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VIBRATION ISOLATION SYSTEMS CG DAEIL SYSTEMS Absolute Control of Vibration, DAEIL SYSTEMS was founded in 1984, as the first Korean company to introduce a vibration isolation system, with our passion for technological innov become the leader in vibration solutions for the new era of nanotechnology. In, we've we've been supplying a wide range of vibration isolation systems including thousands of optical tables and from passive to active isolation systems, t industries, research institutes, and universities that are related with metrology, photonics, semiconductor, display and life sciences, With more than 30 years of experiences in manufacturing and developing its own technology, we are cornmitted to delivering innovative products, We will be relentless in pu explore the mic suing our mission to provide the ultimate vibration solutions to scopic world more clearly. CEO Kwangsan Kim “ A Global Leading Supplier of Vibration Isolation Systems 9? We've established a global network in Asia, the Middle East, Oceania, and the Americas. supplying products that have been developed by our own technology. —— Timeline EIL MACHINERY 2001 EH Established R&D center 1986 BB Fou 1988 @) Changed any name to DAEIL SYSTEMS 2009 Founded aingdao DAEIL SYSTEMS 1989 Dy Inivoduced the firs viration isolation table in Korea stable in Kora 2009 das an INNO-BIZ 1993 iced the first. 1996 Registered as a private limited company i 2011 3) besignated as a promising SME Export 101 Quality Management Certification 2012 ed an active isolation system 1999 Designated as N chnology Venture e 1997 BObiaine a 2 2000 Bultta ne 2016 {J Completed 2* Factory Excansion —— Order Fulfillment Process 1. Receipt of order ase suitable prod ied, we conduc whether the fn i to customers in accordance with equipment and analyze the installation 2, Design ysis of measured data and custome are commited to manufacture high-quality ige manufacturing facilites, 4,Quality Inspection Alter production, we perform a quality inspection ofthe products prior ‘ascertaining their qualiy and quant 5. Delivery & Installation Gur engineers deliver and install products to customers according tothe nd location. Aer installation the engi report ditions ofthe environment tails Product Inquiry Receipt of Order Design Production Quality Inspection Basic Concepts of Vibration 6 aa IL SYSTEMS C0,LTD ° Vibration Vibration is a mechanical movement around an equilibrium point In other words, itis a mecha phenomenon where a dynamic external force is applied onto structures or floors, causing the ‘oscilation metian that repeats itself after an interval af time. Among the sources of vibration the low frequency vibration is not perceptible during daily activities, and adversely affect high-performance metrology tools in the fields of semiconductor, display, electron microscopy, photonics and life Classification of Vibration Periodic noise is defined as the known magnitude ofthe excitation acting on a vibratory system at any given time, kis generally caused by rotating machinery. Random noise is caused by unpredictable ‘excitations such as wind velocity, road roughness, foot and vehicular traffic, and ground motion during various activites Periodic Noise Random Noice Measurement Unit of Vibration Vibration can be measured in units of cisplacement velocity and acceleration. The shape and frequency of the vibration are the same regardless of which of the three measurement units, used to express sibration, except forthe dlference in the phase, Regarding sinusoidal signals, displacement, velocity and acceleration amplitude are related mathematically by a function of frequency and time, If the phase is nota factor to be considered, the velacity is obtained by cividing the acceleration signal by a factar progortional to frequency, and the displacement can fe calculated by dividing the acceleration signal by a factor proportional to the ‘square of frequency. Pm ramon Unt om tam=10 “m= 10% tm =10"'en= 107m ease 1 misec= 10 cm/sec =10 an/see ews) 1g = 980 calsect I misect= 10'ovsect Relationship between Displacement, Velocity and Acceleration eclerson Wley Displcemernd Ph. VI NJ om =f 7 me BA a-Asinwt ecsut dota dejfactate-Asinat Acoustic Noise © Sources of Vibration Direct Force There are three main sources of vibration, 1) Ground vibration DAcoustic noise Ground Vibration 43) Direc force applied to a payload on isolation platform ‘Main Sources of Vibration) © Sources of Vibration ina Lab ’ Denar Nice 7 & Eauipment Vira Mechanical lors include fact and vehicular traffic, Ground vibrations indicate all the factors that cause vibrations on 2 floor. 7 external noises, wind blowing a building and HVAC systerns, Acoustic noises are the factors that directly apply force to_a payload, such as wind blwoing fram fans. rceisa force that d motorized linear stages, Adirect tty applied toa payload on a platform including cables connecting all the equipment and Vibration Terminology 1 AGIL SYSTEMS €0,70 ° Frequency Frequency is defined as the number of events of 2 repetitive motion cycle during the period af 1 second and measured in hertz (Hz! at tli eclepersec) St 3H2(3cyclespersec) st 10002 1000

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