Scientific / Metrology Instruments

Schottky Field Emission Scanning Electron Microscope

Ultra High Resolution FE-SEM

JSM-7610FPlus
Schottky Field Emission Scanning Electron Microscope
for nano-science
 Invitation to the JEOL's SEM World
The JSM-7610FPlus is an ultra-high resolution semi-in lens FE-SEM.
Facilitates observation of extremely fine structures as well as
elemental analysis at the micro-nano scale.

1 Ultra High Resolution FE-SEM

 Features
Semi-in lens type OL
High spatial resolution (1 kV 1.0 nm, 15 kV 0.8 nm)

Energy filtering with next generation r-filter

Freely select between secondary electrons and backscattered electrons

Low angle BEI acquired through LABE detector

Select either channeling, Z-contrast or surface topography

In-lens Schottky Electron Gun

Large current necessary for analysis (200 nA 15 kV), Long service life
(3 year warranty for the emitter), No loss of low kV resolution

Various attachments
The chamber is designed to accept a wide range of attachments,
including EDS, WDS, EBSD STEM, and CL

Electron probe

Semi-in Lens Objective Lens

　Structure
Semi-in lens objective lens design allows ultra-high
Upper Electron Detector
resolution observation with in-lens detector.

Secondary/
Backscattered electrons
Lower Electron Detector

Objective lens magnetic field

Bias voltage Secondary electrons

(GB-mode) Sample (Main component)/
Backscattered electrons

Ultra-High Magnification Observation

× 500,000 × 1,000,000

10 nm 10 nm

Sample: Platinum Catalyst Nanoparticles on Carbon 15 kV

Ultra High Resolution FE-SEM 2

 GENTLEBEAM Mode (Beam Deceleration)
TM

In GENTLEBEAMTM mode (GB mode), a voltage is Standard mode GB mode

applied to the specimen to reduce the landing voltage Electron
of the electrons just before they strike the specimen, probe

enabling high-resolution observation with accelerating

voltages as low as 100 V.
Since the scattering region of the electron beam OL
(magnetic field)
within the specimen is small, it is easy to observe the
micro structures on the surface, and the influence on Deceleration lens

specimens that are susceptible to heat damage can Secondary

electrons
be reduced. Non-conductive specimens can be easily from the sample
Sample
observed with reduced charging.
The GB mode 1 kV resolution with the JSM-7610FPlus Bias voltage

is 1.0 nm.

Effect of GB Mode
GB mode improves resolution at low accelerating voltage.

Standard mode GB mode

3
Resolution (nm)

2 Standard mode

1 GB mode

0 1 2 3 4 5
50 nm
Accelerating voltage (kV)

Sample: Evaporated gold on carbon, 0.7 kV

Improved Low-Acceleration

Previous Model JSM-7610FPlus

Enhanced
resolution

100 nm 100 nm

Sample: Evaporated gold on carbon, 0.1 kV Sample: Evaporated gold on carbon, 0.1 kV

3 Ultra High Resolution FE-SEM

 GB Mode Imaging (All images are without any conductive coating)

100 nm 10 nm

Sample: Mesoporous silica SBA-15, GB 1.0 kV, Magnification: (Left) ×150,000, (Right) × 300,000
Sample courtesy of: Professor Viveka Alfredsson　Department of Physical Chemistry, Lund University

100 nm 100 nm

Sample: Ta3N5 nanorod, GB 0.1 kV, Magnification: (Left) × 50,000, (Right) ×100,000
Sample courtesy of: Professor Kazunari Domen, Dr. Yanbo Li　Department of Chemical System Engineering, School of Engineering, the University of Tokyo

100 nm 10 nm

Sample: 3DOM Carbon, GB 0.3 kV, Magnification: ×100,000 Sample: Mesocarbon, GB 2 kV, Magnification: × 300,000
Sample courtesy of: Professor Andreas Stein　　 Sample courtesy of: Professor Ferdi Schüth
Department of Chemistry, University of Minnesota Department of Heterogeneous Catalysis
Max-Planck-Institut fur Kohlenforschung

Ultra High Resolution FE-SEM 4

 Energy Filtered Imaging With The New r-filter

Next- generation r-filter Electron probe

The next-generation r-filter is a unique energy filter that

combines a secondary electron control electrode, a
backscattered electron control electrode and a filter Upper Electron
r-filter Detector
electrode. When the specimen surface is irradiated
by the electron beam, electrons with various energies Secondary electrons/
Backscattered electrons Lower Electron
are emitted from the surface. The new r-filter makes it Detector

possible to selectively detect the secondary electrons

and backscattered electrons from the specimen while Sample
Secondary electrons (main component)
the electron beam is held at the center of the lens / Backscattered electrons

using a combination of multiple electrostatic fields. Next-generation r-filter features

In comparison to the r-filter of the previous model, the ・Optimized filter shape, with detector efficiency improved by a factor of 3
next-generation r-filter has a 3 fold increase in signal. ・Selectable detection of the electrons from the sample using energy filtering
・Easy operation

Secondary Backscattered
Signal Detection With The New r-filter electrons electrons
Number of electrons

Sample: White: Tin (Sn), Gray: Aluminum oxide

Electron energy generated from sample

SB mode
Detects secondary and
Detects all electrons
backscattered electrons,
it is a composite images
showing both surface
topology and composition

1 µm

SE mode Secondary electrons

Detects secondary electrons +
to observe real surface adjustable detection of
topology images
backscattered electrons

1 µm

BE mode Backscattered electrons

Detects backscattered +
electrons with adjustable detection of
composition contrast
secondary electrons

1 µm

5 Ultra High Resolution FE-SEM

 BSE Imaging Using The New r-filter
The optimization from the r-filter enables an improved signal, by up to a factor of 3 compared to the previous model.

Previous Model JSM-7610FPlus

Improved
S/N

1 µm 1 µm

Sample: Li-ion battery cathode material, 1.0 kV, Signal mode: BE100

Magnified Image Of Mitochondria

Two types of structures of the cristae typically
observed with TEM can be clearly seen.

Sample: Section of rat liver, uranium and lead stain,

5.0 kV, Signal mode: BE60, 100 nm
Magnification: ×100,000

Ultra High Resolution FE-SEM 6

 LABE Detector

The LABE (Low Angle Backscatter Electron)

detector is capable of detecting very low energy
and very low angle backscattered electrons that
were previously not able to be detected.
Detailed topological information of the specimen LABE
surface can be obtained at extremely low Detector
accelerating voltages, and compositional
information for the specimen can be observed with
good resolution at high accelerating voltages.

Sample

Bias voltage

LABE Detector: Low Angle Backscattered Electron Images

1 µm 1 µm

Sample: Ceramic with 2 phase metal eutectic, GB 0.2 kV Sample: Ceramic with 2 phase metal eutectic, 5.0 kV

Thin-film crystal grain channeling contrast can be observed using backscattered electrons with an extremely low
accelerating voltage.

1 µm 100 nm

Sample: DVD-RAM, GB 0.8 kV, Magnification: × 20,000 Sample: DVD-RAM, GB 0.8 kV, Magnification: × 50,000

7 Ultra High Resolution FE-SEM

 High Power Optics

A unique electron optical system allows a variety In-lens Schottky

field emission electron gun
of analyses and observation at high magnification.
The in-lens Schottky field emission electron
gun, which can deliver a probe current 10 times
that of the conventional Schottky field emission
electron gun (FEG), along with the aperture-angle Condenser lens

control lens (ACL) that can maintain a small probe

diameter with the appropriate convergence angle
even with the increased probe current makes it
possible to use probe currents of 200 nA or more. Objective lens aperture

The high-power optics provide all the performance Aperture-Angle Control Lens
(ACL)
you need to conduct everything from high-
magnification viewing to EDS and EBSD analyses.
Semi-in Lens
Objective Lens

In-lens Schottky Electron Gun In-lens Schottky FEG Conventional Schottky FEG

The in-lens Schottky field emission electron gun

combinesthe electron gun with a low-aberration
condenser lens toenable efficient collection of the
electrons generated from the electron gun.

Aperture Angle Control Lens (ACL) JSM-7610FPlus optics Conventional optics

The Aperture-Angle Control Lens (ACL) is positioned

above the objective lens to perform automatic Condenser lens

optimization of the objective lens aperture angle across

the entire probe current range. This makes it possible
to obtain a smaller probe diameter than is possible with
Objective lens
conventional systems, even when the probe current is aperture

large.
Aperture-Angle
Control Lens (ACL)

Objective
lens

Sample

With a large probe current, a small With a large probe current,

probe can be obtained using the the probe diameter
optimized angle of the ACL becomes large

Ultra High Resolution FE-SEM 8

 High Power Optics

Small Probe Diameter, Even With Large Probe Current

100 nm

Probe current: 50 pA Probe current: 500 pA Probe current: 100 nA

Specimen: Evaporated gold on carbon, 15 kV Specimen: Evaporated gold on carbon, 15 kV Specimen: Evaporated gold on carbon, 15 kV

Highly Stable Probe Current for extended analysis times

The in-lens Schottky field emission electron gun delivers a stable probe current.

Stability of specimen probe current

Probe current (nA)

± 1.0 %/h

Time (h)

During observation Probe current

Probe Current Detector (PCD)[ / analysis measurement

The probe current detector is inserted directly below

the objective lens, enabling measurement of the
probe current at any time during analysis without
Objective lens
the need to move the sample. aperture

Probe current
detector

[ Optional

9 Ultra High Resolution FE-SEM

 Various Attachments

Energy Dispersive X-ray Spectrometer (EDS)

The High Power Optics make it possible to effectively take advantage of the features of the EDS (SDD: Silicon Drift
Detector) detector that is difficult to saturate even with large probe currents. By using a low accelerating voltage
and a large probe current, good quality mappings can be obtained in a very short period of time. The images below
show the analysis of an extremely thin graphene and graphite layer on a Ni substrate obtained in 2 minutes.

CK Ni L

10 µm

Sample: Graphene / Graphite, 2.0 kV, Probe current: 10 nA, EDS detector: 30 mm2, Measurement time: 120 sec.
Sample courtesy of Prof.D.C.Bell, Harvard University

Even using a basic type SSD 10 mm2 detector it is possible to analyze the cross section of a multi-layer film of
about 100 nm in just 30 seconds.

Al K Tl K

1 µm 1 µm 1 µm

Sample: Multi-layer film section on cemented carbide (Cross-sectioned using CP: CROSS SECTION POLISHER) 8.0 kV,
Probe current: 38 nA, EDS detector: 10 mm2, Measurement time: 30 sec.

Good S/N ratio maps are acquired NK OK

quickly even on thin specimens with
a low X-Ray yield

100 nm 100 nm

Si K WK

100 nm

Sample: DRAM (Thin film processing with IS:

ION SLICER) 30.0 kV, Probe current: 2 nA,
100 nm 100 nm
Measurement time: 10 minutes

Ultra High Resolution FE-SEM 10

 Various Attachments

Wavelength Dispersive X-ray Spectrometer (WDS)

Because the High Power Optics provide a large probe current with a small probe diameter, it is possible to take full
advantage of the features of WDS. Using WDS enables confirmation of trace concentration differences or elemental
overlaps in a specimen, which cannot be identified with EDS.
BEI EDS WDS
CK CK

5 µm 5 µm 5 µm

Sample: Rubber (Cross-sectioned using CP: CROSS SECTION POLISHER) 5 kV Measurement time 60 minutes

Scanning Transmission Electron Detector (STEM)

With STEM, the electrons that pass through a nano powder or thin film specimen are detected. The data below is an
example of the observation of carbon nanotubes using an accelerating voltage of 30 kV. The catalyst particles in
the carbon nanotubes are just a
few nm and can be viewed with
high resolution.

10 nm 10 nm

Magnification: × 300,000 Magnification: ×1,000,000

Cathodoluminescence Detector (CL)

CL is a phenomenon of visible light being generated when a specimen is exposed to an electron beam. The light
that is generated from the specimen is collected using a focusing mirror and detected. The images below are a
secondary electron image and a CL image obtained with a diffraction lattice of diamond at 1 kV. Observing the CL
image with a low acceleration voltage reveals defects in the diamond surface with good resolution.

Cathodoluminescence（CL） SE image CL image 1 kV

Focusing
Beam parallel to the detector
mirror

Sample

10 µm

Sample:diamond
Sample courtesy of Prof.D.C.Bell,Harvard University

11 Ultra High Resolution FE-SEM

 Transfer Vessel System
The transfer vessel system is effective for air-sensitive specimens (e.g. a specimen adjusted under an inert-gas
environment in a glove box). The use of the transfer vessel system prevents exposure of a specimen to the air
during specimen transfer into the specimen exchange chamber, leading to SEM observation and analysis at good
conditions. The following data set shows that MgCl2 (readily reacts with the air) is observed under an air-isolated
environment by utilizing the transfer vessel system. Unlike the case where the specimen is exposed to the air, the
use of the system enables acquisition of a good image in which the specimen is not deformed because it does not
react with the air.

Specimen exchange chamber and

specimen holder applicable to the
transfer vessel system Without air exposure Air exposure (exposure time: 10 min)

Specimen: MgCl2, Accelerating voltage: 2.0 kV, Magnification: ×10,000　Specimen courtesy: M. Saito, TOHO TITANIUM CO., LTD.

Specimen Chamber Optimized for Analysis

The specimen chamber is designed to permit installation of the various detectors in an optimal layout, including the
secondary electron detector, backscattered electron detector, EDS, EBSD, WDS, STEM, and cathodoluminescence
detector.
The secondary electron detector, EDS and EBSD are positioned to enable them to be seen at the same time on a
tilted specimen, with the EBSD port perpendicular to the eucentric tilt on the stage.

LNT 　ーーーーーー→ ←ー　Reserved

予備
EDS　ーー→
←ーーーーーーー　WDS/EDS
　ーーーーーーーーーー→
Reserved
予備
←ーーーーー　RBEI/CL
　ーーーーーーー→ EBSD 　ーー→
LABE
←ーーーーーー　試料室カメラ
Chamber camera

STEM 　ーーーーー→ ←ーーーーーーー　STEM

A variety of accessories can be installed simultaneously

Ultra High Resolution FE-SEM 12

 Eucentric Specimen Stage

The eucentric specimen stage makes it possible to rotate, tilt and shift the specimen in the XY directions
with minimal focus deviation. All 5 of the specimen movement axes are motor driven. The stage is
equipped with useful functions for easy observation and analysis, including stepped movement, field by
field movement click-centering, mouse drag, and eucentric rotation.

Stage Map Navigator

A graphic display (both side Click on a destination
view and top down view) of position on any of the four
the specimen chamber. The displayed SEM images to
specimen can be moved move the specimen stage
using the graphic display. to that location.

Trackball
The specimen can be shifted in the X/Y directions
using the trackball. Operating the ring allows rotation
or Z direction movements.

Specimen stage panel and trackball

One-action Specimen Exchange

By performing specimen exchange using the specimen exchange chamber, a clean vacuum is always be maintained
in the specimen chamber column lenses and interior of the electron gun. This helps to maintain performance and
supports high-resolution analysis over long periods of time. Specimen exchange is simple using a unique one-action
exchange mechanism to ensure secure specimen exchange. Filling the specimen exchange chamber with dry
nitrogen also helps to minimize contamination.

　Specimen stage
Specimen- Type I: X = 70 mm、Y = 50 mm Type II: X = 110 mm、Y = 80 mm Type III: X = 140 mm、Y = 80 mm
exchange chamber

View entire surface of View entire surface of

Type I: maximum 150 mm −
a 86 mm diameter specimen a 150 mm diameter specimen

View entire surface of View entire surface of

TypeII: maximum 100 mm × 40 mm Height −
a 86 mm diameter specimen a 100 mm diameter specimen

View entire surface of View entire surface of View entire surface of

Auto exchange chamber: maximum 200 mm
a 86 mm diameter specimen a 100 mm diameter specimen a 200 mm diameter specimen

The observable ranges in the table are possible with a combination of X-Y movement and rotation

13 Ultra High Resolution FE-SEM

 Stage Navigation System [
Using the CCD Camera mounted on top of the
specimen exchange chamber enables color images
CCD Camera
to be acquired of the specimen, which can be used
to select the region of interest for point and shoot
navigation.

Chamber Camera [
The camera allows viewing the interior of the specimen
chamber. This is convenient for confirming the
objective lens position, in cases of short WD, high
tilt or where specimens with a complex shape are
observed.

Operation Panel
All operations of the JSM-7610FPlus can be
performed using the mouse, but there is an operation
panel provided to allow operations using physical
knobs and buttons, providing control for operations like
adjustment of magnification and focus. You can freely
combine the mouse and operation panel operations.

[ Optional

Ultra High Resolution FE-SEM 14

 Operation screens facilitate
easy access to many functions

The operation screens are packed with performance. The icons are arranged in a clear, rational layout to
facilitate use of the necessary functions. Files containing the standard observation condition settings
for typical specimen types are provided, simplifying the initial observation and analysis of specimens.
Users can also save their own optimized settings to reuse as desired.

Observation Full screen display of the live image

4 image display with live signal mixing 4 live image display

SEM Status Monitor

Displays an easy to understand operating status of
the SEM including the specimen holder, electron probe,
and detector insertion, vacuum level of chamber and
airlock, specimen height offset and specimen exchange
status.

15 Ultra High Resolution FE-SEM

 Report
The image view / report editing software is SMILE VIEW ™ offers a wealth of the functions needs to create and edit
reports . Reports can be made simply by displaying a table of thumbnails of saved images, selecting images, and
then arranging and pasting them into the document. The size and layout of the images can be adjusted freely, with
the micron bar adjusted automatically to correspond to the specified image size. Image brightness and contrast
can also be adjusted, including a function to adjust all the images to the same tone. All the functions needed to
efficiently create professional reports are provided.

JSM-7610FPlus

SMILE VIEW ™

JSM-7610FPlus

SMILE VIEW ™ layout

(with measurement result).

Ultra High Resolution FE-SEM 16

 Specifications

Secondary electron 0.8 nm (Accelerating voltage 15 kV)

image resolution
1.0 nm (Accelerating voltage 1 kV GB mode)

During analysis 3.0 nm (Accelerating voltage 15 kV, WD 8 mm, Probe current 5 nA)
Magnification ×25 to ×19,000 (LM mode)
×130 to ×1,000,000 (SEM mode)
Accelerating voltage 0.1 to 30 kV
Probe current A few pA to ≥ 200 nA
Electron Gun In-lens Schottky field emission electron gun
Lens system Condenser lens (CL)

Aperture-angle control lens (ACL)

Semi-in lens objective lens (OL)

Specimen stage Fully eucentric goniometer stage
Specimen movement Specimen stage
Standard Optional Optional

type I A2 type II type III

X: 70 mm X: 110 mm X: 140 mm

Y: 50 mm Y: 80 mm Y: 80 mm

Z: 1.0 to 40 mm Z: 1.0 to 40 mm Z: 1.0 to 40 mm

Tilt: -5 to +70° Tilt: -5 to +70° Tilt: -5 to +70°

Rotation: 360° Rotation: 360° Rotation: 360°

Specimen holders 12.5 mm diameter × 10 mm thick, 32 mm diameter × 20 mm thick
Specimen exchange One-action exchange mechanism
Electron detector
Upper detector, r-filter, Built-in,Lower detector
system
Automatic Functions Focus, Stigmator, Brightness, Contrast
I m a g e o b s e r v a t i o n Screen size: 23-inch wide
LCD
Maximum resolution: 1,280 × 1,024 pixels
SEM Control System PC: IBM PC/AT compatible computer

OS: Windows® 7 Professional*

Scan and display Full-frame scan
modes
Real magnification

Selected- area scan

Two-image display (with different magnifications, different image modes)

Two-image wide display

Four-image display (four-signal live display)

Addition image (4 images + addition image)

Scale
Evacuation System Gun chamber, first and second intermediate chambers: Ultra high-vacuum dry evacuation system using ion
pumps
Specimen chamber: Dry evacuation system using a turbo-molecular pump (TMP)
Ultimate pressure Gun chamber: Order of 10 Pa (for standard configuration)
-7

Specimen chamber: Order of 10 Pa (for standard configuration)

-4

Principal options *
1
Retractable Backscattered electron detector(RBEI),

Low angle Backscattered electron detector(LABE),

Scanning Transmission electron detector(STEM),

Stage navigation system, Chamber camera,

Ion cleaning device, Energy dispersive X-ray spectrometer (EDS),

Wavelength dispersive X-ray spectrometer (WDS),

Cathodoluminescence Detector(CL), Variety of specimen holders

17 Ultra High Resolution FE-SEM

 Installation Requirements

Power Single phase 200 V, 50/60 Hz, 4 kVA maximum,

During normal use: approximately 1.2 kVA

In energy-saving mode:
(Evacuation system on: approximately 0.8 kVA Evacuation system off: approximately 0.4 kVA)
Voltage fluctuation tolerance: within ± 10 %

Grounding terminal: 100 Ω or less × 1

Cooling water Faucet: 14 mm outside diameter × 1 or ISO 7/1 Rc1/4 × 1

Flow rate: 0.3 to 0.5 L/min

Pressure: 0.05 to 0.25 MPa (gauge pressure)

Temperature: 20 ± 5 ℃
Drain 25 mm inside diameter or ISO 7/1 Rc 1/4 × 1 (A cooling water circulator is recommended)
Dry nitrogen gas ISO 7/1 Rc1/4 (Dry nitrogen gas must be provided by the customer)

Pressure 0.45 to 0.55 MPa (gauge pressure)

Room Temperature: 20 ℃ ± 5 ℃

Humidity: 60 % or less

Stray varying magnetic field: 0.3 μT(P-P) or less (50/60 Hz sine wave, WD 15 mm, accelerating voltage 30 kV)*
1

Floor vibration: 3 µm (p-p) or less at sine waves of 5 Hz or higher frequency *

2

Acoustic noise: 70 dB or less with flat characteristics *

2

Floor space: 3,000 mm × 2,800 mm or more　

Floor height: 2,300 mm or more

Door size: 1,000* mm (W) × 2,000 mm (H) or more

3

Installation layout
3,000 or more
N2 gas

Drain 455
Faucet
180

RP
Switch board
2,800 or more

PC
1,125

Display
1,000

(350) 790 1,200

Entrance
1,000 or wider 0 500 1000

Unit: mm

＊ Microsoft Windows is registered trademark of Microsoft Corporation in United States and other countries.
＊1 Standard vs options vary with geographic location.
＊2 If the actual conditions do not meet these requirements, we will check the room before installation and
consult with the customer about the maximum observation magnification.
＊3 If the door width is 900 mm, please consult us.

＊ Specifications subject to change without notice.

Ultra High Resolution FE-SEM 18

No. 1301H795C Printed in Japan, Kp