VES Design - SEE ait. movies oe ~ CIPLUIT DESIGN ppocesses _—— as Mos LAYERS —_— “The = MOS circuits Ome hasic Jouers wn OPT wp digquai * poly stlecm ¥ Me tel These Aayees ote anohoted Fu™ ome by. Sedicon dictide tvruloti doyers Te interaction 4 potyssticen , £102 and — dagguaim Lage Feand taarsurter. Vor od ayers ue deliberately Joined “ko gutiey te fm fontace US Tue properties 4 a Mos devansin tes Can b& modified by He Use an insplant vottnin Hee S02 veseon. Tig io used te prodece. ances dopletias type tragic. WE putt Jind a 3 Gophoring the te pel crcl layer ioygormettion qj The acteal covet! iw ile £0 dhot we om cet at Sinsple diafrant potuids Corey bette oye inpe\mation and tepeleyy Fae diagnos covey bette Anger imjpeimation cir ts ie SELON ond stepeleyy q actual diveph the } tolov Cocling ear Hone Cent entedise , Tease HOF panned be easily sterned dato mosp, ~ Aayact ts eowpat ible Hee Qabricatim press, he at Tes rales ere eetart jot te dyeve layouts Called at pased clesigna Teles. @ Can sityMane defame, ented ws a ANOS sisctse Qt —_ — vigteragelt ee ee i i WML ND Polysili ton Ay WS he (Red) s wt —_—— Nm Give) Contact wh e (Black) NT Trplomt ; — (Mette » Buried Corral (eran) Feature. om ee ero cnet deems Te > 4. we le, depletion eyes totveo Stes pewlgy stile ~gttere we veil “ nmos Technology, TM shoe a Loy mAmed Civtuit ore boi wrt be, emily Kurd tte we We dosyewk eamst involves 8 they Fin ox ile. # HH DIBAWIN La 3b) oud © cregiont Cminox (Green) a polysilicon ~ [ eoty) Red p wokok | (Lured J Bue a mplonk Cretiow + cencacrs ( Black Sromaples — OY ANd yo te ast SEP sid} single. sucka, Spl pebytilices, Ceured | ex Breen shiek Leyak pai Sule leyout pat SUES ond &ND wakol (Bue) Ved ey inte ee tue scout am panel , Aeevint encugin Space befveen Ahem gro he ethey Cava E lament vetich will be wrespaved , e-em Vpp Cele) ———— oor gup (Bive)D Werk , Trimox Caveem) paths mo be dracon bles Aue cailS Joy \wenterS amd inverter boxed.” MeHe vy snsteing cent acks Od ALES ea veo tuwox pont Green Gup dors one ™ ived ore sgkructure! ) deoaw he vnplonts ta orate Cus) ratte Wresy sige pars ond cmt vel awe] ig pet (D) Fer SN : el ae eck Ah normally. ee oO smo Beck ion eaycuit “we “a @ Oo Yor weeps oked meno Aimed oO yer sum powee eon lg, Convenient strrokeqy. wotand puses® in parol in Seenlcn 5 us a Aun Pre pegs ce Control Segal li ak vrinuie omplis - lak om Bn Poly (os shames betes, % % bo y eowndaties shows WO teary Cel on he Ste hk qe lhe Cebhe oom be jo plated | such Aor SY vpaay, we aera ly iw Tey Comme tke diveck obukmane OS eo voy Silt om fov ep te estbom peasy wri sther Leak cells . Note: Oe atom sue wictial — Ste oh design , Hae Desig shyle Shoda emcawrage, ae Contopts % + Requloruity - tn whith Me we A weeplication * Generali ty Be tok desig eLiere Com be. minimided ord WR hey comme ct tow 4q leak Cells, SubSysitea Gord — Systems 1D Jaultated ® Merron uavercken’ — & ae bored Ugee Comsint % purr p owdh pad cleo Struchee ©% Pull WP -stractare, Je Cmrached from tha, output pei "te VoD amd Lorin ts | % daplert om mode Tiromiite, tf a Poh dmon Strachee Canists dy obra tomonk mode TWromsvdrs Suitably inter Conne ched petmmeem the. otpuk pointe omd = Gud ye Te aagueres belevd Sanot the “el eee kayak Sa ee ckion we AtTeC eve? Upp | Green Npp veDLoMAMOS — imverteyY vop x A x Ves Fe pape T Vp ‘ Par 4G % je tiaoe Fe a Be voo ol? stick Sac gytconn x For ames kup —p Sevier oR @ ParallelCMOS — mene ChXCOME Cw Cock ys Coley SHreK encoding Layers srork loyal =o eetee et Yells Pe cigQeari om mm at \ Ww Li Prose oe Demorcatton Une Pawel : i vss \ Contact Vee Plas a “es, Cena Dork blue i nee - 2 ov Pesple Black ° oon Feature Feature Pentumne Cree) Gympot) DEMARCATION LINE - m type Fj enhancement { a {| af Green D ke Rea, trom es ee f\ Yelleve P type [a fo enhantemant s i > med, Red TramaustorCmos pesian Stull —— ee na The Sick ond Layout meprresonct-oct t om ae Cmes eke Leficok extenhim 4 yee = nMes Approach anal Style abeosy ad atlined, » The comes lez Style OSce. based om fhe Cont vibut éam made by meno ond = comway » cmos — oles Wn ble mot OS cleple tion Mode Evonsintets Features oma Aayers cued 9 lout Cyeluw ) oe AN Mes with Hee a cephiw 4 inp cuck te BEEA — Cotact Cram) ee used in ¢Mosd asin - da Cmes lesign , yellne cn seal te sdewt iy pmos & wires, . - Cues Design seg ied ond —pmes Aromat amd ake sepotesl Gn Hen SACK doyout: by tha «sd Pemarcatian dine — arbowe voluich ole p type cleulees ont placed , (yell ome wm evict Green) ver placed belmo te Dear cation dine Grd tut Aototed in Prwell. Note: The pemorcaten tine Represent Hee Pwelh Bowndorg | Demorcat rm line, Fj RED ‘ Fl % Yellows EEK &) geese | aoa Demoartetion line n-type (Red over Green) Potupe (Red rel ®” Diy oat atta mut avok — CVYOSL Ae, De nas corima Vives ad pecuyqaatay ach ne earn vores Wurk mol \or e 4 : » rotune ave — BAMALL joinedk We, ay ard (P eobuneg acer > by Metal where, a Comecttga 2 Aeeded Note y — OB Apres rom fer. De morcatton Utne , Wer Yo Mo indicator Awe, actual — Prwelh Tope at tho (stich os an) evel dL abstraction snentter decd Wee PY mos appear | . ® rer qeoeeyy We above Rot wre wilt ep penn. when dhe Sick a wo Ayomstabed ‘be a wos yak , Aw Why pe. gubsrrate, — LMos Civ, nied tvronsytey 7 Made, tu pusell ) Mua Sabsbrecte Conectto he VDD & pruscll — USmacatton co Nse da Sluswn si TH Cito Von & Vsg to lS.he Tryere peta Sheed om € “ice reumple, Ce Leajmat Assy Style . er a Se rae Bib Slag rregiater, o DO We desty begat vate Tee decaf § porolteh unk vols 24 Aue Vop emt Ves sa eke om TR Cree ay a Gmepep amon cotion 3 Tortvonen re" ——™ vp fe ere \ine Se od ow nae TecenBrerS — O0tk ple pedo do wnosr Cot fom ne ole to gece conten’ ore Placed ores Vss wl le. y clere te VPP __ gy vote Cot pave Evans HAA Oe Convenient ly placed yeti Wet a ust om 08 \S® vest intevConmeck the ~Mvs Tramauters with t” PMos Tromruters o% rresypu red vorkngs Metot . omk — Comnget te the vols Lox Shoe pelos), = Veg CONNECTIONS (meTaL #eD PIFFUswes - 3k Skeld bE remembered TWH only metol Com CFOS THE Dewmovy Cacti uth amd ataaaees ee to thot rrestrvich ™, re om 5 ° aloo Base ren OO tum da DIFFONON ‘ re aR TAR Ink evcommettt ons cae @® Froelhy ve wane, Uae ( Staple & D xs oppreres ee Cer Stew bebo agus 9 coal Vo> a or = 5 ‘ N t 1 th ‘ i ‘ : rh fs alent _ a fi a olp. \ / 1 - 1 \ 1 i ‘ L a = 2% — Vise,“oS Note: @ The Conkack OY se o8Ses Soon : de Ryre above _ Sheol represent ove Voy Catach fem Fors — P-Mod Tramste® —o oe por . Ga nnet — Tromsintors, ® Sn te above desi Ghyle— Gometinaes Tromgutte om be marge te odventape @ Wwe Rye belas Sts? Symbolic JoTm Ves Umtoubr oy dragon volich — ComNER HAUS ve Wwyprmakon preset im a Stree di ~ Tue Symbolic orm Dy Qautuetes Tramaintos Mergiap Omd do ale read | txronloted to wos layout. MOS and BiCMOS cncuitdesign processes 9 (0) Dose maskiayot Figure 3-17 A1-biLCMOS shift register cell @®Design Rules and layout | objective of. Pesigar Rute. : Ae allow a ready translation — 6 Lveuct design — Concepts wouolly, dn stele a oY Symbolic Rey | shay Aas, Avkuotl Geometry a Boon, _ The deat mules dw We ehyective Awkerqete blo the Crewe ] systems destyrer omk Mee oloyitaciow — tagimeny ~ PA otk Aha Sider Aue wey Fore \roe on Veated iwkavest tu mahing AY Dw porcicuter toska 8 Od passible, us Des vulo® odkempt — te provida. ao werkable ond nralualole, Compronite tote Mw Aeviendty, Ao Wyott Sd whar Caveat peat Loomks 7 wows - Thee trvrurk Der aes tigutey , Smaller Loy ok Jor oo vp rroved, . Perry mon & om — deecrreated Liki Sten, Pe PCrkiMm SMSivosr, V8ondsT oA Pre lors ot Qebrt “ on vowdty a imeery Voants tue proters | Haoret Cet SAYS B28 ir Y¥wlos Was esule an a prot Controllable — and ceepro ds G BIE .LAMBDA - BASED pEesigw RULES *% 12: ape ese ye Lambda. LA) based Assion yuleg ore posed oq aaa work OF MEAD cmd Conway The design rules core bose om & Braghe _ poremekey » whith leads YO O& Srmple sek S\ roulos At The Ler ganar ond obese SCokeng OL Te dessus emote a lanced extenk . we Mere ah pots in od loyerS Wil) be dumensimed — D~ vwitt ow Subsespoutly a Cam be os Coted on opyyopyiat a. Vole Carpakilole wath Whe Seatuve Side th Rae ators OM pres, * Wr he owe Cortaph Wows AVodk eae atkek OSE Lox oud ALi Folees Little a ctont % due Nolet fubseqyembla allotated Ts We Qeoture Size , but Bae perro Ruler ore Sach thot) a Corre oly nv! ye Mok \oyots wilt Pre dace vost ht cancunts Feo aw rs ong, oy Nourse MMatted te A, , yw BRL wR Con pe ols ted oa Node \eo pm Seo ack LS KU Apesbur Sige ow CWP wilh be apm (2A me Design Ralo& Specdg re Line widlticg, Separations ond = Ravttendios In teray Or“The pes Pudes or Nhe wrdtes SP ee a Backing Paws | iver oe Shown pels (ae OK es MM oF cmos) ean anne a & wv - oe 3 xiowun Ms \ ye dite PAE we wn etol ; WH. Wiz” Sul» By WIM ULILIZA. = TT >» rS rLUMUiDi’W’WWCDWK - ve _, AMAA es fie, best | tn tuk eh eR orsion an parece wth Trovstes Loy nus eee ashe oe lee eee ee ent“> Mt pesige ules asgotiated with Contacts belioeen layerg eve = Slesen an Maw. Yoel D Mekal co Ply atiton He day i GB BA: seers 2A KAR Cuk Centered OW HAKAN Super tnpesed ommo§ loys te BE jomeld Ww alk Coxe? pale 2D Via (contact Arm mekal 2 de erckal | dnd eee a amen te stew layons a ——_ vie" 2A ema Seporat om B tat. ROHAKEA coer over lap with neko | AA RDA Ve ak Conteg - Conkacts (mood § Met) a uk Cmrack Cts om Diffs Aree Possible. approaches te de ik, y ao metoh Wen Metal to Di Xn Dee cot 2) Buried Contact Poy vo DARBR oor 3) Budking Cetace Cohy do DIR, os Mehl) & tortacts betmean Polynltan mMod UT TS 1, Narr Ore+ hmong Abe lost two ie 6 Bovied Lennie ond bale ie cswtack | “Tee, lpuvied contact ws the mett ee vend Bring - 2 Ecomonsy, da tpace & >) A Pelroble — Gsntadh m Putt i Contacts aye betome obSstute ond home been Super sedod by. buried = Cemback | CmMos dos so 7 Poly a BH Ustreetst 4 au mao . ore awe okuoogs mods Via vshem Making — Cavime. chtone boeean we moked owl earthen s Ae ota he legen We pr est wb, ods Mentioned be : Te 2h KR 2A Combate «ce twdh cokes On MR im vtuck the wr ide io fo be vemoved down fs We AS payee tm of Dior Sedat . + whan — deposittos the oratal loyey Pahes plow Ate abo an daprsited serps thee Crack et oad ot The. aes ones So heh Cmratt dn made. betoeayfe ved Contact ¢ —— — Bovially Loser s ore ound ven ow centack Ck emkemsing be Vr m ak diveckios eoround the Cowtact except Amar jhe tortact eat iXbensin qrcseared —' to QA im ALBARN potter oven An K2ARKR wuew with ake berries Orea is Ww bevied Contacte oppreach glusumn tn We ye Siepler thew batty cotach ~ te tenkact Ue (Broken Une) in Se Cake. mdicotes where tee tin eride nts be mrenved to “Teveol Ten SavYete, tus. Silicon woyer — bejere porgsilicor in Aaposited | = We polysitow » dapesi ed dtrect ly on Ae Ovdarelying oupitions wooed L &)~ when d7TNM takeg Plate impurihes wll difjuse, ante the Polysilicor os wets oy inte the Ahr “egitim within the Cartacd one + Borvied Contalts ore smaller Aw oe wen Anet oN Ruckking tmtacth & Since owe mo onto Layer , ore Subjected to evo er daa igo valor — Aestrichim ane Loy om . Paeok Cente ue AS Shown dn Bye when eR Brac Te Pays Gm VOIR touting — contact Oppresch , tue Proces® Jo ares more Complexe ~ A aX BA cUsctack cut in made down to each dy the loyers tro fee Jotun dk | Tue. loyers Ow purred te gettan tu Such weg Aa Anere, hee Cott Lats Lecome, Coatigoss, = Sint ue Polysilicom & DIFFOio =gutlues overlap om Ain oxide, undeY pelysilite acts oF a ros im ee DEST py ta, WE Polysilicm & ee loypny ore ale bathed te getion, Te tmtach ble We hee butking layers io Aacm moda boy. ~ metol overlay. ad Shun ian ReyPSintele feekid, mos PROCESS eyes ne didgusion ails tat a ——— Metel 2 Vid metal 1 = Cab -w- Rgebion 5 ee oN mired layer givet degree OY Aomecdem A Vop omd VES Cawrd vats 6% = omakek (ae wetel 2 Cavkactt . Qemeroly p od level metal eyes Coarser than te Aivsh Layer ord Solatem ae bees ee i oy oe ee a relatively oprenten Awad . mo dinttnquiblh — Coakactt bls SER 2S metol layers , ar Kham of Viog Yatey Aron Catach cats - ; a A Qaral Layer Representation i calor Coded dank blue (or purpl)Te protesd Steps Jer A 2" metal loyer protess “Ore byief 4 oolined below 7 Jun oride vero Aue Save wekal im wn wsited by * ext wok pou ¢ Cromart Co ' v wot Sapossnon't Cove) and we On Vda Layer pekinern Tre ereel Layer uo applied a Qiwarloh — MoMn2Rr, Glebe oreo, dy the orice % actonpished wo Plamen okey whidk Sorgrad te Wome Se lever Of veod i Col Ser Wporbardaenk co alas APY We om uwigerm ekda Takes, loyour Sete SP lew metal jer She Removal @ weble. wert pre teas gyrserk layer pre ers Ore x pro LH sitpe fer & poenekod Wape Pre tess, gk an oxide loyer om otk ent nf Be AYRE pedysties Lote Costly) te Sslate 2h rem tho, ee waaay DA poly lye (ecy 2) “We pretence on Poly Layer. giver Preater ‘ To whey bonmecrtond aloe olkewt Polya ean he Armed we wmtercectina Polya & Ai} psin often deposit rgHM PSeide qropnt ' , Carrucraved He CaWeye wen tes $ & more “gpte, Lojonr SPPLY Ll Kaan epee HE ouwin ont Sse ee emt 4 dromsistes tromslote to Conmectt 0 nodes ee derromsiotet steele Aspens eBay tek cereapend to “el pote x «| \ Groep eqreneeee 4 res popes we aes om Maye om _ p-Aswe ye be daaum . THe ~ — drawn pebisenn Yop omg to ole. ; oo “trate oles Veo amd to Op, vos ables one aed ee ww awe ile Voe Cc D vss SS. G7 * fu uminteoupted deqqurron Step i ip xo sill bony, FR twee eit Cohen, Pati, be : iw Cc dlingrom BiG, ewesEvley’s pate fe PAR Were oth madts aw Yaple sak, Awok each eds dy visited mete amd only mee, For Sogle Poly-stripe , ee se Somat vee euler patit in pulk ap vetworle omc pak door ut be Some, vop 4 Ves,Na f c & ac ° dlLeyouT piageans Sa pelos Shoot He SCR diagrom & The Rowe Loyouk Sov MUMeod Saye Aa Cou. | Nod 7% sx Ith ye WD put 4 BASE "ype | Ty, vss ; | oan 4 iy} ) ole SSS TESS HN? a> Rules 3k powell Cees — PROCESS SERA rarednan GA wells at See Potente ol (ae Ss Teste pure aust oil oases oli Qyeleted Winer by 3 eerniun, a BERS nak het ose mmaninnwum width= HA Pewdany pt mak Taina 4 AMIR OX © Se podotion yo Channel pt a et © odo om v From unresled @ spacers inex oO over tapJ Ons caw gabe a Xa ab VoD a p—-© ole, ot bo agers Anp > Series oR > Parctel PRETS wp - porallel oR - Serie?Maoh the, Ste. Micyran & Select with Th Ryne \oelsvd toy ot alegiom Qeria a wont auoble Genes olp = KAE + YAE 2 GATYDE Tun Stqule belme Brood the layout Nok ete Qa a ile nmosVLSE DESIGN MOPOLE 2 BASIC CIALVIT CONncEpTs , pestomeioe _ xthe wong up xs caveat alter place ww fa VOLO, Conductive layers votuich re Produced by tre mos Prcersing | dk a mecessery to be, cusotte df the resitive € Copacthve Choracterishts dy each layer. a ere Cortepfg Such 0d Shark resrrtamce Rs fy o Stondard Unik X Capaciten ce at welp greatly ay eroluat np tae eyed A wing fe fp lp Copactontes, he dolous orgotiatedt esti, TT th Anvestos & bihey Corcaithy moe be convtentently evaluoted — dutern } delay vatt om edu Hay chaptey , 9b speety, Ane Layers Jn Spm, apm, 12 FO despectively ao Sack layer hes beth wregintence. S% Capacttomce, Thode Components iw estinrting the, pesjsmonce a vnigem Slo Paramekert Values Fer ote, undomental % Garant, & ESISTANCE | Tn, tosis tance nr be expresstal oF Conducting materiel me ; = unre, te restive 4 Re eth * Sa he = A= HuACeness, . a to ows Roe ese 288 ee 5 = wid ondancter, peas ren YL cenduetey mentary | a Raw nr ‘ ee yerinton® os juicknors imerenses + lov wire how wnereazs vrexdrtanc, dacreased , Trio implies thot tack wi y wire Capocttencss Vue vesintom ce decreases Rag ct =Rs [> Bee coe 20 tos Poly Silicon (sreiso arto GS Rohsheck ~wepiviante Contant applied te mes transdets fy = ced erred enthoutereud Trawsinter — > Chawnel ps Lb sity a ¥ke ~ ay 5) v R= lok Reestante Concept applicd Sheet ww wes iwertey : Resistance Col Cutotion . é + pulldown reakto pel ve mar} Zte a rus BS OEE own ake" Z pd 7 Lope 7 Rpu.= Roe = Bes Lo ean pu. = Yok Tl static on Tesintonte, aa = SEA t On AMES iwvesrted iS Row (von te: < Rew= ReutRpd = HeKA+iskKn = Soke a (D CmeS fnverter : Resistance CAleulatrm — — Fer am, cmos inverter the ‘Tokio tule doesnt “pely ond there to mo “Fesetrtom ee. jrem Vop to ves | Under etetic Condi ti ms, deromointcs Will be off one Op the he wesurtomce = 10, Static Power dassipalin ple on He BAL 2 AGEN [Proz 2ska] an xen porx 2A ~ Io ke adv = Pru tRpd = 25k4 tloka = 23k Gyers The Capacitor cet cursociated Qevmed by ynterConne CHton4 Coe _ Te Fotet Capeccitomce on sum A Gore Capacitance capacitance. ‘h mos chewitet & votth yactab , pelysili we olp & & cme Gete in The Aivwior “capaci tonhie Cam Colculote aren Capacitance, Ae aw Krmei we dielettric. MWicewett ye bayer , Tous who Tnieknest S102. fe trea Plates Relative. Permeckvit Sio, ad evi QS Caee Z 2G 2 Goes 29 B94AIS Elm At 385 4R15 Fl Lares Con Abeelate POURVITY Tupilal area Capadtamc = B25 bxto rE lM ry pi on Capactemee Fer aLiqetnt mes layer? ore Capaci tornte Valo RTE Sum ratio weit Bx Tex we yi W7SA 4 | yeqs Rta Bare oi ob xist losis wy lor B3xtat |p 3367 Gate to chomnel Diggin te Substrode Polysiticar te Substrte meked 1 substret]e Mekol 2 te Substmie Meret 2 ‘te wexobl metal 2 te RetySHLCR “Typital one capactinn és values Fel mes Ctycuits ea gromdard Wet Ff capactence 11% ee ne ae t Gomory Mae, — Capact tenn ce By clamsted 0 © amd He Unit an clemered Farad , Te gonad too lange mit ervables welts Vike Mtwve qorad Cur) & Pile pened CPED Wert Wee wed. aR mes cholo} pf, Caprcionce unit io demabed es Sqpene, Coq) & » cepnet a we pe chammel Capacitance va Meh kramsister WOUng usrdlte (sy = Venger (1) = Jetre Se “eqemotond” oF Jeokure SiZe Sf MOS Here Syme oo Axanetey + Te 0 many be ebauated Fee MG pact process for Ek? For _ShM mes Cree ts er ees) ~ Shm RSM = 2spm ren. | stamdard S5nrre V : a = trea minimum S13e srominter Copaciten ce, Value. = Uxis PF] MM awa Stomdand Vel ey = aSemrhx uxt PE fam = Doler Foy __2H™ Mos cine tS sfrea] Stondard equate 2 ABMK DKS Perea capacitem ce. Vals = &% to PR] M2. an Stmd vaue Dogs Cra Brist PF jum? xe HM F_b2hm mos Creutts roomare Frea] Smadar d square = haber [2 -me tet Feat” Capacitom ce. Valse, = lexio—4 Pel ° fram 2 ya ai mad odd Value Db =o 002" 1002 3/FSome Aecr Capereidonce — Gerlentatians a Fie, eppreneh, may be demonstrated Hsing A bored geometry The Caltatatim ni Capaetton ce, Valued a” dene, 4 estab lishi the, ratio ble x wreo dy whens g the, lea Stendara | gete L2AR 2A ow A bared Teles), and outliplying thir vetto Toy the Ap preRimate — Xelatt he C Value, Som fable qua Product a Me, Reyureet Capacidin Cc, in a Voit, Ex: Simple. avea 9 Capacitance, Cale 4710" ei slop. ate 2 a a LE RON PIE 8 wae, e we mush Catecclate : S ghswn above. YS orsicey The BFE : me te, Be Relate orca te Mat Oo Stomaard Ye Relative. avea. = 2oARBA = trea Qinterah GOA Lag “Dae rea o} Stemdord gate AF we - . fs | mt Ye mening oan & Helene Co vole . Gyaciteue fe substate Jos x eos Ge MES Oy estat Capecitanc, . B ay stms trea x (ca AY metal | to substrate ] Subs tra. QoARSAD(O+2 K 107 FPF [MO) GOA® X O62 x oY pplaeu® => A= aspm™ Cm = Ox (a5 xis) * x OB KIS FPF fame [ene cen 277] > ems v-025 ey oa ¢ Reg L=®=QA= Sum tre Abe defined oten ty metal hos DK Capacitance. cto Subshaye ITE meg that Q a Agate Sige saprare Fre ea we a. Poysilicon Consider tre Some crea dn Polystli con : al Ces Capacitance, oe Substrates Area x a} pely do ef selstrte = baby oy mista Fp O, Stendond unt = eps o-o1s Roispa or NG = FS OIG Boone type dizi hisg > 2pm . = osé63 . Capacitance, dp Subttngs 240 S63 0G > r2Km, LL ee iy, FISK 209 ed = 3780 5 Surry CAE CAA tres hea a clip te Substrate > Bex Gis pap x [Nis HPF/em = 0037573,ea ga stondard wt = 29375 ct 2 SIsy cA 5 aa cA 804 Qu ods BS2IN GP rapH Nott! The Aelati hi Ca porcitan ce, Velies. dig Um Layer even thagh Pheripherol Capacitame hos mot been allowed fr. Ko may wacrease total drppustov Capacrtame ste Considnably cere thom the aren, Capaciten@, coleutated Clewbate jae Capacitama do Substrate 43 tae, FrolLswi Aer represents Ci) metal! @) DIRQ wIE® @) Polysitecm |) fal 2, rhe CS Capacitente ~ trea X Ca Q Mekal ‘fo Sab y «T= Q0n? SOS KIO PF] nt X LOA KOA = BOA™ F 03 KUT PF fmt CW) Diqasion 2 Bo x GS HT N02 MVE pit Cm.= core? AME Cpmctonce = trang Ca ay OME SESE eg 2 FOS, Tsu TO ‘Substrate’ Oo} = 5S x Ye, 00s pa qe CAs O05 te (ae) ACs oor ay SoG. oe > are a Cpe prea we CA SY polysricm to Subst Z = So F OB’KwTT = 20, i) sist? Substrate co Lem cm, = fren ® CAS Meret a fe “ews = Sour ore <1dG Calculate aren — capacttomce, Values argecrated with ctrachores occupying MOTE Amon One (Oyen - ee oy NN cur? , a « Oe Hes Be ned > ANIM, 4 & vA Sol” metal | an = oS pe Fate EMS NCEA A matt to Sets) = NPA BAK OZ AICS = BOR PS he x wee hy CAD eetystltee = £6259 y ihe amt s x eto LG Cpe trea Capacitor Ce yom Poly ae Subs tre a[GAR& a +1A *DAD + QAR 2ay}x ore (Ce +244 A> K obRiet PE Jetand OSS tyWate & fren x Capacitance, Trem aakt. te Chomnel 7. = Ay waist pF) m>. Tojal Capacitance = cm beet CF SWSDYtOS9 DQM OCs pelay vit ST Time Corstant- = Cres Cnchannel ) x 10 GD Seconds Zs = electro —“hamsit fire, From Sorte, to Dain s Le Fn Ve Vay vores 0 Cy Changer From ovelts te G3 Q Vor om fon wr SF BM Technoloyy : = ae a 2 ta = Le Lespum pre 6S ty Sec. Bavde Vela = BY. Th ° 2S -$e0 25 Pm SEC tg Ty beg cmb bso cmha au pig nsec Thin 12 Vos ihem ——S Clete fo the. HluorttiGal Rime Const T Coleutated ot Previaal, The -tromade poink om imventey =H oSVpp With do ckete te Ob3Vpp . We tromaiot time (Teg) amd time Constant (cd Con be vised inte — Cnomgeabl The shay Capacitene Values Oe oon wdlowes Tam drbling the thasrihital Valued Coleuate d, Tednolypy delay unit Cc) SHm_ > oansee SS loage Copaci most tee om chip fo Thm > o2n See ve U 1-2 Kea > o-lntec Ress wt : ip destinations , ike. Copaohve Lercly, 4 atypical Yt chap capacihve. Lsacla (er) will Woe very empored to OM chip Capacitemce, [ cicg] values. Jor ex. EY Ee YY HP twad wm clemeted ay crm tek 1c ued to Tromsnat Scredo rem cy en Clearly Capacttomce, Le eA tomce- quo orden munk be ave tH oterurse, Ew Ces wely dotoys sill occ, Sn dave ath [sods THe Np mest Provide, aw lor verintow le York , vterise TF RCL will oe Lange. aim aloe Vetemes excessive » Te dacyeor Ane tence, VOX Ge. Werensd a puk 2% OS oder imewenued tan ate aren Wwereases Ee Qate capaci tan abe increas? Thin Compe cy woke the crate chonge, ily voltage Slswser Miah wer probiem ty we Reed to deuve a lorge Capacitive Lead the catubion Genmotyic Cortada. Te fe Cus Mae. ikeonn ust GREOh cach stage Jr larger that Previos by a, wh oe iMverterS ap Pavers * ne Tate ded ty drive rr Capacttire Leacls must cs te Present Cao pullup i Purl -deum Retin tante | EAS the, vote re Mevewes Se We Capacitive Leacl Presented ac Hee Upak UMCreased, amd” HUL ooren occupied imewared, too ye the vate ab which Abe idl” Lneremer ( ie The Value OY) will ingluene the Mamie A A tages eslrieh cote te dxwe a perttelan vatter gC, \- with Large 4, Nu decreases fut deloy Pea chee imerense> | For Wi ames 1 Inventors ri na : Delay per per sta. = gov LR 0 te 1 trom tm oy 'e ‘¢ aia Lite tvomtion 4 ile. a mule ve uy. co an Logic: a Totak delay Pey ames pay =Sht. Bn a SWilot Mannan ik Can Pe deteteingd tot the Delay por cmos Party = The Nek: era Comma ng Lala) = wi ne LOYD TO). case : Fence ee Oe gy mmet raventer CH 10) Total pelo = » (80) = aig NAT (HED -O a % (10 = BENT tem) -@ SH EP Me eG relay ac spo = WO ae [eNED) Se F CPeMES dhs value @ Me x makural \egecrithnd) cack SIOGE Sh be apmexinately eq tines wider Than iff prede cessor. r mun avuming SE we tata), bey) = ity Oty, tal wet) [Rey ce ex n= & OD]