Individual project/assignment

1. (5 points)

Calculate the required voltage for the comb-driven actuator to pull the moving electrode 10 µm from its
outstretched position of the spring. Assume that the stiffness of the driving arms can be made equivalent
to a spring constant of 0.05 N/m. The comb drive is operated in air. The gap d between the electrodes and
the width W of the electrodes are 2 and 5 µm, respectively. The rotation of the electrodes from the
bending of the driving arms is negligible.

2. (10 points)

Please carefully check the research paper:

Kane, B.J., M.R. Cutkosky, and T.A. Kovacs, A traction stress sensor array for use in high-resolution robotic
tactile imaging. Journal of Microelectromechanical Systems, 2000. vol. 9: p. 425–434.

a. The polymer protective cover in the paper is provided by gluing an elastomer with adhesive
backing. However, the adhesion of the polymer to individual shuttle plates is not controllable.
Discuss an alternative design and process of a tactile sensor, with similar functions as in the case,
but with an improved method for integrating the polymer with the silicon parts.

b. Discuss the reason for selecting TMAH as the silicon etchant rather than EDP or KOH. Identify and
cite supporting evidence from the literature.

Deadline: Monday, 18 April 2022, 10:00 PM