = "FA"; }
"FA"; }
7:36:39 AM S8W23183.5 | Main System\\THIN FILM DIELECTRICS\IPIX\IPIX-T1"; }
2:11:48 PM S8W23183.3 | Main System\\THIN FILM DIELECTRICS\IPIX\IPIX-T1"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 15:02:43> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 15:05:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:05:20> e = "SaveData(Rmt)"; m = "CX90-T1-FSG"; }
{ <08/07/18 15:05:27> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 15:07:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:07:48> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 15:10:02> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:10:09> e = "LdWafer"; m = ""; }
LotID (LNW22803.1) "; }
{ <08/07/18 15:12:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:12:44> e = "PP Selected (LT83/LT83-MIM)"; m = "Main System\THIN
DIELECTRICS\LT83\LT83-MIM"; }
{ <08/07/18 15:12:47> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
FILM DIELECTRICS\LT83\LT83-MIM\LT83-MIM-NITRIDE- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 15:15:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:15:30> e = "SaveData(Rmt)"; m = "LT83-MIM-NITRIDE"; }
{ <08/07/18 15:15:38> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
{ <08/07/18 15:17:50> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:17:57> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 15:20:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:20:24> e = "LdWafer"; m = ""; }
LotID (LTW20802.1) "; }
(20%)."; }
{ <08/07/18 15:22:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:23:24> e = "LdWafer"; m = ""; }
(LNW22801.1) "; }
FILM DIELECTRICS\CX90\CX90-VIA3\CX90-VIA3-FSG- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 15:26:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:26:20> e = "SaveData(Rmt)"; m = "CX90-VIA3-FSG"; }
{ <08/07/18 15:26:27> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 15:29:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:29:22> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
(20%)."; }
{ <08/07/18 15:31:51> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:31:59> e = "LdWafer"; m = ""; }
(LNW22801.1) "; }
(20%)."; }
{ <08/07/18 15:34:26> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:34:53> e = "LdWafer"; m = ""; }
{ <08/07/18 15:35:25> e = "Right Port, Slot13 "; m = "WaferID (AHW21017.1-17),
LotID (AHW21017.3) "; }
(20%)."; }
{ <08/07/18 15:36:32> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:36:32> e = "SaveData(Rmt)"; m = "A76B-VIA3-FSG"; }
{ <08/07/18 15:36:39> e = "LdWafer"; m = ""; }
LotID (AHW21017.3) "; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 15:37:50> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:37:57> e = "LdWafer"; m = ""; }
LotID (AHW21017.3) "; }
(20%)."; }
{ <08/07/18 15:39:09> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:39:17> e = "LdWafer"; m = ""; }
LotID (AHW21017.3) "; }
(20%)."; }
{ <08/07/18 15:40:28> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\LT83\LT83-TOPVIA"; }
{ <08/07/18 15:40:53> e = "PP Selected (LT83/LT83-TOPVIA)"; m = "Main System\THIN
DIELECTRICS\LT83\LT83-TOPVIA"; }
{ <08/07/18 15:40:56> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
FILM DIELECTRICS\LT83\LT83-TOPVIA\LT83-TOPVIA-DARC- PATTERN Test - SITE BY SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 15:43:44> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:43:44> e = "SaveData(Rmt)"; m = "LT83-TOPVIA-DARC"; }
{ <08/07/18 15:43:51> e = "LdWafer"; m = ""; }
LotID (LTW20804.1) "; }
FILM DIELECTRICS\LT83\LT83-TOPVIA\LT83-TOPVIA-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 15:46:11> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:46:11> e = "SaveData(Rmt)"; m = "LT83-TOPVIA-DARC"; }
{ <08/07/18 15:46:35> e = "LdWafer"; m = ""; }
LotID (IBU50264.20) "; }
FILM DIELECTRICS\IM41\IM41-VIA1\IM41-VIA1-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 15:49:24> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:49:24> e = "SaveData(Rmt)"; m = "IM41-VIA1-DARC"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 15:52:15> e = "LdWafer"; m = ""; }
LotID (GXW23208.1) "; }
FILM DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-USG- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 15:54:46> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:54:46> e = "SaveData(Rmt)"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 15:54:53> e = "LdWafer"; m = ""; }
LotID (GXW23208.1) "; }
(20%)."; }
{ <08/07/18 15:56:52> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\SLSF\SLSF-SSIN3"; }
{ <08/07/18 15:57:13> e = "PP Selected (SLSF/SLSF-SSIN3)"; m = "Main System\THIN
DIELECTRICS\SLSF\SLSF-SSIN3"; }
{ <08/07/18 15:57:17> e = "LdWafer"; m = ""; }
{ <08/07/18 15:57:47> e = "Right Port, Slot23 "; m = "WaferID (SFV44166.1-3),
LotID (SFV44166.14) "; }
FILM DIELECTRICS\SLSF\SLSF-SSIN3\SLSF-SSIN3-NITRIDE- PATTERN Test - SITE BY
SITE"; }
(20%)."; }
{ <08/07/18 15:59:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 15:59:48> e = "SaveData(Rmt)"; m = "SLSF-SSIN3-NITRIDE"; }
{ <08/07/18 15:59:56> e = "LdWafer"; m = ""; }
{ <08/07/18 15:59:56> e = "Right Port, Slot24 "; m = "WaferID (SFV44166.1-2),
LotID (SFV44166.14) "; }
FILM DIELECTRICS\SLSF\SLSF-SSIN3\SLSF-SSIN3-NITRIDE- PATTERN Test - SITE BY
SITE"; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 16:02:10> e = "UnLdWafer"; m = ""; }
{ <08/07/18 16:02:10> e = "SaveData(Rmt)"; m = "SLSF-SSIN3-NITRIDE"; }
{ <08/07/18 16:02:40> e = "LdWafer"; m = ""; }
(GXW23215.1) "; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 16:04:14> e = "UnLdWafer"; m = ""; }
SLPStatus=00H, SLPError=00H 0.00 Mins ago, Enc in 1 sec-
TimeStamped:1"; }
{ <08/07/18 16:05:04> e = "---"; m = "GX17-T1-DARC -- Test Aborted,User aborted
test"; }
{ <08/07/18 16:06:29> e = " Enter SSM window "; m = "Guest"; }
{ <08/07/18 16:06:54> e = " Exit SSM window "; m = "Guest"; }
4:02:43 PM GXW23215.1 | Main System\\THIN FILM DIELECTRICS\GX17\GX17-T1"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 16:15:24> e = "LdWafer"; m = ""; }
(GXW23215.1) "; }
{ <08/07/18 16:16:51> e = "UnLdWafer"; m = ""; }
{ <08/07/18 16:16:59> e = "LdWafer"; m = ""; }
(GXW23215.1) "; }
{ <08/07/18 16:18:03> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 16:24:39> e = "LdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 16:25:09> e = "Right Port, Slot1 "; m = "WaferID (IPW23193.1-2),
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 16:26:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 16:26:20> e = "LdWafer"; m = ""; }
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 16:27:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 16:27:36> e = "LdWafer"; m = ""; }
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 16:28:51> e = "UnLdWafer"; m = ""; }
{ <08/07/18 16:28:59> e = "LdWafer"; m = ""; }
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 16:30:08> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
System\THIN FILM DIELECTRICS\IP77\IP77-VIA3"; }
{ <08/07/18 17:05:02> e = "LdWafer"; m = ""; }
11), LotID (IPW23191.1) "; }
FILM DIELECTRICS\IP77\IP77-VIA3\IP77-VIA3-FSG1- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 17:07:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:07:48> e = "SaveData(Lcl)"; m = "IP77-VIA3-FSG1"; }
{ <08/07/18 17:07:55> e = "LdWafer"; m = ""; }
12), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 17:10:22> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:10:30> e = "LdWafer"; m = ""; }
24), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 17:12:53> e = "UnLdWafer"; m = ""; }
5:05:05 PM IPW23191.1 | Main System\\THIN FILM DIELECTRICS\IP77\IP77-VIA3"; }
installed!"; }
{ <08/07/18 17:16:25> e = "PCIF Info"; m = "PCIF RESET Completed"; }
{ <08/07/18 17:16:25> e = "Custom Calibrations loading start "; m = "---"; }
{ <08/07/18 17:16:25> e = "Custom Calibrations loading end"; m = "---"; }
{ <08/07/18 17:16:25> e = "ENM Process Recipes Loading Start"; m = "---"; }
{ <08/07/18 17:16:25> e = "ENM Process Recipes Loading Completed"; m = "---"; }
{ <08/07/18 17:16:28> e = "Start Summit"; m = "SUMMIT� Software Version
4.90.06_SP10, FTML Version 4.11.01, F5x with DS Thin Film Measurement System"; }
{ <08/07/18 17:16:36> e = "System Name (F5x with DS Thin Film Measurement System),
Serial # (200611080757)"; m = "Handler Macro version V0.8, Indexer firmware
version S01.20"; }
{ <08/07/18 17:16:36> e = "TestOperator Contructor"; m = "Begin Initializing
TestOperator"; }
{ <08/07/18 17:16:36> e = "TestOperator Contructor"; m = "End Initializing
TestOperator"; }
{ <08/07/18 17:16:36> e = "SECSGEMEnable"; m = ""; }
}
}
{ <08/07/18 17:16:36> e = "---"; m = "VIDEO - Wafer Positioner has completed
successful hardware initialization.(0)"; }
Code 216"; m = "FA"; }
"FA"; }
System\THIN FILM DIELECTRICS\GX17\GX17-TOPVIA"; }
{ <08/07/18 17:20:36> e = "LdWafer"; m = ""; }
01), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:22:56> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:22:56> e = "SaveData(Lcl)"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 17:23:03> e = "LdWafer"; m = ""; }
02), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:25:06> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:25:13> e = "LdWafer"; m = ""; }
03), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:27:22> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:27:30> e = "LdWafer"; m = ""; }
07), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:29:50> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:29:57> e = "LdWafer"; m = ""; }
11), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:32:15> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:32:22> e = "LdWafer"; m = ""; }
15), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:34:23> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:34:30> e = "LdWafer"; m = ""; }
19), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:36:29> e = "ErrorTester"; m = "***ERROR*** - Couldn't move to site
- Tester Error - '(In TAPrepSite::TesterPrepSiteDone Function) '"; }
{ <08/07/18 17:46:30> e = "---"; m = "GX17-TOPVIA-USG -- Retry Recipe,Unknown
error. 'Couldn't move to site'"; }
19), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:48:12> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:48:19> e = "LdWafer"; m = ""; }
23), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:50:14> e = "---"; m = "GX17-TOPVIA-USG -- Retry Recipe,Unknown
23), LotID (GXW28203.1) "; }
(20%)."; }
{ <08/07/18 17:51:57> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 17:53:57> e = "LdWafer"; m = ""; }
5:20:39 PM GXW28203.1 | Main System\\THIN FILM DIELECTRICS\GX17\GX17-TOPVIA"; }
{ <08/07/18 17:54:23> e = "Left Port, Slot23 "; m = "WaferID (BS7W30542.1-23),
LotID (BS7W30542.1) "; }
FILM DIELECTRICS\QUAL\STRESS\Stress_Pre_CHB1- Scan Test"; }
{ <08/07/18 17:55:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 17:55:30> e = "SaveData(Rmt)"; m = "Stress_Pre_CHB1"; }
{ <08/07/18 17:55:40> e = "LdWafer"; m = ""; }
LotID (BS7W30542.1) "; }
{ <08/07/18 17:56:39> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 18:07:29> e = "LdWafer"; m = ""; }
LotID (LTW20805.1) "; }
(63%)."; }
{ <08/07/18 18:08:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:08:47> e = "LdWafer"; m = ""; }
LotID (LTW20805.1) "; }
(63%)."; }
{ <08/07/18 18:09:34> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:09:41> e = "LdWafer"; m = ""; }
(LTW20805.1) "; }
(63%)."; }
{ <08/07/18 18:10:26> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:10:33> e = "LdWafer"; m = ""; }
LotID (LTW20805.1) "; }
(63%)."; }
{ <08/07/18 18:11:21> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 18:12:47> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 18:14:42> e = "---"; m = "GX17-TOPVIA-USG -- Test Aborted,Unknown
{ <08/07/18 18:14:42> e = "Failed DataUpload"; m = "No Saved Data"; }
{ <08/07/18 18:14:45> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-USG"; }
{ <08/07/18 18:20:44> e = "Open Recipe Edit Window"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 18:20:49> e = "Start Pattern Rec. Training"; m = "GX17-TOPVIA-H"; }
{ <08/07/18 18:20:49> e = "Open WaferNavigator"; m = ""; }
{ <08/07/18 18:20:49> e = "Open Trainer"; m = ""; }
Lin"; }
Lin"; }
{ <08/07/18 18:24:57> e = "Close WaferNavigator"; m = ""; }
{ <08/07/18 18:24:57> e = "Close Trainer"; m = ""; }
{ <08/07/18 18:24:57> e = "PR. Trainer Operation completed"; m = ""; }
Line"; }
Line"; }
{ <08/07/18 18:25:00> e = "Modified Recipe"; m = "GX17-TOPVIA-USG: 08/07/18
6:25:00 PM"; }
{ <08/07/18 18:25:03> e = "Close Recipe Edit Window"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 18:25:44> e = "LdWafer"; m = ""; }
{ <08/07/18 18:26:13> e = "Right Port, Slot1 "; m = "WaferID (2018/08/07 18:25
01), LotID () "; }
(20%)."; }
{ <08/07/18 18:26:54> e = "TO_INT::pause"; m = ""; }
{ <08/07/18 18:26:55> e = "TO_INT::abort"; m = ""; }
{ <08/07/18 18:26:55> e = "TO_app abortFlag Set"; m = ""; }
TimeStamped:1"; }
{ <08/07/18 18:26:56> e = "---"; m = "GX17-TOPVIA-USG -- Test Aborted,User
aborted test"; }
{ <08/07/18 18:26:57> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 18:28:52> e = "LdWafer"; m = ""; }
LotID (S7W27447.1) "; }
System\TFM\CUBS\ETCH_Rate2\9PTS POST CHD- Quick Test"; }
(63%)."; }
{ <08/07/18 18:30:00> e = "---"; m = "9PTS POST CHD -- Test Aborted,Unknown
{ <08/07/18 18:30:01> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 18:32:27> e = "LdWafer"; m = ""; }
LotID (IBW04119.13) "; }
(20%)."; }
{ <08/07/18 18:35:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:36:55> e = "LdWafer"; m = ""; }
LotID (S7W27447.1) "; }
System\TFM\CUBS\ETCH_Rate2\9PTS POST CHD- Quick Test"; }
Code 216"; m = "FA"; }
"FA"; }
(63%)."; }
{ <08/07/18 18:37:59> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:37:59> e = "SaveData(Rmt)"; m = "9PTS POST CHD"; }
Code 216"; m = "FA"; }
"FA"; }
FILM DIELECTRICS\CR01\CR01-SSC0"; }
{ <08/07/18 18:44:17> e = "PP Selected (CR01/CR01-SSC0)"; m = "Main System\THIN
DIELECTRICS\CR01\CR01-SSC0"; }
{ <08/07/18 18:44:20> e = "LdWafer"; m = ""; }
LotID (S8V50067.11) "; }
FILM DIELECTRICS\CR01\CR01-SSC0\CR01-SSC0-NIT- PATTERN Test - SITE BY SITE"; }
(63%)."; }
{ <08/07/18 18:46:55> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:46:55> e = "SaveData(Rmt)"; m = "CR01-SSC0-NIT"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 18:48:32> e = "LdWafer"; m = ""; }
(GXW23202.1) "; }
(20%)."; }
{ <08/07/18 18:50:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:50:55> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 18:52:47> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:52:54> e = "LdWafer"; m = ""; }
(GXW23202.1) "; }
(20%)."; }
{ <08/07/18 18:54:47> e = "UnLdWafer"; m = ""; }
{ <08/07/18 18:54:54> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 18:56:37> e = "---"; m = "GX17-TOPVIA-USG -- Test Aborted,Unknown
{ <08/07/18 18:56:38> e = "UnLdWafer"; m = ""; }
DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-NITRIDE"; }
DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-NITRIDE"; }
{ <08/07/18 18:59:02> e = "Open Recipe Edit Window"; m = "GX17-TOPVIA-NITRIDE"; }
{ <08/07/18 18:59:08> e = "Open Recipe Edit Window"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 18:59:15> e = "Close Recipe Edit Window"; m = "GX17-TOPVIA-USG"; }
{ <08/07/18 18:59:18> e = "Close Recipe Edit Window"; m = "GX17-TOPVIA-
NITRIDE"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 19:00:21> e = "LdWafer"; m = ""; }
LotID (GXW23208.1) "; }
FILM DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 19:02:53> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:02:53> e = "SaveData(Rmt)"; m = "GX17-TOPVIA-DARC"; }
{ <08/07/18 19:03:00> e = "LdWafer"; m = ""; }
LotID (GXW23208.1) "; }
FILM DIELECTRICS\GX17\GX17-TOPVIA\GX17-TOPVIA-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 19:05:10> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:05:10> e = "SaveData(Rmt)"; m = "GX17-TOPVIA-DARC"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
System\THIN FILM DIELECTRICS\GX17\GX17-VIA2"; }
{ <08/07/18 19:33:20> e = "LdWafer"; m = ""; }
13), LotID (GXW23204.1) "; }
FILM DIELECTRICS\GX17\GX17-VIA2\GX17-VIA2-FSGNB- PATTERN Test"; }
(20%)."; }
{ <08/07/18 19:34:48> e = "Queue cassette (1)"; m = "Main System\THIN FILM
{ <08/07/18 19:34:53> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:34:53> e = "SaveData(Lcl)"; m = "GX17-VIA2-FSGNB"; }
{ <08/07/18 19:35:01> e = "LdWafer"; m = ""; }
14), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 19:36:13> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:36:39> e = "Start Q-cassette run (Lcl)(1)"; m = "Main System\THIN
{ <08/07/18 19:36:42> e = "LdWafer"; m = ""; }
01), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:38:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:38:28> e = "LdWafer"; m = ""; }
02), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:39:39> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:39:47> e = "LdWafer"; m = ""; }
05), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:40:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:41:05> e = "LdWafer"; m = ""; }
06), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:42:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:42:25> e = "LdWafer"; m = ""; }
09), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:43:37> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:43:45> e = "LdWafer"; m = ""; }
10), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:44:56> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:45:04> e = "LdWafer"; m = ""; }
13), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:46:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:46:24> e = "LdWafer"; m = ""; }
14), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:47:36> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:47:43> e = "LdWafer"; m = ""; }
17), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:48:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:49:05> e = "LdWafer"; m = ""; }
18), LotID (AHW22005.1) "; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
7:33:23 PM GXW23204.1 | Main System\\THIN FILM DIELECTRICS\GX17\GX17-VIA2"; }
{ <08/07/18 19:50:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:50:24> e = "LdWafer"; m = ""; }
21), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:51:33> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:51:40> e = "LdWafer"; m = ""; }
22), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:52:53> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:53:00> e = "LdWafer"; m = ""; }
25), LotID (AHW22005.1) "; }
(20%)."; }
{ <08/07/18 19:54:13> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:54:46> e = "LdWafer"; m = ""; }
01), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 19:56:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:56:28> e = "LdWafer"; m = ""; }
02), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 19:57:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:57:48> e = "LdWafer"; m = ""; }
03), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 19:59:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 19:59:08> e = "LdWafer"; m = ""; }
04), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:00:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:00:28> e = "LdWafer"; m = ""; }
05), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:01:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:01:47> e = "LdWafer"; m = ""; }
06), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:02:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:03:05> e = "LdWafer"; m = ""; }
07), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:04:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:04:29> e = "LdWafer"; m = ""; }
08), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:05:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:05:48> e = "LdWafer"; m = ""; }
09), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:07:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:07:08> e = "LdWafer"; m = ""; }
10), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:08:20> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:08:28> e = "LdWafer"; m = ""; }
11), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:09:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:09:49> e = "LdWafer"; m = ""; }
12), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:11:05> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:11:13> e = "LdWafer"; m = ""; }
13), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:12:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:12:32> e = "LdWafer"; m = ""; }
14), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:13:47> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:13:55> e = "LdWafer"; m = ""; }
15), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:15:09> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:15:17> e = "LdWafer"; m = ""; }
16), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:16:33> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:16:40> e = "LdWafer"; m = ""; }
17), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:17:53> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:18:41> e = "LdWafer"; m = ""; }
18), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:21:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:21:24> e = "LdWafer"; m = ""; }
19), LotID (GXW23204.1) "; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 20:28:35> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:28:42> e = "LdWafer"; m = ""; }
20), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:29:55> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:30:03> e = "LdWafer"; m = ""; }
21), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:31:18> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:33:09> e = "LdWafer"; m = ""; }
22), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:34:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:34:26> e = "LdWafer"; m = ""; }
23), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:35:37> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:35:44> e = "LdWafer"; m = ""; }
24), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:36:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:37:04> e = "LdWafer"; m = ""; }
25), LotID (GXW23204.1) "; }
(20%)."; }
{ <08/07/18 20:38:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:38:48> e = "LdWafer"; m = ""; }
01), LotID (IPW23191.1) "; }
FILM DIELECTRICS\IP77\IP77-VIA3\IP77-VIA3-FSG- PATTERN Test"; }
(20%)."; }
{ <08/07/18 20:40:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:40:25> e = "SaveData(Lcl)"; m = "IP77-VIA3-FSG"; }
{ <08/07/18 20:40:33> e = "LdWafer"; m = ""; }
02), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:41:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:41:52> e = "LdWafer"; m = ""; }
03), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:43:05> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:43:13> e = "LdWafer"; m = ""; }
04), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:44:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:44:32> e = "LdWafer"; m = ""; }
05), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:45:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:45:48> e = "LdWafer"; m = ""; }
06), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:47:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:47:09> e = "LdWafer"; m = ""; }
07), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:48:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:48:33> e = "LdWafer"; m = ""; }
08), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:49:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:49:53> e = "LdWafer"; m = ""; }
09), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:51:04> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:51:12> e = "LdWafer"; m = ""; }
10), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:52:24> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:52:31> e = "LdWafer"; m = ""; }
11), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:53:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:53:49> e = "LdWafer"; m = ""; }
12), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:55:01> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:55:09> e = "LdWafer"; m = ""; }
13), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:56:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:56:28> e = "LdWafer"; m = ""; }
14), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:57:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:57:48> e = "LdWafer"; m = ""; }
15), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 20:58:59> e = "UnLdWafer"; m = ""; }
{ <08/07/18 20:59:07> e = "LdWafer"; m = ""; }
16), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:00:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:00:25> e = "LdWafer"; m = ""; }
17), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:01:37> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:01:45> e = "LdWafer"; m = ""; }
18), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:02:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:03:05> e = "LdWafer"; m = ""; }
19), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:04:17> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:04:24> e = "LdWafer"; m = ""; }
20), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:05:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:05:53> e = "LdWafer"; m = ""; }
21), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:07:05> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:07:13> e = "LdWafer"; m = ""; }
22), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:08:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:08:33> e = "LdWafer"; m = ""; }
23), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:09:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:09:52> e = "LdWafer"; m = ""; }
24), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:11:05> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:11:12> e = "LdWafer"; m = ""; }
25), LotID (IPW23191.1) "; }
(20%)."; }
{ <08/07/18 21:12:25> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:15:25> e = "PP Selected (ECP/REFLECTIVITY)"; m = "Main
{ <08/07/18 21:15:25> e = "PP Started(Host)"; m = "Main System\TFM\DAILY
MONITORING\ECP\REFLECTIVITY"; }
{ <08/07/18 21:15:28> e = "LdWafer"; m = ""; }
LotID (BS7W31441.1) "; }
{ <08/07/18 21:16:25> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:18:30> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
FILM DIELECTRICS\CX90\CX90-VIA3\CX90-VIA3-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 21:20:58> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:20:58> e = "SaveData(Rmt)"; m = "CX90-VIA3-DARC"; }
{ <08/07/18 21:21:05> e = "LdWafer"; m = ""; }
LotID (LNW22801.1) "; }
FILM DIELECTRICS\CX90\CX90-VIA3\CX90-VIA3-DARC- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 21:23:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:23:19> e = "SaveData(Rmt)"; m = "CX90-VIA3-DARC"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:26:15> e = "LdWafer"; m = ""; }
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 21:27:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:27:57> e = "SaveData(Rmt)"; m = "IP77-VIA3-FSG"; }
{ <08/07/18 21:28:04> e = "LdWafer"; m = ""; }
LotID (IPW23193.1) "; }
(20%)."; }
{ <08/07/18 21:29:13> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:29:13> e = "SaveData(Rmt)"; m = "IP77-VIA3-FSG"; }
T3NB"; }
{ <08/07/18 21:29:38> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
(20%)."; }
{ <08/07/18 21:31:13> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:31:21> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
(20%)."; }
{ <08/07/18 21:32:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:32:37> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
(20%)."; }
{ <08/07/18 21:33:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:33:53> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
(20%)."; }
{ <08/07/18 21:35:01> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:47:50> e = "LdWafer"; m = ""; }
LotID (BS7W30542.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P NIT CHB1- Polar map"; }
{ <08/07/18 21:51:22> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:51:22> e = "SaveData(Rmt)"; m = "49P NIT CHB1"; }
{ <08/07/18 21:51:30> e = "LdWafer"; m = ""; }
LotID (BS7W30542.1) "; }
FILM DIELECTRICS\xxxx TFD Cu QUAL\DAILY TFD\49P NIT CHB2- Polar map"; }
{ <08/07/18 21:54:45> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:54:45> e = "SaveData(Rmt)"; m = "49P NIT CHB2"; }
{ <08/07/18 21:55:14> e = "LdWafer"; m = ""; }
LotID (S8W23183.3) "; }
FILM DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-FSG- PATTERN Test - SITE BY SITE"; }
(63%)."; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:58:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 21:58:00> e = "SaveData(Rmt)"; m = "IPIX-T1-FSG"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 21:59:03> e = "LdWafer"; m = ""; }
LotID (BS7W30542.1) "; }
{ <08/07/18 22:00:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:00:38> e = "LdWafer"; m = ""; }
LotID (BS7W30542.1) "; }
{ <08/07/18 22:01:39> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 22:23:21> e = "LdWafer"; m = ""; }
LotID (GXW23212.1) "; }
(20%)."; }
{ <08/07/18 22:25:41> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:25:48> e = "LdWafer"; m = ""; }
(GXW23212.1) "; }
(20%)."; }
{ <08/07/18 22:27:40> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:28:04> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 22:30:26> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:30:33> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 22:32:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:32:32> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
(20%)."; }
{ <08/07/18 22:34:25> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:34:32> e = "LdWafer"; m = ""; }
LotID (GXW23202.1) "; }
Code 216"; m = "FA"; }
"FA"; }
(20%)."; }
{ <08/07/18 22:36:27> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 22:47:23> e = "LdWafer"; m = ""; }
LotID (S7W30415.1) "; }
FILM DIELECTRICS\QUAL\STRESS\Stress_Pre_CHC1- Scan Test"; }
{ <08/07/18 22:48:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:48:48> e = "SaveData(Rmt)"; m = "Stress_Pre_CHC1"; }
{ <08/07/18 22:48:57> e = "LdWafer"; m = ""; }
LotID (S7W30415.1) "; }
{ <08/07/18 22:49:57> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:50:06> e = "LdWafer"; m = ""; }
LotID (S7W30415.1) "; }
{ <08/07/18 22:51:06> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:51:15> e = "LdWafer"; m = ""; }
LotID (S7W30415.1) "; }
{ <08/07/18 22:52:16> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:52:52> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 22:54:18> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:54:27> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 22:55:27> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:55:36> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 22:56:37> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:56:46> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 22:57:46> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:57:56> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 22:58:56> e = "UnLdWafer"; m = ""; }
{ <08/07/18 22:59:05> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 23:00:06> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:00:15> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 23:01:16> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:01:25> e = "LdWafer"; m = ""; }
LotID (BS7W30450.1) "; }
{ <08/07/18 23:02:26> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:02:57> e = "LdWafer"; m = ""; }
LotID (IBW04119.13) "; }
(20%)."; }
{ <08/07/18 23:05:35> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
FILM DIELECTRICS\IP90\IP90-PASS"; }
{ <08/07/18 23:10:16> e = "PP Selected (IP90/IP90-PASS)"; m = "Main System\THIN
DIELECTRICS\IP90\IP90-PASS"; }
{ <08/07/18 23:10:19> e = "LdWafer"; m = ""; }
LotID (IPW10023.8) "; }
FILM DIELECTRICS\IP90\IP90-PASS\IP90-PASS-NITRIDE1- PATTERN Test - SITE BY SITE"; }
(20%)."; }
{ <08/07/18 23:13:32> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:13:32> e = "SaveData(Rmt)"; m = "IP90-PASS-NITRIDE1"; }
{ <08/07/18 23:13:40> e = "LdWafer"; m = ""; }
LotID (IPW10023.8) "; }
(20%)."; }
{ <08/07/18 23:16:03> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:16:10> e = "LdWafer"; m = ""; }
LotID (IPW10023.8) "; }
(20%)."; }
{ <08/07/18 23:18:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:18:37> e = "LdWafer"; m = ""; }
LotID (IPW10023.8) "; }
(20%)."; }
{ <08/07/18 23:20:59> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:21:26> e = "LdWafer"; m = ""; }
LotID (S8W23183.3) "; }
FILM DIELECTRICS\IPIX\IPIX-T1\IPIX-T1-DARC- PATTERN Test - SITE BY SITE"; }
{ <08/07/18 23:24:00> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:24:00> e = "SaveData(Rmt)"; m = "IPIX-T1-DARC"; }
Code 216"; m = "FA"; }
"FA"; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 23:28:04> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 23:30:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:30:36> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 23:32:30> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:32:38> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 23:34:49> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:34:56> e = "LdWafer"; m = ""; }
LotID (GXW23211.1) "; }
SITE"; }
(20%)."; }
{ <08/07/18 23:36:56> e = "UnLdWafer"; m = ""; }
FILM DIELECTRICS\SLSM\SLSM-UTV"; }
{ <08/07/18 23:37:19> e = "PP Selected (SLSM/SLSM-UTV)"; m = "Main System\THIN
DIELECTRICS\SLSM\SLSM-UTV"; }
{ <08/07/18 23:37:22> e = "LdWafer"; m = ""; }
{ <08/07/18 23:37:51> e = "Left Port, Slot21 "; m = "WaferID (SFW24500.1-5),
LotID (SFW24500.5) "; }
FILM DIELECTRICS\SLSM\SLSM-UTV\SLSM-MIMTOP-NITRIDE- Quick Test"; }
(63%)."; }
{ <08/07/18 23:38:29> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:38:29> e = "SaveData(Rmt)"; m = "SLSM-MIMTOP-NITRIDE"; }
{ <08/07/18 23:38:36> e = "LdWafer"; m = ""; }
LotID (SFW24500.5) "; }
(63%)."; }
{ <08/07/18 23:39:21> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:39:29> e = "LdWafer"; m = ""; }
LotID (SFW24500.5) "; }
(63%)."; }
{ <08/07/18 23:40:13> e = "UnLdWafer"; m = ""; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 23:45:42> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:47:09> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:47:19> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:48:19> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:48:28> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:49:28> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:49:37> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
Code 216"; m = "FA"; }
"FA"; }
{ <08/07/18 23:50:38> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:50:47> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:51:48> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:51:57> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:52:58> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:53:07> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:54:08> e = "UnLdWafer"; m = ""; }
{ <08/07/18 23:54:17> e = "LdWafer"; m = ""; }
LotID (BS7W31483.1) "; }
{ <08/07/18 23:55:18> e = "UnLdWafer"; m = ""; }

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Activity 2

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{ <08/07/18 08:54:42> e = "Hardware Info [2]"; m = "HW.

DLL - Port2 Cassette

{ <08/07/18 13:02:29> e = "Recipe selectable calibration"; m = "Calibration name

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