Professional Documents
Culture Documents
25 Tribology of Nanostructured
and Composite Coatings
Ali Erdemir and Osman Levent Eryilmaz
Argonne National Laboratory, Argonne, Illinois
CONTENTS
25.1 Introduction
25.2 Recent Advances in Deposition Technologies
25.2.1 Hybrid Deposition Processes
25.2.2 Control of Process Parameters
25.2.3 Modern Coating Practices
25.3 Structure and Mechanical Properties
25.4 Tribology of Nanostructured and Composite Films
25.4.1 Self-Lubricating Nanocomposite Coatings
25.4.2 Superhard Nanocomposite Films
25.4.3 Nanostructured Carbon Films
25.4.3.1 Nanocrystalline Diamond Films
25.4.3.2 Nanostructured Carbide-Derived Carbon
25.4.3.3 Nanocomposite Diamond-Like Carbon Films
25.5 Novel Design Concepts for Self-Lubricating Nanocomposite Films
for High-Temperature Applications
25.6 Summary
Acknowledgments
References
25.1 INTRODUCTION
In recent years, there has been an overwhelming interest in the production and widespread utiliza-
tion of multifunctional, nanostructured, and composite coatings by various industries [1–4].
Specifically, increasing demands for greater power density, more compact design, better reliability,
lower fuel and material consumption in numerous advanced tribological systems have increasingly
necessitated the use of such coatings to achieve greater performance, longer durability, and higher
efficiency. For numerous applications, nanostructured and composite coatings can make a huge pos-
itive impact [5–7]. Because of their superior mechanical properties (in particular, superhardness and
supertoughness) and high chemical inertness, these coatings can significantly lower friction and
wear losses and at the same time increase resistance to fatigue, erosion, and corrosion, which have
increasingly become the life-limiting factors for mechanical components in many industrial appli-
cations. Such coatings can also provide greater resistance to contact deformation and damage dur-
ing heavily loaded rolling or rotating contacts [8]. Their isotropic, nanocrystalline structure may
provide higher load-carrying capacity, greater fracture toughness, and hence better resistance to
crack initiation and growth under both normal and tangential loads [9].
Production of bulk nanostructured or nanocomposite materials (metallic, ceramic, and poly-
meric types) was demonstrated a long time ago and the superior property and performance charac-
teristics of these novel materials have been demonstrated under a wide range of application
conditions [10–13]. In particular, ceramic-based nanostructured or composite materials have
recently become very popular in applications that range from microelectronics to transportation.
One particular concern has been the relatively high production cost of nanopowders used in the
making of actual parts and components. Nevertheless, several kinds of nanostructured ceramics
have recently been produced and offered for use in automotive, machining, and biomedical fields
[10,11]. For example, production of high-strength springs, ball bearings, fuel injectors, and valve
lifters for demanding automotive applications has been demonstrated and their superior chemical,
mechanical, and tribological properties have been verified. In the near future, nanostructured ceram-
ics are expected to find more application possibilities, especially in biomedical field, cutting tools,
sensors, fuel cells, electronic substrates, wear-resistant coatings, optical materials, and catalysis.
Production of nanostructured and nanocomposite coatings is realized by using a wide range of
vacuum deposition systems, which have been in existence for many decades [2,3]. These coatings
are much cheaper to produce than the bulk nanocomposite materials. They can be applied on most
ceramic and metallic substrates with strong bonding. In fact, with recent advances in surface engi-
neering and coating technologies, the application of nanocomposite coatings on all kinds of sub-
strates became very easy [3,14]. Some of the most recent nanostructured and composite coatings may
combine superhardness with self-lubricating properties and they are extremely well suited for
demanding tribological applications. For example, recently developed nanostructured carbon films,
such as nanocrystalline diamond [15] and carbide-derived carbon [16] as well as nitride, carbide, and
boride-based multicomponent nanocomposite coatings [1,2,17], can dramatically increase hardness
and hence reduce wear under harsh sliding or machining conditions. These novel coatings can also
offer superior mechanical, optical, magnetic, biomedical, electronic, catalytic, and surface acoustic
properties that can be very useful in a wide range of advanced industrial applications [2,18,19].
In some of the current applications, the use of liquid lubricants is no longer desired, mainly
because of increasingly tougher environmental regulations [20], whereas in others, steep variations
in load, speed, and temperature have become a routine operating condition under which current
materials or coatings fail rather rapidly or wear out quickly [21]. For example, dry machining and
hot forming of machine parts and components are much desired practices in today’s manufacturing
operations, but they are currently very difficult to realize, mainly because of high friction and severe
wear losses in current tool materials and coatings [19,22,23].
Nanostructured and composite coatings can be formulated in such a way that they can substan-
tially increase the load-bearing capacity of sliding surfaces and hence improve their resistance to
scuffing as well as adhesive or cohesive failures. Some of the innovative design considerations for
multifunctional nanostructured coating architectures include nanograde, superlattice, or multilayer
films, whose properties are specifically tailored to meet the stringent application conditions of
advanced tribosystems [2,3,24–27]. It is also possible to design nanocomposite coatings that can
form self-replenishing and self-lubricating tribofilms on their sliding surfaces and thus help in
increasing the overall lubricity of these surfaces [3,28]. One can also design a multicomponent,
nanocomposite film that can adapt and follow the changing operating or environmental conditions of
a specific application. For example, in such films, while one component provides lubricity, a second
or third component may provide wear resistance; alternatively, while one phase is active and provides
both lubricity and high wear resistance at room temperature, a second phase may become more active
and provide lubricity at high temperatures [29]. Figure 25.1 schematically illustrates some of the
design architectures that are possible for most popular nanostructured and composite films [3,30].
Recent experimental studies have shown that some of the key advantages of nanostructured
coatings over conventional coatings for tribological applications are superior mechanical hardness,
resilience and toughness, high resistance to fatigue, oxidation, and corrosion, lower friction, and
greater tendency to produce lubricious tribofilms on dry or marginally lubricated sliding surfaces
[1–3,7,17–19,26,27,30]. Some nanostructured coatings are specifically designed to promote the for-
mation of such low-friction tribofilms on sliding surfaces [7,31]. Such nanocomposites are often
referred to as self-lubricating and they are well suited for green machining and manufacturing appli-
cations.
Liquid lubricants have existed for centuries and have been perfected over the years to provide
the levels of lubrication that we appreciate every day while we drive our cars. The additive package
of these lubricants has also reached its limits and further optimization does not seem feasible or will
not really make much difference in the friction and wear of those sliding surfaces that are subjected
to heavy loading or high operating temperatures. However, it is possible to design new nanomate-
rials and coatings around the existing liquid lubricants or additives to achieve further improvements
in lubrication [7]. These coatings can be regarded as smart or adaptive tribological coatings because
of their excellent compatibility with, and favorable response to, the lubricated test environments.
Such nanocomposite coatings may further be optimized to provide low friction and wear even in the
near absence of ZDDP- and Mo-DTC-type additives in future liquid lubricants.
This chapter presents an overview of recent advances in the fields of superhard and low-friction
nanostructured and nanocomposite coatings that have attracted a great deal of interest in recent
years. When applied properly, these coatings can exert a huge positive impact on a wide range of
industrial applications, including manufacturing, transportation, aerospace, information technology,
and biomedical fields. Specific examples are given to demonstrate the superior performance and
durability of such novel coatings under a very wide range of mechanical and tribological conditions.
The major emphasis has been placed on recent developments in the production and uses of super-
hard and low-friction coatings. The fundamental tribological mechanisms that control their superior
friction and wear behaviors are also discussed. It must be understood that the application conditions
of future tribosystems will be much more challenging than in the past. To meet these challenges,
researchers must develop more exotic coatings that can further improve durability and performance
and at the same time self-adapt to the increasingly harsh and rapidly changing application condi-
tions of future tribological systems. Ultimately, it will be extremely desirable to design or discover
a universal nanostructured or composite coating that can work under any application conditions.
However, the development of such a coating is still far in the future and perhaps is hard to realize
with existing technological capabilities.
2 µm
FIGURE 25.1 Schematic representation of various design architectures for nanostructured and composite
coatings.
In the following section, we provide a short overview of recent advances in deposition tech-
nologies that are used in the production of nanostructured and composite coatings. These advances
were essential for the design and development of several nanostructured or composite films. This
will be followed by a review of structural and mechanical properties that are most relevant to and
important for tribological improvements in various application fields. Tribological properties or
performance characteristics of such coatings will be reviewed next. Finally, future prospects for
such films will be discussed, with emphasis on the development of next-generation coatings that
may combine supertoughness with superhardness and superlow friction.
Ar
HTC-1000
Two axis
One axis
Three axis
I
Cathode
(a) (b)
FIGURE 25.2 Schematic layout of multi-target (a) hybrid magnetron sputtering and cathodic-arc PVD sys-
tem (courtesy of R. Dielis, Hauzer Techno Coating) and (b) closed-field magnetron sputter ion plating system
(courtesy of D. Teer, Teer Coatings, Ltd).
materials before film deposition. The use of hybrid processes is most ideal for the production of duplex,
multiplex, or superlattice coatings. In these processes, the physical shape or architecture of conventional
deposition systems is not greatly changed, but additional targets and appropriate power sources are
added to enable coating deposition by one of the methods alone, two or three of them in sequence, or
altogether. For example, in the production of nanocomposite or multilayer Cr, Ti, or W, and carbon
films, sputtering and arc-PVD techniques (see Figure 25.2) may be used alone or simultaneously
[44,45]. In essence, the nanoscale Cr layers are alternated with those of carbon, (see Figure 25.3a) or
Ti or W grains are imbedded in the amorphous matrix of diamond-like carbon (DLC) film, as shown in
the transmission electron microscopy (TEM) images in Figures 25.3b and c [46,47], respectively.
In recent years, multilayer coating architectures have become very popular. Because of their
layered structure, these coatings provide much better fracture toughness, higher mechanical hard-
ness as well as excellent tribological properties to the coated parts and components [1,2,9,30]. By
employing an innovative design approach, one can also produce a coating that may allow machin-
ing or manufacturing under application conditions that are dry or marginally lubricated. Elemental
or chemical ingredients used in each layer may themselves become lubricious, thus enabling tools
to operate without external lubrication [48,49]. These coatings may also have direct implications for
other fields such as transportation and aerospace [7,29,30]. In the manufacturing and transportation
sectors, the reduction or even complete elimination of some oils or oil additives is currently being
considered (mainly because of environmental concerns) [50]. Coated machine elements with self-
lubricating capability can certainly make a huge positive impact on such applications.
10 nm 5 nm
(a) (b)
10 nm
(c)
FIGURE 25.3 TEM images of (a) nanolayered Cr/C (from Hovsepian, P.Eh. et al., Thin Solid Films,
447–448, 7–13, 2004, with permission from Elsevier), (b) nanocomposite Ti/C (Reused from Meng, W.J. et
al., J. Appl. Phys., 88, 2415, 2000, Copyright (2000), American Institute of Physics), and (c) nanocomposite
W/C:H films (courtesy of Hauzer Techno Coating).
carbon films in which carbon makes up the matrix while nanocrystalline phases of transition metal
carbides are produced as dispersoids within the amorphous matrix [62]. Microwave CVD, which
uses a hydrogen–methane plasma, is used for the synthesis of diamond films at very high tempera-
tures. The same method is also used to produce nanocrystalline diamond films with grain sizes in the
range of 2 to 6 nm; in this case, hydrogen is replaced with argon in the plasma [15].
Most of the PVD and CVD methods mentioned above can be scaled up and used to achieve
large production volumes. However, extreme caution is needed to make sure that the quality of the
coatings is repeatable from one production run to another, and that deposition rates and tempera-
tures are very stable and fairly uniform across the workpieces being coated. With the use of hybrid
deposition processes in one system, much greater flexibility has been achieved in the design and
production of novel coating architectures. In particular, hybrid deposition systems based on
cathodic-arc and magnetron sputtering have recently become very popular. These methods are used
not only to clean substrate surfaces effectively but also to form a graded interface that can lead to
strong bonding [56]. Multicathode hybrid deposition systems are currently used for the production
of nano- or multilayered coatings that can provide very low friction as well as very high wear resist-
ance in sliding bearing applications. Such coatings can also provide greater durability when used in
machining or metal-forming applications [19,27,63].
ZrN
W
A = 2.1 mm
ZrN
W
4 nm
FIGURE 25.4 High-resolution TEM image of a W/ZrN nanolayer coating after annealing at 1000°C for
1 h. (From Barnett, S.A. and Madan, A., Scr. Mater., 50, 739–744, 2004, with permission from Elsevier.)
Another popular design strategy for nanostructured coatings has been the production of truly
nanocomposite films by using a hybrid PVD or CVD system. A typical nanocomposite coating
architecture includes a nanocrystalline phase surrounded by an amorphous carbon and ceramic or
metallic phase [1,2,5,24]. The amorphous and metallic phases are kept at very small volumes and
selected to have a strong chemical bonding to the hard crystalline phase. It is also possible to have
more than one crystalline phase imbedded into the amorphous matrix, or both phases made of dis-
similar crystalline phases. The yield strengths of such nanocomposite films may far exceed those
observed in the bulk crystalline forms of either single component or even of their bulk composites.
Some of the major factors that can influence mechanical and tribological properties of such
nanocomposite coatings are size, shape, and orientation of nanograins; surface area and thickness
of grain boundary phases; residual stresses; and stress gradient across the overall coating thickness.
In recent years, several theoretical models have been proposed for the many superior mechanical
properties (in particular hardness and elastic modulus) of nanostructured and composite films. In one
of the theories, Koehler has proposed that the dramatic increases in hardness of nanostructured coat-
ings may largely be the result of the fact that dislocations are elastically repelled at grain boundaries
and hence plastic deformation is hindered. In another theory, the Hall–Petch relationship has been pro-
posed as the major reason for the superhardness of nanostructured coatings. According to the
Hall–Petch equation (i.e., H(d) ⫽ H0 ⫹ Kd⫺1/2), the yield strength or hardness H(d) of a polycrystalline
solid is related to its average grain diameter d (while H0 and K are material-specific constants). In gen-
eral, the smaller the grains, the harder the material. In bulk materials or composites, this relationship
may be valid down to ⬇ 0.01 µm grain size, but beyond this, the hardness may decrease (mainly
because of increased grain boundary sliding). If the grain boundaries of a composite material or coat-
ing are engineered to be very strong, these materials or coatings should provide high hardness values,
even at grain sizes less than 0.01 µm. Table 25.1 presents the chemical composition and mechanical
properties of some of the nanocomposite coatings developed recently by various research groups.
At present, several nanostructured and nanocomposite films that can provide hardness values
well above 40 GPa are available and they are referred to as superhard coatings. In this case, the
grains are in nano domains (i.e., 3 to 5 nm) and the grain boundaries are decorated by a very thin
(one or two atomic size), immiscible but strongly bonded phase [2]. The same effect or superhard-
ness can be achieved by producing a nanocomposite film in which two or more crystalline phases
may be present and strongly bonded to each other at the grain boundaries so that grain boundary
sliding is very difficult.
TABLE 25.1
Chemical Composition and Mechanical Properties of Some of the Standard and Superhard
Coatings Developed by Various Research Groups
Average Grain Hardness ⫺v2))
E*(E/(1⫺
Coating Size (nm) % Cu (at.) H (GPa) (GPa) Ref.
Zr-Cu-N 38 1–2 55 395 [67–69]
Zr-Ni-N 6 4.1 (Ni) 57 430 [70]
CrCu-N 70–90 1 35 [71]
Ti-Cu-N (J.L. He) 22 1, 5 30 [72]
Al-Cu-N 9, 5 8, 1 47 313 [69]
Zr-Cu-N 10–15 23 23 250 [67–69]
Ti-Cu-N (J.L. He) 5 12 10 [72]
ZrN — 0 16 [68]
TiN (J.L. He) 22 0 23 [72]
nc-TiN/a-Si3N4 40–60 ⬎500 [52,74]
nc-TiN/a-Si4N4/a-TiSi2 ⬎80 [52]
The unusual hardness properties of nanocomposite coatings are almost impossible to achieve
by using simple rule of mixtures. For example, some of the recently developed nanocomposite coat-
ings (such as TiN/Si3N4, Ni/ZrN, Cu/MoN) exhibit hardness values higher than 40 GPa [1–5] if
each of the phases that make up such a composite coating was considered; it is obvious that the
composite or combined hardness of these phases must have been much lower. However, it has been
proved that these coatings exhibit hardness values two to three times higher than the phases of
which they are composed. In general, it has been well established that, by the selection and proper
use of metallic or ceramic phases, it is now possible to achieve very soft composite films that exhibit
hardness values less than 10 GPa or coatings with hardness values greater than 50 GPa. Briefly,
nanocomposite coatings can be designed to provide tunable mechanical properties.
In addition to superhardness, fracture toughness of a coating is very important, especially for tri-
bological applications where high normal and shear forces are present [9]. Hardness alone may not
provide the level of protection that one needs in a sliding contact or machining application. Sometimes,
high levels of internal stresses within the films may partially be the reason for superhardness observed
in thin coatings, and such a situation may be detrimental to the fatigue and wear resistance of such coat-
ings. Recent experimental studies have confirmed that most nanostructured and composite coatings
possess relatively high fracture toughness [5,75]. It is proposed that their nano-size grain morphology
can provide an ideal condition for resisting crack initiation. Even if a crack has initiated within a grain,
strong grain boundaries can arrest or deflect it back to the grain and hence prevent or retard crack
growth. Overall, superhardness and toughness are quite achievable in nanostructured or composite
coatings by producing high-strength grain boundaries and by controlling the surface and interface
energy of nanograins, and the extent of texture, residual stress, and strain throughout the films.
In recent years, many researchers have concentrated on the design of a novel nanocomposite
coating that can rival the hardness of diamond. To realize this quest, several complex coating systems
that consist of more than two phases were explored. Most refractory nitrides with little or no misci-
bility with each other would satisfy this condition. Such a coating system was recently designed by
Veprek in the form of a nanocrystalline TiN phase imbedded into an amorphous Si3N4 phase and in
an amorphous and nanocrystalline TiSi2 phase. The reported hardness value of this coating was more
than 100 GPa [76,77]. Several other coating systems (such as (Ti,Al)N and VN) that exhibit super-
hardness were designed and produced in several PVD and CVD systems by similar approach.
Beside high hardness and toughness, strong adhesion between film and substrate materials is by
far the most important prerequisite for most mechanical and tribological applications [78]. If adhe-
sion is poor, coatings rapidly delaminate under the influence of high normal and shear forces of
most tribological applications. Poor adhesion may often be the result of high residual stress or stress
build-up at the film–substrate interface, inadequate physical and chemical intermixing, or poor
mechanical interlocking at the interface. In most tribological applications, adhesion determines a
film’s endurance life, load-bearing capacity and, hence, effectiveness in such applications. With
recent advances in the field, it is now possible to achieve very strong bonding between thin coat-
ings and their substrates. Arc-PVD and high-power pulse magnetron sputtering can provide an
atomically clean surface and promote high levels of inter-diffusion or mixing between coating and
substrate atoms at the interface and thus ensure strong bonding. However, there are a few excep-
tions. Despite their superhardness and very attractive tribological properties, cubic boron nitride or
some of the coatings based on B-C-N still suffer from poor adhesion and high internal stresses [79].
Therefore, these coatings are currently not widely available for commercial use.
In most tribological applications, operating conditions may involve high temperatures or aggres-
sive environments. Therefore, tribological coatings are expected to be chemically and structurally
benign to routine variations in ambient temperature and environment. In certain applications, high tem-
perature is often generated by the high speed of the sliding or machining operations. Under the influ-
ence of repeated sliding passes, nanostructured and composite coatings may undergo some structural
or chemical changes, which, in turn, lead to gradual degradation of their mechanical and tribological
properties. During operation or use in open air or aggressive environments, some chemical changes are
expected to occur in certain coatings (especially at or near their sliding surfaces). Despite being some-
what inert or chemically stable, these coatings may oxidize. With increasing desires for dry machining
and high-temperature metal-forming operations, chemical and thermal stability of coating systems is
becoming much more important than before. Doping with Al, Y, Ce, etc. seems to help in retarding the
oxidation process and hence increase wear-life of tools and dies used in such applications [79].
Cracks along
columnar grains
(a) (b)
FIGURE 25.5 Fracture morphology of (a) conventional MoN and (b) nanocomposite Cu/MoN coating.
0.15
Test conditions:Load: 20 N, speed: 0.01 m/sec,
Temperature: 22°C, Pin: M50 steel,
Lubricant: 10W30 engine oil
0.1
Friction coefficient
0.05
M50 steel against Sn/MoN nanocomposite coating
0
0 5000 1×104 1.5×104 2×104 2.5×10 4
Time (sec)
FIGURE 25.6 Friction coefficients of steel sliding against steel and steel sliding against Sn/MoN nanocom-
posite film under boundary-lubricated sliding conditions.
and self-lubricating secondary films on the sliding surfaces and thus provide much lower friction.
Figure 25.6 shows the frictional behavior of a nanocomposite Sn/MoN film under boundary-lubri-
cated sliding conditions. When compared with an uncoated steel surface, the Sn/MoN coating pro-
vided a much lower friction coefficient. It is possible that such a reduction in friction is due to the
low-shear-strength Sn phase in the nanocomposite structure. Sn may have also reacted with addi-
tives in oil to produce a low-shear boundary film on the sliding surface.
composite coatings were also produced on sliding surfaces of various engineering components and
used to combat friction and wear, especially at high temperatures [84]. Several other composite coat-
ings that consist of graphite, molybdenum disulfide, and hexagonal boron nitride (HBN) were also
produced by plasma spraying or electroplating methods and used to achieve better mechanical and
tribological properties [85]. The development and use of thin self-lubricating nanostructured and
composite coatings are imperative. Nanoalloying of thin coatings with special metals may also lead
to superior tribological properties for more demanding tribological applications (involving severe
application conditions such as high speeds, loads, temperatures, vacuum, etc.).
In the past, a series of alloying ingredients was introduced into conventional coatings to improve
their mechanical properties and environmental compatibilities. A prime example is self-lubricating
MoS2 films, which have found numerous applications in aerospace and a few other areas. Some of the
alloying elements or compounds used in such coatings included Au, Ni, Ti, Pb, C, TiN, PbO, Sb2O3,
etc. [86–89]. Tribological studies have demonstrated that when alloyed properly and tested under the
right conditions, such alloying ingredients can substantially improve the mechanical and tribological
properties of MoS2 films. Alloying of MoS2 with Pb, Ti, Ni, Fe, Au, and Sb2O3 leads to film amor-
phization or nanocrystalline structure, which, in turn, further reduces friction and substantially
increases film wear life [86,90]. In recent years, electro-less nickel, chromium, and nickel–phosphorus
coatings that contain small amounts of nanoscale graphite, MoS2, PTFE, and diamond particles have
also been developed and used to achieve relatively thick films with self-lubricating properties [91].
Since the early 1990s, interest has steadily shifted toward the production of self-lubricating thin
nanostructured and composite coatings. It was felt that, with the design and realization of such coat-
ings, greatly improved tribological performance may be feasible. Conceptually, the approach was
similar to the conventional methods used in the production of bulk self-lubricating composite mate-
rials and coatings mentioned above. However, structurally, the individual grains that make up such
coatings are on the nanoscale or mixed homogenously within the produced layers. Chemically, such
coatings may consist of soft and hard nanoscale phases (such as metal carbides, amorphous or crys-
talline solid lubricant phases) that can provide high fracture toughness, high load-carrying capacity,
low friction and high wear resistance in sliding contacts [3,29–31,92]. In such coating systems, the
hard carbide and carbon phases may provide high hardness and hence wear resistance, whereas the
relatively soft solid lubricant phase may provide low friction and high load-bearing capacity.
The soft solid lubricant phases in self-lubricating nanocomposite films may be selected from
graphite, HBN, and transition metal dichalcogenides such as molybdenum, tungsten, and niobium
disulfide or diselenide. These lubricants owe their lubricity to a layered crystal structure. As illus-
trated in Figure 25.7, the crystal structures of these solids are such that while the atoms lying in the
same layer are closely packed and strongly bonded to each other, the layers themselves are rela-
tively far apart, and the forces that bond them, e.g., van der Waals, are weak. When present between
sliding surfaces, these layers can align themselves parallel to the direction of relative motion and
slide over one another with relative ease to provide low friction. They are used extensively in vari-
ous tribological applications. Among the dichalcogenides, WS2 and MoS2 have been used as single-
component thick or thin coatings for solid lubrication purposes in aerospace mechanisms [29,89].
In inert gases or space-like environments, they can provide friction coefficients as low as 0.01.
However, their friction may become high or fluctuate significantly at high temperatures and moist
or oxidative environments. WS2 is preferred over MoS2 when applications involve relatively higher
temperatures. Selenides of W, Nb, and Mo may provide higher temperature capabilities than their
sulfide analogs, but they are very expensive for large-scale applications.
The dichalcogenides mentioned above have been used as self-lubricating components in nanoal-
loyed or multicomponent tribological coatings. One of the nanoalloyed films is based on the MoS2
and Ti system and is produced by the closed-field unbalanced magnetron sputter ion plating technique
[31]. Figure 25.8 shows the typical friction behavior of such a film in humid-air and dry-nitrogen
environments. This film is much harder and more wear resistant than the single-component MoS2
films that were used for a long time by industry for solid lubrication purposes. The friction coefficient
0.1
Test conditions: 5N; speed 0.1 m/sec;
440C Ball diameter: 10 mm
0.08
Humid air
Friction coefficient
0.06
0.04
Dry nitrogen
0.02
0
0 1000 2000 3000 4000 5000 6000 7000 8000
Time (sec)
FIGURE 25.8 Friction behavior of MoS2/Ti coating in humid air (40% R.H.) and dry nitrogen (less than 1%
humidity). (MoS2/Ti coating is from Teer Coatings, Ltd.)
of such an MoS2/Ti film against steel or ceramic balls is below 0.1 in humid air and less than 0.05 in
dry N2; when compared with conventional MoS2 films, its Vickers hardness is much higher and hence
it lasts longer in tribological applications [93]. Furthermore, the frictional properties of this coating
are not greatly affected by moisture in the test environment and it is proposed for use in various dry-
sliding and machining applications (e.g., milling, drilling, tapping, cold-forming dies and punches,
stamping, bearings, and gears for aerospace and vacuum applications) [31,93].
In more recent research activities, attempts have been made to produce self-lubricating
nanocomposite films that consist of multilayers or discrete phases of a solid lubricant (such as MoS2
or WS2) and a metal, ceramic, or hard-metal nitride or carbide (i.e., Ti, Pb, Au, TiN, TiC) [3,28,89].
These coatings can be prepared by co-sputtering MoS2 and TiN or TiB2 targets or a single target
composed of both TiN and MoS2. The resultant coatings may consist of distinct nanolayers or
phases of hard ceramic and soft dichalcogenide compounds. The hardness of these coatings could
be as high as 20 GPa, while their friction coefficients are ≈0.1, even in open-air environments.
Because of high hardness and low friction, they can be used in both sliding and machining appli-
cations [94]. Recently, researchers have also produced multi-layer MoSx/Pb and MoSx/Ti coatings
(with individual layer thicknesses in the range of 4 to 100 nm) by magnetron sputtering at room
temperature. Sliding wear tests in 50% relative humidity showed great improvement in wear-life
over that of pure MoSx coatings [95]. The 3-D design of adaptive coatings based on multicompo-
nent MoS2/TiC/DLC or WS2/WC/DLC coating architectures led to improved tribological properties
over broad ranges of environmental humidity and other test parameters [96]. Whereas the hard coat-
ings of TiC and DLC provided high strength and resistance to wear, solid lubricants DLC and MoS2
provided low friction at the sliding surface. The friction coefficients of the coatings were 0.15 in
humid air and 0.02 in dry nitrogen, thus increasing the prospects for use in space mechanisms.
PbO/MoS2- and ZnO/WS2-based nanocomposite films have also been produced in recent years
and tested for their lubricity and durability in various environments [97]. Composite films perform
significantly better during tribotesting than films composed entirely of MoS2 or PbO and ZnO. In
addition, the composite films demonstrate the properties of “adaptive” lubricants. MoS2 provides
lubrication at room temperature; however, when the films are exposed to oxidizing environments at
elevated temperatures, they adapt by forming PbMoO4, a compound that has been noted to display
low friction at high temperatures.
Other layered solid lubricants such as graphite and HBN can also provide low friction to slid-
ing tribological interfaces, but they are not widely used as nanodispersoids in coatings to achieve
low friction. In contrast to dichalcogenides, these solid lubricants work best in moist environments
but fail in vacuum or under dry running conditions. It is generally agreed that no solid can provide
very low friction and wear regardless of test environment and conditions. Furthermore, lifetimes of
most solid lubricants tend to be very limited because of the finite film thickness and susceptibility
to chemical or thermal degradation. In general, no single lubricant can provide reasonably low and
consistent friction coefficients over broad test conditions, temperatures, and environments.
Lubricants mentioned above function rather well under certain, but not all, test conditions.
5 nm
55
DC-discharge C
50
HF-discharge
45
40
Hardness (Gpa)
35
30
25
20
15
10
5
0
0.0 0.5 1.0 1.5 2.0 2.5 3.0
(a) (b) Tin coverage with Si3N4 (monolayer)
FIGURE 25.9 (a) Typical high-resolution TEM photomicrograph and (b) hardness dependence of TiN/Si3N4
nanocomposite coating on thickness of grain boundary Si3N4 phase. (From Veprek, S. et al., Thin Solid Films,
476, 1–29, with permission from Elsevier.)
100
90
80
70
Life time r.u.
60
50
40
30
20
10
0
S26 S26+TiN S26+TiAIN 826-1 826-2 8026
FIGURE 25.10 Cutting performance of various hard coatings while milling a CK45 steel (cutting conditions —
feed rate, 0.23 mm/tooth; depth of cut, 2 mm; cutting speed, 179 m/min). S26, indexable uncoated insert;
S26⫹TiN, TiN-coated; S26⫹TiAlN, (TiAl)N-coated; 826-1 and 826-2, same inserts coated with (Ti1⫺xAlx)
N/a-Si3N4 nanocomposite coatings; and 8026: nc-(Ti1⫺xAlx)N/a-Si3N4 multilayer nanocomposite coating. (From
Veprek, S. and Jilek, M., Pure Appl. Chem., 74, 475–481, 2002, with permission from Elsevier.)
machining performance of some superhard coatings and conventional hard coatings [101]. With the
use of novel lateral-rotating-arc cathodes during deposition, and virtual shutters for the precleaning
of the cathodes, additional improvements have been achieved in the cutting performance of coated
tools, particularly in dry machining. For example, when these nanocomposite coatings are used in dry
drilling of hard steel, the lifetime of tools is increased by factors of 4 or more as compared to the state-
of-the-art (AlTi)N-coated tools [4,101,102]. Under such machining conditions, the temperature of the
cutting edge of tools may reach as high as 800°C. In addition to superhardness, these nanocomposite
coatings are also expected to have very high thermal stability and high resistance to oxidation [102].
Ar−1%CH4 7
Number of crystallites
C60 −Ar−2% H2 UNCO
GB 4
0
1 nm 0 2 4 6 8 10 12
Crystallite size (nm)
25 nm
FIGURE 25.11 TEM image of nanocrystalline diamond film. (Left inset shows details of nanograins and
grain boundaries; right inset shows grain size distribution.)
0.5
hin
g Rough
0.4 p olis microcrystalline
ive
Friction coefficient
ss diamond
gre
0.3 Pro
Polished 0.2
diamond UNCD
film 0.1
0
0 100 200 300 400 500 600
RMS surface roughness (nm)
Smooth
ultrananocrystalline
diamond film
FIGURE 25.12 Frictional behavior of microcrystalline, nanocrystalline, and polished diamond films. Note
that friction coefficient of microcrystalline diamond film is ten times higher.
hydrogen gases over the carbide-based substrates at temperatures of 600 to 1100°C. Chlorine in the
gas mixture reacts preferentially with metal atoms and etches them away. In the case of SiC, the reac-
tion product is SiCl4, which is volatile and thus easily removed. The carbon atoms left behind on the
surface rearrange themselves to form a truly nanostructured carbon film, which is composed of
nanocrystalline diamond and graphite phases, carbon nanoonions, and amorphous carbon [16,108].
Figure 25.13 shows the typical microstructure of these coatings [16].
By controlling process parameters, the structure and properties of CDC films can easily be
manipulated or fine-tuned to meet the specific application needs of a given tribological system.
Recent experimental studies have shown that the friction properties of these films are quite sensi-
tive to test environments [111,112]. In humid air, their friction coefficients are comparable to those
of highly oriented pyrolitic graphite, whereas in dry nitrogen or vacuum, the friction values may
vary greatly. Figure 25.14 shows the friction coefficient of CDC and SiC. Certain CDC films can
provide friction coefficients less than 0.1 in dry nitrogen but others exhibit much higher friction
(perhaps due to some structural or topographical differences). By exposing these films to post-dep-
osition hydrogenation, their friction coefficients can be reduced to values in dry nitrogen of less
than 0.05 [113]. These low-friction carbon films hold promise for applications that involve MEMS,
electrical contacts, biomedical implants, and mechanical seals.
Onions
Diamond
FIGURE 25.13 High-resolution TEM photomicrograph of nanostructured CDC film on SiC substrate.
Sample was treated for 24 h at 1000°C in Ar/3.5% Cl2. (From Gogotsi, Y. et al., Nature, 411, 283–287, 2001,
with permission from Elsevier.)
SiC in air
0.8
Friction coefficient
0.6
0.4
CDC in air
0.2
CDC in dry nitrogen
0
0 200 400 600 800 1000 1200
Time (sec)
FIGURE 25.14 Friction performance of CDC against Si3N4 ball in humid air and dry nitrogen. For compar-
ison, friction coefficient of SiC is also provided.
C/Cr multilayers have attracted the most attention [44,46,75]. These coatings have been produced on
steel substrates and evaluated for their tribological properties under a wide range of dry- and lubri-
cated-sliding conditions [114–116]. The results indicate that these coatings indeed possess superior
load-carrying capacity and wear resistance not only in laboratory tests but also in actual applications.
Some of the nanostructured carbon films consisted of nanoscale carbide and other crystalline
phases that are evenly dispersed or imbedded into the amorphous carbon matrix. Figure 25.3 shows
a few examples of nanolayered and nanocomposite carbon films that are currently used for a wide
range of tribological applications. Crystalline carbide grains in these films are measured on the
nanometer scale and they are evenly distributed within the amorphous DLC films. When compared
with conventional or monophase DLC films, these nanocomposite films possess an unusual combi-
nation of high mechanical hardness and toughness.
friction coefficients (i.e., 0.1 to 0.4) [3,57]. The major drawbacks of oxide-based solid lubricants
are that they are inherently brittle and thus may easily fracture and wear out quickly. Furthermore,
most oxide-based lubricants do not provide lubrication down to room temperature. Potential appli-
cations for lubricious oxides include high-temperature seals, bearings, and gears, valves and valve
seats, variable stator vanes, and foil bearings.
Recently, a crystal-chemical approach was introduced by Erdemir [119] to classify lubricious
oxides on the basis of their lubrication performance and operational limits. This approach was pro-
posed to serve as a guide for determining the kind(s) of lubricious oxides that are needed on a slid-
ing surface at high temperatures. Apparently, the crystal chemistry of certain oxides that form on
sliding surfaces relates strongly to their shear rheology and hence their lubricity at high temperatures.
The crystal-chemical approach is based essentially on the ionic potential of an oxide and is
defined as Z/r, where Z is the cationic charge and r the radius of the cation. Apparently, ionic poten-
tial controls several key physical and chemical phenomena in oxides. In general, the higher the ionic
potential, the greater the extent of screening of a cation in an oxide by surrounding anions. Oxides
with highly screened cations (such as B2O3 or Re2O7) are generally soft and hence easily sheared at
elevated temperatures. Their cations are well separated and completely screened by anions; hence,
they participate in little or no chemical interactions with other cations in the system. Most of their
bonding is with surrounding anions. As can be deduced from Figure 25.15, the higher the ionic
potential, the lower the friction coefficient. This means that oxides with higher ionic potentials
appear to shear more easily and thus exhibit lower friction at high temperatures.
In nanocomposite coatings, more than two chemically dissimilar solid phases are present. When
such coatings are rubbed against another material or against themselves, then there is no doubt that
there will be more than one kind of oxide on the sliding surface. The crystal-chemical approach may
be used as a guide in the formulation of such nanocomposite films so that complex oxide layers that
form on their sliding surfaces may have low shear, and hence, low friction. Figure 25.16 shows sev-
eral cases in which two oxides (CuO–Re2O7, CuO–MoO3, PbO–B2O3, PbO–MoO3, CoO–MoO3,
and NiO–MoO3, etc.) were either present at or purposely introduced to sliding interfaces to achieve
low friction at high temperatures. As can be expected, there is a reasonable correlation between the
0.8
0.7
ZnO
NIU
Al2O3
0.6
MgO
Friction coefficient
TiO2
0.5
FeO
0.4
B2O3
WO3
V2O5
0.3
MoO
Re2O7
0.2
0.1
2 4 6 8 10 12 14
Ionic potential (Z/r)
FIGURE 25.15 Relationship of friction coefficients of certain oxides to their ionic potentials. (From
Erdemir, A., Tribol. Lett., 8, 97–102, 2000.)
difference in ionic potentials of these oxides and the levels of friction coefficients measured at high
temperatures [119].
The crystal-chemical approach presented above may have broad practical implications for the
design or formulation of novel self-lubricating nanocomposite coatings. Such coatings may find
applications in metal-cutting and metal-forming operations, wherein high temperature always exists
and causes severe adhesive and oxidative wear of cutting- or forming-tool surfaces. The lubrication
of such tools by traditional means (i.e., using metal-working fluids) is becoming more and more dif-
ficult, mainly because of increasingly more stringent environmental regulations. What will be very
desirable is a tool that needs little or no external lubrication.
Most cutting and forming tools used by industry today are coated with a hard nitride or carbide
film. Nowadays, they are increasingly coated with a nanocomposite coating that functions quite
well when used in externally lubricated cutting or forming operations. However, when used under
dry or marginally lubricated cutting operations, they fail rather quickly. By incorporating certain
alloys or nanophases in these coatings, one can potentially improve the performance and durability
of these tools. These alloying elements or phases must be selected in such a way that they promote
the formation of lubricious oxides on cutting or forming surfaces of the tools during operation.
Similar lubrication approaches may also be used in the formulation of novel thermal or plasma
spray coatings that are already used in various engine components, and in rolls and dies that are
used in high-temperature forging or metal-forming operations.
In recent years, several attempts have been made to incorporate lubricious oxides and oxide-
forming elements into hard coating systems to achieve better performance and longer life in cutting
tools and various tribological systems. In one of these attempts, researchers have incorporated
tungsten and vanadium oxides into the coating systems and achieved reasonably low friction and
wear coefficients at elevated temperatures [120]. In another study, vanadium was purposely added
to TiAlN coatings with the hope that it would produce V2O5 as a lubricious oxide and thus enable
dry machining. Dry-sliding tests showed that the friction coefficient of such a composite coating
dropped from 0.6–0.8 to about 0.18 at 700°C. It was concluded that the addition of vanadium to
hard coatings holds promise for achieving greater lubricity during dry machining, mainly because
0.7
PbO−MoO3
CoO−MoO2
NiO−FeO
NiO−TiO2
CoO−WO2
0.6
0.5
CuO−MoO3
CuO−Re2O2
Friction coefficient
NiO−MoO2
SiO2−PbO
NiO−B2O2
0.4
PbO−B2O2
0.3
ZnO−MoO3
0.2
Cs2O−MoO3
NiO−WO
PbO−V2O3
0.1
0
Difference in lonic potential (Z/r)
FIGURE 25.16 Relationship of friction coefficients of certain double oxides to differences in their ionic
potentials. (From Erdemir, A., Tribol. Lett., 8, 97–102, 2000.)
of the formation of V2O5 and other easily shearable lower oxidizes of vanadium [49]. As suggested
by Figure 25.15, ionic potentials of V2O5 are high and hence the lubricity of this material at high
temperatures is high.
Gulbinski et al. [121] studied the dry-sliding behavior of pure MoO3 and V2O5 as well as com-
posite phases that originate from Ag2O–MoO3, Cu–V2O5, and Ag–V2O5. All of these phases low-
ered friction, but the best results were obtained from surfaces that formed silver molybdate
(Ag2MoO4) and silver–vanadium oxides (the reported friction coefficients were ≈0.2). Note that
these complex oxides also exhibit low ionic potentials. In fundamental studies, researchers have
also achieved low friction on certain oxides that form low-shear Magneli phases [22,122]. They
mainly are the result of tribo-oxidation at sliding interfaces and once formed, they can dominate
friction and wear.
25.6 SUMMARY
In this chapter, we provide an overview of recent advances in the production and uses of nanos-
tructured and composite coatings in tribology. Unlike conventional coatings, nanostructured and
composite coatings offer a combination of low friction and high wear resistance to sliding surfaces
under a wide range of tribological conditions. Structurally, they consist of two or more phases that
are mixed in a very special manner to provide a very dense structural morphology. These coatings
may be super-hard and exhibit very low friction and wear coefficients. The type of grain-boundary
phases seems to play a major role in their hardness and other properties. Multi-layer coatings, with
layer thicknesses that range from a few atoms to several nanometers are also available and can pro-
vide superior mechanical and tribological properties. At present, several PVD and CVD techniques
are available to reliably deposit nanostructured and composite coatings on several metallic and
ceramic substrates. Some of the films (such as nanocrystalline diamond, CDC, and DLC) are self-
lubricating and may provide friction coefficients of less than 0.1, even under very harsh sliding con-
ditions. These films hold promise for a wide range of tribological applications (such as mechanical
face seals, MEMS, engine and drivetrain components, and invasive or implantable medical devices).
Another important development in the field is the design and production of self-lubricating
nanocomposite and multilayered coatings on various tribological components. Because of their low
friction, these coatings can be very useful in extreme tribological applications such as aerospace and
green manufacturing. For applications that involve high temperatures, the development of thermally
stable, self-lubricating coatings is essential. Recently, a crystal-chemical approach was introduced
to understand better and classify lubricious oxides or oxide-forming nanocomposites on the basis
of their lubrication performance and operational limits at high temperatures. This approach may
serve as a basis for the design of novel nanocomposite coatings that can produce the kind(s) of
lubricious oxides that are needed on sliding surface at high temperatures.
ACKNOWLEDGMENTS
This work is supported by the U.S. Department of Energy, Office of Energy Efficiency and
Renewable Energy, Freedom Car & Heavy Vehicle Technologies Program, under Contract W-31-
109-Eng-38. The authors thank R. Dielis of Hauzer Techno Coating and D. Teer of Teer Coatings,
Ltd for providing some of the figures used in Figures 25.2 and 25.3.
This chapter has been created by the University of Chicago as Operator of Argonne National
Laboratory (“Argonne”) under Contract No. W-31-109-ENG-38 with the U.S. Department of
Energy. The U.S. Government retains for itself, and others acting on its behalf, a paid-up, nonex-
clusive, irrevocable worldwide license in said article to reproduce, prepare derivative works, dis-
tribute copies to the public, and perform publicly and display publicly, by or on behalf of the
Government.
REFERENCES
1. Musil, J. (2005) Physical and Mechanical Properties of Hard Nanocomposite Films Prepared by
Magnetron Sputtering, Nanostructured Hard Coatings, Kluwer Academic, New York, pp. 1–46.
2. Veprek, S. (2004) Superhard nanocomposites: design concept, properties, present and future industrial
applications, Eur. Phys. J. App. Phys., 28, 313–317.
3. Donnet, C. and Erdemir, A. (2004) Historical developments and new trends in tribological and solid
lubricant coatings, Surf. Coat. Technol., 180–181, 76–84.
4. Jilek, M., Cselle, T., Holubar, P., Morstein, M., Veprek-Heijman, M.G.J., and Veprek, S. (2004)
Development of novel coating technology by vacuum arc with rotating cathodes for industrial pro-
duction of nc-(Al1⫺xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining, Plasma
Chem. Plasma Process., 24, 493–510.
5. Zhang, S., Sun, D., Fu, Y., and Du, H. (2003) Recent advances of superhard nanocomposite coatings:
a review, Surf. Coat. Technol., 167, 113–119.
6. Holubar, P., Jilek, M., and Sima, M. (2000) Present and possible future applications of superhard
nanocomposite coatings, Surf. Coat. Technol., 133–134, 145–151.
7. Erdemir, A. (2005) Review of engineered tribological interfaces for improved boundary lubrication,
Tribol. Int., 38, 249–256.
8. Chen, Y-H., Polonsky, I.A., Chung, Y-W., and Keer, L.M. (2002) Tribological properties and rolling-
contact-fatigue lives of TiN/SiNx multilayer coatings, Surf. Coat. Technol., 154, 152–161.
9. Leyland, A. and Matthews, A. (2000) On the significance of the H/E ratio in wear control: a nanocom-
posite coating approach to optimised tribological behaviour, Wear, 246, 1–11.
10. Ajayan, P. M., Schadler, L.S., and Braun, P.V. (2003) Nanocomposite Science and Technology, Wiley-
VCH-Verlag GmbH, Weinheim, Germany.
11. Nalwa, H.S. (2003) Handbook of Organic-Inorganic Hybrid Materials and Nanocomposites, Vol. 1–2,
Stevenson Ranch, CA, USA, American Scientific Publishers.
12. Lee, K.Y. and Goettler, L.A. (2004) Structure-property relationships in polymer blend nanocompos-
ites, Polym. Eng. Sci., 44, 1103–1111.
13. Vollath, D. and Szabo, D. V. (2004) Synthesis and properties of nanocomposites, Adv. Eng. Mater., 6,
117–127.
14. Karvankova, P., Veprek-Heijman, M.G.J., Zindulka, O., Bergmaier, A., and Veprek, S. (2003)
Superhard nc-TiN/a-BN and nc-TiN/a-TiBx/a-BN coatings prepared by plasma CVD and PVD: a com-
parative study of their properties, Surf. Coat. Technol., 163–164, 149–156.
15. Gruen, D.M. (1999) Nanocrystalline diamond films, Annu. Rev. Mater. Sci., 29, 211–259.
16. Gogotsi, Y., Welz, S., Ersoy, D.A., and McNallan, M.J. (2001) Conversion of silicon carbide to crys-
talline diamond-structured carbon at ambient pressure, Nature, 411, 283–287.
17. Mitterer, C. and Mayrhofer, P.H. (2004) Design of nanostructured hard coatings for optimum per-
formance, Key Eng. Mater., 264–268, 453–458.
18. Holleck, H., Leiste, H., Stuber, A., and Ulrich, S. (2003) Nanoscale protective coatings for highly
stressed tools and components, Z. Metallkunde, 94, 621–627.
19. Lugscheider, E., Bobzin, K., Pinero, C., Klocke, F., and Massmann, T. (2004) Development of a super-
lattice (ti, hf, cr) n coating for cold metal forming applications, Surf. Coat. Technol., 177, 616–622.
20. Boyde, S. (2002) Green lubricants. Environmental benefits and impacts of lubrication, Green Chem.,
4, 293–307.
21. Gamulya, G.D., Ostrovskaya, E.L., and Yukhno, T.P. (2001) Tribological properties of materials for
use under extreme conditions, Powder Metall. Metal Ceram., 40, 135–143.
22. Kutschej, K., Mayrhofer, P.H., Kathrein, M., Polcik, P., and Mitterer, C. (2004) A new low-friction
concept for Ti1⫺xAlxN based coatings in high-temperature applications, Surf. Coat. Technol., 188–189,
358–363.
23. Schramm, B.C., Scheerer, H., Hoche, H., Broszeit, E., Abele, E., and Berger, C. (2004) Tribological
properties and dry machining characteristics of PVD-coated carbide, Surf. Coat. Technol., 188–189,
623–629.
24. Mitterer, C. and Mayrhofer, P.H. (2001) Some materials science aspects of pvd hard coatings, Adv.
Solid State Phys., 41, 263–274.
25. Hauert, R., Patscheider, J., Knoblauch, L., and Diserens, M. (1999) New coatings by nanostructuring,
Adv. Mater., 11, 175–177.
26. Chung, Y-W. and Sproul, W.D. (2003) Superhard coating materials, MRS Bulletin, 28, 164–168.
27. Münz, W.D. (2000) Super lattice-structured hard coatings, in Trends and Applications of Thin Films,
Vides, Nancy, pp. 12–16.
28. Wu, J.H., Rigney, D.A., Falk, M.L., Sanders, J.H., Voevodin, A.A., and Zabinski, J.S. (2004)
Tribological behavior of WC/DLC/WS2 nanocomposite coatings, Surf. Coat. Technol., 188–189,
605–611.
29. Voevodin, A.A., O’Neill, J.P., and Zabinski, J.S. (1999) Nanocomposite tribological coatings for aero-
space applications, Surf. Coat. Technol., 119, 36–45.
30. Donnet, C. and Erdemir, A. (2004) Solid lubricant coatings: recent developments and future trends,
Tribol. Lett., 17, 389–397.
31. Teer, D.G. (2001) New solid lubricant coatings, Wear, 251, 1068–1074.
32. Bunshah, R.F. (2001) Handbook of Hard Coatings, William Andrew Publishing, Noyes, Park Ridge,
NJ.
33. Mattox, D.M. (1998) Handbook of Physical Vapor Deposition (PVD) Processing, William Andrew
Publishing, Noyes.
34. Seshan, K. (2002) Handbook of Thin-Film Deposition Processes and Techniques — Principles,
Methods, Equipment and Applications, William Andrew Publishing, Noyes.
35. Choy, K.L. (2003) Chemical vapour deposition of coatings, Prog. Mater. Sci., 48, 57–170.
36. Safaie, S., Pochet, L. F., and Howard, C. (1997) CVD coatings: From cutting tools to aerospace appli-
cations and their future potential, Surf. Coat. Technol., 94–95, 70–77.
37. Schneider, J. M., Rohde, S. L., Sproul, W. D., and Matthews, A. (2000) Recent developments in
plasma assisted physical vapour deposition, J. Phys. Appl. Phys., 33, 173–186.
38. Bergmann, E., van der Kolk, G. I., Buil, B., and Hurkmans, T. (1999) The next generation of deposi-
tion equipment for wear protection coatings, Surf. Coat. Technol., 114, 101–107.
39. Loir, A.S., Garrelie, F., and Donnet, F. (2004) Toward the deposition of tetrahedral diamondlike car-
bon films on hip joints by femtosecond pulsed laser ablation, Surf. Coat. Technol., 188–189, 728–734.
40. Jeon, J.H., Choi, S.R., and Chung, W.S. (2004) Synthesis and characterization of quaternary Ti-Si-C-N
coatings prepared by a hybrid deposition technique, Surf. Coat. Technol., 188–189, 415–419.
41. Goller, R., Torri, P., and Baker, M.A. (1999) The deposition of low-friction TiN-MoSx hard coatings
by a combined arc evaporation and magnetron sputter process, Surf. Coat. Technol., 121, 453–457.
42. Celis, J.P., Drees, D., Huq, M.Z., Wu, P.Q., and De Bonte, M., (1999) Hybrid processes — a versatile
technique to match process requirements and coating needs, Surf. Coat. Technol., 113, 165–181.
43. Renevier, N.M., Oosterling, H., Konig, U., Dautzenberg, H., Kim, B.J., Geppert, L., Koopmans,
F.G.M., and Leopold, J. (2003) Performance and limitation of hybrid PECVD (hard coating) — PVD
magnetron sputtering (MoS2/Ti composite) coated inserts tested for dry high-speed milling of steel and
grey cast iron, Surf. Coat. Technol., 163, 659–667.
44. Hovsepian, P.E., Lewis, D.B., Constable, C., Luo, Q., Kok, Y.N., and Münz, W.D. (2003) Combined
steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological
applications, Surf. Coat. Technol., 174, 762–769.
45. Strondl, C., Carvalho, N.M., De Hosson, J.T.M., and Van der Kolk, G.J. (2003) Investigation on the
formation of tungsten carbide in tungsten-containing diamond like carbon coatings, Surf. Coat.
Technol., 162, 288–293.
46. Hovsepian, P.Eh., Kok, Y.N., Ehiasarian, A.P., Erdemir, A., Wen, J.G., and Petrov, I. (2004) Structure
and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered
cathodic arc/unbalanced magnetron sputtering technique, Thin Solid Films, 447–448, 7–13.
47. Meng, W.J., Tittsworth, R.C., Jiang, J.C., Feng, B., Cao, D.M., Winkler, K., and Palshin, V. (2000) Ti
atomic bonding environment in Ti-containing hydrocarbon coatings, J. Appl. Phys., 88, 2415–2422.
48. Gassner, G., Mayrhofer, P.H., Kutschej, K., Mitterer, C., and Kathrein, M. (2004) A new low-friction
concept for high temperatures: lubricious oxide formation on sputtered VN coatings, Tribol. Lett., 17,
751–756.
49. Mayrhofer, P.H., Hovsepian, P.E., Mitterer, C., and Münz, W.D. (2004) Calorimetric evidence for fric-
tional self-adaptation of TiAlN/VN superlattice coatings, Surf. Coat. Technol., 177, 341–347.
50. Canter, N.M. (2003) The possibilities and limitations of dry machining, Tribol. Lubr. Technol., 11, 30–35.
51. Yau, B.S., Huang, J.L., Lii, D.F., and Sajgalik, P. (2004) Investigation of nanocrystal-(Ti,AI)N-x/
amorphous-SiNy composite films by co-deposition process, Surf. Coat. Technol., 177, 209–214.
52. Veprek, S., Niederhofer, A., Moto, K., Bolom, T., Mannling, H.D., Nesladek, P., Dollinger, G., and
Bergmaier, A. (2000) Composition, nanostructure, and origin of the ultrahardness in nc-TiN/a-Si3N4/a-
and nc-TiSi2 nanocomposites with H-v = 80 to <= 105 GPa, Surf. Coat. Technol., 133, 152–159.
53. Perry, A.J. and Teer, D.G. (1997) Surface technology for temperature-sensitive materials, Surf. Coat.
Technol., 97, 244–249.
54. Knotek, O., Loffler, F., Kramer, G., and Stossel, C. (1992) Reproducible arc-pvd process management
under various reactive gases source, Vacuum, 43, 567–571.
55. Sproul, W.D., Christie, D.J., Carter, D.C., Tomasel, F., and Linz, T. (2004) Pulsed plasmas for sput-
tering applications, Surf. Eng., 20, 174–176.
56. Ehiasarian, A.P., Münz, W.D., Hultman, L., Helmersson, U., and Petrov, I. (2003) High-power pulsed-
magnetron-sputtered CrNx films, Surf. Coat. Technol., 163, 267–272.
57. Quinto, D.T. (1996) Technology perspective on CVD- and PVD-coated metal-cutting tools, Int. J.
Refract. Metals Hard Mater., 14, 7–20.
58. Erdemir, A. (2001) Solid Lubricants and Self-lubricating Films, Handbook of Modern Tribology, CRC
Press, Boca Raton, FL, pp. 787–818.
59. Erdemir, A. (2002) Friction and wear of diamond and diamond-like carbon films, Proc. Inst. Mech.
Eng. Part J – J. Eng. Tribol., 216, 387–400.
60. Lackner, J.M., Waldhauser, W., Berghauser, R., Ebner, R., Major B., and Schoberl, T. (2004)
Structural, mechanical and tribological investigations of pulsed-laser-deposited titanium nitride coat-
ings, Thin Solid Films, 453–454, 195–202.
61. Erdemir, A., Busch, D.E., Erck, R.A., Fenske, G.R., and Lee, R.H. (1991) Ion-beam-assisted deposi-
tion of silver films on zirconia ceramics for improved tribological behavior, Lubr. Eng., 47, 863.
62. Meng, W.J., Curtis, T.J., Rehn, L.E., and Baldo, P.M. (1998) Plasma-assisted deposition and charac-
terization of Ti-containing diamondlike carbon coatings, J. Appl. Phys., 83, 6076–6081.
63. Yao, S.H., Kao, W.H., Su, Y.L., and Liu, T.H. (2004) On the tribology and micro-drilling performance
of TiN/AlN nanolayer coatings, Mater. Sci. Eng. A-Struct. Mater. Properties Microstruct. Process.,
386, 149–155.
64. Zhou, Z., Rainforth, W.M., Rother, B., Ehiasarian, A.P., Hovsepian, P.Eh., and Münz, W.D. (2004)
Elemental distributions and substrate rotation in industrial TiAlN/VN superlattice hard PVD coatings,
Surf. Coat. Technol., 183, 275–282.
65. Barnett, S.A. and Madan, A. (2004) Hardness and stability of metal–nitride nanoscale multilayers, Scr.
Mater., 50, 739–744.
66. Hultman, L., Engström, C., and Odén, M. (2000) Mechanical and thermal stability of TiN/NbN super-
lattice thin films, Surf. Coat. Technol., 133–134, 227–233.
67. Musil, J., Zeman, P., Hruby, H., Mayrhofer, P.H. (1999b) ZrN/Cu nanocomposite film — a novel
superhard material, Surf. Coat. Technol., 120–121, 179–183.
68. Zeman, P., Cerstvy, R., Mayrhofer, P.H., Mitterer, C., and Musil, J. (2000) Structure and properties of
hard and superhard Zr-Cu-N nanocomposite coatings, Mater. Sci. Eng. A, 289, 189–197.
69. Musil, J., Hruby, H., Zeman, P., Zeman, H., Cerstvy, R., Mayrhofer, P.H., and Mitterer, C. (2001) Hard
and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering, Surf. Coat. Technol.,
142–144, 603–609.
70. Musil, J. and Vlcek, J. (2001) Magnetron sputtering of hard nanocomposite coatings and their prop-
erties, Surf. Coat. Technol., 142–144, 557–566.
71. Musil, J., Leipner, I., and Kolega, M. (1999) Nanocrystalline and nanocomposite CrCu and CrCu-N
films prepared by magnetron sputtering, Surf. Coat. Technol., 115, 32–37.
72. He, J.L., Setsuhara, Y., Shimizu, I., and Miyake, S. (2001) Structure refinement and hardness enhance-
ment of titanium nitride films by addition of copper, Surf. Coat. Technol., 137, 38–42.
73. Gogotsi, Y.G., Jeon, I.D., and McNallan, M.J. (1997) Carbon coatings on silicon carbide by reaction
with chlorine-containing gases, J. Mater. Chem., 7, 1841–1848.
74. Veprek, S., and Reiprich, S. (1995) A concept for the design of novel superhard coatings, Thin Solid
Films, 268, 64–71.
75. Czyzniewski, A. (2003) Deposition and some properties of nanocrystalline WC and nanocomposite
WC/a-C:H coatings, Thin Solid Films, 433, 180–185.
76. Veprek, S. (2000) Ultra Hard Nanocomposite Coatings with Hardness of 80 to 105 GPa, Societe
Francaise du Vide, pp. 185–192.
77. Nesládek, P. and Veprek, S. (2000) Superhard nanocrystalline composites with hardness of diamond,
Phys. Stat. Sol. A, 177, 53–62.
78. Holmberg, K., Matthews, A., and Ronkainen, H. (1998) Coatings tribology-contact mechanisms and
surface design, Tribol. Int., 31, 107–120.
79. Münz, W.D., Lewis, D.B., Hovsepian, P.E., Schonjahn, C., Ehiasarian, A., and Smith, I.J. (2001)
Industrial-scale manufactured superlattice hard PVD coatings, Surf. Eng., 17, 15–27.
80. Veprek, S., Nesládek, P., Niederhofer, A., Glatz, F., Jílek, M., and Síma, M. (1998) Recent progress in
the superhard nanocrystalline composites: towards their industrialization and understanding of the ori-
gin of the superhardness, Surf. Coat. Technol., 108–109, 138–147.
81. Rohatgi, P.K., Ray, S., and Liu, Y. (1992) Tribological properties of metal matrix graphite particle
composites, Int. Mat. Rev., 37, 129–149.
82. Prasad, S.V. and McConnell, B.D. (1991) Tribology of aluminum metal-matrix composites, lubrica-
tion by graphite, Wear, 149, 241–253.
83. Friedrich, K., Lu, Z., and Hager, A.M. (1995) Recent advances in polymer composites tribology, Wear,
190, 139–144.
84. DellaCorte, C. and Sliney, H.E. (1990) Tribological Properties of PM 212: A High-Temperature Self-
Lubricating Powder Metallurgy Composite, NASA TM-102355.
85. Zimmerman, F., Clark, D.G., Aust, K.T., and Erb, U. (2002) Pulse electrodeposition of Ni–SiC
nanocomposite, Mater. Lett., 52, 85–90.
86. Zabinski, J.S., Donley, M.S., Dyhouse, V.J., and McDevitt, N.T. (1992) Chemical and tribological
characterization of PbO-MoS2 films grown by pulsed laser deposition, Thin Solid Films, 214,
156–163.
87. Zabinski, J.S., Donley, M.S., Walck, S.D., Schneider, T.R., and McDevitt, N.T. (1995) Effects of
dopants on the chemistry and tribology of sputter-deposited MoS2 films, Tribol. Trans., 38, 894–904.
88. Hilton M.R., Bauer, R., Didziulis, S.V., Dugger, M.T., Keem, J., and Scholhamer, J. (1992) Structural
and tribological studies of MoS2 solid lubricant films having tailored metal-multilayer nanostructures,
Surf. Coat. Technol., 53, 13–23.
89. Lince, J.R. (2004) Tribology of co-sputtered nanocomposite Au/MoS2 solid lubricant films over a
wide contact stress range, Tribol. Lett., 17, 419–428.
90. Wahl, K.J., Seitzman, L.E., Bolster, R.N., and Singer, I.L. (1995) Low-friction, high-endurance, ion-
beam-deposited Pb-Mo-S coatings, Surf. Coat. Technol., 73, 152–159.
91. Ghorbani, M., Mazaheri, M., Khangholi, K., and Kharazi, Y. (2001) Electro deposition of graphite-
brass composite coatings and characterization of their tribological properties, Surf. Coat. Technol.,
148, 71–76.
92. Voevodin, A.A. and Zabinski, J.S. (2000) Supertough wear-resistant coatings with ‘chameleon’ sur-
face adaptation, Thin Solid Films, 370, 223–231.
93. Teer, D.G., Hampshire, J., Fox, V., and Bellido-Gonzalez, V. (1997) The tribological properties of
MoS2/metal composite coatings deposited by closed-field magnetron sputtering, Surf. Coat. Technol.,
94–95, 572–578.
94. Gilmore, R., Baker, M.A., Gibson, P.N., and Gissler, W. (1998) Preparation and Characterization of
low-friction TiB2-based coatings by incorporation of C or MoS2, Surf. Coat. Technol., 105, 45–50.
95. Simmonds, M.C., Savan, A., Van Swygenhoven, H., Pfluger, E., and Mikhailov, S. (1998) Structural,
morphological, chemical and tribological investigations of sputter-deposited MoSx/metal multilayer
coatings, Surf. Coat. Technol., 108–109, 340–344.
96. Voevodin, A.A., Bultman, J., and Zabinski, J.S. (1998) Investigation into three-dimensional laser pro-
cessing of tribological coatings, Surf. Coat. Technol., 107, 12–19.
97. Walck, S.D., Zabinski, J.S., McDevitt, N.T., and Bultman, J.E. (1997) Characterization of
air_annealed, pulsed laser deposited ZnO-WS2 solid film lubricants by transmission electron
microscopy, Thin Solid Films, 305, 130–143.
98. Veprek, S., Veprek-Heijman, M.G.J, Karvankova, P., and Prochazka, J. (2005) Different approaches to
superhard coatings and nanocomposites, Thin Solid Films, 476, 1–29.
99. Veprek, S. and Jilek, M. (2002) Super- and ultrahard nanacomposite coatings: generic concept for their
preparation, properties and industrial applications, Vacuum, 67, 443–449.
100. Münz, W.D., Lewis, D.B., Hovsepian, P.E., Schönjahn, C., Ehiasarian, A., and Smith I.J. (2000)
Industrial-scale manufactured superlattice hard PVD coatings, J. Vac. Sci. Technol. A: Vac. Surf. Films,
18, 1681–1689.
101. Veprek, S. and Jilek, M. (2002) Superhard nanocomposite coatings. From basic science toward indus-
trialization, Pure Appl. Chem., 74, 475–481.
102. Jilek, M., Holubar, P., Veprek-Heijman, M., and Veprek S. (2003) Toward the industrialization of
superhard nanocrystalline composites for high speed and dry machining, MRS Symp. Proc., 750, 393.
103. Erdemir, A. and Donnet, C. (2000) in Tribology of Diamond, Diamondlike Carbon and Related Films,
Modern Tribology Handbook, Bhushan, B., Ed., CRC Press, Boca Raton, FL, pp. 871–899.
104. Erdemir, A., Bindal, C., Fenske, G.R., Zuiker, C., Krauss, A.R., and Gruen, D.M. (1996) Friction and
wear properties of smooth diamond films grown in fullerene plus argon plasmas, Diamond Relat.
Mater., 5, 923–931.
105. Erdemir, A., Bindal, C., Fenske, G.R., Zuiker, C., Csencsits, R., Krauss, A.R., and Gruen, D.M. (1996)
Tribological characterization of smooth diamond films grown in Ar-C-60 and Ar-CH4 plasmas,
Diamond Films Technol., 6, 31–47.
106. Erdemir, A., Fenske, G.R., Krauss, A.R., Gruen, D.M., McCauley, T., and Csencsits R.T. (1999)
Tribological properties of nanocrystalline diamond films, Surf. Coat. Technol., 121, 565–572.
107. Krauss, A.R., Auciello, O., Gruen, D.M., Jayatissa, A., Sumant, A., Tucek, J., Mancini, D.C.,
Moldovan, N., Erdemir, A., Ersoy, D., Gardos, M.N., Busmann, H.G., Meyer, E.M., and Ding, M.Q.
(2001) Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices,
Diamond Relat. Mater., 10, 1952–1961.
108. Ersoy, D.A., McNallan, M.J., Gogotsi, Y., and Erdemir, A. (2000) Tribological properties of carbon
coatings produced by high-temperature chlorination of silicon carbide, Tribol. Trans., 43, 809–815.
109. Ersoy, D.A., McNallan, M.J., and Gogotsi, Y. (2001) Carbon coatings produced by high-temperature
chlorination of silicon carbide ceramics, Mater. Res. Innovations, 5, 55–62.
110. Welz, S., Gogotsi, Y., and McNallan, M.J. (2003) Nucleation, growth, and graphitization of diamond
nanocrystals during chlorination of carbides, J. Appl. Phys., 93, 4207–4214.
111. Carroll, B., Gogotsi, Y., Kovalchenko, A., Erdemir, A., and McNallan, M.J. (2004) Tribological char-
acterization of carbide-derived carbon layers on silicon carbide for dry friction applications, Key Eng.
Mater., 264–268, 465–468.
112. Carroll, B., Gogotsi, Y., Kovalchenko, A., Erdemir, A., and McNallan, M.J. (2003) Effect of humidity
on the tribological properties of carbide-derived carbon (CDC) films on silicon carbide, Tribol. Lett.,
15, 51–55.
113. Erdemir, A., Kovalchenko, A., and McNallan, M.J. (2004) Effects of high-temperature hydrogenation
treatment on sliding friction and wear behavior of carbide-derived carbon films, Surf. Coat. Technol.,
188–189, 588–593.
114. Podgornik, B., Viintin, J., Jacobson, S., and Hogmark, S. (2004) Tribological behaviour of WC/C coat-
ings operating under different lubrication regimes, Surf. Coat. Technol., 177–178, 558–565.
115. Wänstrand, O., Larsson, M., and Hedenqvist, P. (1999) Mechanical and tribological evaluation of PVD
WC/C coatings, Surf. Coat. Technol., 111, 247–254.
116. Voevodin, A.A., Prasad, S.V., and Zabinski, J.S. (1997) Nanocrystalline carbide amorphous carbon
composites, J. Appl. Phys., 82, 855–858.
117. Kanakia, M., Owens, M.E., and Ling, F.F. (1984) in Proceedings of Workshop on Fundamentals of
High Temperature Friction and Wear with Emphasis on Solid Lubrication for Heat Engines, Industrial
Tribology Institute, Troy, NY, pp. 19–38.
118. Kanakia, M.D. and Peterson, M.B. (1987) Literature Review of the Solid Lubrication Mechanisms,
Interim Report, BFLRF #213, Southwest Research Institute, San Antonio, TX, pp. 6–18.
119. Erdemir, A. (2000) A crystal-chemical approach to lubrication by solid oxides, Tribol. Lett., 8, 97–102.
120. Lugscheider, E., Knotek, O., Barwulf, S., and Bobzin, K., (2001) Characteristic curves of voltage and
current, and phase generation and properties of tungsten- and vanadium-oxides deposited by reactive
d.c.-MSIP-PVD-process for self-lubricating applications, Surf. Coat. Technol., 142–144, 137–142.
121. Gulbinski, W., Suszko, T., Sienicki, W., and Warcholinski, B. (2003) Tribological properties of silver-
and copper-doped transition metal oxide coatings, Wear, 254, 129–135.
122. Storz, O., Gasthuber, H., and Woydt, M. (2001) Tribological properties of thermal-sprayed Magnéli-
type coatings with different stoichiometries (TinO2n⫺1), Surf. Coat. Technol., 140, 76–81.