HMW - 3

Q1: How to make doping in Si? Pls explain the importance of doping in solar cells!

Q2: Explain the Si-wafer production from raw material to electronic grade Si-wafer

Q3: How you can fabricate 10 nm thick high quality SiO2 on Si?

Q4: Find out 5 different polymer materials used in fabrication of nano-featured patterns on Si-
wafer? Explain how to obtain nano-structures? (hint: co-polymers)

Q5: You want to deposit 300 nm thick SiO2 on (100) Si @ 1000 oC and then you want to grow
additional 100 nm on the first one @ 1200 oC. How long does take to complete the
processing?