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LOICAM ON Dé hoan thinh chuong trinh cao hoc va viét ludn van nay, t6i di nhan duge su hudng din, gitp 46 nhiét tinh cita qui thay 6 trong dai hoe Vinh. rude hét, téi xin chin thanh cam on dén qui thay o6 truéng dai hoc Vinh, de bigt 1a nhiing thay c6 da tan tinh day bao t6i trong sudt thdi gian t6i hoe tap tai rudng. dén Tién si Mai Van Luu da danh rat ‘Téi xin gi lei biét on sau nhiéu thdi gian va tam huyét hwéng din nghién ctu va gitp téi hoan thanh ludn van tét nghigp. Nhin day t6i xin chin thanh cim on Ban Gidm Higu truéng dai hoe Vinh, Ban Gidm Higu trudng dai hoe Sai Gdn... dat tao didu kién, gidp 46 161 trong thdi gian hoe tap. Mae di t6i e6 nhiéu cé géng hoan thién Juan van bang tat ca sy nhiét tinh va nang Ive cia minh, tuy nhién khéng tranh khdi nhing thiéu sét, rat mong su déng gép ctta qui thay cd va céc ban. ‘TP Ho Chi Minh, thing 6 nim 2013 Hoe Vién Dao Quynh Tran This document is prosucpfbhtaifhastiw Trang Lai cam on Mue luc Danh mue hinh vé MO DAU 1 Chuong 1. Mét sé két qua di nghién cizu vé phiin bé nang luong 4 bom trong hoat chat laser rin 1.1. Téng quan vé laser rin LL. Dé diém cia laser rin 4 1.1.2, Hoat chat ctta laser riin 5 1.13. Co ché tao nghich dio néng dé trong laser rén 6 1.2. Chim laser xung Gauss 8 1.2.1. Phén 66 mode trong buéng céng huedng laser 8 1.2.2, Laser phdt xung Gauss 12 1.3. Phan bé nang hrong bom trong laser rin khi bom bing laser 16 ban din 1.4. Két luan chuong 1 20 Chwong 2. Anh hudng ciia higu img két hop thdi gian ctia cic 22 xung bom lén phan bé nang hrong bom 2.1. Cau hinh laser rin bom ngang bang laser ban dan 22 2.2. Anh hwéng cia hiéu tmg két hop théi gian cia cdc xung bom — 25 len phan bé ning hong bom trong hoat chit laser 2.2.1. Biéu thite téng nang lwong bom 25 2.2.2. Phin bd nding long bom trong tring hop cic xung bom hop pha 28 2.2.3. Phan bé nding luong bom trong tring hop cic xung bom léch pha 30 2.2.3.1. So smh phén bé nding wong bom khi bom hop pha va léch pha 30 This document is prosucpfbhtaifhastiw 2.2.3.2, Phan bé niing long bom voi dé léch pha khéic nhau 32 2.3. Két luan chwong 2 34 KET LUAN CHUNG 35 36 This document is prosucpihttithashv DANH MUC CAC HiNH VE Trang 1, Hinh 1.1. Hinh dang thanh hoat chat laser{2| 5 2, Hinh 1.2. So d5 4 mite nang long véi cée chuyén dich(2] 7 3, Hinh 1.3. Mode ngang cia chim laser [5] i 4. Hinh 1.4, Budng cng hiring guomg ciu va edu trie chim Gauss [6]. 12 Hinh 1.5. So sinh céng suat gita hai phuong phap bién digu: (a) bién 13 digu ngoai, (b) bién digu trong [2.5] 6. Hinh 1.6. Mot sé hinh dnb sung laser [11,12,13,14]. 15 7, Hinh 1.7. Cau tric laser rn bom ngang mot bén bang laser diode [10]. 17 8, Hinh 1.8, Tiét dién ngang tia laser bom ngang mot bén bing laser 18 diode [10] 9, Hiinh 1.9, Phin bd ning Iuymg bom trong thank Taser rin bom agang 19 4 bén bi 1g laser diode: wp = 0.3mm (a) va Wyo = Lamm (b) [10] 10, Hinh 1.10. So sinh ving chéng lin ning Iuong bom véi him Gauss 20 trong mat phiing x (hinh a) vi mat pt 0.3mm [10] 1g y =x (hinh b) cho w#,0= 11, Hin 2.1. So dé laser rin bom ngang bing bén laser bin din [10]. a. 23 Mit cit doc, b. Mat ct ngang, 12, Hinh 2.2. Thanh 16 laser bain din [4] 4 13, Hinh 2.3. Laser rn bom bing laser ban dan va bién digu xung 24 Pokker[1, 14, Hinh 2.4, Phin bé nang lueng bom ngang hai bén (a, mau d6) 29 va bin bén (b, mau xanh) 15. Hinh 2.5. Phan bé ning hurong bom ngang bén bén & vi tri bom Smm 30 (miu 4), 10mm (miu xanh) va 15mm (miu ving) 16. Hinh 2.6, Phin bé nang lrong bom cho trusmg hop bom ngang bin bén 31 hap pha (a) va léch pha véi df = 0,5¢(b). This document is prosucpfbhtaifhastiw 17. Minh 2.7, Phin bé niing long bom cho truimg hop bom nging bénbén 32 hop pha (mau xanh), léch pha véi_ dt = 0, 5r(miu dé). 18 Hinh2.8. Phin bé ning long bom véi dé léch pha kite nhau: 33 (@):dt=0,355(8) :dt =0,4r,(0) dt =0,5¢ 19. Hinh2.9. An hurdg ciia dé léch pha én phiin bé ning hrong bom: 33 de=0,3¢ (mau ving). at = 0,5r (miu dé) va df = 0,4 (miu xanh) MO DAU Laser hoat ding trén cor sé phat xa cuOng bite gitta hai mite nang long ‘xac dinh trong nguyén ti hay phan tt hoat chat. mét mie goi 1a mute laser trén va mite edn lai goi la mite laser duéi. Dé e6 nghich dao mat dé gitta hai mite laser xée dinh, theo phan bé Boltman, gitta hai mite ning lvong nay khéng thé e6 nghich dio mat 46 ew trit trong trang thai c4n bing nhiét. Ton nila, theo Einstein, xtc xudt chuyén dich hip thu cutmg bite va phat xa cusmg bite gidta hai mite ning Ivong laser luén bing nhau, Do d6, mudn e6 nghich dio mat 46 cu tru git hai mite laser, thi te d6 ting cw tri mute laser trén uén luén Ién hon tdc dé ting ov tra mite laser dudi. Dé ting cu tri mite laser trén, khéng thé chuyén true tiép kich thich cée nguyén ti tir mie laser duéi vi qué trinh tich ‘thoat tir mite laser trén xudéng mite laser dudi cn bing voi qua trinh kich thich. ‘Nhu vay, phai kich thich mic laser trén biing con duémg khéc, dé 1a, ting ou tr mie laser trén bing cde chuyén dich ti cée mite kich thich cao hon [2,5,6]. Qué trinh ting cu tri cde mie kich thich cao hon mute laser trén goi la qué trinh bom. Bang céc nguén nang wong khac nhau nhu: ngudn anh sang, ngudn din, phan img hoa hoo, hay ting te dot ngét, tac dong vao cae tim hoat trong hoat chat laser sé lam cho céc tim hoat chuyén lén mite nang long. kich thich cao. Nhu ta da biét, trong phan 1én cdc hoat chit laser, cic mute ning Iuong kich thich cao khéng phai 1a mét vach don ma la mét bing réng, This document is prosucpfbhtaifhastiw 6 phan bé xac dinh[2]. Hon nia, cae nguén nang Ivong cung cp ning lvong cho hoat chat khéng phai la nguén don sdc, phé ning lugng eta ching rong hon phé hap thu ctia cdc tm hoat, Qua dé, ching ta thay ring, hoat chat sé chiu téc déng (hép thy) cba mét Iwong nang Iuong du thia, khng tham gia vao trinh laser. Phin ning Iuong thita nay sé gay ra qué trinh nhiét trong hoat chat tite 14 dét néng hoat chat [1.6]. Khi hoat chat bi dét néng, mat 6 cu tru ciia cae mite, dic biét cdc mite dao d6ng va quay thay adi. Digu nay din dén su mé réng ctia cde mie laser, tite 14 anh hudng dén phd phat xa cia laser, Hon nita, khi nhiét 46 thay déi, chiét suat trong hoat chat citing thay déi din dén quang 16 ctta 4nh sing trong buéng céng hung laser va cudi cting lam thay ddi tan sé cla cc MODE doc [6]. Mét digu quan trong cn quan tam nifa, dé 1a, qua trinh dét néng trong hoat chat khéng déng nhat trén tiét dién ngang ctia hoat chat sé din dén su phan bé khéng déng nhat ciia chiét suat. Hign tuong nay sé bién hoat chit ‘thanh mét thau kinh, duge goi la “Thu kinh nhiét”, Khi thau kinh nhiét xuat hién trong budng cng hudng laser, sé lam thay d6i c4u hinh cia né va din dén thay déi cu tric chim tia laser khi di ra khéi budng céng hudng [1.6]. Dé tranh nh@ng anh hudng trén, cho dén nay da cé rit nhiéu phuong phap céng nghé ap dung trong qua trinh ché tao laser [2.6]. ~ Déi voi laser rin, vi cae tim hoat duge cay cd dinh trong méi trrgng tinh thé nén ky thuat lam lanh hoat chat bing cde chat léng tai nhiét duge ap dung réng rai nhat. Bang c4ch nay, nhiét d6 cia hoat chat luén git duge & mite nhigt 46 phong. Ngoai ra, dé tranh ning lugng bom dw thifa, cée nguén bom két hop (laser khac) da duge str dung. Théng thong cdc nguén bom cho laser rin 1a cde laser ban din c6 bude séng phat nim trong ving héng ngoai gan tring véi phd hap thy cia cdc ion dat hiém cdy trong céc tinh thé, - Déi véi laser mau voi ving phé hdp thu réng, nguén anh séng khéng két hop (dén flash) cfing duge sir dung. Tuy nhién, nang Iuong thita 1A khong thé tranh khéi, do d6, hoat chat duge Iuu chuyén trong qua trinh hoat ding. This document is prosucpfbhtaifhastiw ~ Déi véi laser kh He-Ne hay CO; sit dung ky thuat lim lanh bing chat long la tat yéu, Do qué trinh phéng dién trong dng phéng sé sinh nhiét, dng thdi, cdc dign tich voi toe dé chuyén déng cao sé va cham vao cae nguyén tt hoat chat hay va cham véi thanh éng sé sinh ra nhiét. - Déi véi laser ban dan cing trong tu, sw chuyén déi ctia cdc hat tai trong mang tinh thé bin din sé sinh nhiét, do d6, céng nghé lim lanh bing cach gén chip laser lén cac hé canh toa nhiét da duge sit dung. Hién nay, laser rin bom bing laser ban din c6 bude séng tring voi phd hap thu cia hoat chat 44 duge nghién ciru va dua vao sit dung. Bang cdch nay, qué trinh Lam Ianh sé don gin hod, va do dé, kich thude ea laser sé nhé gon hon [6]. Tuy nhién, bing phuong phap bom doc hay bom ngang. thi phan bd cia ning Ivgng bom bing laser ban dan trong hoat chat cing phan bé khéng. déng nhat. Nhw ta da biét, phan bé ning Ivong cua chim laser ban din cé dang tua Gauss, do dé, di bom ngang hay bom doe, thi phin bé nang Ivong bom ciing sé e6 dang Gauss trong hoat chat laser ran [5.6]. Nhu da néi 6 trén, phan bé nang Iugng dang Gauss trong hoat chat sé sinh ra thdu kinh nhigt trong buéng cOng huéng, két qua lam thay déi edu hinh cua buéng céng huéng. Khi budng céng huéng thay déi, tat nhién cdu trite ctia chim laser phat ra sé thay d6i [1..6]. Tuy nhién, sw thay d6i nhiéu hay it cén phy thude vio nhiéu yéu té ctia chim laser bom nhu: cudng dé. ‘mat that chim tia laser bin din, khodng cdch gita ce laser bom dén thanh hoat chat, cée chim bom hop pha hay léch pha, ‘Trong luan vin nay, ching t6i dé cap dén anh huéng khoang céch bom, dae bist ca dé tré gitta cdc xung bom lén phan bé ning lvong bom trong céu hinh laser rfn bom ngang. Dé di dén két lun ctia vin dé da néu, ndi dung cta Juan van duge trinh bay theo hai chuong sau: Chuong 1. Mét sé két qua di nghién ciru vé phan bé nang long bom trong hoat chit laser rin. Néi dung chuong nay ching t6i sé tinh bay nhiing diém téng quan vé laser rin, vé chim laser xung Gauss. Diém nhin This document is prosucpfbhtaifhastiw cia chuong 1 la tinh bay t6m luge mét sé két qua da nghién eu eta cae nhém tae gia khée vé phan bé nang long bom trong thanh hoat chat trong. cu hinh laser rn bom ngang Chuong 2. Anh huéng cia d@ tré thoi gian cia eie xung bom len phan bé ning long bom, trinh bay anh hudng dé tré thoi gian bom Ién phan bé nang lvong bom trong laser rin bom ngang bin bén. Két qua cho ching ta nhtng két luan dinh huéng cho thye nghiém nhim loai tt anh huéng khéng ‘t8t khi stt dung phuong phap bom ngang bing laser ban dan, Chuong 1 MOT SO KET QUA DA NGHIEN CUU VE PHAN BO NANG LUONG BOM TRONG HOAT CHAT LASER RAN 1.1. Téng quan vé laser rn 11.1. Dée diém cia laser rin Laser rin 1a loai Laser ma méi trudng hoat tinh 1a chat rin. Chat rin cd thé la don tinh thé, ho&c chat v6 dinh hinh. Trong Laser rin nghich dao néng 46 thudng duge thye hién § nhing mie ning hong cla nguyén ti, hoe eta ion tap chat. ‘Néng dé hat bute xa cla Laser rin thudng rat én, khoang 10" dén 10% cm’ tte 1 lén hon khoang 10( 000 [2] lan so v6i cht khi, Iie dau nguai ta 44 cho ring chi cé Laser ran méi cho céng suat lon. Do ndng dé hat ln nén hé sé khuéch dai ctia Laser rn ln hon nhiéu so v6i Laser khi, do dé véi cng swat bing nhau thi thanh hoat chat nhé hon nhiéu. Chat rn 66 d6 déng nhdét quang hoc kém hon nhiéu so véi cht khi, Do dé tiéu hao do tan xa sé lén va hé sé phim chdt cia né sé nhé. Thanh hoat chat cé chiéu dai chi khong 10 +60 em[2]. Do dé déng nhat quang hoc ctia ‘thanh hoat chat nhé nén géc mé cia tia Laser do nhiéu xa sé rat én, thudng hang chue phit, trong khi géc mé ctia Laser khi chi vai chuc gidy This document is prosucpfbhtaifhastiw Trong Laser ran cac hat sé twong tac voi nhau do dé cac mite ning lwong thudng c6 46 rdng Kim vi vay vach bite xa ty phat va vach bite xa Laser thug c6 dai phd kha réng. D6 réng vach bite xa tu phat cia chat vo dinh hinh khodng vai chuc A‘, cia chat don tinh thé khoang vai A’, con d6 réng ‘otia bite xa Laser khi chi vai phan mudi A°[2] Dé tao nghich dao trong Laser rin ngudi ta ding bom quang hoc tite 14 chiéu anh sing cita phé hdp thu cue dai vao thanh hoat chat 8 tao tich ly cht yéu cho mite Laser trén va do dé tao nghich dao ndng dé. 1.1.2 Hoat chat cita laser rin Hoat chat ota laser rin thugng 1a dign méi dang tinh thé hode vé dinh hinh cé dang hinh tru tron. Lép phan xa thudng duge phu & ngay dau thanh, hv vay dau thanh thuéng duge danh bong va duge phu bing lép dign méi da dé dam bao hé sé phan xa can thiét cho bude séng laser. a O IO > — ——— 1 1 1 Hin 1.1, Hinh dang thanh hoat cht laser [2] Dé phan xa tét ngwdi ta con ding hién tuong phan xa toan phan. Dau thanh cé dang hinh mai nha, v6i diéu kién phan xa: saan 2) ay trong dé n 1a chiét suat hoat chat. Dudng kinh thanh chi khoang vai milimét ti 2 + 3 em. Dé khit nhting dao déng ky sinh do phan xa 6 mat xung quang ngudi ta phai Lim cho ching duge sin sii. Hoat chdt thuémg cé hai thanh phin: chat nén va chat kich hoat. Chat nén 1a chat co ban sé khéng tham gia tre tiép vao nhing qué trinh This document is prosucpfbhtaifhastiw tao bite xa laser. Chat nén 6 thé 14 don tinh thé hode vé dinh hinh va 6 chia cde nguyén tir hod ion ctia chit kich hoat. Chat kich hoat thudng cé ty 1é rét nhé chi khoang vai phan trim so véi chat nén. Vi vay tinh chat ky thuat co ban ciia hoat chat sé do chat nén quyét dinh. Laser rin sir dung hoat chat 1a cae tinh thé c6 edy cde ion kim loai dat hiém. Cée tinh thé Alexandrite (BeAI,Q)-Cr™), Fosterite (Mg:Si0,-Cr"), Saphie (AI,O3-Ti™"), YAG- Neodym (Y3AlsO,:-Nd"*), hap thu manh ving phé ti 400 dén 850 nm va bite xa ving hdng ngoai gan, tir 700 dén 1600 nm [2]. ‘Noi chung, chat nén cdn bao dim nhiing yéu cdu kf thuat nhu sau: ~ Bén chéc vé co hoe va héa hoe dé dam bao 46 bén ctia méi tru’ng hoat tinh, - Bén ving vé nhiét dé chiu duge bite xa bom lén va bite xa laser lon, ~ Dé ché tao vé phuong dign céng nghé ché tao va san xuat hang loat, ~Cho phép gia cdng co khi va gia céng quang hoe (hinh dang, dnh béng, mai mon, phti lép phan xa 6 hai dau, ...), - Déng nhat quang hoc cao dé dam bao tiéu hao nhé va hé sé pham chat budng cng hudng lén, - Phai trong suét véi bite xa bom va bite xa laser. Dé lam chat nén ngwoi ta hay ding tinh thé mudi kiém thé va chi yéu gém 3 thanh phan H;WO,, HMO, va HF. Hién nay ngwdi ta ding rong rai chat nén 1a tinh thé Itri- granat, dang Y;MesQ,2. Trong dé Me 1a kim loai kiém, vi du Al, Fe, ... Chat nén la granat 6 wu diém: giam duge céng suat bom ngudng va ting duoe higu qua bite xa. Dae biét ngudi ta hay ding Y3Als0y3 va ky higu la YAG. Thuy tinh cfing 1a chat nén cho laser thiiy tinh. Thiy tinh la chat v6 dinh_ hinh nén cé wu diém: dé ché tao, 06 thé tao due kich thude lén va dat d6 déng nhat cao. Thiy tinh cé nhuge diém la dé bén va mhiét kém va céng suat bom. ngudng kha lén. Chat kich hoat la nhing nguyén t6 dat hiém nhu Crom, Neodym, Urani, Nhing nguyén t5 niy thudmg 6 dang ion hai hod ba dign tich. 1.1.3. Co ché tao nghich déo néng dé trong laser rin This document is prosucpfbhtaifhastiw Nhiing qué trinh co ban tao nghich dao néng dé gitta cae mite céng tac celia laser chi: yéu La qua trinh dich chuyén va khi phan tich diéu kign tao nghich dio thing ngudi ta chi xét nhiing trang thai diu va nhitng trang thai cudi cia nhtng dich chuyén co ban. Do dé tay thuée vao sé trang théi ma. chting ta c6 duge hé hai mie, ba mic hodc bén mute, & méi hé 46 ching ta da don gian héa mét cdch hop ly dé 6 thé hiéu duge nhitng qua trinh co ban co ché lam vige eta laser. Khi phin tich céng tac ctia hé ching ta gia thiét: bie xa bom chi téc dung véi mot dich chuyén gitta mite laser trén vi mite eo ban. Didu dé cé thé dat duge, vi du bing cach chon phé bite xa bom hode chon nhém trang thai thé ndo dé xae suat dich chuyén quang hoc gitta trang thai co ‘ban va trang thai trén 1a rét lon hon xc sudt eta tat ca qua trinh khée trong nh6m trang thai dé, Tuy nhién, méi trudng gdm cae nguyén ti hai mite nang hrgng thi rat kho tao ra nghich dio mat 46. Gia sit e6 tao ra duoc trang thai nay thi xe suit dich chuyén tt mite co ban lén mite mite kich thich va nguge lai la bang nhau, do dé trang thai nay khéng tén tai duge lau, ma quay vé trang thai cn bing ban dau. Nhu vay. dé cé duge diéu kién nghich dao mat 46 cu tri ching ta chi cd thé tim thay trong cdc nguyén tit cé it nhat ba mute nang lwong. ‘Trong so dé cac mite nang lrong dé it nhat o6 mét mite kich thich trung gian siéu bén, 06 thoi gian séng léu hon nhiéu so véi cée mite kich thich khéc. Sau diy ching ta tim diéu kién tao nghich dio mat d6 cho so dé 4 mite nang luong. Ns— mite hich thich cao No — mite Bich thich su Ben mite laser trén Ni = mie laser die No ~mie.co ban This document is prosucpfbhtaifhastiw Hinh 1.2, So dé 4 mie nang hong voi cde chuyén dich [2] So dé bén mite nang Iuong la so dé dc trung cho hoat chat laser rin YAG:Nd™ théng dung duge trinh bay trong hinh 1.2 véi cde dich chuyén gitta ‘cde mite. Céc mili tén ky higu F mé ta chuyén dich hap thu do nguén bom & ngoai, cdn mili tén ky higu R m6 ta chuyén dich tich thoat ndi (chuyén dich khéng btte xa). Vi chua xét dén bite xa cudng bite nén gitta hai mic laser trén (Nz) va mite laser dussi (N,) chi xét str phét xa ty phat théng qua hé sé As, Trong diéu kign cén bing nhiét dong sé hat chuyén téi cde mute bing sé hat ra khéi cde mite dé va tuén theo hé phuong trinh ding hoc, diéu kién nghich dio mit d6 eu tri théa man [2} Rod, R (1.2) ‘Tit (1.2) ta thy: nghich dio mat d6 cw tri dé tao ra déi véi ede chat 66 xdc sudt chuyén dich te nhién tir mic laser trén xuéng cdc mite thép hon nhd (bé sé Anhxtanh Az, va R nhd), xdc suat chuyén dich tir mite laser duéi xuéng. mic co ban Idn (Rj lén), xéc sudt chuyén dich tir mite co ban lén mite laser trén nhé (F; nhd) va chuyén dich tt mic co ban lén cée mite kich thich cao én (F ln). 1.2, Chim laser xung Gauss 1.2.1. Phan bé mode trong buéng céng hwong laser Ly thuyét trudng dién tir cho thay cudng dé trudng trong cdc budng céng huéng khde nhau cé thé phan tich thanh chudi cdc ham phy thuge vao ba tham s6. Méi tham sé img voi mét dang dao déng (hay cén goi la mode), duoe ky higu TEMayg (viét tat cia mode ngang - Tranverse, mode dign - Electric va mode tit - Magnetic, trong dé m va n 1a cdc sé nguyén). Cac sé nguyén cho biét s6 cue tiéu, hay sé diém cudng dé bang khéng, gitta cdc ria ciia chim tia theo hai huéng vuéng géc nhau (m cho mode dién va n cho mode tit). Hai chi s6 dau (mn) img vi ham mé ta cau tric ngang ctla dao ddng (dang dao dng ngang) - This document is prosucpfbhtaifhastiw TEMan. Méi dao déng ngang tng voi hang loat dao déng doc c4ch nhau mét nita bude séng, sip xép theo chiéu dai buéng cng huéng, cde dao déng nay ing véi chi sé g. Chigu dai budng cong huéng va bude song anh sang tac dong ln nhau dé tao ra mode doc cia su phan bd nding luong trong chim tia. Con thiét ké budng cOng hudng 1a nhéin t6 then chét trong viée xdc dinh su phn bd curimg d6 theo chiéu ngang eta chim tia [6] ‘Trong budng cng hudng quang hoe sé tn tai cdc séng dimg, do su giao ‘thoa cua céc séng phing truyén doc quang truc theo huéng nguge nhau sau khi phan xa trén hai guong. Khodng cach gitta hai bung séng lién nhau bing mét mita bude séng, Cac dao déng doc sip xép theo chiéu doc budng céng hudng. méi dao dng doc tmg véi mét tin sé riéng. Thue té s6 dao déng doc (mode doc) trong laser 1a sé nguyén lan mét nia bude séng so véi chiéu dai buéng cng hung. Bude sing ctia mode doe duve tinh theo céng thite [6] 2uL, q (1.3) v6i L la chiéu dai budng c6ng hudng, q la sé nguyén (1a sé mode doc trong budng céng hudng), va tin sé tuong tng 1a: v, = °2in a4) trong dé c ld van téc Anh sing trong chan khéng va n la chiét sudt clia mdi trung hoat chat trong budng céng hudng. Khi dé tin sé mode ké tiép sé a (qti)e Yes =r as) ‘Ti (1.4) va (1.5) ta tinh duge dé léch tan sé gitta hai mode lién tiép: Av (1.6) 200 Khi lim viée & gan ngwéng thi chi nhtng mode nim gan dinh vach This document is prosucpfbhtaifhastiw ‘huynh quang duge phat ra. Nhung khi khuéch dai manh, vugt hin nguéng thi hau nhw tat c cde mode nim trong vach huynh quang déu duge phat [6] M6t chim laser dién hinh sing nhét tai trung tim va gidm din cudmg d6 vé phia ria 1a mode bac nhat don gian mhat, ky higu 18 TEMo - con goi 1 mode eo bin. Mode co bin e6 cudng d6 edt ngang chim tan theo him Gauss. Véi cic mode ¢6 m> 0 hoe n> 0 goi li cée mode ngang bac cao. Céu tric mode ngang gdn véi sw tan xa ctia bite xa khi phan xa trén guong va mat mat do tén xa trén chi tiét quang, giéi han khdu d6 chim tia,...[6]. Anh hudng ctia tan xa lén phan bé trudng dign tir trong budng cong. huéng doe nghién ctu dau tién trén co sé nguyén ly Huygen - Fresnel. Theo nguyén Iy nay, si phan xa trén guong sé lim cho tia sing duge lan truyén trong hoat chat nhiéu lan, giéng nhw truyén lan qua khéi gdn true ¢6 kich thude khéng déi, song song véi nhau, ma mdi khi qua khéi dé séng duge khuéch dai. Néu kich thade cua guong én hon nhiéu lan bude song, gidi han cho mode ngang va truéng dién tir phan cue déng nhat trong mét phuong thi trong qué trinh phan xa, trudng sé thay déi 6 bién nhiéu hon 6 tim. Sau nhiéu lin phan xa truéng 6 bién sé nhé dan, khi dé mat mat do nhiéu xa & bién nhd hon 6 tam [6] Déi véi budng cong hudng déng tiéu, Boyd, Gordon va Kogelnik di mé ti phan bé trudng eila mode ngang la tich ea da thite Hermit voi him Gauss ‘vi tham sé pha [5.6]: gy (.Ys7q) = CH g (XH ("Jeo (7) trong 46H, H, 1a da thite Hermit bic m,n, thita s6 Cc’ = C(m, (ioe phu thude vao zo, R, m n(C 1a hé sé suy giam); phan cén lai 1a pha g(w,z9) trong. ‘mat phing z = zp cdch true budng eéng huéng mét khoang w : a yt. Chic bién x" va y* phy thudc vao khong cdch git hai guong va lién hé vi x va y nur sau: This document is prosucpfbhtaifhastiw (8) Phan bé ewdng d6 cla mode co ban (TEMoo) ¢6 thé nhan duge tt (1.7) yt oye 2% Khi thay /1,(¢*)=H,(*)=1 va x+y"? =? 2 ta e6: AY Heat) =Hy(y*)=1 VE » Rae Neg(*y.%)=Ce BED ay Tw (1.9) ta thay ring phan bé theo tiét dign ngang cila mode co ban - ‘TEMo ¢6 dang Gauss. Cuong dé J cia mode co ban c6 dang sau: Ieny)=10.0)e * (1.10) trong dé /(0,0) la cudng dé tai truc budng céng hwéng: x, y la toa dé trén tit ign ngang cia chim tia, wo Li bin kinh chim tia, tai dé cudng 46 gidm " so voi gid tri cudng 46 dinh. Hinh 1.3 minh hoa mét vai mode ngang (TEMy,) kha di. Mae di mét s6 laser buéng céng hudng bén, dic biét 1a nhiing laser duoc thiét ké cho céng sudt ra cue dai, hoat déng 6 mét hodc nhigu mode bic cao, do nang luong khéng tap trung nén ngudi ta thudng muédn Logi bé nhiing dao dng nay [5]. This document is prosucpfbhtaifhastiw Beth lana Ah chi in lA!-® Lan.|~4D re 0() Hinh 1.3. Mode ngang cia chim laser [5] ‘Tw biéu thie mé ta phan bd cudng dé ciia mode co ban ta nhan thay ring, néu chi phat & mode nay thi véi guong laser c6 kich thuée giéi han. chim tia laser phat ra sé dinh huéng theo chiéu doc cia buéng céng huong. Chim tia nay la song phiing, song song ly tuéng va dinh hudng theo chiéu doc buéng céng hudng, néu bd qua higu tg nhiéu xa trén bién ctia guong. Tuy nhién, trong tradng hop budéng céng hudng duge cdu tao béi hai guong cu thi mode co ban sé phu thudc toa dé Z theo chiéu doc budng céng huéng, khi d6 chim tia laser phat ra sé 1a séng edu 06 géc phan ky xdc dinh. Chim. tia ny duge goi ld chim tia Gauss nhu trén hinh 1.4 [6] inh 1.4. Budng odng hutmg gong cau va cdu trite chim Gaus [6]. ‘Trong hinh 1.4, R,, Ry tong img 1a ban kinh cong cia guong G,, Gx L This document is prosucpfbhtaifhastiw Ja khoang cach gitta hai guong; wo va b la kich thude ban kinh mat that chim tia va tham sé ddng tiéu, cdc tham sé nay phy thude vio R, Rz, L va 2. 1.2.2 Laser phat xung Gauss Trong ché dé phat ty do, phu thude vio dé én dinh cia dén bom, ctia budng céng huéng, chim tia laser nhiéu khi ld chudi céc xung nhd vi nang long dinh thay déi ngdu nhién. Véi céc xung nhu vay thi laser phat ra s€ c6 cng suit thip, do dé khéng duge img dung rong rai trong thuc té. Cling véi m6t gid tri ning Iuong, néu ta rut duge théi gian phat xung xudng 6 ns thi céng suat phat sé duge tang lén nhiéu lan. Qué trinh rit ngdn thoi gian xung goi la bién digu xung [2]. Dé laser phat ra & ché 46 xung, phuong phap truc tiép duge img dung nhiéu nhdt 1a str dung laser lién tue véi bé khod bién digu ngoai sao cho dé truyén qua ciia anh sang chon loc trong mét khoang théi gian nhat dinh. Tuy nhién, phuong phap nay cé hai bat loi: thé nhat, bang cach chan anh sing nén mat mat nang lvong trong khoang théi gian kho déng. Tht hai, khéng thé ‘ndng cao céng sudt dinh so véi céng sudt phat lién tue (hinh 15a) [2,5]. Nhim khic phuc nhting han ché cia phuong phap bién digu ngoai, so dé tht hai (hinh 1.5b) laser ty déng mé bing bé bién digu dat trong budng céng hudng. Khi d6, nding Iueng trong thoi gian déng sé g6p vo xung trong thei gian mé va céng sudt dat duge sé cao hon, Ning Iuong trong thoi gian déng tén tai trong buéng céng huéng & dang nghich dio mét dé cu tri. Bang phuong phap nay, eng suat laser phat & ché 9 xung sé cao hon cdng suat phat & ché dé lién tuc. This document is prosucpfbhtaifhastiw L =u Ht E Hot cd I tin Minh 1.5. So sinh céng suit gitta hai phrong phip bién digu: (a) bién digu ngoai, (b) bign digu trong [2,5] Trong kY thuat laser, c6 bén phuong phdp str dung bién digu: déng mé hé sé khuéch dai (gain switching), thay déi d6 phim chat (Q - switching), thay déi hé sé truyén qua (cavity dumping) va kho& mode (mode locking). - Dong mé hé sé khuéch dai (gain switching): Nhw da biét, hé s6 khuéch dai ti Ié thuan véi nghich dao mt 46 cw tri ban dau. Hay néi cach khde, hé sé Khuéch dai phy thuge vao téc d6 bom. Nhu vay, laser xung c6 thé hoat ding néu ta bién digu téc 46 bom. ‘Tée 46 bom thay ddi tun hoan theo chu ky nhat dinh. Tai mét chu ky tée 46 bom thay déi sao cho khuéch dai 1én hon hodc thap hon mat mat [2,5,6]. Déi voi laser rin va laser mau, nguén bom 1a quang hoc ding dén phat xung thi cé thé thay déi tan sé lap ctia dén. V6i laser khi, nguén bom 1a dong. ion thi thay d6i dign ap nudi theo chu ky. Trong laser ban dan, nguén bom 1a dong dign tir thi thay déi cudng d6 dong theo chu ky. - Thay déi dé pham chdt (Q - switching): Déi voi phuong phap nay, ta biét ring laser sé khéng phat khi mat mat trong budéng céng huéng Ién hon khuéch dai. Mat mat duge bién digu thay déi theo chu ky bing mét bé hap thy dat trong budng céng hudng. Trong thdi gian déng (mat mat ln), toan bo nang lvgng trong budng céng hudng sé gitt 6 dang nghich dao cu tri. Trong This document is prosucpfbhtaifhastiw théi gian mé, toan bé cu tro mie trén sé déng loat tich thoat va phat ra xung laser c6 céng suat lin [2,5,6]. - Thay déi hé 6 travén qua (cavity dumping): K¥ thuat tao xung laser nay dya trén nguyén tic giam gitt photon trong budng céng huéng trong thoi gian d6ng va gidi thodt photon trong thoi gian mé. Khde véi phutong phip Q - switching, mat mat cla buéng céng hudng duoc bién digu bang cach thay déi hé sé truyén qua cia guong ra [2], - Khod mode (mode locking): Phuong phip khod mode la mot ky thuat trong quang hoc. nho dé laser o thé tao ra cae xung anh sdng cve ngin, cd pico gify (10s) hode femto gidy (107s) [2]. Co si cia ky thuat nay 1a tao ra ‘méi lién hé xde dinh vé pha gitta cc mode ctia budng céng hudng laser. Khi 5, laser duge goi 1A “khod pha” hay “khod mode”. Sut giao thoa gitta cée mode nay tao ra chudi ede xung laser. Tuy theo ede thude tinh etia laser, ede xung nay co thé rat ngiin, c& vai femto gidy [2.5.6]. Phuong phép khod mode trong laser duge chia thanh hai loai 14 chi dong ‘va thu déng. Phuong phép chi déng 1a ding tin higu bén ngoai dé bién digu anh sang trong buéng cng hudng. Ky thuat khéa mode phé bién nhat la bién digu am quang trong budng cong huéng. Mot ky thudt khéa mode cht déng Khac 1a bién digu tin sé st dung higu tg quang - dign. Phuong phdp thu déng 1a ding nh sang trong budng céng huéng dé gay ra sw bién déi cla phan tw bién digu, ti d6 tic dng tré lai chim sing. Cé thé hiéu day 1a phuong phap tw bién digu cia 4nh sing trong budng céng huéng. Phuong phap nay thudng sir dung chat h4p thy bao hoa. Chat hdp thu bao hoa 06 d6 truyén qua phu thuéc vio cudng 46 Anh sing wi. Khi 4nh séng ti cing manh, 46 truyén qua cing ‘ing. Chat hap thu bao hoa str dung trong laser khoa mode cé kha nang hap thu 4nh sing yéu va cho truyén qua khi énh sing dii manh [5,6] Nhu da trinh bay 6 trén, mode co’ bin (TEMg,) trong budng edng hudng e6 dang Gauss nhu biéu thite (1.9). Trong buéng edng huéng sti dung guong cau, This document is prosucpfbhtaifhastiw bang phuong php bién diéu xung, ta sé thu duge laser phat ra 6 ché d6 xung Gauss, Tuy nhién, két ludn trén chi ding trong khi tinh toan thuan ty ly thuyét. Sir dung ky thudt tao xung cue ngén (c 800) digu hudng duge trong mién 6007m khi sit dung nguén bom ns, tac gid N.D.Hung va nhom nghién etry da thu duge xung 790fs dang Gauss nh hinh 1.6a [11] 203ns/1.0us © 4 Minh 1.6, Mot s6 hinh anh xung laser (11,12,13.14} Nam 2005, Ji-Chyun Liu va cae céng sy da thiét ké mach dién tu dé dinh dang lai mat séng trong mién ps, két qua duge tng dung trong linh vue thong tin quang. Bang the nghiém nhom tée gid da thu duoc dang xung tua Gauss nhw hinh 1,6b [2]. Diéu bién théi khoang xung nhung git nguyén céng suat trung binh phuc vu cée qué trinh xt ly vat ligu, nhém tie gid Werner Wiechmann da thu duge hinh anh xung laser nhur hinh 1.6c [13]. Trong céng trinh ctia minh, Hidenori Watanabe va cdc cong sy da phat trién laser xung co hang chue ns (65ns) c6 dé don sic cao (0.2pm) tai 157nm dé phuc vu céng nghé cham khée [14], hinh anh xung laser thu drge nhu hinh 1.6d This document is prosucpfbhtaifhastiw Nhw vay, tir cac két qua hinh anh xung laser ta thay ring. laser déu phat xung twa Gauss, Nghién ctu vé anh huéng cua laser [10], céc két qua thu duge cho thy laser xung Gauss téc déng lén hoat chat laser rin (cde ion) gary ‘ra qué trinh phn bé khéng déng nhat cdc tim hoat bi kich thich. Céc két qua nghién ettu nay sé duge trinh bay sau day 1.3. Phan bé nang long bom trong laser rin khi bom bang laser ban din ‘Tir dic trumg phé hap thu ctia cdc hoat chit laser rin, thay ring néu ding bom 14 dén phéng khi thi higu suat rat thap (2%). Phan Ién nang lugng 4nh. sdng ciia dén (75%) gay ra nhiét trong hoat chat, ti dé gay ra cdc higu tng. nhiét c6 anh hudng khéng tét dén qué trinh phat laser [5,6]. Dé tranh duge cae higu tng nhiét bat loi nhw vay, trong céng nghé laser ngwoi ta tim cdc ngudén quang hoc cé phé tring véi phé hap thy cia laser rn. Laser ban dan la nguén Anh sang két hop, dic biét c6 phé phat xa rat hep va od thé thay déi duge trong ving phé rong. Hign nay, cdc laser ban din c6 cng suat phat lin va kich thude nhd da duoe ché tao[7.9]. Sit dung laser ban dan cé bude séng tring véi phé hap thy cla hoat chat lam nguén bom cho laser rn 1 m6t trong nhing phat trién cita cng nghé laser [6] Laser rin céng suat phat nhé dén céng suat lin c& kilo ot da duge ché tao nhé str dung céng nghé bom ngang bing laser diode [10]. Nhéy str dung cong nghé nay ma c6 thé thu duge higu suat lién két cao nha kha nang két hop tét gitta phd phat xa cia chim bom va phé hap thu ctia méi trudng laser [1.3.4,5.6,]. Trong ky thuat, laser rin o thé sit dung cau hinh bom doc hode bom ngang véi nguén bom Ia laser ban dan. Déi véi céu hinh bom doe, ching ta c6 thé thu duge su két hop tt trong khéng gian gita chim bom va thé tich mode laser. Tuy nhién, trong edu hinh nay thi nang Ivong bom sé giam dan theo ham mii doc theo hudng truc cla budng céng huéng. Dé khie phye diéu nay, chting ta sit dung cdu hinh bom ngang. Theo dé 6 thé thu duge laser céng suat phat lén [6,10]. inh 1.7 mé. This document is prosucpfbhtaifhastiw ta edu tric laser rin bom ngang mat bén bing laser diode. 6 day L, va L2 tuong img 1a thau kinh chudn tye va thdu kinh hdi tu cé tae dung héi ty anh sing chim bom vao hoat chat laser. Hinh 1.7, Cau tric laser rin bom ngang mot bén bing laser diode [10]. ‘Trong qua trinh nghién ettu, W. Xie va cée edng sw da gid thiét [10] Phan bé cde day laser ban dan déi ximg quanh true nén cé thé chiéu sang déu dén thanh laser theo mét géc nhat dinh, -Bé qua cée higu tig xay ra do hign twong phn xa va Khe xa -Bé qua qué trinh hap thy tir bom dén bé mat thanh hoat chat, nhém tac gid chi m6 ta chim tia laser bén dnsau khi da di vao tam etta thanh hoat chat Bang cach nay, viée tinh toan khéng cdn quan tam dén cau hinh, hé thong lim. Jan, hé s6 din nhigt eva éng lam lanh, -Chim tia bom duge chiéu thing vio hoat chit (bd qua sy thay déi chim tia khi di qua eéc linh kién phan xa), Tiét dign ngang cua laser rin bom ngang mét bén bing laser diode duge mé ti trén hinh 1.8. G diy cae ngudn laser diode bom xem nhwr e6 phan bé ‘u xung quanh hoat chat, véi bin kinh mat thét Gauss, va ching duge xg higu dung Wyo tai diém R, trén true y. Gia st R, tai vi tri (0,0), didu dé nghia la 4nh sing bom sé h6i tu tai tim truc; Wyo bang ban kinh ctla chim laser tai vi ‘tri tm truc va ban kinh chim laser (9p) la nhu nhau trén toan bé thanh laser. This document is prosucpfbhtaifhastiw Hinh L8. Tiét dign ngang cita laser bom ngang mot bén bing laser diode [10], Céng sudt phat chudn hod cia laser diode bom duge viét duéi dang [10] Zh (22) seo)-fEbee 22 trong dé Jy la cng suat cia day laser diode bom trén true, w la ban kinh chim quay tia, Bén kinh chim tia la mét ham eiia y duge dinh nghia: (1.12) ‘Véi Wo 1A ban kinh mat thit ela chim bom va 41a bude séng bom. Sau khi dua vao thanh phan hap thu -fd (1a hé sé hap thu mét lan), (1.11) tré thank: (2 ee 103,9) Viale, z (1.13) Trong hinh 1.8, diém A 6 bén trong thanh laser va ro 1a ban kinh ea thanh. Vi kich thuée chm bom nhé hon kich thuse thanh laser nén chiéu dai hap thu duge tinh gin ding nhw sau: d= AB- Je ~y (14) Khi thay (1.14) vio (1.13) ta thu duge ham phin bé ning Ivong bom trong thanh laser. inh 1.9 mé tA phiin bé nding Iwong bom trong thanh laser rin bom ngang bing laser diode cho tradng hop bom ngang 4 bén. This document is prosucpfbhtaifhastiw Hinh 1.9. Phan bé ning lugng bom trong thanh laser rin bom ngang 4 bén bing laser diode: w,0 = 0.3mm (a) va vep0= Imm (b) [10]. Trong khi tinh toén, thc gid str dung cée tham sé: bin kinh thanh laser r= 15mm, cudng 46 bom J, =20Wiem*, bude séng bom 4, = 808nmva hé so hap thu déi véi laser Nd:YAG 1A f= 4.5/cm[10] cho hai truéng hop: ban kinh mat that chim bom w,.=0.3mm(hinh 1.9a) va w,,~1.0mm(hinh 1.9b) ” » = /\ = j bnooxnetcom 2 oe Boo } Hin 1.10. So sinh ving chéng lin ning hong bom véi him Gauss trong mit phing x (hinh a) va mat phing y =x (hinh b) cho wpo = 0.3mm [10]. Két qua so sanh ving chéng lan phan bé ning lung bom tai tim truc va ‘ham Gauss due mé ta nhw hinh 1.10, Trong 46 ving chéng lan ning luong bom tai tam truc duge thé hién bang nét ign va him Gauss duoc thé hign This document is prosucpfbhtaifhastiw bang dudng nét ditt. Ving chéng lan ciia phan bé nang lvgong bom tai tim truc cé dang tua Gauss. Tir két qua khao sat ta thay nding lrong bom déng. ‘26p vio qué trinh kich thich céc tim hoat efing nhwr qué trinh sinh nhigt trén ‘moi tiét dién ngang ctta tinh thé laser c6 dang phin bé Gauss (theo dang ving chéng lan ctia cdc chim laser Gauss). 1.4, Két lin chuong 1 Trong chuong 1 chung téi da trinh bay khdi quat vé laser xung Gauss. Ciing v6i mét nang Ivong, néu ta rit ngdn duge thdi gian phat xung xudng c& ns thi céng suat phat sé duge ting lén nhiéu lan. Dé nit ngdn thoi gian xung ta ding phuong phap bién digu xung. Trong ky thuat laser, cé bén phuong phap sit dung bién digu: dong mé hé sé khuéch dai, thay déi d6 phim chat, thay déi lee) trong buéng céng huéng cé dang phan bé Gauss, bing phwong php bién hg sé truyén qua va khéa mode, Chiing ta biét ring, mode eo ban (TE digu, ta sé thu duge laser phat & ché 46 xung Gauss. Tuy nhién, két lun trén chi dung trong truéng hop thuan tuy ly thuyét. Nhiéu céng trinh thye nghiém 4a cho thay laser thu duge déu phat xung tya Gauss. Ciing trong néi dung chuong 1, ching 16i da trinh bay két qua nghién cru ting dung ciia laser sung Gauss: ‘Trong céng trinh ctia minh, the gid W.Xie va cc céng sw da khao sat phan bé tim hoat bi kich thich trong hoat chat laser rin bom ngang bang laser ban din. Tuy nhién, trong qud trinh nghién citu, nhém tac gid da gid thiét chim bom ngang da cé dang Gauss trong hoat chdt véi cdc tham sé cho trivéc. Trong khi thuc té ché tao laser réin thi cic tham sé cia nguén bom, tham sé buéng cong hiring, yéu té két hop thai gian gitta cde xung bom lai déng vai tré quan trong. Khao sét anh hung ctia cdc tham sé y dén laser ran bom ngang bang laser bin dan sé direc chiing 161 trinh bay trong noi cung chueong 2 ciia ludn vin. This document is prosucpfbhtaifhastiw Chuong 2 ANH HUONG CUA DO TRE THOT GIAN CUA CAC XUNG. BOM LEN PHAN BO NANG LUQNG BOM 2.1. Cau hinh laser rin bom ngang bang laser ban dan Ching ta biét ring, bom quang hoc két hop 14 mét phuong phdp tao nghich dao mat 46 cu tri trong hoat chat laser dat hiéu qua cao. Nguén bom két hop (laser) e6 bude sng loc Iva trong mét ving phd hep, khéng nhing nang cao higu suit hép thu (loc Iva) tao ra chuyén dich kich thich lén mite cao ‘ma cén gidm duge higu img nhiét trong hoat cht (do ning lugng bom trong ving phé du khi sir dung nguén bom khéng két hop - dén flash). Cang voi sw phat trién clia laser ban din (Laser Diode - LD), laser rin bom ngang bing laser ban din duge phat trién manh trong nhting ndm gan day. Nho phuong phap bom bang laser ban din ma kich thude cia laser rin duge giam di rat nhiéu vi khéng can st dung ky thuat lam lanh. Bén canh d6 kich thuée nguén nuéi cing duoc gidm di ding ké ma vin ting céng suat phat laser [1.4.6]. Cé hai phuong phép bom cho laser rin bing laser ban dan, dé 14 bom ngang va bom doc. Bom doc tr diu vao budng céng huéng co loi 1a nang lugng trong hoat chat phin bé déu trén tiét dign ngang. Tuy nhién, higu suat bom khéng cao vi khé tip trung ning Ivong bom vio hoat chat. Bén canh d6 thi ning long bom sé giam din theo chiéu dai hoat chat [6], Dé khdc phuc nhiing han ché trén, phuong phap bom ngang duge st dung. Tir cdc két qua di céng bé, ta thay phan lén nang Iuong anh sang cia dén (75%) gay ra nhiét trong hoat chat [6]. Sy dét néng hoat chat sé gay nén nhiéu higu tmg nhiét khdc nhau: gidm céng suat phat, gay bat én dinh céng suat, gay bat dn dinh céu trac chim tia va thim chi lam héng hoat chat. Dé tranh duge nhting higu tmg bat loi nhu vay. trong céng nghé laser thay vi ding dan phéng khi, ngudi ta c6 ging tim cde nguén quang hoe 06 phé tring This document is prosucpfbhtaifhastiw ‘voi phd hap thy eta laser rin. Va nhw vay, laser ban din duge st dung dé lam. nguén bom cho laser rin. Hién nay cdc laser ban din da duge ché tao voi kich thude nhé nhumg céng suat phat lon. Sir dung laser bin din e6 céng suat lon hoe nhiéu laser c6 cdng sudt nhd dé ghép thanh bé c6 bude song tring véi phd hap thu tia hoat chat Lim nguén bom cho laser 1a mét trong nhing phat tién ctia laser rin. Céc laser ban din duge str dung nhiéu nhat dé lam nguén bom cho laser rin 1a cdc laser ¢6 bude séng nim trong khoang tir 800nm dén 900mm. V6i viée sit dung nguén bom két hop, higu suat laser c6 thé dat t6i 80%. Ngoai ra, néu sit dung laser ban dan khéng nhiing sé nang cao hiéu suat phat laser ma con 6 thé phat laser & bat ky tan sé nao, phy thude vao tin sé ctia laser ban din, Hon nia, vi khéng cé nang long du thita dot néng hoat chat, nén khong cén hé thong lam lanh, tranh duge mét céng nghé phitc tap trong ché tao laser rn tin sé lip cao. Véi cdc uu diém trén cia nguén bom quang hoc két hop, laser rin dang duoc phat trién trén co sé sit dung ngudén bom laser ban din va nang cao tan sé lap lén dén hang tram Hz [6,10], hina ser \) F Diode inser b Hinh 2.1. So dé laser rin bom ngang bing bin laser ban dn [10] 4. Mat edt doe, b, Mat eft ngang Khi st dung ngudn bom la ede laser ban déin, dén bom dat song song véi ‘thanh hoat chat - goi 1a cu hinh laser rin bom ngang (hinh 2.1). Vi mdi laser ban din cé céng suat thap va ban kinh vét chim tia rat nhé, nén khéng thé st This document is prosucpfbhtaifhastiw EROOKHKMTCOM dung mét laser dé bom cho laser rin. Dé ting cng sudt bom va ning lvong duge phan bé déu trén hoat chat, cae laser nay duge gin voi nhau thanh nhiing thanh gdm nhiéu laser ban dan ging nhau (hinh 2.2). Hinh 2.2. ‘Thanh 16 laser ban dn [4] ‘Nang wong ctia cdc laser nay én dinh va phan bé déu trén todn bé chiéu_ dai hoat chat laser rin. Ce thanh nay duge dat song song véi hoat chat (hinh 2.1a) gidng nhu dén flash. Bic xa phat ra otia laser ban dan sé chiéu thing vao hoat chat mi khéng phai str dung mat phn xa nhu trong trrbng hop nguén bom quang hoc khéng két hop. Théng thuong ngudi ta st dung hai hoac bén thanh dat xung quanh hoat chat (hinh 2.1b). Ta biét ring, phan bd ning Iugng chim tia ban din cé dang Gauss, va khong déu theo tiét dién ngang. Do dé trade khi chiéu vao hoat chit, tia laser ban dan sé duge tai phan bé lai nh mét hé quang hoc dat gitta thanh ban dan va hoat chit. Tuy theo sé Iuong thanh laser ban dan va kich thuée ctia hoat chéit ma ta str dung hé quang ‘hi tu hay phan ky. C4u hinh thye nghiém hoan chinh st dung trong thyc té duge trinh bay trén hinh 2.3 [1.3] Bi pita cue Ong dinaute Tah Yate Hinh 2.3. Laser rin bom bing laser ban din va bién digu xung Pokker{ 1.3] This document is prosucpfbhtaifhastiw hv trén hinh 2.3, ta thay ring, mie di da st dung bén thanh laser ban din c6 bude séng tring voi ving phé hdp thu ctia tim hoat laser rin, song vin cdn dén qué trinh lim lanh. Nguyén nhn can dén lim lanh chinh la do phd phat xa ctia laser ban din khéng phai la don vach, ma cé mét dé rong phd nhat dinh, Phan nhiéu ning lwgng nim trong ving phd nay khéng bién ddi thanh ning Ivong cia laser rin (nding Ivong lanh) ma lA tée nhdn gay nhiét, tuy ring khéng Ién. Cau hinh laser rin trong hinh 2.3 cho thay, ¢6 bén thanh laser ban dn duge st dung trong céu hinh bom canh (side-pumped) véi muc dich phan bé déu nang lvong ti bén huéng. Tuy nhién, khéng thé 6 duoe sw phan bé déu ning Ivong trén tiét dign ngang cia hoat chit, vi hai ly do: 1) nang lvong cia laser bin din cé phn bé Gauss 6 trang xa, 2) dé phan ky ctia laser ban dan rat lon, vao khoang (5+10)°, do d6, cain phai héi tu vao hoat chat laser. Diéu nay dan dén sw phan bé lai nang Ingng trong hoat chat. 2.2. Anh hudng cia dé tré thai gian cia céc xung bom Ién phan bé nang long bom trong hoat chit laser 2.2.1. Biéu thitc tng nang long bom Chim tia Gauss cua laser ban din o6 thé duge mé ta théng qua bién 6. phtte U(x,z,f,dt) phan bé trén mat phing (x,z) nhu sau [4..6] cand vee, exp, — jhe jhe ™ + 7202) le P= es | | v6i cde tham sé: W2)=W,| 1a} 2.2) ( “| \-) | (2.2) 1a ban kinh mat thit tai toa d6 z trén hudng lan truyén, 6-477 1a tham sé ding tiéu v6i k 1a s6 séng ola laser ban dan; were (Q 1a ban kinh cong ctia mit sing, This document is prosucpfbhtaifhastiw (23) 24) 1 mit that chim tia tai thdu kinh; S(@)= tant" (2b) (25) 1a pha ban dau. ‘Chim tia laser di qua hoat cht duge xem nhu trayén qua mét thau kinh 6 tigu ew a 2.6) fa (2.6) Khi truyén qua hoat chat bién 46 phite etia chim tia thay déi vi hé sé: 1 oo( =) 27) Hon nita pha ciia né ofing sé thay déivé dang sau [5.6] ek 8 (2) bate ke 2.8) g(2)-bE ek 8) 28) trong dé: wets 2 ‘Thay (2.3), (2.8) va (2.9) vao (2.1) ta nhin duge bigu thie mé ta bién 46 phite ctia chim tia trong hoat chat nhw sau: ‘V6i diy la tham sé déng tiéu trong hoat chat, Wigg la ban kinh mit that chim tia = 18@ on) (ne ay ye ‘bom va W,, la ban kinh tiét dién ngang cia chim tia trong hoat chit. Céc tham sé nay duge tinh nhw sau: Tr orzyy" gM by MPN Weg | : 1) A 3 | | M —— 1, eer) 0-1 Dé cho ning Iugng ciia chim tia bom héi ty tai tim clia thanh hoat chat, ‘tie 14 vi tri mat thit chim tia trong hoat chat phai tring véi tim thanh hoat chat tai toa d6 d6, nghia 1a biéu thite sau phai théa man: This document is prosucpfbhtaifhastiw n (2.12) Str dung (2.4), (2.11) va (2.12) ta tim duge ban kinh mat that chim tia bom trong hoat chat nhw sau’ (2.13) Nhu vay, bin kinh mit thét chim tia bom trong thanh hoat chét phu thude vio vi tri ela laser bom (<9), bén kink thanh hoat chat laser (ra), phu thude vao chiét suat hoat chat (m), phu thudéc bude song (2) va ban kinh mat ‘that ban dau ciia chim tia bom (WW). Thay (2.12) vio (2.11) ta tim durge quan hé gitta r va yo nur sau: (2. | <— (2.14) chinh la diéu kién cdn thod man ctia vi tri ban dau yp sao cho vj tri nome mit tht chim tia bom sau khi vao hoat chat sé tring véi tam ciia hoat chat. Tit (2.10), dé tinh duoc phin bé nang Ivong (hay céng sudt bom) cia chim tia bom trén tiét dién ngang ciia hoat chdt, chting ta tinh cudng 6 chim: bom trong hoat chat nhw sau wv 7 ae 1G 2 tdt)= 1, ceaiaw| exp, eam ex 2.15) neoaeay xc * ri 7 ‘ ‘va 6 chm bom phia déi dién: wz 7 ze [. Ij( 21,41) = 1, ing) 0 lex 2.16) 22-1 gag cee ee Biéu thite (2.15) va (2.16) cho ta thay phan bé nang luong cia mét chim. tia bom trén tiét dign ngang cua hoat chét. Khi thoa man diéu kién (2.13), tte la mat that ctia Wyo trong (2.15, 2.16) nam tai toa dé (0,0) thi cudng dé cia ching ciing déi ximg qua géc toa dé, tite 1a: Te2.hd)=1,C-m-2h.d) @17) This document is prosucpfbhtaifhastiw Dé cho don gidn trong tinh toan va thiét ké. ching ta gia thiét ring cic thanh laser duge Lip déi xtmg quanh tim hoat chat, tite 1a déi xing qua géc toa d5 (x=0 =0) va bén thanh laser bom 6 ede tinh chat nh nhau. Digu gia thiét nay cé nghia la: I Qztd= Tex 2tdt)=Tx-nthat)=Mex-2tdt) (2.18) Hon nita, nhw ching ta biét, su hap thu photon trong khi bom 1a qua trinh ‘théng ké, nghia la sé luong tim hoat bi kich thich phu thude vao sé Ivong photon (mat d6 photon) tuong téc va hé sé hap thu. Do dé, phan bé tam hoat bi ich thich lén mite trén trong tiét dién ngang cia hoat chat phu thude vio phan bé sé photon kich thich trong tiét dign d6. Tt lip ludn trén, str dung (2.17) va (2.18) chting ta 6 thé rit ra, ddi véi trong hop bom bang hai thanh laser ban dan thi phin bé téng nang luong trong hoat chat sé la: nga 82st) 1, (0, 25f,dB)~ Ly 2. tod) (2.19) va vi trudng hop bom bing bén thanh laser ban dan la: Tceuie(* 2st dt)=, nae 2s AE) La 25% fot) (220) Trong (2.19) va (2.20) ta hiéu ring, nang long bom tai vi tri (x=) trong hoat chat bing hai lin nding Iuong bom tai vi tri dé cia mét laser ddi véi trudng hop bom hai bén va bing bén lan déi véi truéng hop bom bén bén déi xtmg. Van dé quan trong dat ra 1a, phn bé nang Iwong cla hai thanh hay bén. thanh trong hoat chit e6 déu hay khéng trong ving mode co ban va ching phu thude nhu thé nao vao cde tham sé dau vao cia laser. Néi dung tiép theo ching tdi sé khao sat cho nhting trubng hop nay, két qua duge trinh bay va thio ludn duéi day. 2.2.2. Phan bé nang lwong bom trong trang hop cdc xung bom hap pha Gia thiét chim tia bom cila mét laser bin din bude song r=Ips ¢6 bin kinh mat thét W,=1mm. Hoat chat laser rin 06 ban kinh 602m, 1, = 6mm va chiét suat n=1.78 [10]. Trong diéu kién hop pha (cdc xung bom This document is prosucpfbhtaifhastiw hoat déng dng théi: dt = 0), str dung (2.15), (2.16), (2.19) va (2.20), bing phan mém Maple khao sat phan bé nang Iugng bom trén tiét dién ngang cia thant nga 3n, kétq vhir i t i i 2 i i : Minh 2.4, Phan bé ning lnong bom ngang hai bén (a, mau d3) va bin bén (b, mau xanh) Ti két qua mé phong ta thay ring ning Iugng bom phan bé déi xtmg qua tim thanh hoat chat. Gid tri cudng dé tai tam thanh hoat chdt gdn bing gid tri cudng 46 dinh cila chim tia vao nhan véi sé thanh bom, Dang phan bé thay déi phu thudc vao sé thanh laser bin din bom. Tuy nhién, phan bé nay khéng déu trén toan bé mit phang cua tiét dién. Khi nghién ctu dah hong ctia vi tri bom dén a6 l6n ciia ban kinh ving chéng lan nang long trong hoat chat chtng ta thy ban kinh nay phu thude ‘yao vi tri ciia thanh bom. Diéu nay duge thé hign trén hinh 2.5 cho phan bé. nang Ivong cia bén thanh bom trén tiét dign ngang cia hoat chat 6 nhting vi This document is prosucpfbhtaifhastiw tri bom khac nhau: Smm, 10mm va 15mm. ‘Ty hinh 2.5, & nhing vi tri bom khée nhau thi ban kinh mat thit chéng lin khae nhau. Trong khi Jan theo ban kinh mat thét cla chim tia vio, Do dé, ban kinh mat that ving chdng lan sé thay déi theo ban kinh mat that ctia chim tia vao. inh toan, ching t6i chuan hoa ban kinh ving chéng Hinh 25. Phan bé nang Ivgng bom ngang bén bén & vi tri bom Smm (mau 6), 10mm (ania xan) vi Sm (mtu vag) Cling tir két qua m6 phéng hinh 2.5, r6 rang khi cac bom dat cang gan thanh laser thi phin bé nang luong bom trong thanh cing déu hon. Trong nhing trudng hop da khdo sit, chiing ta thdy ring khi khodng céch bom 1a Smm thi phan bé ning Ivong 1a déu nat trén mat phing tiét dign cia hoat chat. Tuy nhién, diéu nay c6 thé din dén sut giam higu suat bom do ban kinh ving chéng Lin nding long bom lén hon ban kinh tiét dién thanh hoat chat 2.2.3. Phan bé ndng hegng bom trong triving hop ede xung bom léch pha 2.2.3.1. So sinh phan bd nang cong bom khi bom hop pha va léch pha Sw dung gia tri céc tham sé nhw trén, ching t6i khao sét phn bé ning Iuong bom trong khéng gian cho truéng hop bom ngang bén bén léch pha, qua dé so sinh véi trudng hyp cée xung bom hop pha. Trong khi khao sat, dé This document is prosucpfbhtaifhastiw don gian trong qua trinh tinh ton ching téi gia thiét hai xung bom déi dién cing pha, két qua tuong tmg duge trinh bay ag bmg bomf2)] ing tng bom) @ Hinh 2.6, Phin bé ning lurong bom cho truimg hep bom ngang bon bn hyp pha (a) va Ich pha véi d= 0,5¢() Tw hinh vé ta thay, trong trudng hop cde xung bom hop pha, phan bé nang lugng bom trong thanh ¢é dang Gauss, mac di phan bé 14 khéng déu trén mat phing tiét dién cua thanh hoat chat (hinh 2.6a). Tuy nhién, khi cic xung bom léch pha, gid tri nling Inong dinh giam di va c6 xu hudng téch thanh hai dinh, gid tri cue dai va khoang cach gita hai dinh phu thude vao d6 Igch pha gitta cée xung bom (hinh 2.6b). Sé di e6 hign tugng nay la do cde ‘xung bom léch pha, din dén ving chéng lin nang rong bom trong thanh hoat chat khéng cén tap trung nhv trong truéng hop cdc xung bom hop pha. This document is prosucpfbhtaifhastiw Dé tre quan chting t6i biéu dién cac ding cong phan bé ning luong bom trong thanh hoat chat trén ciing mét hé toa d6, két qua nh hinh 2.7. Boca inh 2.7. Phan bé ning lung bom cho trutmg hop bom ngang bén bén hgp pha (miu. xanh), lech pha véitdr—0,5¢ (mtu da). Ti hinh 2.7 cho chiing ta thy ré hon vé su tach dinh va sut giam gid tri ning lugng eve dai so véi trudng hop ede xung bom hop pha. 2.23.2 Phin bd nang long bom véi dé léch pha khic nhau Dé thay sw phu thudc ctia phén bé nding hrong bom vao dé léch pha gitta cdc ‘ung bom, ching t6i di khao sat phan bé nang Ivgng bom véi cae a6 léch pha 0.3r, 0,4rva 0,5¢. Két qui khdo sit tuong tg duge trin bay tén hinh 2.8. ‘TW hinh 2.8, khi 46 Iéch pha nhé ( dr~0,3e), so sinh véi trubng hop cée ‘xung bom hop pha ta thay phfin bé nang long c6 dang Gauss. ‘Tite la d6 léch pha trong trudng hop nay anh khéng dang ké dén qua trinh phan bé ning wong trong hoat chat. Tuy nhién, véi nhtng d6 léch pha lén hon thi phin bd nang lugng c6 su thay d6i dang ké. Nhu da trinh bay 6 trén, ta thay d6 léch. pha cing In thi gid tri nling Iuong eve dai cng gidm, déng thoi sw tach dink dng 10 rét hon (hinh 2.8b cho trudng hop dt=0,4r va 2.8¢ cho dt=0,5r). ‘Dé true quan héa, ching t6i biéu dién ca ¢ duémg cong phan bé nang lugng bom trong thanh hoat chat voi cdc d6 1éch pha khée nhau trén cing This document is prosucpfbhtaifhastiw mét dé thi nhu hinh 2.9. Ré rang d6 léch pha eé anh huéng dang ké dén sv phan bé cing nhv gid tri nang luong bom eve dai trong hoat chat, eee en EROOKHKMTCOM © Tinh 2.8, Phin bé nding long bom véi dé Iéch pha Khe nau (@)idt=0,37,(6): dt = 0,44, (0) t= 0,57 Hinh 2.9, Anh hurong cia dé léch pha lén phn bé niing long bom: dt ~ 0,3r (mau ving), at ~ 0,5r (miu dé) va dt ~ 0,4r (miu xanh). This document is producpibhyiitastv 2.3. Két luan chong 2 Néi dung chuong 2 ching t6i da gidi thigu edu hinh laser rin bom ngang 1g bon thanh laser ban din, Trong truéng hop téi wu, gid thiét cdc thanh laser bom dat déi ximg xung quanh thanh hoat chat. Ludn vin da khao sit phin bd ‘nang Iuong bom tng qua 6 so sénh phan bé nang luong bom trong truong hop cée xung bom hop pha va léch pha. ‘Tu két qua khao sét cho thay, khi 46 léch pha nhé thi hinh anh phan bé nang lugng bom trong hai truéng hop déu cé dang Gauss, mac di phan bé 1a khéng déu trén tiét dign ngang cia hoat chat. Trong trudng hop cée xung bom Iéch pha, gid tri ning long din e6 xu thé giam dan khi dé léch pha lén dan. Hon nia, theo chiéu ting eta dé léch pha thi nding long ewe dai cé xu thé tach thanh hai dinh ngay cang 1% rét hon. This document is prosucpfbhtaifhastiw KET LUAN CHUNG ‘Trong ludn vin nay ching tdi da trinh bay nhiing diém téng quan nhat vé laser rin. Trong céng nghé, ching ta cé thé sit dung cu hinh laser rin bom doc ho&ic bom ngang bang cdc thanh laser ban din. Tuy nhién, bing phuong php bom doc hay bom ngang, thi phn bé cla nding Iugong bom bing laser ban dan trong hoat chat cing phan bé khong ding nhat. Nhu ta da biét, phan bé nang lugng ila chim laser bin din 6 dang twa Gauss, do d6, dd bom ngang hay bom doe, thi phan bé ning long bom efing sé c6 dang Gauss trong hoat chat laser rin, Théng qua viée gidi thigu mét s6 két qua cia viée nghién etru phan bé nang long bom trong hoat chit laser rin bom ngang. Tt két qua khao sat cho thay gia tri va phin bé nang Iuong bom téng phu phuée vao nhiéu tham sé. 6 dy chiing t6i da khdo anh huéng clia khoang cach bom, ela d6 tré gitia cde xung bom dén gid tri cuc dai va phan bé nang Iuong bom. Két qua cho thay d6 léch pha cdng lén thi gid tri nding Iuong cue dai cing gidm, xu thé tach thinh hai dinh cia tong ning luong cang r6 rét hon theo chiéu ting cia 9 Ich pha. Mac di da thu duge mét sé két qua, tuy nhién trong truéng hop nay dé don gian ching t6i da gid thiét bén thanh bom dat déi xg nhau, trén thye té cOng nghé rat khé Lam duge diéu nay. Hon nia, ching ti méi chi dimg lai & ‘trudng hop ede xung bom léch pha theo tig cap déi ximg, ma trong thue nghiém, c6 thé bin xung bom nay déu léch pha voi nhau, Day ld nhtng ndi dung ma luan vin nay chua dé cp khao sat. sé 1a nhiing ndi dung cho céc nghién ettu tiép theo This document is prosucpfbhtaifhastiw ‘TAI LIEU THAM KHAO [I]. Nguyén Thai Bang. Nghién cit anh huong ciia cong sudt bom lén cdu tric laser réin bom ngang bang laser ban dén, Luan vin Thac s¥ Vat li, Dai hoc Vinh, 2010 [2]. Trdn Dite Tan (Chi bién), Co so kf thudt laser, NXB Gio duc, 2001 (3). Nguyén Van Hién, Nghién cttw anh hong cia ban kinh mat that phan bé nding Iwong bom trong hoat chdt lén céu tric chim tia laser phat trong laser rén bom ngang bing laser ban dén, Luan vin Thac s¥ Vat li, Dai hoe Vinh, 2012 [4 Mai Vin Luu, Anh hiring cia chim laser xung Gauss lén qué trink quang phén bé cia méi tréng bi kich thich, Luan an Tién si Vat li, Dai hhoe Vinh, 2010. [5]. Hé Quang Quy (Chi bién), Laser budic séng thay déi va img dung. NXB DHQG Ha Néi, 2005, [6]. 118 Quang Quy, Laser rin - Cong nghé va img dung, NXB DIQG Ha Néi, 2006 [7]. 1. ¥. Fan and R. L. Byer, Diode laser-pumped solid-state lasers, IEEE J. Quantum Electron. 24, 1988 [8]. P. Laporta and M. Brussard, Design criteria for mode size optimization in diode-pumped solid-state lasers, [9]. M.V.Luu, D-X-Khoa, V. N. Sau, 1. Q.Quy, Transverse distribution of ® J, Quantum Electron, 27, 1991 pump power in the diode - lasser side-pumped solid-state laser rod, Comm. in Phys., Vol.19, No.1, 2009, [10]. W. Xie et al, Influence of the thermal effect on FMoo mode output power of a laser-diode side-pumped solid-state laser, Appl. Opt. Vol. 39, No.30, 2000. [11].N. D-Hung et al, Development of a Tunable Ultrashort Dye Laser System by using Molecular Photonic Processes and a Nanosecond Pumping This document is prosucpfbhtaifhastiw Laser. AISTD Vol. 23 Issue 4, 2006, pp.275-284. [12].Ji-chyun Liu et al, Picosecond Pulse Shaping Circuits with Inverse Gaussian Monocycle Waveform, Journal of C SIT, Vol.34, No.1, Nov 2005, pp.1-9. [13]. Hidenori Watanabe et al, Long Pulse Duration of F Laser for 157m Lithography, Proc. SPIE. Vol 4346, 2001, pp.1074-1079. [14]. Wener et al, Long Pulse Duration of F2 Laser for 157nm Lithography. Proceedings of the 4" International Conggress on Laser Advanced Materials, Processing. Japan Laser Processing Society, Vol.2, No.1, 2007, pp.66-68. This document is prosucpfbhtaifhastiw

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