Any sample, all data

Quanta ™ Series
Flexible SEM Solutions for
Structural Diagnostics ™
 Control your SEM future

Technologies, materials, and samples are changing faster than ever before, and so is the diagnostics

function in the analytical laboratory. Analytical tools need to accommodate materials with very different

properties while collecting more analytical data in less time. The demand for non-destructive analytical

techniques and functionality that can accommodate tomorrow’s analytical requirements is increasing.

Quanta: The All in One SEM Solution:
Ready to serve a broad range of applications,
now and in the future
The Quanta™ Series from FEI is the
advanced, flexible solution for cur-
rent and future Structural
Diagnostics™ and Automation appli-
cations. Featuring three imaging
modes – high vacuum, low vacuum
and ESEM™ – it accommodates the
widest range of samples of any SEM
system. It is engineered to provide
maximum data - imaging and micro-
analysis - from all specimens, with or
without preparation.
The All in One, single tool
advantage
The Quanta does with a single tool
what used to require multiple analyt-
ical tools. What’s more, it leaves the
specimen untouched should the
same specimen need to be investigat-
ed with other more destructive ana-
lytical tools to complement the diag-
nostics dataset. Quanta™ is the versa-
tile sample diagnostics data manage-
ment solution ready to serve all your
advanced applications, today and
tomorrow.
FEI Company
FEI Company is The Structural Process
Management™ Company serving
semiconductor, data storage and ana-
lytical lab and life science markets.
Our technology base represents 50
years of advanced engineering for FIB,
SEM, DualBeam™ and TEM solutions.
With FEI, you can invest in your SEM
future with confidence.
Global service and applications
support
FEI service and application support is
organized from three regions: Europe
(including Latin America), North
America, and Asia Pacific (including
Australia). Our application support lab-
oratories welcome you for demonstra-
tions, training and application support
(Peabody MA (USA), Eindhoven (NL),
Singapore and Tokyo).
Remote diagnostics and software
upgrades
Our service engineers will be able to
perform remote diagnostics in order
to improve the repair efficiency and
time to repair. Software upgrades can
be made available as part of service
contract arrangements.
Visit the Quanta website for more
information
Visit the Quanta website at
www.feicompany.com/quanta for
details on the instrument specifica-
tions, value propositions and applica-
tion-specific information. Via this
website users will be kept up to date
on new Quanta developments and
opportunities to meet at exhibitions
and workshops.

Quanta 200 Quanta 400 Quanta 600

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Quanta: the system for automotive failure
analysis and quality control Increase the value of your data and operation
High vacuum, morphology
Aluminium fracture surface. Automation
The Quanta series user interface is designed for top-level
user-interaction during the data collection process. And
once the data collection process turns into routine oper-
ation – the same sequence of operation to yield the
High vacuum, surface
Low magnification same type of data – the standard scripting adapter
image of fractured bolt. allowes routine operation to be fully automated. Work
together with FEI to develop customized scripts to auto-
mate your data collection process.
FEI is committed to increasing the value of your sys-
tems performance through automated data collection
solutions.
Safeguard sample authenticity –
safeguard credibility
The credibility of analytical data output is strongly
dependent on preserving the original state of samples.
FEI’s Quanta series preserves a specimen’s authenticity
while providing images with great detail and superb
depth of focus. Once a sample is investigated in the
Quanta SEM it can be studied again— as-is unprepared,
unaltered. Furthermore, as coating is no longer
required, coating artifacts typical for conventional SEMs
can be ruled out. Seeing – the unaltered specimen – is
believing.
Reduce time to result
Making non-high-vacuum compatible samples (such as
bulky, oil-contaminated metal fragments) suitable for
conventional high-vacuum SEM environments is time-
consuming and can lead to unacceptable delays in the
data collection process. Eliminating the sample prepara-
tion phase in the SEM sample data collection process
significantly reduces your time to result. Embedding of
microanalysis implemented in the Quanta user interface
is a significant contributor to achieving the shortest
possible time to result.
Improve your return on investment
- Quality and repeatability of data.
- Faster time to results.
- Greater flexibility and higher utilization.
- Preparedness for any application and any sample that
might come your way.
Capable of analyzing unprepared specimens, the
Quanta “All in One” SEM will be used more often and
earlier in the data collection process. From any perspec-
tive, the Quanta can make significant improvements to
the return on your SEM investment.

Reproduce data with confidence

In many industrial SEM applications, including failure
Low vacuum, morphology
Ceramic metal interface.
analysis and forensics, the findings of the analytical lab
can have tremendous legal consequences. Thus,
absolute reproduction of artifact-free data is a vital qual-
ity requirement of today’s analytical labs. With conven-
tional SEMs, the ability to reproduce data depends on
the exact duplication of sample preparation techniques.
By eliminating the need for sample preparation, Quanta
delivers improved reproduction and reliability of data.

Low vacuum, phase distribution

Car paint X-section.

Low vacuum, phase distribution

Glass fibers in rubber brake pad.

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Quanta: the system for Pharmaceutical
diagnostic applications Any sample
Low vacuum, morphology
IDP. The differentiating feature of the
Quanta SEM series is FEI’s
proprietary ESEM™ technology.
It provides the necessary
environment and tools in the
specimen chamber to allow
ANY-SAMPLE data collection in a
true “All in One” SEM high-vac,
low-vac, and ESEM™ -system.
Low vacuum, phase distribution
Drug on carrier particles.
High vacuum mode: don’t
change your process if it
works for you
The exciting new analytical capabili-
ties in low vacuum and ESEM modes
™
will not jeopardize the usage of
Quanta in high vacuum mode. What
worked for you using conventional
SEM will work for you with Quanta.
Quanta’s high vacuum mode imaging
and analytical performance is not
compromised by the “All in one”
Microanalysis design concept. It performs like a
Light element separation. conventional SEM – in high vacuum
mode. Switching from high vacuum
to low vacuum is seamless, activated
and executed by a single mouse click.
Any sample - Quanta vs. other SEM solutions:
Conductive Non-conductive
C-SEM + -
LV-SEM + +
Quanta + +
Low vacuum, surface
Drug on carrier particles. FE-SEM ++ ++
ESEM, morphology
Partially hydrated paracetamol tablet.
6 7
Low vacuum mode: eliminate
sample charging
Charging of non-conductive or poor-
ly-coated specimens is a common
nuisance of conventional SEM users.
By allowing gas in the specimen
chamber, charge build-up can be
avoided. Quanta’s low vacuum mode
accommodates all non-conductive
specimens, small or large. Unlike
other low vacuum SEMs, it behaves
like high vacuum SEM with the SE
detector standard and similar resolu-
tion specifications.
ESEM™ mode: difficult sam-
ples no longer exist
Sample data collection using conven-
tional SEM of moist/wet, hot or dirty
specimens has often been declined in
the past with the justification “Can’t
do”. This is no longer the case, as the
high chamber pressure allowed in the
Quanta specimen chamber - signifi-
cantly higher than other low vacuum
SEMs - provides the necessary envi-
ronment to collect data even from
moist/wet specimens (up to 100% rel-
ative humidity), heated specimens
(up to 1500˚ C), or oil or emulsion-
coated specimens.
Moist/Wet Dirty
- -
- +
+ ++
- -
Large samples
The Quanta series provides the
required sample space to navigate
large and irregular specimens without
mechanical adjustments requiring.
Three stages are available with motor-
ized 50 mm (2-inch), 100 mm (4-
inch) and 150 mm (6-inch) stage x/y
travel. In particular, the motorized
Z range, which is 60 mm and 65 mm
for the 100 mm and 150 mm stage
respectively, doubles the amount of
usable z-space compared to most
other low vacuum SEMs. Your benefit:
accommodate larger specimens with-
out mechanically adjusting sample
height and interrupting the workflow.
Hot/Outgassing Large/Thick
- +
- +
+ ++
- +
Quanta: the system for micro-electronics/
opto-electronics packaging diagnostics All data
Low vacuum, morphology
2nd gold bond
Morphological
characterization
The principal contrast mechanism
Low vacuum, morphology
offered by secondary electron emis-
contaminated wedge tool sion is the so-called "Edge Effect". Due
after bonding
to this edge effect, small micrometer-
to nanometer-sized topographical fea-
tures appear as bright features in the
SE image to reveal the sample’s mor-
phology. Standard Quanta configura-
tion – unlike most other low vacuum
SEMs - includes the necessary secon-
dary electron detectors for all vacuum
modes, to reveal the edge effect.
Quanta features the industry-standard
resolution specification of 3.5 nm
imaging resolution at low vacuum
specimen chamber conditions.
Surface characterization
Due to the penetrating nature of
high acceleration-voltage primary
electron-beams, true surface details
only become visible at low accelera-
tion voltages (< 5 kV). The Quanta
range provides state-of-the-art-imag-
ing capabilities down to 200 V to
reveal surface detail not visible at
Low vacuum, morphology
contaminated capillary
after bonding
All data - Quanta vs. other SEM solutions:
Morphological Surface
Characterization Characterization
C-SEM - +
LV-SEM + +
Low vacuum, elemental mapping
oxygen map, gold bond X-section
Quanta ++ + +
FE-SEM - ++
Low vacuum, morphology
1st gold bond
8 9
Integrated data collection capabilities enabled by a single solution
differentiate Quanta from other low vacuum SEM + EDS solutions.
high acceleration voltages. Quanta
features the industry-standard resolu-
tion specification of 15 nm at 3 kV at
low vacuum specimen chamber con-
ditions.
Phase distribution
Distribution of materials with differ-
ent atomic composition can be made
visible using backscattered electron
detectors. The recommended solid-
state backscattered electron detector
for the Quanta range is optimized to
differentiate phases of even very
small atomic number differences.
Quanta features the industry-stan-
dard backscattered image resolution
specification of 0.1 atomic number
difference (∆Z = 0.1).
Quantitative microanalysis
The ability to collect high quality
quantitative microanalysis data in all
vacuum modes may seem obvious
when the system is equipped with an
Energy Dispersive Spectrometer
(EDS), but due to the sample’s
gaseous environment in low vacuum
and ESEM™ modes this is not trivial.
The key issue is to keep the primary
Phase Quantitative
Distribution Microanalysis
- -
+ -
+ +
+ -
beam away from the gas, as beam
scattering causes the beam to lose
coherence, and hence the spatial res-
olution in the EDS spectrum is lost.
The Gaseous Analytical
(Backscattered Electron) Detector sys-
tem (GAD) of the Quanta range pro-
vides the necessary gaseous analytical
geometry to reduce the beam skirt
effects by at least one order of magni-
tude compared to other low vacuum
SEMs.
In-situ materials testing
Failure analysis labs typically feature
in-situ dynamic testing devices such
as stress-strain testing machines and
environmental testing machines. The
capabilities of the Quanta range to
accurately control the sample’s envi-
ronment can also be used to cycle
the sample’s environment whilst
imaging or analyzing the sample.
Examples include humidity cycling
storage tests in pharmaceuticals,
recrystallization–melting–crystalliza-
tion cycles in ceramics, and stress-
strain tests using optional tensile
stages in metallurgy.
In-situ
Testing
-
-
-
Quanta: the system for imaging and
microanalysis of biological samples Sample data management
Low vacuum (freeze-dried), morphology
leaf lower surface Low vacuum, morphology The value of your data, regardless of sample type, is only as good as your ability to manage the data.
pollen grains
Advanced peripheral tools provide greater efficiency for your complete SEM diagnostics operational responsibility

Report generation and data archive

Cut and paste your data in the report generator wizard
in the Quanta data archiving software package and gen-
erate professional documents with only one click of the Data
Quanta Support PC
mouse.

Report and data archive On-line e-mail

On-line e-mail CD read/write
The optional support computer may be loaded with Web access data archive
Data
your company’s e-mail server software to provide the Access control
fastest link between data collection and distribution.
Don’t waste time running from office to lab. Combine
SEM laboratory and office into a single sample data
management control center.

CD-read/write
The support computer is equipped with the latest state- LAN

of-the-art CD-read/write capabilities for data storage

Data Browser
and distribution.

Web access data archive

The support PC is loaded as standard with web access
data archive software that will allow your colleagues to WWW

access the database using the intra/internet.

Browser

Access control
ESEM™, morphology The support computer offers another benefit in that the
wax structure Quanta controller does not need to be connected to the
local area network or Internet. Access to and from the
Quanta controller can be customised by the supervisor
on the support computer system acting as a safe gate-
way to and from the Quanta controller. Additionally,
the support computer can be updated with the latest
tools for digital data management without affecting the
Quanta controller system. Examples include new print-
ESEM™, morphology er drivers, Microsoft or comparable Office suites, virus-
upper leaf surface
scanners and additional hard disk drives.

Phase diagram for H2O

10 11
FEI Company
World Headquarters and
North American Sales
7451 NW Evergreen Parkway
Hillsboro, OR 97124-5830
Tel: +1 503 640 7500
Fax: +1 503 844 2615

European Sales
Tel: +31 40 27 66 768
Fax: +31 40 27 66 786

Asia-Pacific Sales
Tel: +65 351 7671
Fax: +65 354 0644

e-mail: sales@feico.com
www.feicompany.com

032-PB0011 03/01

©2001. We are constantly improving the performance of our products, so all

specifications are subject to change without notice. The FEI logo, The Structural
Process Management Company, ESEM and Quanta are trademarks of FEI Company.
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