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Dept. of Quantum & Computing Keysight Technologies Inc. Delft University of Technology
Engineering; QuTech Santa Rosa, CA USA Delft, The Netherlands
Delft University of Technology
Delft, The Netherlands
f.sebastiano@tudeft.nl
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Fig. 3 (a) Adjoint ANN training of the model gate terminal charge function
from CGG and -CGD data. The Adjoint training method utilizes a more
complicated ANN network, but ultimately returns an ANN model for the
terminal charge Qg (this figure) and similarly for Qd, the drain charge,
assuming a three-terminal device structure with the bulk node shorted to
Fig. 2. (a) ANN structure illustrating the ANN layer structure, its the source. (b) Quasi-static model obtained by combining the voltage-
mathematical description and a plot of typical univariate neuron controlled current source ANN for the drain current with the two
nonlinearity (sigmoid and threshold functions). (b) Modeling flow: Given independent terminal charge ANN model functions for gate and drain.
the measured data, an ANN model is automatically trained (constructed).
The trained model is easily linked to a circuit simulator, e.g., Keysight
ADS, for high-level circuit simulation and design.
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shown in Fig. 2b. Given the measured data, e.g., drain current functions to bias-dependent capacitances (e.g. CGG and CGD)
from sampled bias points and over a wide range of temperatures that can be obtained from S-parameter data [12]. This requires
and geometries (widths, lengths), an ANN model is a unique kind of automated “Adjoint training” [10] that
automatically trained (constructed). The trained model is easily essentially performs line-integration of measured data and is
linked to a circuit simulator, e.g., Keysight ADS, for high-level illustrated in Fig. 3. This approach is generally superior to a
circuit simulation and design. direct numerical line-integration approach for several reasons,
as described in [13].
B. ANN-based Nonlinear Charge-based Capacitor Modeling The implementation in this work, however, ignores the effect
Unlike drain currents that can be directly measured at of independently biasing internal nodes (e.g. the bulk node), and
different bias conditions and used to train ANN functions with effectively treats the device as having two independent terminal
standard techniques to produce voltage-controlled current voltages, drain-source (VDS) and gate-source (VGS) voltages,
source elements, the charge stored by device bias-dependent assuming the bulk node to be tied to the source.
capacitances cannot be directly measured. Instead, the nonlinear
charge functions (modeled by voltage-controlled nonlinear III. EXPERIMENTAL RESULTS
capacitors) can be generated by training ANNs to A. DC Characteristics
simultaneously fit the partial derivatives of the desired charge
Experimental cryogenic data were obtained from an array of
NMOS and PMOS devices fabricated in the TSMC 40-nm bulk
CMOS process and comprising 400 different device geometries,
ranging from minimum (W=120 nm, L=40 nm) to large size
(W=10 µm, L=10 µm). The drain and source of all devices share
the same Kelvin connections, respectively. Individual transistors
are digitally selected by either shorting their gate to the
appropriate supply rail or an external gate voltage. Assembled in
a ceramic DIP package and mounted on a PCB, the die
temperature has been swept by inserting the sample inside a
liquid-Helium dewar and varying its height in the Helium vapor
or in the liquid Helium. The chip temperature is monitored by an
external Cernox reference sensor in thermal contact with the
package.
The drain current has been measured with two Keithley
2636B Source Measurement Units (SMUs) by sweeping both
VDS and VGS over the range from 0 to the nominal supply voltage
(VDD=1.1 V) with the source shorted to the bulk potential
(ground for the NMOS, VDD for the PMOS). Although the data
has been acquired on a regular grid for VDS and VGS, this is not
strictly necessary for the ANN training. For instance, the width
and length of the 400 geometries are not linearly spaced but
logarithmically scaled from 40 nm to 10 µm, in order to sample
the region closer to the minimum size more accurately, since
those devices are more relevant for circuit design and more
significant variations in their electrical behavior are expected.
The ANN model has been trained over the drain current data
measured at 4 K, 100 K and 300 K, over a bias grid of 12 VDS
values × 151 VGS values, and for the 400 geometries to learn the
constitutive relation ID(VDS, VGS, W, L, T). The training required
24 hours on a 4-core intel i7 workstation with 32-GB RAM. The
resulting model fitted the measured DC characteristics within a
1% RMS error. Examples from a few selected devices and
temperatures are shown in Fig. 4, demonstrating the quality of
the resulting models.
B. Model Validation with Static Circuits over a Wide
Temperature Range
To demonstrate the potential of ANN models for circuits
designed to operate over a wide temperature range, the ANN
models have been used to simulate the cryo-CMOS voltage
Fig. 4. Examples of extracted models compared to measured results for 3
seelcted devices; red circle: experimental data; blue line: model.
reference described in [14], which has been designed and tested
over the ultra-wide temperature range from 4 K to 300 K. Four
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devices (2 NMOS and 2 PMOS) from the test chip described in IV. CONCLUSIONS
Section II.A and with geometry closely matching the devices These results demonstrate the utility of automatically
used in the circuit were measured over multiple temperatures (4 generated ANN models for cryo-CMOS applications. By
K, 20 K, 40 K, 80 K, 120 K, 160 K, 190 K, 220 K, 300 K) to get avoiding developing specific physics-based models and
a smoother temperature behavior. Circuit simulations with the minimizing the required characterization data, the proposed
resulting ANN models showed a good match with the modeling approach can significantly accelerate the development
experimental data over the whole range from 4 K to 300 K, as of the complex cryo-CMOS electrical interfaces for future large-
shown in Fig. 5. scale quantum processors.
C. Model Validation with a Dynamic Circuit
ACKNOWLEDGMENTS
A dynamic ANN model based on the quasi-static approach
described in Section II.B was generated from S-parameters The authors thank the legal teams of the TU Delft and
obtained from simulations of the same devices using the Keysight Technologies, and Keysight Laboratories and
foundry-provided models at 300 K (the foundry models are not Keysight Quantum Engineering Solutions organizations for
valid at 4 K) and measured I-V data, and has been benchmarked encouragement and support. The authors at TU Delft would like
by simulating a 500-MHz inverter-based ring oscillator to thank Intel for funding.
employing 142 digital inverters (and a NAND gate). Although
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