Sant Dnyaneshwar Shikshan Sanstha’s

Annasaheb Dange College of Engineering and Technology, Ashta

(An Autonomous Institute affiliated to Shivaji University, Kolhapur)

B. Tech. ( E &Tc Engineering ) (Semester – VI)

(For Academic Year 2021-22, Even Semester)
MEMS and SoC [0ETPC444]
(Assignment No.-I)

Unit No. 1. Marks CO BL

Q. No. Solve the following questions
What is Micro fabrication in relation to MEMS? 08 [444_1] K2
1

What are Micro-electromechanical systems? Describe its applications. 08 [444_1] K2

2

Explain bulk Micromachining in detail [444_1] K2

3 08

Explain Surface Micromachining in detail [444_1] K2

4 08

Explain LIGA Micromachining in detail [444_1] K2

5 08