Thin-Film Measurements in the Scanning Electron Microscope

T. E. Everhart

Citation: Journal of Vacuum Science & Technology 7, 322 (1970); doi: 10.1116/1.1315850
View online: http://dx.doi.org/10.1116/1.1315850
View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/7/2?ver=pdfcov
Published by the AVS: Science & Technology of Materials, Interfaces, and Processing

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Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 69.166.47.134 On: Fri, 28 Nov 2014 10:04:26
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 69.166.47.134 On: Fri, 28 Nov 2014 10:04:26