519722, 8:08 PM .3P2001205600A - Fine structure and is manufacture - Google Patents Patents JP-2001205600-A Fine structure and its manufacture Abstract JP2001205600A haa inh carole se sconce, SOLUTION Te alin nanosbe fred an ° falter sane The nh of shmina ranoeube carlo the phat of alia naobes St F srajed ap togethorn burch Inver Tetsuya nas 33, Tor Den 2000 -ppeatonsP2000019245 evens 2000-01-27 Appice ted by Canon ne, #7 AAR nected y (5), Stir documents Poy en Reed Apples ‘teal inks: Escort clo Dossier Dsus Claims (1) ide Depencet = [oti ester compriingsuin avn eluate shape with ices o S00 oe bang clin pres perl othe colin shape.2.The vores searing toca where then oft cokmnar por ar open 3 One ert he cokers pore pen Themicostucure azotng a clin wherein he ote erie caeed A microsucure where a laly of si icosbucues ae raged an asserted inabunde 5 “hamieesttre acne oc whan he heres othe irene Is} ym ries 6 The most secdng tam wert proededin he calunpa! pote ofthe mesic. 7. The msastuctve aesargta lam where amet fla We clr pote of he mostuetve 8, Amati aed 8 ricrostucture made of amina having 2colmrar shape and having clue pores paral the colar shape, wien ast At tp of forming more than one lo ‘peering pin and ang ich pores ee provid ecorance wth he Kind the pereetaring pol by aneding apron he meee ain containg Shinar sonra sie offorming aminaahsste of elmnatng at fhe aoszed alrna accra te ye ofthe pare staring pon ne isaesing the anced shinne tothe aut te cba amos Aether er racing amicostucie comping forthe. 9, The pre tating pot has a concave shape aa ‘cared wit te sacunigs ad te fet step offing he pore staring pat forms atleast two ore yes of poe stating Dons tang ferent cance shapes. The hod for producing a microstruc aoring techn when he method ia ie of 10 The fet tap forming the pore staring pit tp foing at ast wo cr rare type of pore starng poets hav tet depts of the concave shape 3. The method for produiga merece aceorengo dam 1.1. Themcostuctre ‘cording to hie 8 hr he peering pout ia frmed by radiating apron nin creed ef lumina ith aceon bar. anf met. 12. A retod fo produong aie stucre made of uring having a come shape and Nevin cola ors paral the clue shape, he ateas 2 st tp of forming regiors hag ferent pest pore string pnt arangerents and aneding a prion ofthe wakpece many cataning mina oar pores in accordance wth *herepons havng fern pare staring pant arangement seed step of fring aroazed aurin prone wth ati step of eminatng apart te apogee luring step of dsocatng bt af struct 13 The st steps step of forming atleast we ore yes oregon havo eet ore stat ol ena hawng ferent pore star por neva 14. The mead fe producing a most ust eccordng teal 12, wheren te pte larg pols poduedby edge focused lon bean to portn ran compoced of siirum. 15.8 miostuetr produce bythe manfactiing methed code oda 8 Deesiptn Description tateeed om Japanese tooo arteuth oe nano material mee of aoa whic canbe wey Used as afurctonal materia eecnic deves, etal dees, mit dels, te The present (ooo) amt519722, 8:08 PM .3P2001205600A - Fine structure and is manutactu 2 Desert of he Related At Metal an sericordictr hi fins, ets. dos ane the ae eget ate 2 te mar han cian characte leigh nen te movement feeevons scone, may ex urau eer opt. an chercal papers. om such aWewpont. thre 8 growing interest n rater saowacizes) hain tutus ethan over! 00 ra fet malar Google Patents [ooo Aca method for roduc such ananasivee, For examplpotslthgraghy lecton bea exposure ‘Theels@mebod of erect marae enanostusteby a sericeadute processing econ such cerponue Oihernnssrstrefabrenion metho rls: tve-ine parce materes te erp ied. Such an ute petele meters manufactured a method such as evaporation a gas ose inept ong ehnolgy ash eb Ke0y [oo04] on ene the ann asta o such manfectung method. an ates been mace tora arovelnanestire baton a eur sce forme rua hls.» sectreomed se reo Bere. Mary sues have begun a these enue Deca Dera pasa that ae! ad api auc ‘canbe prsucas rare than areonl matossdepnang ob a merosturie ured ea base (0005 An exanoe of such slog metode anode oration whch can eal potice a rarartuce hag nansize pre nace nr ot ‘cramp snodied luring produced by enedingahumium aris loys nen 218 bth known. When anedrg al pitein an ace lec, ' porous ode im rede alumina) farmed fr exept, A Funeau, WR by) EA P Dod MATURE Vl 397, P14 (188) ). Ths porous onde hat a ope eam sete nw emi eb ae etsembld and aang uting a col auricle Sunt srt, The cate f each shri cl haat sete of etl mo severance ‘having extemal re eed pes nae hols ‘The dstanes bewoonthe pre aresponde othe ell as hl the dee of the slumin ee ndrarge om severe to several handed Thea enor pore ave high epee and excelent in ioral ree sectonal rete. Te Grete atl pacing te pres re contigo treet by ajng he oer nate orig ae oxen and he heenes oft cei athe aephf he pore arecontaledycanoing he rede idan tne posse, ‘sa, the erty othe pores of anoiz04 amine, Inordertsimproveinesty ar indepecenca,amthad af pevloming two-stage anes cud that nie evi te pra ade flamed by aeons {ano onsen, performing nace oan agin eban beter vray. A meta fr rodkcing anoeze luring ordered rantoles hava pees exng Tees arindeensenc hasbeen proposed ip, Jounal ps). oped Physics vo. 35, Par 2,No. 1p L1264128, 15 January 1936). Here his method uses that ne depression onthe sua ofthe aluminum pl formed when removing he anode oie fim formed byte est ‘nedetion,« metre of ming epee starting so byes patering tia depression fre by pressing esubsveleheng 2 play of pets on he srface of aiirum plat a3 pre staring ponte ore Artie of predcig spore de ln ang pores etbsrg betes cael ofthe hap, pace ‘nd ptier by petonming ode nation tt hanes buen proposed (JPA 1012292) ‘rou apslatans hve ban ated focusing onthe pee gamete srchie ofthe anodaed luna The xp hstonby Masse dete, bt the sppeaionxanples a lstelow Fr example bere a appeton a ln zg the wear teutance adinslatnreaitance of he adic fin sah Speen toa ker by peng ten, Furthermore, oy venga tenis a Fang aranhole wah a mtalorssemicendvtor ers rela tecniga af he nacho, Calor 2 magnetic resrdng medium an light erie element a dechorlvor element a opel element 2 ob cla. g senate Various options have been atepte, Woreove, chemical eect el. (a5, ‘Sls Phys 3, 43101958) tooto, ‘he arect abeation of rarastrcired mately th semicocucter rosin tshique desorbed bows aie probs sch oot elt andish ent coe andie sno and as goodrereduiy. method that an be manus she. ‘on te otarhand nthe production of rane partes, eer, Soe aproers sch as quer ot agafegation ie uae It ic produce a nanceucurehavng att epereal shape nda completed srt. In ‘don seta ture amaeralhaeg high anormiy mn setwe ands aon htemparatr protests sich ge veprsion re genera ured Fabrcaton a loemperaure process eae ‘The serdong matoddescced above partly the aed oto metod can produces nanostructured ateral eal rath oodcoral However sce ‘henenosmutred mares grea omes as en onthe surece ofthe mata use Was red. Aaugh ef use alr asocston colt ‘the oher hand sa nanosized matithavng sync! shape, carbon nanotubes ant thee ae few pet of produ # nical nano sttred ratral vengottarmaterale Sree ath oni! anorrtred matel opens ahve vars freon y Fang sallow portant a afer atest ‘ealztn of any males ese Ft erp ile ne yal aterseal made of ning ate an nur coated naronte canbe fore requred to eanon ne octon of te sagegt.iperant. raforcing materi ora cela matealexcetenunformty the fn uct ard ize ie An otecof te preentnvntanis ta aah these oben. That sat abet othe precet invention sto proée cynical nanostuctredmatralhavng a hty convo ze ene structure ad in pertet, to peduce eirina nanotubes en alanine nate avis, Rete! bjt he pest veton a pov rnthod for producng sch a nnosrctre ater Fatherare,anovelanesturued mail rdnanostetire de av Selcas bed on luring arouse oreduedy epg ths teeny, rnenceles can be use as feetonel atria vaoue etn, hitpssipaterts.google.compaterlJP2001205600AVen?0q=JP-2001208600-A aint519722, 8:08 PM .3P2001205600A - Fine structure and is manutactu looral Google Patents ‘The sbove bets canbe taney the floning constuton an manufacturing mths of he preset averton Tht the fst ewenton of he preset nventons [oor Amicon checerzein tat bth endo the clunoer pares ae ope peered A itosnucure carcezed in tal one ed of he cline! pore Isopanardine ote end lass A micosute shancarzee nia splay ofthe moose ae aranged andacsombl in bundle pefenle povsofthe mistrust perened, Armorostaetue nuhich metal ille inh cova pares ote morose peal. ‘The sesoninenion fhe patent etn ees os metho for produc an ature mace fsninahvig 2 column hap antag eolurnse pres pura! te clunaa hep, wheres linus main sed A Http of forming teas wo of more pe of ote starting poison a Worle having potion ad anoszng th aluminurased prion afte worker and s.jecing the portion andar acording ts the typeof the pore staring po. second Step forming andleed alumina proved th pres, atid tp of minting pat oe aroized alumi ezerdng och ype fe ete staring pont ahd And ‘The pore string poirthus a concave shape a compared wih he surcundgs ed ease of oring We ote start pot sep fering test ta rare tipes por saring ponte hang df cansave tapes i eters fate a method for rac x fe sare charateroea byte flowing “Theft te of omg the poe staring pot i te of oi at ae or ote nds of pore staring pots having diferet depth of th concave shape. The rad prefered. The mead for producing amlostuctue ie haracerzed nha pore startg pots procuedby editing focused on beam ote rainy composed af irar, Furteainetton ofthe preset ivenons meted fer produc fine sce made of umn having columnar shape ed having clue pees tale poms on a werkpece nevig a porte, and aredig te elunur-sesed orton fhe wolece fom the poe starr po secur ste of ming anced lumina provin wth oer acordng ath rar regine fhe atangemen, and te atp of mina part the apaczas sana searing the “tern eons the stag ok erangemeno the pees Ard fou se of usocabg te anedzedcumia tm th suaguate lo bien an svete “ha fest opin tof forming at east wo ora ype of eins haig feet ne ween ha slartng pol of pos andthe thd snp in te of ‘orming aneized ahr acer oe gins having eet eras bebe Be staring pbs of pees Pee, a metod fr podihy eine cies 8 step ofelminatnga partf refi structure (o024 A ath or produc fe scl characte a he pore stating Fb pace yada a facated io bear ox pron my compass of ake, Fart fourth aspect of the patent vento a mirostuetre produces by fe sbovedeeesbed manufacturing ethos econ othe reer vention a ie stucture particular anche, fa lumina arotube bund whic sre ararges canbe posed fete, ‘Therese! ention es nanostuctred teal wth tigh uote ad shape by lw temperate rceste sucha aon [large amaurt of alumina nanaibes ean be ross speci number of eaira nates rare, nenesrutured mater having new futon canbe obaned Far xangh,by embecing 2 metain a urn nanetube ea sletg-neted rane Furth fs fhe preset vein path io abe ath uring ante led wh th fectonal tel maybe ued ab cotentachemisl acon veel lt esereg boy srenorengrteral arabes, ars an insulting mater acosmet cn be apple ‘ares wide ele such as chericl pats, magnetic maleviae, decvonc mets, ad eptzal materia (ooze) ‘Asa preteredenbodren ofthe miciostuctue fhe presertinveron an aura nanotube wile partly describes Suture of AiiraNaraube 16. toms an example ote eture fhe sina naotbe ofthe preset verion 16 Ine above 5112 aiinanaotbe 52s eluniba 53's pre ranche), tis ah open en 56 lea cosed en ard Si ing ‘Themiroatuture (lumina rate) 51 ofthe preset enon composed af dinar S2hvrg eur shape rami Shaving x comgositen may composed of oxen, thas ecolnar pte 5 parte be ue shape, Tat it haba yaa shape avn ales covered wth le sevnrat9 500 {era sinthrangeof 10m to 100m. he aluminate luring enue of he preset invention nl conta uminun ane oxyen Bt nay coin au purty elements sch Ma, Cr nS ‘The amin rarlue cf the preset invertion is show FG. [Asshown in (0 the ater bape anther” shape seb substantial cynic the cute shape lea hevapoal lr ora queer a shawn 15. Colma shapes are pose Nee tat he couna shape olde shape having an aba aspect toute lareter/ rg) es ges he above ses ‘As ahown FIGS. 1(0),1(8) an) an aunina note having both open eas, ‘As shown in (and) thre an lira nate faving ne en open anh ther enlace Fut a shown FIGS. 1) an (cons tel uch a ral ora econdtr canbe embedded nthe larina nance Fo exe by og a stalin an alumna nancte, an slg aed ranwie can be cba hitpssipaterts.google.compaterlJP2001205600AVen?0q=JP-2001208600-A ait519722, 8:08 PM .3P2001205600A - Fine structure and is manutactu FG. 2ahows an exrle af he tr the icroebuctueahimina anatube bul) o the presen inveslon. A shown MFG. 2 he alina nate bund of ‘he pect ive asa srt n which alumi nanctube 1 (turin cele 5) ate asserted nc ararge, Alumina nencubes having colina pores (paral) atthe comer areal shat ath pre Sb Cane aranged substan praelo one aster ent equleetl. is severe severethuneed re. Also, isthe heh of he alin paotbe bul, nc he depth eng) ete pres 53s, or example, between 10 nm and 100, nthe gee the ina cel is ran a hergorl colin and he pores are dawn 3b yer However the pest eto ot ed tothe epeaing onthe manufacturing onde, nd rayhave an etary colunna shape such ae an eltialcalumn or prem Google Patents ‘The arargerent ofthe liming nnotbes inthe amin nanos banal of he preset iventon mayb forsale weimension late arangerant a2 ‘on IG FG. 108 shows wg ate arangemer and 1,108 howe a eragnal ates aranerar, er bay latice arama nye ute tar these nanotube th present veto. space rar an pes sangeet of lumina rartibe ean const an alurnananeine brs, or exaale, FIG 2 (a shows acne inhi we aimiaranlies sre bundle ard IGS. 7) and 2) saw ener whieh De arargeant tthe bans tecteer FS Ile alo posse to ered afrctoral matrilsuch a metaland somlonducterin sch an alumina nanotbe Inns faumioa caso subsvete and en assaate the anode alone rom te subset. Can be ade tbe arazed alumina Yeon formed onthe subevte a show inI6 78s sgleizoltedlumin cl sage alure cl ats, an alumna nanstuse canbe ota aden FG, 8 eG A shown n (2). te repofotmed sedaed luminal foamed by fv andthe slurna cel pentane ander sbi rarstubes canbe obised aepctiey nie way. ae dion FG fy forming anid alumina a bier pattr ruts of dina cal, rode lin in which specie number faint calls are arangedina spect matoer tats lara arate bundles can be roced ‘Thereporfomed sodeed sluninainle rt tp af fring a est wor mee eds of oe ating pln of a workoece ng x parton maitly eamposee cof uinunoan be predued by pafoming second step eroding oem arozed mina ane ath step of inaig pat ofthe ara auming sccording othe ype of he pare staring pot Inedsion te et tes step o faring aca! oor mor ype of eginshevg een pee stating peut sequences, [Asathea stop, te soczes alarnacan se formed emnmirg medaed simian aezarancs wih te type of pore staring pos sangeet. erent tenet ft rodcing alumina notte fhe resertinenton willbe dazed wth reeterce a FIFI. 3ina rosezectnalvew tg rsd for producng an arin nance othe present nvctan. The folowing ses () (0) conespond oe). ¢ ©. (A Werle preparatn Fat he wopece 7s reared. The workpiece ofthe preset nventan he perton many compas of amnum, ‘An cxampl of thos embediment ofthe werkplece according tothe present iventn sa bukmilycompssed of ich aan alennum psc ran lumina Dn example tch fle 2 coneing Alea man comnertifrmes on bie 19s aloud nts as, eras of the substrate de substrates sich ae sinsdatig edbstte suc es uur las a aericondict! abate auc asian and gallu este we substate in hh neo mere yes ate ‘ore a ‘tose sutras Foresarge, fa subst ora y forming const ln sucha TUNB or Gu on aubetaen uses poste to merase he wnormyof ‘hefnllgh of te alanowenanbe In aldo se «metodo forming afl contring Ala ema conpanes, wy fy frmg-etiod nein teitance heating evaporate, 8 eraorabon spur, CV. and pat canbe applied (a) step ot rnin Pore tt Pint nthe, pore tt pint 2 ferme aa desired posit parton of te warpiete sin canting AL Pore la pt 2 Hes aerertphyecal poperte uch as shape, emsoston cyst ee. compared os serous Asa mathd offorirg he pore staring pon hr are amethod fang a ocutd on team () amethad fun SPM (esting abe microscope) zh ae ‘AM (ome fre mtosepe), For exam emetiod of forme dent sig pes aterng closed in JP-A-112292, method of oming a derby eehing ater ni step he pores ae termed eontoing We arengement shape of oresin othe poe ating pl 8y colin Ie poe stag pit hecomes esse cotal he arapgemor. ton postin athe fhe alumi lls nthe pres, an ure o ental formation of reglons Species, moot raretypes af pare staring pots eins havig ferent pore tring poi rages ate oe, Acer tthe Kn ard angen of hese pre tarng Doss becomes posi fo form anodaes luna ar aegon withthe somina onl Soa asus Foreranpl a how FG 6 (3) by fm woke of poe staring ptt posable form an alumina elena shown nF. 629.7 ~ 9 0,86) and 90) respec bye arangement ofthe staring ots a own FCS. Ihisponsba tom snoded ama region a shown (nado by contig te ype and arangernnt fhe or staring pints pose oom an say reglon nants of aunnacels ure: b concn th poston and rangement ofthe staring ins of the pores, the arangument ofthe alin col S andthe pores 3 an be conte For ‘rapl shonin FG. 10 he lina cals maybe anange ie two-émersnal atc. FH 108 hows square late arangeren ang 16108 shows a bsagenal lice sarge is ease te poe stating pls fst faredin a wo-dansional ate. yep he eg staring post canaon dope htt, regu eodmensonalarangerent of shmia cei cab alae gest andthe andonsaton ‘The shape of the sumin naoute canbe cole to sare exter by he alin cel arangeet For eval a heapoal ite arangenest both te outer ‘sap anche ner ape maybe a bexageal prism having rounded comers. or maybe asubstartally peret yer. n thet cases, a square toe arangemert ay lake a ape cae toa queregu prom, Inparecur since te arangement ofthe amin cols andthe pores enés be arranged in aheagenl tie peten duet setarganzaton dng erode xt, Ie prtorbleo previa fom he par staring pots nateragoral ace frm, this ne, ios there sacral betwee hella a the rad xaton| ‘andthe tra bewoen he pares itis preferable et te poe stating pont in cansieaton a he teva hitpssipaterts.google.compaterlJP2001205600AVen?0q=JP-2001208600-A am519722, 8:08 PM .3P2001205600A - Fine structure and is manufacture - Google Patents moder topic we ormare ind of erent poe starng pls as descbed ahve nthe method ug fected ln bee the fected in bee raion ‘our beam crete on eradaton energy. et 8 cooling he dition codons ts oss ocaohe cooave shape end te eompetion of he pare ‘tung pont leche sng pres plang the eh and ren of fe cuncare shape athe starting poi the pecan be corte by pen xing ‘he shape of press pattem to aceereg shape Inthe metas ug SPM, he concave shape athe pare starng pot fr exarple, te depth canbe contol by, surface png @voage othe short had ean be ple. nts case the shape ad cmposton of he pore starting pot can be cooe byte vonage, ne, ‘mong thm he method using aceon beam ation does ot que complicate ses sich as ress coating eeton Bean eposu, anes emova and forms aperestntng pont 3 sort re, ipartulypeeate om he enol tat ean be applocto a orkpcs harlow mechaniealsength Beaute Ie posse apie presse ome wongiece does ot edo ep eco the wodoice ‘ha farmaton fhe pce trtg point tng the fsa am wb arta decorate Ga Shih a dma on sou, tea the on speci of veal nels C5 Nu, ard Me, nd, N HH nthe eh at fl oreatin on ones ‘Thelen specs ofthe focited inbeam is a telly Urited along a theres ne prblemin loin pre by ancien. Te beam arte of the focused in bear maybe the range of abou S10 1000rm. beam sty in aditan shown FC. 4, here's method of radatng a osusedon beam to a workolce to paral ine Wrasaton stars 32 havea tere formed at erection 33 fhe ne ‘hereacon ay the poston whee she ocuaon bea aqueth ade isthe staring pt ofthe poe thats ate ferent rom the cursus ferme onthe wutoce ofthe wogiece by ion ipl ore elaing. is presumed Daten onda rend. Fue as descrbed above the shape and ‘ampestion of he poe stag pint ean cantly snoling theo radaten suntan edition ney. Seam ameter ate ke (€) step ot Faming Pare Ae shown nF6 (0 by subjecting the atovemeronedwortlece to sto adaton Leste he porn mally composed feta Ie conredinteanogaes ana, 1. Schema shows nanadiing appt usedin the top Shown MFG 5 7lseworglece, 7s aemasa 42a caode ot Pee, 3's an ecole solani eacton vessel ‘les power sep forspphirg an soding okaps stds ean ammeter fer meat an srodsingcrer AlRouph rot shown nthe feu, compte or util conoang ard meesving te vote and cure ncrporates “he wore 7 ante ethos 42 ae aang nan lst soliton mated a constant tmp by a constant emperor waterbath nd anedation la peronnay ppg avatage betwen te sil nthe catode rom power spay. ‘he leo sluton used forthe ance olan nse, fr earl, onal es, phosphor acl sultee al and chromic aed sorton ut net partly lined as tng a area no probien in fortng pre by eno etn, Vas conditions such es the noe nition votee end he tempat depending 0 each ecole seinen canbe aortas As aererbd stow snce te voltage of head cast nthe tance between he pote have a oralato, by using sppoprate andi ods cantons secotding the aargemet ofthe sarin ports o te pres the step () canbe perermed The pote cane fomed at apes retest he emed pare staring pont ‘ubeequnty the poe ameter cpl of he ata edd alumi canbe performed ude the conn oe pore wiring teste of ping a it “alison (er samp x posprene a ecient anode exes Anoaed lorina having poe of eared arate can be bined dapnsrgon he 6 Fuerte. entrosing ha btn fhe pres othe anaes aria the lake nnetbe 57 cn be farmed a ster in uhhh es open of cose. For xara when alumina = aadiedpartnay tei aniaubing bari jer beeen he olor fhe pare andthe unde lisa, ash In Fa 8y avg bare ayer ane lesocatng th anedzed lumina or he substan lina nanotube 57 having ore closed ed ean be roded Conte atarhand these ayers zed an lana nanstbe having both rds op cane praca Fer dissing thebereriyer hte re aatios ot reducing ethics ofthe baler aye by cet anv tenet ug ano extn, anda method ot moving he bare yer yal weatnent er sree deon Can sven te workpiece sng loth the i nods Siro th boom of he pores pentate ae shown nF. 1 (9), by dssestng the ane lin am the suet an alenna nae hang oh ers open can (0) Resin orig stp Farts th sale rpardin th tp) a seers x stable soliton foreamph anaes sltan such ae phospho sl cota the ‘As shown (he lina cel canbe selectively etched naccortance wah he rangement an tps fhe pre staring ponts Fr exam the amin cal tthe seep concave porto the poe starting pt dngpetr, andthe nina cl era at the thal prt, orig rg, ‘As cesibed above. ty coreg the shape and composton ofthe pote starting port prfarmedtn he tp ().he presence or abseoe of anodized atumine canbe Fer example 2 shaw IFC 6 (0), by forming twokees epee startng pots. is posse to fom an aun cole a8 shown nF. 6(€).7109 0), ‘hearargenert ofthe startg ponte a how nc) an (8) make pesto farm an alumi cl rein ae shown FS. 7, 8(c) N69 (8) eepetey Iva tla why the teing rate vate depend onthe shape and composton ofthe pre tating poi. Home te pon and reaction ao ec pote tla Inthe pore fomation proces nsled andthe shane and eons ofthe slmina ee are afte. Resor that onesies ‘Sup Dscition Sap Arce in i escalate sb shown 1G sit519722, 8:08 PM .3P2001205600A - Fine structure and is manufacture - Google Patents Fer example by Satociting the anode cldsed alumina reponfotmed shown FIG. 7) fom the suber he alng nates St teamed a shown in 6. 8(6) andro ‘saratied (daca the rads aimina fermen the rein a shown (8) rom he sbstat, an threy desing he aed sinina tom the suberte ftom whch te pertamer nd timer elmin artube bundles can be cbtaed, fs the reese method adoptee. A metodo ec adeprtion used ‘Ths method ante peroonedby ising devices the eneling device and apn evap he ek alton erection pone to tht ting the snoszng -octar eagle i szcnton yeching thundering mater For eal, whe lumina cured as base shminum mayb remove rm mereury ise or ‘mixed soliton of bromine ane metal Futon congutlon wtih srr shimin i formed on x ute ase meal esovtien may be achieved aby mmersan i aohiton sch a ‘id In ato tte deacaton i petnmed ates ng the ferent trie pores ofthe anodized alumi eine nantes led ithe ciletet rater ean be roses (oor) ‘The presets ent wl be described ebw wth reference to exenoles Heft he method for proce auminananoubes ofthe preset iventonwllbe need wit ference GF 3iea cross-sectional vam tar x eto for predung an senna note a he pact vento, The long sep (2) 10(@)oanespendto(@) 126. saale inthis example on aim raroibe neg oe ord closed was repared (A Wrigiee Pepution A wore mas repre Saluion of prone acl and ethane (a) step of Faming Por Start Pit As sho n FG. 38.2 focuedion beam ns atin a at shape on the sina surface of th were a forma pre Or heagorl te ay wth? efferent 8 adn conctans ‘hetermatonof deren pps of or stating pits wa peered FI. 7() shows apart of the spe, ea sino stating pole was eed oer the ete surface othe sample Hers the an spe oh ecueson seam processing was Gath acceleration vole wa 201, telen beam date we 30 arte lon caren wes3pA. Atte une he type of the pore stating pot wae contol the ada tine ofthe focused in beam, Fre ‘oration othe tt pate ‘Sanpontandne second pare star point the 18 iain tre wae 1s me ar 50m reapactvely (0) Step ffoming pores Arosa rena mas prod one wks ua cctate ral Toxale acd aqueous olin, the solaon was kept at 3°. bya conta eerste water bath he anode olan vokage wa ett 40, ar 70m rocitng appar shen FG, 0 fom anaes. 03 for aed (©) Resin fog step Nex he enodzed alin spat lta aocordance neh the peo he poe startng pol whereby the rein shown FCS. ‘8y mmersng ie eptoepore acd slrion fr 7 mutes, te alumi cel ihe ele where he ecord staring pot ws famed wes ches IFC 79, ee one sige sarin cts se sour, bt many ested simi ca are formes on ane uae ote spl. The Weatrant sa caries 63 pore widening treater andthe poe aratr inte region ofits oxieze alma coresponny oe rst starting pont eat {© Dison top Alanine ws desl ug raccoon and anode sins angle simi el was coc ram he mst ota lamina luton (Sct Obsration hea elo FESEM abeenton a sown FG) he str anion’ shapes fhe alsa saat ofthis erdedient havea ell shape substantial perfect end did The suri ance was one end opened and te ober en eed, Aluninananctube ter ameter oon or 28 [Althe ami rartibes ad amost the seme size ad shape, and te unflomiy of he strstr wes Wey xceer. Before the arotain th start par fhe pre was dtermind by AFM. ‘saree twas fund tat coneave pre tring ports were aye on th eurtace fhe linum hn. Du tthe ado tine ofthe fcueed ion bee the ph fhe coneave shape was doopr at the secon por start par than ath ft poeta paint By conroling te arate ofthe aceon bear athe tart pit fhe ores, hati 2 contain the shape fhe tarbg point he pte, possible te ‘orm araaed larna is of slimina els can be ee hat alii nnotaescoulsbe produced vg his, xample 2 This aample is st examples wich tine ina nanotube bundle wa produced ung apres pateing ati Fat we ype of pobusons wee erty and serosal hexagonal ome a flows. Pres pat suosates aengedon alate wee prepared tuna pod ot 02 ym on con ute The opting hava «lame of bout 200 ad the opening havag a Sareea aba Or ar shown FG “hearargerer ithe se ath anager ofthe fst an second pre stat pont ina) On i roms wa aporseposed using vapor cep in cei ad cluomiur on terest wat ered topetet wit here tee oming Wo pe of evomiun projections hath adamete of abet 2am a dare of Stout 40, ard eight of om Furth ing the horn a¢ 2 matte sion ruta ened onthe sleon suse bya recive ry etching mod ing OF egos and te onde eved by ope plea ‘ube are pres patriotic bo ype of rousons having aight of 6 and atin of bout am were repay ange a paso of 02 ym wa prepared (0) Wengiee Preparation Aworpiece wae prepared ejecting a Alptehaving spurt of 959% ana thicness a? ne a electopaing amie sation of pacer aidan taro (@)tep of Farming Pare tt Pit The aubtate ors pres encergone ete (a). a itha subetedo 2108 Pa (tors) / Cm). pre starting pant was foredon the surat of ie aluminum te The pate the hitpssipaterts.google.compaterlJP2001205600AVen?0q=JP-2001208600-A ant519722, 8:08 PM .3P2001205600A - Fine structure and is manufacture - Google Patents potest points eectdthe shape of the pres paton aust, two yes of pore tart pls nee aranged an formedin #20 rmenagarl tice shown (€) step of Farming Pore Aadization was performed the ae arner ain Earp. However the nas: dation volage was 0 (0) Rion tog step Reon were ome by pay ng anodized amin a S wk hosptre at tohtion for 1A ies. te, raid sina wes fomredaa region as shown FI (© disociato stp Atuirum was dissed sing a aed slain of trie ard ethan ‘Aunnanaratbe bundles were obtanedby dssoleig eroded alumina Yom the usta, [luton (Sructsal Oberon Aaa eu FESEMabeevation a town FS. 28h sinra nate burl of hs exarple wae eer Sothhecter, ‘shape natn ine shape had aye shape oe nexaporl colin wt feuded cones. adr, oe end wes open aid the ter end was closed ehripa arouse bal The lane oe date 28 700 rm, ae ner arte ee pre lame 2 Daman elengh it Each lina raretube banal aos be same sz an she onthe stetalufomiy's eevee excel. Wi efor the aration the staring par ofthe pre was determin AFM ‘Asarez twas fone hat concave pte tring pis were aye the surface ofthe suninum fl. Compared he fst pore sartng pol “he ses poe startg pit hae arg concave shape, Thus, ane sen hay anong he shape of he staring part of te pres, was posse o produce sauna rape brdeyfoming pon af enedzed ainiraio ute alumi cl {raale 3 he earls an example in wich abr of shminarantibesarangedin a aus waa pense (a Preparation of Worle A worsice was prepare by subjecting an Al pt haing pry of 998% ad acess of mmo lcropolsing na ied saluion of pectore acd and ehel (0) Step of Forming ore Start Pit The buen bebe ie sand form pall Ins iraiaon pater at el of "nm, For, flowing the fermion of ‘vert re pte ae formes raéatngin Ine asm ntrale, Thetereecton of wo vera ard hrrantalines range in aque tei eda the pores pot Hertel pels of te focuseé on beam 66 The sccleaonellage ae 251 eon beam arate ae 0m anteion cust wae 4s Alea when forming vera ne pater, ating te frmatin of te horzontalin pater te nue of ovrgpng sears ofthe same Ine was owes evr TO rows Thats arew of ene Sean and aow of scan ware repeatedly omed every 10 ro (©) Pre eming step Andon was perermedn the sme mene’ asin Exes. Howeve 23 ma/I sul eld aqueous sliton was used ste ad steele he slion waskeptat9"C matters water aha he ara oxaton ohape was 25, (©) Rion foming step Anca hevina was partly elie ine Swi phosphor eid oon or 40 ines tof eg, (© Disocaon step Alaminen was desled using mercury chi, enodzd alumina was ssl fom the subse to etan an alumi nancube bun. luton (SructsalOasration When FSM abserton was performed th suming natotebundl of hi example was 3 10Omer arayedina square of 10% 10. Inboh he eter shape ene ne shape as shew FC 1), ond uring arabes having rounded sms eppepated fom an durina nanotube burs. Inaction one and war ope anther nd as closed alumina artube bundle. The outer dame 28 of ach alanine wes 750m Ne vee 2 fhe ore wae SO man th eso the sania natured by ase 1D a am was eBOUt 750. 5 pn eth Althe sliminararotite bres nad atract the same size and shape syste ion of haste was very excalet [Embodiment «This aaderent i ah example wich rina nanotubes havingbath ope ede were fared (A reparation of Workplece As shown nF. Aa sostate 3m which a Culm hav ahckess of 100 em was forme as & conde lm on subsite by ‘A werlee S00 wae rte repay foming 00 nm Afi 12 teeon by spe (0) step of Frming Pare Start Pit A shown in FG). afocusdon beam ts rated at shape one slurinum srface ofthe wecglceta fm pote ster pont As shen n 1, Ins ase, woypr of or staring pls avin eileen hexagonal late arangorent wih ferent Fl natin conn wereforred Hers thelon species ‘tte fooveed in beam proesaog was Gath celeron vokape wes 201th fon ber ater a 30, athe lon Cent wat 4A. Ai tne ype ot ‘hepoe maring pit wa arte bythe rato re ofthe focused en etm To for he et pre stat pot andthe scone pre tt pb heb irsclsion timewas seo TO mses respecte nwa seo 100 mess (©) step framing Pore Te anesaig apparatus shown nF. Sat use uel he woe Loli eaten farm etodzed lin, 0. fr ae sete Using malonate aid aquaus sltin he ston was ep a3. thermostat wae baba the aradangYokage wae 40V. The aadang cute wat ‘onto at enerng hl he anodng cuenta deceased oat hath ir sluminm fin hase neared, he vokogs alan wa (©) (0 Regn forming sep ane dsoiton sep Araditd alumina wes Gssocates fom te ubete whe being fomadin aren by eeatlon ina Sts ‘vtuaton(Stucual Observation) Ae a eu FESEM cbeervaton a shown nF), ana apatbe of the presen example has acylndrcal shape of sires pret yer nth he ater tape athe nner shape dil acon, wat an lori anit havrg bth ed pene, The slurin raneane ote ‘Gate 28 was 100 ant einer are hth pore career 2 ws 7% ed he length wae S00. Alte anna nantes had aot De sane size ard shape andthe unonny of haste was vere Example The aes raronne bah example in ich ears of ane alunina were omed y elon hating lent pote sa potter a pote a ang am519722, 8:08 PM .3P2001205600A - Fine structure and is manufacture - Google Patents (A) Preparation of Warglece Accor t ramp (8) Ste of Farming Pate Stating Pit As ahow in I6. 42) ocusedion beamin the for af doe was ore const aluminum surface ofthe workpecetedtonforves.a pare neton pont The arangeeat of th pore star pos was eexaporal toe eangemet, ni ‘he wesgica wae redated ith a ocuedionbeamin the orm af dos om te pce trl os nae ba eins having eet redo patos ‘ocusedion team wer formed. Te etre hes atari partner of 101m andthe second region has asartg pital ef 0m, then curert was’ pA ante stay me was 100 mate (©) Step of Famin Pore Anaang estan was psoralen he woes uring the aradng state Using ana Torle sed aunous slain the ator wast a3 °C. Inathemartne waterbath andthe andr voltage was 40 The ned oiaton cet wes mostored anditwas enirea tha the aluninun wes replaced y alumina ove te een ness Ge ote decreasein he aot oxiationcurent (0) Resin forming stp Nota in was formed by partly eitg raze ina. The alumina els int second regen ware ached by erm a Stk lotphre ad slain fr 70 minutes. Thi estat aka served a pore wieing Vesey arth pate aren the een of razed sina Careepenang te fet sara pont was erased (© Disocaton step Aturirum was dissed using a aed slain of rome ard math ‘Aura nanatbe burdes were obtenedy dssocleg aroszed alumina om he uoetate [luton (Sutra Observation FESEM cbsenatan reve thatthe bundle was an aluninananctub unde wth one ad oon andthe ote en clsed The lumina arabe outer dameter 28 100m, eer dart ate pore rte 2; Om end the length Tu aeach ena neetbe bundle hae seth sre sear shape ‘heey fhe tuctre ws ey gd xarale Thc example an example in wich an alumi notte having pores Hos wh etal was prague. Fs he tps) 196) were perormed asorng to Geamal and anodzed alsira hig aio fomectns raped Swsequert M was fled 5 filer the pores by pefeming Welctedepetin fags 0 Nisa deposed the nanohole bengimmereedandlecrodepostedin the dectays citon o Nos lageher ith the N aun elec, (© Disocaton Step Faster lamin dsoheby usnga mixed slit of rome ard methanol and anodized alain is esocited rom the subst, sere [Nid lamina rantabe was bie lution (Stuctal Observation Yen FE-SCM absaraton mas pore showin 161 (0snalmina arabe ie wh Na ang oe end led waz btn, Tat anirslaing-naesnanowre having Nise score wa bare lth rina anehines had noe se age and shape, ard he norms of the sbi wes very good ona ‘As aarribd stove present rveonhasth flor eects (1) Aeorng tothe present nto anid simi of iglesia thts naming arouse baal ich as notes and elurnaaotubes ee wranged ina specie nunbet canbe prociced (2) 8y the method fe preset verter lumina anaubes hv high nfery size ard shape canbe producosin go arses bys erpertie process (3) By embeddings tl nthe alumina rte: th ina nanotbe oft presrt invention net aba rantibe filed wth the fanctonal metal may bean adeorbnk lean be apple a wievariety ffl ueh a cheialreactonveccel Ih acallees renfring aera, abraiver, Mica rang mater, cosmeti, hema pans, magneto materal elesvonc mater, andopteal materia (ore desepton ofthe eninge) FG. Tis asthematc gam showing an durina notte of the pest veto, HG 2\¢asehematcwew showing or slarina rant bande of he reson vent “kad 48 ate shart diagrams uting at example ct formation of pre tart pty iredaton of focveed an beam acento the presente, wri FG. 48 tate formation by do shape and useaes oeson by Ine treo, FG. isa schematic ew showing are staring point rangement arc an ane min regan fermen of he pesert iveton, wherein) stows pee ‘Sasing pol arangement anda) shaw aragon formed aradved alumina, Gs. 7hand 78 ae scart dagrarsshowing are tring oi rangement adh omatn of eine of enadedsunine accra othe preset invention, ‘where FG, 7 stows poe string pt aragamert ard FE FG. Sie a schematic view showing & pte ttn pot erengement andthe formato of regen of anodied ann according the pretest vent wherein) ‘0H pore staring oh arangersr ane (€) shows areporfomed aodzed shining FG Sie a schematic dagram stoning he pare staring point stargement ante fntin fre of wodze aina seco the preserve wheren (stows the poe starting pos rangement an (8) soma the aroazed ame whch te reins ae formes Fi. 10ieasshematie dagram shavings wo-menionalaray fauna clan pre of node alin (nx ear aay, (8) shows afexegena erengerent 165.11 and 11Bare scemate agra showing he otions of pres of raz alumna, herein FG, 1A shows the booms of pes formed of are Iv,519722, 8:08 PM [Explain ot sats] .3P2001205600A - Fine structure and is manutactu Google Patents DESCRPTION OF s¥MBOLS 1 Aunum2 Start pot of pore 3 Pore Bate yer 5 Aunina cells Fileg 7 Woklee 8 SuBsuate 9 Anode alunine 10 Focused Bane titra rs ce ao Po et 5 Contnaed ae tnt ge Fem (ference 46076 ANG? AIS ACTOGASD| 120.8602 Head Cao) CAG CAPS CAzBDAD7 ORT ORTGDATBOABO FAO" wozvo4o17a9a1 + agoszr96r64* Panosnsecaoa coxtoosrszaac® ssonecare2 woo 2090141 + 2040929 2007.07.20 2005.03.08 2o0s042 2ov-0804 20081033 ogsnea 2008230 aoremnar some eana ay dpa Fenty tami oaen Simi Documents Pubteaton Pasouauane Pesaeorane seoraaee2 sole amos. 20080810 2005.12.08 2008 25ca.02205 Posten Foeneaton conan ne erage Fj court ca aR cambios Tecate Cambs Tecate Carparaton ICRC rporation meat camtioing Comparten Methed for produeng pres Ceramic nanostructure congestion coors the sire method Fer predng Method for manuactutrg mesoporous alvin molecular seve and auming moatibe sngutect he stn nants fr etre cna oor metal ascharg sauce a fine patie forming sppras Nanotolstucce ats manufacturing meth stage’ nite Iranfartuegrethas apne reorshg nagury ae erating Feed ad magrevs ecotdg deve ond eget receding meta Capac slonent ane meted of manctstring sapsor evans, Capac andmanutecung mation heel ‘ent of slunira ran bans roto ane applet on Nanoweebased ran Composteanspatet conducts and mats o farming sesame Nanoweeas frenparrtcondvtrs na appeatora hte Fadaonasorent fhotrrste nk corpse nd angers aha eg Monufaesceg meth of retire ang ots ane srt manufac byte arufacng etiod ‘Suet having pore and device sng he struct avin pore Ssmtrehaug tales anne fer prong th same Method for produc sata ating pores and sett ain pares in etre aac pros alimina omaton by sekorganized radzing "Naw ttanun-sontalng We, proces fx teduongnaow tanlun-cortaning wie, swt ard lestor-amiting deve hitpssipaterts.google.compaterlJP2001205600AVen70q=JP-2001208600-A