Name: Safdar Mehmood

Student ID: 2021A8015926007

Design strategies to achieve 10-6 Torr and 10-11 Torr in a vacuum chamber

Procedure:

1) Turn OPEN valve 1, valve 2 and valve 4 and CLOSED the Valve 3 so that the rotary
vane pump is connected to the vacuum chamber through the bypass pipe and generate a
rough vacuum (760 to 10-3 Torr) inside the chamber.
2) When a pressure range is reached 10 to 15 torr valve 2 is CLOSED and OPEN valve 3
while Valve 1 and 4 are remaining open . so the roots booster pump and Rotatory vacuum
pump are connected in series with the vacuum chamber. At 10 to 15 Torr (low pressure
range) is suitable to operate Roots pump efficiently. The Roots pump generate pressure
from the chamber and rotatory vane pump discharge the pressure from the chamber till
the internal pressure become 10-5 Torr which is consider as high vacuum level.
3) Once the internal pressure of vacuum chamber reached in the range of (10-4 -10-6 ) the
Valve 1 is closed and the vacuum in the chamber is sustained then the Sputter ion pump
in action which the vacuum level of the chamber into ULTRA-HIGH Vacuum region
typically 10-5 to 10-12 Torr range. The operation of sputtering ion pump take the fallowing
steps.
a. Create a high magnetic field
b. Generate a plasma
c. Ionize gas molecules
d. Capture gas ions
4) Once the vacuum level reached in the range of 10-6 to 10-11(Ultra high vacuum ) which is
carefully analyze from the vacuum Gauge then closed (shutdown the supply ) sputtering
ion pump.